High-precision plane detection platform equipment

Abstract

The utility model relates to the technical field of workpiece surface detection, and particularly discloses high-precision plane detection platform equipment which comprises a base, a first moving platform movably arranged on the base and a bearing part arranged at the output end of the first moving platform and used for bearing a workpiece to be detected. The device further comprises a detection device and an electric control device, the detection device comprises a movable mechanical arm and a detection unit arranged at the tail end of the movable mechanical arm, the electric control device is electrically matched with the first moving platform and the detection device, and the electric control device is used for controlling the first moving platform to transfer an external to-be-detected workpiece. And the movable mechanical arm is synchronously regulated and controlled to drive the detection unit so as to carry out size detection and multi-surface precision detection on the workpiece to be detected.

Description

Technical Field

[0001] This utility model relates to the field of workpiece surface inspection technology, and in particular discloses a high-precision planar inspection platform device. Background Technology

[0002] In modern manufacturing, the demand for high-precision workpiece inspection is increasing, especially in fields such as semiconductors, optical components, and precision instrument manufacturing, where the requirements for dimensional and multi-surface precision inspection of workpieces are extremely stringent. Traditional inspection methods mainly rely on manual operation or fixed measuring devices, which often suffer from low inspection efficiency, significant influence of human factors on measurement accuracy, and limited measurement range. To address these issues, automated inspection platforms are gradually becoming a trend in the industry, among which high-precision planar inspection platform equipment has attracted attention due to its high stability, high accuracy, and high degree of automation.

[0003] However, existing inspection platforms still have the following shortcomings: the precision control of the motion system is difficult, making it hard to meet the requirements of high-precision inspection; there is a lack of efficient position detection components, making it difficult to provide real-time feedback on the motion errors between the inspection device and the moving platform; and the mechanical structure lacks stability, affecting measurement consistency. Therefore, to address the above technical problems, there is an urgent need for a planar inspection platform device that can provide high-precision motion control and inspection capabilities to improve inspection accuracy and reliability. Utility Model Content

[0004] In order to overcome the shortcomings and deficiencies of the existing technology, the purpose of this utility model is to provide a high-precision planar inspection platform device to solve the above-mentioned technical problems.

[0005] To achieve the above objectives, this utility model provides a high-precision planar inspection platform device, comprising a base, a first movable platform movably mounted on the base, and a carrier component disposed at the output end of the first movable platform for carrying the workpiece to be inspected; it also includes an inspection device and an electrical control device. The inspection device includes a movable robotic arm and an inspection unit disposed at the end of the movable robotic arm. The electrical control device is electrically coordinated with the first movable platform and the inspection device. The electrical control device is used to control the first movable platform to move the external workpiece to be inspected, and synchronously control the movable robotic arm to drive the inspection unit to perform dimensional inspection and multi-surface inspection of the workpiece to be inspected.

[0006] Furthermore, the movable robotic arm includes a first lateral movement module that reciprocates along a first direction and is mounted on a base, a second lateral movement module that reciprocates along a second direction and is mounted at the output end of the first lateral movement module, and a first lifting module that reciprocates along a third direction and is mounted at the output end of the second lateral movement module. The first direction, the second direction, and the third direction are arranged in pairs, and the detection unit is located at the output end of the first lifting module.

[0007] Furthermore, the first transverse module includes a first guide rail disposed on the base, a first stator module disposed on the base along the extension direction of the first guide rail, a first moving sub-module slidably disposed relative to the first stator module, and a first slider slidably disposed on the first guide rail, wherein the first moving sub-module is slidably disposed on the first guide rail via the first slider.

[0008] Furthermore, the first stator module includes a stator mounting frame mounted on a gantry, and two rows of permanent magnets disposed within the stator mounting frame. The two rows of permanent magnets are arranged with alternating N and S poles to form a linear magnetic field array. The first mover module includes an iron core, a coil disposed on the iron core, and a first connecting plate for mounting the iron core and the first slider.

[0009] Furthermore, the structure of the second lateral movement module and / or the first lifting module is the same as that of the first lateral movement module.

[0010] Furthermore, the base is made of marble, and a first through hole is provided in the middle of the base for use with the detection device and the first moving platform.

[0011] Furthermore, the carrier is provided with a second through hole. Combined with the structure of the first through hole and the second through hole, when the workpiece to be tested moves under the drive of the first moving platform and the detection unit moves under the drive of the movable robotic arm, the detection unit can clearly perform surface detection on the workpiece to be tested carried by the carrier.

[0012] Furthermore, the first mobile platform includes a first driving unit for driving the carrier to reciprocate along a fourth direction. The first driving unit includes a second guide rail disposed on the base, a second stator module disposed on the base along the extension direction of the second guide rail, a second moving sub-module slidably disposed relative to the second stator module, and a second slider slidably disposed on the second guide rail. The second moving sub-module is slidably disposed on the second guide rail via the second slider.

[0013] Furthermore, the first mobile platform also includes a second drive unit disposed at the output end of the first drive unit. The structure of the second drive unit is the same as that of the first drive unit. The carrier is disposed at the output end of the second drive unit. The first drive unit is used to drive the second drive unit to reciprocate along the fourth direction, and the second drive unit is used to drive the carrier to reciprocate along a direction intersecting the fourth direction.

[0014] Furthermore, the movable robotic arm also includes a second lifting module mounted on a base, located below the base, while the first traverse module, the second traverse module, and the first lifting module are all located above the base. The second lifting module includes a first support plate mounted on the base, a third slide rail mounted on the first support plate, a first lead screw rotatably mounted on the first support plate, a third slider screwed to the first lead screw, and a first motor connected to the first lead screw. The third slide rail is slidably mounted on the third slide rail.

[0015] Furthermore, the planar detection platform equipment also includes multiple sets of position detection components mounted on the base. The position detection components include a grating ruler mounted on the base and a sensing element mounted on the output end of the movable robotic arm and the first moving platform. The sensing element is electrically coupled with the grating ruler and the electronic control device. The sensing element is used to sense the light signal generated on the grating ruler, thereby detecting the movement position of the detection device driven by the movable robotic arm and the carrier driven by the first moving platform, and feeding back the movement position information to the electronic control device. The electronic control device adjusts the movement stroke and movement speed of the movable robotic arm and the first moving platform (2) in real time according to the movement position information. The sensing element includes a zero-position exciter mounted on the output end of the movable robotic arm and the first moving platform, a reading head mounted on the zero-position exciter, and a signal processor.

[0016] Furthermore, the position detection component also includes multiple sets of photoelectric photocells, which are installed on the other side of the output end of the movable robotic arm and the first moving platform (e.g., if the grating ruler and sensing element are installed on the left side of the first slide rail, then the photoelectric photocells are installed on the right side of the first slide rail). The core advantage of this design is that it combines the target detection capability of the photocells with the high-precision displacement measurement capability of the grating, achieving more stable, high-precision, and high-reliability slide system control, suitable for high-requirement applications such as precision manufacturing, semiconductor equipment, and automated assembly.

[0017] Furthermore, the planar inspection platform equipment also includes a gantry frame mounted on a base. The first transverse module is provided in two sets, with the two sets of first transverse modules respectively mounted on opposite sides of the gantry frame. The second transverse module is mounted on the top of the gantry frame.

[0018] To further improve the structural rigidity and measurement accuracy of the equipment, this utility model also includes a gantry structure. The gantry structure includes side columns on both sides of the base, two longitudinal support blocks on the side columns, and a transverse support plate between the two longitudinal support blocks. The transverse support plate has at least two channels extending through it along its extension direction, which are used to distribute the stress concentration caused by the weight of the second traversing module and the first lifting module.

[0019] Furthermore, the planar inspection platform equipment also includes multiple sets of anti-collision components, which are installed at both ends of the first slide, the second slide, and the third slide in the direction of movement. The anti-collision components are integrally molded from silicone material.

[0020] This invention provides a high-precision planar inspection platform device, which mainly consists of a base, a first moving platform, a carrier component, an inspection device, and an electrical control device. The first moving platform can move precisely in a fourth direction, and the movement of the carrier component in two directions is controlled by a dual-drive unit, thereby ensuring the precise positioning of the workpiece under test. The inspection device includes a movable robotic arm, which consists of a first traverse module, a second traverse module, and a first lifting module, enabling multi-dimensional controllable movement of the inspection unit, thereby performing dimensional and multi-surface precision inspection of the workpiece.

[0021] To improve detection accuracy, the platform is also equipped with a position detection component, which consists of a grating ruler, sensing elements (including a zero-position exciter, a reading head, and a signal processor). This component ensures high-precision motion control of the system by monitoring the displacement changes of the moving platform and robotic arm in real time. Furthermore, the equipment incorporates a gantry structure for stable support and adopts a dual-first lateral movement module scheme to enhance the detection range and rigidity. Additionally, the equipment is equipped with anti-collision components, integrally molded from silicone material, to effectively prevent damage caused by impacts during movement and improve equipment reliability.

[0022] Compared with the prior art, the high-precision planar inspection platform equipment of this utility model has the following advantages:

[0023] (1) High-precision motion control: Through the cooperation of grating ruler and sensing element, high-precision positioning of the moving platform and detection device is achieved, thereby improving the reliability of detection;

[0024] (2) Multi-dimensional detection capability: The mobile robotic arm has precise movement in three directions, enabling the detection unit to perform comprehensive detection of the workpiece, which is suitable for the measurement needs of various complex workpieces;

[0025] (3) Strong structural stability: The use of marble base and gantry structure improves the vibration resistance and rigidity of the system and reduces the impact of the external environment on the detection accuracy;

[0026] (4) Enhanced Safety: The addition of anti-collision components effectively reduces the impact risk of the motion system at extreme positions, extending the service life of the equipment. In summary, this invention not only improves detection accuracy but also enhances the stability and safety of the system, providing an efficient and reliable solution for the field of high-precision measurement. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of the planar inspection platform equipment of this utility model;

[0028] Figure 2 This is a partial structural schematic diagram of the detection device of the planar detection platform equipment of this utility model;

[0029] Figure 3 This is a schematic diagram of the structure of the first mobile platform of this utility model;

[0030] Figure 4 This is a schematic diagram of the structure of the first drive unit of this utility model;

[0031] Figure 5 This is a schematic diagram showing the exploded state of the first transverse module of this utility model;

[0032] Figure 6 for Figure 5 A magnified structural diagram of part A in the middle;

[0033] Figure 7 This is a structural diagram of the first transverse module of this utility model when used with a gantry frame;

[0034] Figure 8 for Figure 7 A magnified structural diagram of part B in the middle section;

[0035] Figure 9 This is a schematic diagram of the structure of the second lifting module of this utility model.

[0036] The reference numerals in the figures include:

[0037] 1. Base; 2. First moving platform; 3. Detection device; 5. Position detection component; 6. Gantry frame; 7. Anti-collision component; 11. First through hole; 20. Bearing component; 201. Second through hole; 21. First drive unit; 211. Second guide rail; 212. Second stator module; 213. Second mover module; 214. Second slider; 22. Second drive unit; 41. First transverse module; 411. First guide rail; 412. First stator module; 4121. Stator mounting frame; 4122. Permanent magnet; 413. First mover module; 4131. Iron core; 4134, First connecting plate; 414, First slider; 4141, Induction plate; 42, Second transverse module; 43, First lifting module; 44, Second lifting module; 441, First support plate; 442, Third slide rail; 443, First lead screw; 444, Third slider; 445, First motor; 51, Grating ruler; 52, Sensing element; 521, Zero-position exciter; 522, Reading head; 523, Signal processor; 61, Side support column; 62, Longitudinal support block; 621, Photoelectric sensor; 63, Transverse support plate; 631, Channel. Detailed Implementation

[0038] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to embodiments and accompanying drawings. The content mentioned in the embodiments is not intended to limit the present invention.

[0039] Please see Figures 1 to 9 As shown, the base 1 of this invention is made of marble, and its main function is to provide stable platform support while reducing the impact of external vibrations on the detection accuracy. A first through hole 11 is provided in the middle of the base 1 to accommodate the detection device 3 and the first moving platform 2, allowing the workpiece to be measured to be stably placed on the base 1 and enabling the detection unit to perform measurements more conveniently. Compared to traditional metal bases 1, marble material has better thermal stability and vibration resistance, reducing the impact of ambient temperature changes on measurement accuracy.

[0040] The first moving platform 2 is mounted on the base 1 and driven by an electronic control device to achieve reciprocating movement of the workpiece in the fourth direction (X-axis direction). The first moving platform 2 includes a first drive unit 21, which employs a linear motor drive structure. Its main components include a second guide rail 211, a second stator module 212, a second mover module 213, and a second slider 214. The second mover module 213 is slidably mounted on the second guide rail 211 via the second slider 214, achieving high-precision linear movement of the platform. Furthermore, to achieve bidirectional precise movement, the first moving platform 2 also includes a second drive unit 22, with the same structure as the first drive unit 21, capable of driving the carrier 20 to move in a direction intersecting the fourth direction. This bidirectional drive method ensures that the workpiece under test can move freely in two perpendicular directions, facilitating comprehensive measurement by the detection device 3. Compared to traditional single-direction drive, this solution improves the flexibility of the detection range and reduces repetitive positioning errors.

[0041] The detection device 3 mainly consists of a movable robotic arm and a detection unit. The movable robotic arm is responsible for driving the detection unit to move in multiple directions to adapt to the detection requirements of different workpieces. The movable robotic arm consists of a first transverse module 41, a second transverse module 42, and a first lifting module 43, which reciprocate along a first direction (X-axis), a second direction (Y-axis), and a third direction (Z-axis), respectively, enabling the detection unit to be freely positioned to the target position. The first transverse module 41 is mounted on the base 1, and its main structure includes a first guide rail 411, a first stator module 412, a first moving sub-module 413, and a first slider 414. The first moving sub-module 413 is slidably mounted on the first guide rail 411 via the first slider 414, achieving high-precision movement along the first direction.

[0042] Specifically, the first stator module 412 includes a stator mounting frame 4121 mounted on the gantry 6 and two rows of permanent magnets 4122 disposed within the stator mounting frame 4121. The two rows of permanent magnets 4122 are arranged with alternating N and S poles to form a linear magnetic field array. The first moving module 413 includes an iron core 4131, a coil disposed on the iron core 4131, and a first connecting plate 4134 for mounting the iron core 4131 and the first slider 414. The specific working principle is as follows: When current flows through the coil in the moving module, the coil of the moving module generates an electromagnetic field, which interacts with the magnetic field generated by the stator. According to Faraday's law of electromagnetic induction and Lorentz's law of force, the stator magnetic field exerts a force on the coil of the moving module, causing the moving module to move linearly. The moving module moves linearly along the direction of the magnetic field generated by the stator, pushing the first slider 414 forward. By adjusting the current intensity and direction in the stator winding, the movement speed and direction of the moving module can be precisely controlled.

[0043] In this embodiment, the electronic control device regulates the current driving the stator module, causing a changing electromagnetic field in the stator windings, thereby controlling the speed, position, and movement path of the mover module. By adjusting the current frequency, the mover's speed can be precisely controlled; by adjusting the current amplitude, the generated thrust can be controlled, thus precisely regulating the linear motion of the mover module. When the electronic control device employs a high-efficiency digital signal processing (DSP) unit, it can achieve fine control of the current waveform, ensuring smooth and efficient motion characteristics and improving the system's accuracy and response speed. This technical feature, combined with the electronic control device in this solution, achieves high-precision control and optimized performance of the mover module, making it particularly suitable for demanding industrial testing and application scenarios.

[0044] Specifically, the second transverse module 42 and the first transverse module 41 have the same structure. The first transverse module 41 has two sets, respectively installed on both sides of the gantry 6, and the second transverse module 42 is installed at the output end of the first transverse module 41. This achieves precise motion control along the first and second directions. This three-axis linkage system ensures that the detection unit reaches the target measurement point with high precision, improving adaptability and measurement coverage compared to traditional fixed probes.

[0045] To further enhance the adjustability of the detection device 3, the movable robotic arm also includes a second lifting module 44, which mainly consists of a first support plate 441, a third slide rail 442, a first lead screw 443, a third slider 444, and a first motor 445. The first lead screw 443 is screwed to the third slider 444 and driven by the first motor 445 to achieve precise lifting adjustment of the detection unit. The addition of the second lifting module 44 allows the detection unit to perform detection within different height ranges, thereby improving the adaptability and flexibility of the measurement and making it suitable for workpieces of different sizes and shapes. In this embodiment, the first lifting module 43 and the second lifting module 44 have the same structure.

[0046] To ensure detection accuracy and motion control stability, this invention is equipped with a position detection component 5, which includes a grating ruler 51 and sensing elements 52 (zero-position exciter 521, reading head 522, and signal processor 523). The grating ruler 51 is mounted on the base 1, while the sensing elements 52 are respectively located at the output ends of the first moving platform 2 and the movable robotic arm. During operation, the sensing elements 52 can sense the light signal on the grating ruler 51 in real time, detect the movement position of the first moving platform 2 and the detection device 3, and feed the data back to the electronic control device for motion error compensation and correction. Compared to traditional encoder position detection schemes, this scheme, combining the grating ruler 51 with the sensing elements 52, provides higher detection accuracy, avoids mechanical transmission errors, and improves the reliability of the measurement system.

[0047] To further improve the structural rigidity and measurement accuracy of the equipment, this utility model also includes a gantry frame 6 structure. The gantry frame 6 structure includes side columns 61 disposed on both sides of the base 1, two longitudinal support blocks 62 disposed on the side columns 61, and a transverse support plate 63 erected between the two longitudinal support blocks 62. The transverse support plate 63 has at least two channels 631 extending through it along its extension direction. These channels 631 are used to disperse the stress concentration caused by the weight of the second transverse module 42 and the first lifting module 43.

[0048] Specifically, the longitudinal support block 62 is provided with a photoelectric sensor 621, and the first slider 414 of the first transverse module 41 is provided with a sensing plate 4141 for inserting into and cooperating with the photoelectric sensor 621. The photoelectric sensor 621 and the sensing plate 4141 are both electrically connected to the electronic control device and are used to detect the moving position of the first slider 414.

[0049] Because photoelectric sensors (photoelectric sensors) and gratings operate on different principles, using both detection devices simultaneously can complement each other and prevent misjudgments caused by the failure of a single sensor. For example, if the photoelectric sensor misjudges a position due to ambient light interference or changes in the reflectivity of components, the grating can still provide accurate position detection data, thereby improving system reliability. Grating detection can provide high-precision real-time position feedback to correct motion trajectories and avoid cumulative errors; while the photoelectric sensor can be used for target positioning detection to ensure that components reach the correct position. By combining the information from both, the control system can optimize the acceleration and deceleration curves of the slide, reduce vibration and impact, and achieve smoother motion.

[0050] Specifically, the first transverse module 41 adopts a dual-module design, with each module mounted on one of the two longitudinal support blocks 62. The second transverse module 42 is mounted on the transverse support plate 63. The base, side pillars 61, longitudinal support blocks 62, and transverse support plate 63 are detachably connected, facilitating subsequent maintenance. The structure of the gantry 6 enhances the stability of the overall mechanical structure and reduces errors caused by mechanical vibration during measurement. Compared with a single-sided support structure, this design provides a more stable measurement environment, making it particularly suitable for the inspection of large-sized workpieces.

[0051] In addition, to improve equipment safety, this invention includes a collision-resistant component 7, which is integrally molded from silicone material and installed at both ends of the first, second, and third slides in the direction of movement. This design effectively absorbs the impact of the moving mechanism, preventing equipment damage or measurement errors caused by collisions and extending the equipment's service life.

[0052] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A high-precision planar inspection platform device, characterized in that: It includes a base (1), a first moving platform (2) movably mounted on the base (1), and a carrier (20) mounted on the output end of the first moving platform (2) for carrying the workpiece to be tested; it also includes a detection device (3) and an electrical control device. The detection device (3) includes a movable robotic arm and a detection unit mounted at the end of the movable robotic arm. The electrical control device is electrically connected with the first moving platform (2) and the detection device (3). The electrical control device is used to control the first moving platform (2) to transfer the external workpiece to be tested, and to synchronously control the movable robotic arm to drive the detection unit to perform dimensional detection and multi-surface detection on the workpiece to be tested.

2. The high-precision planar inspection platform equipment according to claim 1, characterized in that: The movable robotic arm includes a first transverse module (41) that reciprocates along a first direction and is mounted on a base (1), a second transverse module (42) that reciprocates along a second direction and is mounted at the output end of the first transverse module (41), and a first lifting module (43) that reciprocates along a third direction and is mounted at the output end of the second transverse module (42). The first direction, the second direction, and the third direction are arranged in pairs, and the detection unit is located at the output end of the first lifting module (43).

3. The high-precision planar inspection platform equipment according to claim 2, characterized in that: The first transverse module (41) includes a first guide rail (411) disposed on the base (1), a first stator module (412) disposed on the base (1) along the extension direction of the first guide rail (411), a first moving sub-module (413) slidably disposed relative to the first stator module (412), and a first slider (414) slidably disposed on the first guide rail (411). The first moving sub-module (413) is slidably disposed on the first guide rail (411) via the first slider (414).

4. The high-precision planar inspection platform equipment according to claim 2, characterized in that: The second transverse module (42) and / or the first lifting module (43) have the same structure as the first transverse module (41).

5. The high-precision planar inspection platform equipment according to claim 1, characterized in that: The base (1) is made of marble, and a first through hole (11) is provided in the middle of the base (1) for use with the detection device (3) and the first moving platform (2).

6. The high-precision planar inspection platform equipment according to claim 1, characterized in that: The first mobile platform (2) includes a first drive unit (21) for driving the carrier (20) to reciprocate along a fourth direction. The first drive unit (21) includes a second guide rail (211) disposed on the base (1), a second stator module (212) disposed on the base (1) along the extension direction of the second guide rail (211), a second moving sub-module (213) slidably disposed relative to the second stator module (212), and a second slider (214) slidably disposed on the second guide rail (211). The second moving sub-module (213) is slidably disposed on the second guide rail (211) via the second slider (214).

7. The high-precision planar inspection platform equipment according to claim 6, characterized in that: The first mobile platform (2) further includes a second drive unit (22) disposed at the output end of the first drive unit (21). The structure of the second drive unit (22) is the same as that of the first drive unit (21). The carrier (20) is disposed at the output end of the second drive unit (22). The first drive unit (21) is used to drive the second drive unit (22) to reciprocate along the fourth direction. The second drive unit (22) is used to drive the carrier (20) to reciprocate along a direction intersecting the fourth direction.

8. The high-precision planar inspection platform equipment according to claim 1, characterized in that: The movable robotic arm also includes a second lifting module (44) mounted on the base (1). The second lifting module (44) includes a first support plate (441) mounted on the base (1), a third slide rail (442) mounted on the first support plate (441), a first lead screw (443) rotatably mounted on the first support plate (441), a third slider (444) screwed to the first lead screw (443), and a first motor (445) connected to the first lead screw (443). The third slider (444) is slidably mounted on the third slide rail (442).

9. The high-precision planar inspection platform equipment according to claim 1, characterized in that: The planar detection platform equipment also includes multiple sets of position detection components (5) set on the base (1). The position detection components (5) include a grating ruler (51) set on the base (1) and a sensing element (52) set on the output end of the movable robotic arm and the first moving platform (2). The sensing element (52) is electrically connected with the grating ruler (51) and the electronic control device. The sensing element (52) is used to sense the light signal generated on the grating ruler (51) to detect the movement position of the detection device (3) driven by the movable robotic arm and the carrier (20) driven by the first moving platform (2), and feeds back the movement position information to the electronic control device. The electronic control device adjusts the movement stroke and movement speed of the movable robotic arm and the first moving platform (2) in real time according to the movement position information.

10. The high-precision planar inspection platform equipment according to claim 2, characterized in that: The planar inspection platform equipment also includes a gantry (6) set on the base (1). The first transverse module (41) is provided in two sets. The two sets of first transverse modules (41) are respectively set on the two sides of the gantry (6) that are far apart from each other. The second transverse module (42) is set on the top of the gantry (6).

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