Non-contact five-point leveling mechanism for exposure machine

Abstract

The utility model discloses a non-contact five-point leveling mechanism for an exposure machine, which relates to the technical field of leveling of exposure machines, and comprises an exposure machine main body, a workbench and five laser distance measuring sensors, the laser distance measuring sensors are uniformly distributed, the workbench is mounted on one side of the upper part of the exposure machine main body, and the workbench is mounted on one side of the lower part of the exposure machine main body. An adjusting mechanism for detecting and leveling the workbench is arranged on one side of the upper part of the exposure machine main body, and comprises a mounting assembly, a fixing assembly and a leveling assembly, the laser ranging sensor can be installed on the universal damping ball head support, the flatness of the working table is detected through five points, and the problems that when a traditional mechanical tool is used for leveling a working table at present, efficiency is low, and the working table is prone to being abraded are solved. And meanwhile, a micro motor drives a screw rod to drive a top plate to ascend and descend so as to adjust the flatness of the workbench surface, and the leveling efficiency of the workbench is improved.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine leveling technology, specifically a non-contact five-point leveling mechanism for exposure machines. Background Technology

[0002] Exposure machines are core equipment in semiconductor manufacturing, PCB (printed circuit board) production, and other fields. Using the principle of photolithography, a mask is placed on the surface of a wafer or circuit board coated with photoresist. The mask is engraved with a pre-designed circuit pattern. Then, the exposure machine emits ultraviolet light, which passes through the light-transmitting part of the mask and shines on the photoresist, triggering a photochemical reaction. The photoresist that has been exposed to light is either removed or retained in subsequent development, etching, and other processes, thereby accurately replicating the pattern on the mask onto the wafer or circuit board to form the required circuit structure.

[0003] Referring to the patent document: Patent Publication No. CN119148480B, Patent Publication Date 2025-05-06, a specific exposure machine is disclosed, including an exposure machine body, with feeding ports for PCB boards to enter and exit on both the left and right sides. The exposure machine body includes a support system for placing PCB boards. The exposure machine also includes two flipping modules respectively placed on the left and right sides of the exposure machine body and corresponding to the two feeding ports. The flipping module includes a flipping frame extending forward and backward along its axis and two conveying roller groups installed on the flipping frame. Each side of the exposure machine body can be used for loading unexposed PCB boards, loading single-sided exposed PCB boards, and unloading double-sided exposed PCB boards. There is no need to set up a transfer device outside the exposure machine body to transfer single-sided exposed PCB boards, saving space. It utilizes the flipping time and loading / unloading time, especially the loading / unloading time which takes a long time, to work synchronously, saving time and improving work efficiency.

[0004] Traditional exposure machines typically employ mechanical contact leveling methods, such as micrometer adjustment and wedge block filling. However, these methods rely heavily on manual operation, resulting in low adjustment efficiency and difficulty in ensuring accuracy. Furthermore, the frequent contact between mechanical equipment and the worktable surface for inspection and leveling can easily cause wear and tear, leading to uneven surfaces, depressions, bumps, or scratches. This affects the levelness of the exposure machine's worktable, causing variations in the intensity and angle of light passing through the mask onto the photoresist, ultimately reducing the accuracy and quality of the exposed pattern.

[0005] Therefore, this utility model provides a non-contact five-point leveling mechanism for an exposure machine. Utility Model Content

[0006] To address the problem that existing exposure machines rely heavily on manual inspection for leveling the worktable, and that the frequent contact between the inspection and leveling equipment and the worktable surface causes wear, the purpose of this invention is to provide a non-contact five-point leveling mechanism for exposure machines.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a non-contact five-point leveling mechanism for an exposure machine, comprising an exposure machine body, a worktable, and laser rangefinders. The laser rangefinders are five evenly distributed points. The worktable is mounted on the upper side of the exposure machine body. An adjustment mechanism for detecting and leveling the worktable is provided on the upper side of the exposure machine body. The adjustment mechanism includes:

[0008] The mounting components include a universal damping ball joint bracket set below the fixed component. Five universal damping ball joint brackets are evenly distributed. Each of the five universal damping ball joint brackets has a mounting block fixedly installed at its bottom. Each of the five mounting blocks has two symmetrically distributed clamping plates slidingly attached to its lower part. Each of the five laser rangefinders is in contact with one side of the clamping plate.

[0009] The adjustment assembly includes a support plate fixedly installed at the bottom of the workbench. Five evenly distributed micro motors are fixedly installed at the top of the support plate. Each of the five micro motors has a screw at its top. The bottom of each of the five screws is fixedly installed at the drive end of the micro motor. Five evenly distributed top plates are detachably installed at the bottom of the workbench. The upper part of each of the five screws is threaded onto the middle of the bottom end of the top plate.

[0010] A fixing component is located on the upper side of the exposure machine body to support and install the mounting components.

[0011] Preferably, the mounting assembly further includes a fixing ring fixedly installed inside the mounting block, a rotating disk rotatably mounted in the middle of the fixing ring, two symmetrically distributed drive grooves opened on the upper part of the rotating disk, two symmetrically distributed moving plates slidingly engaged at the lower part of the mounting block, the top ends of the two moving plates slidingly engaged inside the drive grooves, and two clamping plates fixedly mounted on one side of the bottom end of the moving plates.

[0012] Preferably, the mounting assembly further includes a worm gear fixed at the center of the top of the rotating disk, and a worm is rotatably mounted on the upper side of the mounting block, with the worm and the worm gear meshing with each other.

[0013] Preferably, the fixing component includes a support frame disposed on one side of the top of the exposure machine body. The support frame is provided with four evenly distributed rubber damping rings. The bottom ends of the four rubber damping rings are in contact with one side of the top of the exposure machine body. Corresponding insertion holes are opened on the four lower feet of the support frame and the upper parts of the rubber damping rings. Fixing bolts are slidably inserted through the interior of the multiple insertion holes. The lower parts of the multiple fixing bolts are threaded onto one side of the upper part of the exposure machine body.

[0014] Preferably, each of the five mounting blocks has two symmetrically distributed limiting grooves at its lower part, and the lower parts of the multiple movable plates are slidably engaged in the middle of the limiting grooves.

[0015] Preferably, each of the five top plates has multiple evenly distributed vertical ribs fixedly installed at its bottom end to support the top plate and make the top plate more evenly stressed. Beneficial effects

[0016] This invention provides a non-contact five-point leveling mechanism for an exposure machine. Compared with the prior art, it has the following advantages:

[0017] 1. This application enables the installation of a laser rangefinder sensor on a universal damping ball joint bracket to detect the flatness of the worktable surface at five points. This solves the problems of low efficiency and easy wear and tear on the worktable surface when using traditional mechanical tools for leveling the worktable. At the same time, the micro motor drives the screw to raise and lower the top plate to adjust the flatness of the worktable surface, thus speeding up the leveling efficiency of the worktable.

[0018] 2. This application uses a worm gear and worm self-locking structure to clamp and fix the laser rangefinder sensor in the cooperation of the drive groove and the sliding plate, thereby facilitating the quick installation and disassembly of the laser rangefinder sensor. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of this utility model.

[0020] Figure 2 This is a schematic diagram of the structure of the fixed component after disassembly in this utility model.

[0021] Figure 3 This is a cross-sectional structural diagram of the installation component of this utility model.

[0022] Figure 4 This is another cross-sectional structural diagram of the mounting component of this utility model.

[0023] Figure 5 This is a schematic diagram of the cross-sectional structure of the rotating disk of this utility model.

[0024] Figure 6 This is a schematic cross-sectional view of the adjustment component of this utility model.

[0025] Figure 7 This is a schematic diagram of the top plate structure of this utility model.

[0026] In the diagram: 1. Exposure machine body; 11. Worktable; 2. Adjustment mechanism; 21. Mounting assembly; 211. Universal damping ball joint bracket; 212. Mounting block; 213. Worm gear; 214. Worm; 215. Fixing ring; 216. Rotating disk; 217. Drive slot; 218. Moving plate; 2181. Limiting slot; 219. Clamping plate; 22. Adjustment assembly; 221. Support plate; 222. Micro motor; 223. Screw; 224. Top plate; 225. Vertical ridge; 23. Fixing assembly; 231. Rubber shock absorber ring; 232. Support frame; 233. Fixing bolt; 3. Laser rangefinder sensor. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] Please see Figures 1-7 This utility model provides a technical solution: a non-contact five-point leveling mechanism for an exposure machine, including an exposure machine body 1, a worktable 11, and a laser rangefinder 3. The laser rangefinder 3 employs a laser triangulation rangefinder, utilizing blue laser technology. During measurement, it emits a downward-facing blue laser beam, which reflects off the surface of the worktable 11. The reflected beam is captured by a receiving system and converted into an electrical signal, calculating the height of the worktable's center position. Based on the triangulation principle, the height of the worktable's center position is calculated. The laser rangefinder 3 transmits the measurement data to the control system via an industrial Ethernet network. The laser rangefinder 3 has five evenly distributed laser rangefinders. The worktable 11 is installed on the upper side of the exposure machine body 1. An adjustment mechanism 2 for detecting and leveling the worktable 11 is provided on the upper side of the exposure machine body 1. The adjustment mechanism 2 includes:

[0029] Mounting assembly 21 includes a universal damping ball joint bracket 211 located below the fixing assembly 23. Five universal damping ball joint brackets 211 are evenly distributed. The universal damping ball joint bracket 211 refers to the use of damping washers, damping oil, or other damping materials at the ball joint. The function of damping is to provide appropriate resistance so that the ball joint is not too flexible or loose when rotating, but has a certain damping feel, and can be stably maintained at the set angle position. At the same time, it can realize flexible adjustment of multiple angles and prevent unexpected changes in angle due to external force interference or equipment vibration. The bottom end of each of the five universal damping ball joint brackets 211 is fixedly mounted with a mounting block 212. The lower part of each of the five mounting blocks 212 is slidably fitted with two symmetrically distributed clamping plates 219. Each of the five laser rangefinders 3 is in contact with one side of the clamping plate 219.

[0030] The adjustment assembly 22 includes a support plate 221 fixedly installed at the bottom of the workbench 11. Five evenly distributed micro motors 222 are fixedly installed at the top of the support plate 221. Each of the five micro motors 222 has a screw 223 at its top. The micro motors 222 are high-performance servo micro motors with an angular positioning accuracy of ±0.001°, which meets the requirements of nanometer-level leveling. The micro motors 222 use rare earth permanent magnet materials and sine wave drive technology, with torque fluctuation of less than 1%, which effectively reduces vibration during the leveling process. The bottom ends of the five screws 223 are fixedly installed at the drive end of the micro motors 222. Five evenly distributed top plates 224 are detachably installed at the bottom of the workbench 11. The upper part of each of the five screws 223 is threaded onto the middle of the bottom end of the top plate 224.

[0031] The fixing component 23 is set on the upper side of the exposure machine body 1 for supporting and installing the mounting component 21.

[0032] The mounting assembly 21 also includes a fixing ring 215 fixedly installed inside the mounting block 212. A rotating disk 216 is rotatably mounted in the middle of the fixing ring 215. Two symmetrically distributed drive grooves 217 are opened on the upper part of the rotating disk 216. Two symmetrically distributed moving plates 218 are slidably engaged at the lower part of the mounting block 212. The top ends of the two moving plates 218 are slidably engaged inside the drive grooves 217. Two clamping plates 219 are fixedly installed on one side of the bottom end of the moving plates 218.

[0033] The mounting assembly 21 also includes a worm gear 213 fixed at the top center of the rotating disk 216, and a worm 214 rotatably mounted on one side of the upper part of the mounting block 212. The worm 214 and the worm gear 213 are meshed and connected to each other. With the worm gear 213 and worm 214 structure, the structure has a self-locking function, which makes the clamping and fixing of the laser rangefinder 3 more stable.

[0034] The fixing component 23 includes a support frame 232 disposed on one side of the top of the exposure machine body 1. The support frame 232 is provided with four evenly distributed rubber damping rings 231. The rubber damping rings 231 are made of nitrile rubber with a Shore hardness of 60HA. This material has good wear resistance, oil resistance and anti-aging properties, ensuring the accuracy of the detection data of the laser rangefinder 3 under the elastic performance of the rubber damping rings 231. The bottom ends of the four rubber damping rings 231 are in contact with one side of the top of the exposure machine body 1. The four lower feet of the support frame 232 and the upper part of the rubber damping rings 231 are provided with corresponding insertion holes. Fixing bolts 233 are slidably inserted through the interior of the multiple insertion holes. The lower parts of the multiple fixing bolts 233 are threaded and installed on one side of the upper part of the exposure machine body 1.

[0035] Each of the five mounting blocks 212 has two symmetrically distributed limiting grooves 2181 at its lower part. The lower parts of the multiple moving plates 218 are slidably locked in the middle of the limiting grooves 2181. By opening the limiting grooves 2181, the moving plates 218 can be limited and supported, while also facilitating their connection and fixation with the clamping plate 219 at the lower part.

[0036] Each of the five top plates 224 has a number of evenly distributed vertical ribs 225 fixedly installed at its bottom end to support the top plate 224 and make the top plate 224 more evenly stressed. The vertical ribs 225 are made of high-strength alloy steel and are integrally formed by forging process. They have excellent compressive strength and rigidity and can withstand large loads without easily deforming. The vertical ribs 225 are fixed to the top plate 224 by welding.

[0037] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0038] During operation, the worktable 11 is moved to the lower part of the support frame 232 under the operation of the exposure machine body 1. The laser range sensor 3 at the center position vertically downwards to detect the overall height of the worktable 11 surface, while the laser range sensors 3 at the four corners are tilted at a 45° angle to form a three-dimensional detection matrix, eliminating measurement blind spots. The detection data is fed back to the control system. The micro motor 222 is connected to the control system and receives instructions from the control system. When the detection data is abnormal and leveling is required, the micro motor 222 is started by the control system, which drives the screw 223 to rotate. Since the upper thread of the screw 223 is installed in the middle of the bottom end of the top plate 224, it drives the top plate 224 to move up and down, thereby lifting and pulling the worktable 11 surface to adjust, thus achieving five-point leveling of the worktable 11.

[0039] When installing the laser rangefinder sensor 3, the worm gear 214 is rotated to drive the worm wheel 213 to rotate, causing the rotating disk 216 to rotate. This is achieved by the limit of the drive groove 217, which drives the two moving plates 218 to move relative to each other, thereby causing the two clamping plates 219 to move relative to each other. This clamps and fixes the laser rangefinder sensor 3 located in the middle of the two clamping plates 219. When the angle needs to be adjusted, the mounting block 212 is directly moved so that the multi-angle flexible adjustment can be achieved under the characteristics of the universal damping ball head bracket 211.

[0040] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0041] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A non-contact five-point leveling mechanism for an exposure machine, comprising an exposure machine body (1), a worktable (11), and a laser rangefinder (3), characterized in that: The laser rangefinder (3) has five evenly distributed sensors. The worktable (11) is installed on the upper side of the exposure machine body (1). The upper side of the exposure machine body (1) is provided with an adjustment mechanism (2) for detecting and leveling the worktable (11). The adjustment mechanism (2) includes: The mounting assembly (21) includes a universal damping ball head bracket (211) located below the fixing assembly (23). The universal damping ball head bracket (211) has five evenly distributed members. The bottom of each of the five universal damping ball head brackets (211) is fixedly mounted with a mounting block (212). The lower part of each of the five mounting blocks (212) is slidably fitted with two symmetrically distributed clamping plates (219). Each of the five laser rangefinders (3) is in contact with one side of the clamping plate (219). The adjustment assembly (22) includes a support plate (221) fixedly installed at the bottom of the workbench (11). Five evenly distributed micro motors (222) are fixedly installed at the top of the support plate (221). Each of the five micro motors (222) has a screw (223) at its top. The bottom of each of the five screws (223) is fixedly installed at the drive end of the micro motor (222). Five evenly distributed top plates (224) are detachably installed at the bottom of the workbench (11). The upper part of each of the five screws (223) is threaded onto the middle of the bottom end of the top plate (224). The fixing component (23) is set on the upper side of the exposure machine body (1) for supporting the mounting component (21).

2. The non-contact five-point leveling mechanism for an exposure machine according to claim 1, characterized in that: The mounting assembly (21) also includes a fixing ring (215) fixedly installed inside the mounting block (212). A rotating disk (216) is rotatably mounted in the middle of the fixing ring (215). Two symmetrically distributed drive grooves (217) are opened on the upper part of the rotating disk (216). Two symmetrically distributed moving plates (218) are slidably mounted on the lower part of the mounting block (212). The top ends of the two moving plates (218) are slidably mounted inside the drive grooves (217). Two clamping plates (219) are fixedly mounted on one side of the bottom end of the moving plates (218).

3. A non-contact five-point leveling mechanism for an exposure machine according to claim 2, characterized in that: The mounting assembly (21) also includes a worm gear (213) fixed at the top center of the rotating disk (216), and a worm (214) rotatably mounted on the upper side of the mounting block (212), with the worm (214) meshing with the worm gear (213).

4. A non-contact five-point leveling mechanism for an exposure machine according to claim 1, characterized in that: The fixing component (23) includes a support frame (232) set on one side of the top of the exposure machine body (1). The support frame (232) is provided with four evenly distributed rubber damping rings (231). The bottom ends of the four rubber damping rings (231) are in contact with one side of the top of the exposure machine body (1). The lower four feet of the support frame (232) and the upper part of the rubber damping rings (231) are provided with corresponding insertion holes. The interior of the multiple insertion holes is provided with a fixing bolt (233). The lower part of the multiple fixing bolts (233) is threaded on one side of the upper part of the exposure machine body (1).

5. A non-contact five-point leveling mechanism for an exposure machine according to claim 2, characterized in that: Each of the five mounting blocks (212) has two symmetrically distributed limiting grooves (2181) at its lower part, and the lower parts of the multiple moving plates (218) are slidably locked in the middle of the limiting grooves (2181).

6. A non-contact five-point leveling mechanism for an exposure machine according to claim 1, characterized in that: Each of the five top plates (224) has a number of evenly distributed vertical ribs (225) fixedly installed at its bottom end to support the top plate (224) and make the top plate (224) more evenly stressed.

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