Target material gap grinding mechanism

Abstract

The utility model discloses a target material gap polishing mechanism which comprises a machine base, a guide assembly and a fret saw. During production, a worker places a target bound with a back plate in the workpiece placement area, a gap of the target needing to be polished and a polishing line are aligned up and down, then the worker moves the fretsaw, and in the process that the fretsaw polishes the gap of the target, guiding in the up-down direction and the left-right direction is achieved through the first guiding frame and the second guiding frame; therefore, the moving direction and angle of the fret saw are kept stable, the polishing line is kept horizontal, the risk that polishing defects occur in gaps of the target materials can be reduced, the quality of the target materials is improved, and the service life of the target materials is prolonged.

Description

Technical Field

[0001] This utility model relates to target material processing, and in particular to a target material gap grinding mechanism. Background Technology

[0002] Some existing thin films require sputtering targets to be fabricated using physical vapor deposition. The sputtering target consists of a backing plate and several targets bonded to it, with gaps between the targets. During the target bonding process, factors such as ambient temperature can cause the gaps between the targets to be too small. One existing solution is to manually widen the gaps using a wire saw. However, during manual wire sawing, the direction and angle of the saw are prone to deviation, leading to grinding defects such as chipping or tilting of the targets at the gaps, affecting the quality and lifespan of the targets. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a target gap grinding mechanism, which can reduce the risk of grinding defects at the target gap and improve the quality and service life of the target.

[0004] The target gap grinding mechanism according to an embodiment of the present invention includes a base, a guide assembly, and a wire saw. The base has a workpiece placement area; the guide assembly is disposed on the base, and the guide assembly includes a first guide frame and a second guide frame. The first guide frame is movably disposed on the base along a first direction, and the second guide frame is movably disposed on the first guide frame along a second direction; the first direction is a vertical direction, and the second direction is a horizontal direction, or the first direction is a horizontal direction, and the second direction is a vertical direction; the wire saw is disposed on the second guide frame, and the wire saw has a grinding line disposed along a horizontal direction, and the wire saw is located above the workpiece placement area.

[0005] The target gap grinding mechanism according to the present invention has at least the following beneficial effects: During production, the worker places the target material with the back plate attached in the workpiece placement area, aligning the target gap to be ground with the grinding line vertically. Then, the worker moves the wire saw. During the grinding process of the wire saw, the first guide frame and the second guide frame guide the wire saw in the vertical and horizontal directions, thereby keeping the angle of the wire saw's movement stable and keeping the grinding line horizontal. This reduces the risk of grinding defects at the target gap and improves the quality and service life of the target material.

[0006] According to some embodiments of the present invention, the base is provided with an elastic element, which cooperates with a guide frame movable in the vertical direction and is used to provide an upward elastic force to the guide frame.

[0007] According to some embodiments of the present invention, the base is provided with a first slide rail in the vertical direction, the first guide frame is provided with a first slider, the first slider is slidably connected to the first slide rail, the first guide frame is provided with a second slide rail in the horizontal direction, the second guide frame is provided with a second slider, and the second slider is slidably connected to the second slide rail.

[0008] According to some embodiments of the present invention, the base is provided with a back plate positioning mechanism, which is opposite to the workpiece placement area and can fix or release the position of the workpiece located in the workpiece placement area.

[0009] According to some embodiments of the present invention, the base is provided with two first blocks, which are arranged side by side with a gap between them, and the workpiece placement area is formed between the two first blocks. The back plate positioning mechanism includes a clamping member, which is adjustable in position on the first block in the left-right direction, and one end of the clamping member forms a back plate abutting the top.

[0010] According to some embodiments of the present invention, the base is provided with two first blocks, which are arranged side by side with a gap between them, and the workpiece placement area is formed between the two first blocks. The back plate positioning mechanism includes a clamping member, which is adjustable in position on the first block in the left-right direction, and one end of the clamping member forms a back plate abutting the top.

[0011] According to some embodiments of the present invention, at least two clamping members are provided and are respectively disposed on two of the first blocks, with the clamping members on the two first blocks facing each other.

[0012] According to some embodiments of the present invention, a wire saw clearance groove is provided on the upper side of the first block, the groove opening of the wire saw clearance groove is provided facing upward, the wire saw clearance groove extends in the left and right direction, and the wire saw clearance groove is vertically opposite to the wire saw.

[0013] According to some embodiments of the present invention, the wire saw further includes a saw frame, both ends of the grinding wire are connected to the saw frame, the second guide frame includes a frame body and a pressure plate, the frame body is slidably disposed on the first guide frame in the left-right direction, the pressure plate is detachably disposed on the frame body, the saw frame is located between the frame body and the pressure plate, and the pressure plate and the frame body clamp the saw frame.

[0014] According to some embodiments of the present invention, the second guide frame further includes a second threaded fastener, and the pressure plate is locked to the frame body by the second threaded fastener.

[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0017] Figure 1 This is a three-dimensional schematic diagram of the target gap grinding mechanism according to an embodiment of the present utility model;

[0018] Figure 2 This is an embodiment of the present utility model. Figure 1 A magnified view of a portion of point A;

[0019] Figure 3 This is an embodiment of the present utility model. Figure 1 A magnified view of part B.

[0020] Figure label:

[0021] Machine base 100, workpiece placement area 110, first slide rail 120, back plate positioning mechanism 130, clamping component 131, first block 140, wire saw clearance groove 141.

[0022] Guide assembly 200, first guide frame 210, first slider 211, second slide rail 212, second guide frame 220, second slider 221, frame body 222, pressure plate 223, second threaded fastener 224;

[0023] Wire saw 300, grinding wire 310, saw frame 320;

[0024] Elastic element 400. Detailed Implementation

[0025] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0026] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0027] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0028] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0029] Reference Figures 1 to 3 This utility model discloses a target gap grinding mechanism, comprising a base 100, a guide assembly 200, and a wire saw 300. The base 100 has a workpiece placement area 110. The guide assembly 200 is disposed on the base 100 and includes a first guide frame 210 and a second guide frame 220. The first guide frame 210 is movably disposed on the base 100 along a first direction, and the second guide frame 220 is movably disposed on the first guide frame 210 along a second direction. The first direction is vertical, and the second direction is horizontal. The wire saw 300 is disposed on the second guide frame 220 and has a grinding line 310 arranged horizontally. The wire saw 300 is located above the workpiece placement area 110.

[0030] During production, the worker places the target material with the back plate attached in the workpiece placement area 110, aligning the gap of the target material to be ground with the grinding line 310 vertically. Then, the worker moves the wire saw 300. During the grinding process of the wire saw 300, the first guide frame 210 and the second guide frame 220 guide it in the vertical and horizontal directions, thereby keeping the moving angle of the wire saw 300 stable and keeping the grinding line 310 horizontal. This reduces the risk of grinding defects at the gap of the target material and improves the quality and service life of the target material.

[0031] It is conceivable that in other embodiments, the first direction may be left-right and the second direction may be up-down. That is, the first guide frame 210 may be movably disposed on the base 100 in the left-right direction, and the corresponding second guide frame 220 may be movably disposed on the base 100 in the up-down direction.

[0032] In this embodiment, the base 100 is provided with an elastic element 400, which cooperates with a guide frame movable in the vertical direction and provides an upward elastic force to the guide frame. The elastic element 400 helps to keep the horizontal height of the wire saw 300 relatively stable and less prone to sudden changes during left-right movement, improving the stability of the grinding process; it also allows for vertical adjustment of the position of the wire saw 300.

[0033] Specifically, the elastic element 400 is a tension spring, with its upper end connected to the base 100 and its lower end connected to the first guide frame 210. It is conceivable that in other embodiments, the elastic element 400 could also be an elastic device such as a gas spring or a rubber band, which can be selected by those skilled in the art according to actual needs; or the elastic element 400 could be a compression spring, with one end abutting against the base 100 and the other end abutting against the first guide frame 210. It should be understood that if the second guide frame 220 can slide vertically, then one end of the elastic element 400 is connected to the second guide frame 220, and the other end is connected to the base 100.

[0034] In this embodiment, the base 100 is provided with a first slide rail 120 along the vertical direction, the first guide frame 210 is provided with a first slider 211, the first slider 211 is slidably connected to the first slide rail 120, the first guide frame 210 is provided with a second slide rail 212 along the horizontal direction, and the second guide frame 220 is provided with a second slider 221, the second slider 221 is slidably connected to the second slide rail 212. The sliding structure of the first guide frame 210 and the second guide frame 220 described above is relatively simple and easy to implement. It is conceivable that in other embodiments, the first guide frame 210 can also be moved vertically relative to the base 100 through a guide post and guide sleeve structure, and the second guide frame 220 can also be moved horizontally relative to the first guide frame 210 through a guide post and guide sleeve structure. Those skilled in the art can choose the appropriate method according to actual needs.

[0035] In this embodiment, the base 100 is provided with a backplate positioning mechanism 130. The backplate positioning mechanism 130 is opposite to the workpiece placement area 110 and can fix or release the position of the workpiece located in the workpiece placement area 110. By providing the backplate positioning structure, before grinding with the grinding mechanism, the backplate of the target material can be fixed in place by the backplate positioning mechanism 130, avoiding the risk of grinding defects caused by workpiece shaking during the grinding process. After grinding is completed, the backplate positioning mechanism 130 can release the backplate, and then the operator can remove the ground backplate.

[0036] In this embodiment, the base 100 has two first blocks 140 arranged side-by-side with a gap between them, forming a workpiece placement area 110. The backplate positioning mechanism 130 includes a clamping member 131, which is adjustable in position along the left-right direction and positioned on the first blocks 140. One end of the clamping member 131 forms a backplate abutting the top. When the workpiece is placed in the workpiece placement area 110, the operator can adjust the position of the clamping member 131 so that it abuts against and binds the backplate of the target material, thus clamping and fixing the clamping member 131 between the two first blocks 140, thereby fixing the backplate. When the clamping member 131 is adjusted away from the backplate, the backplate is released.

[0037] In this embodiment, the clamping member 131 is a first threaded fastener, and the first block 140 is provided with a threaded through hole in the left-right direction. The first threaded fastener is threadedly connected to the threaded through hole. By using the threaded connection between the first threaded fastener and the threaded through hole, when the first threaded fastener is tightened, the position of the first threaded fastener can be adjusted left-right relative to the threaded through hole to abut against or move away from the back plate. The method of adjusting the position of the clamping member 131 is relatively simple and reliable.

[0038] In this embodiment, at least two clamping members 131 are provided and respectively disposed on two first blocks 140, with the clamping members 131 on the two first blocks 140 facing each other from left to right. By providing a plurality of clamping members 131 respectively located on two first blocks 140, the position of the back plate in the workpiece receiving area can be adjusted by adjusting the position of the clamping members 131 on both sides. For example, the back plate can be kept centered in the workpiece receiving area, thereby improving the clamping flexibility and positional stability of the workpiece.

[0039] Specifically, each first block 140 has two clamping members 131, and the clamping members 131 on the two first blocks 140 are opposite each other, which can make the force more stable when the back plate is clamped and fixed. The first block 140 is strip-shaped and extends in the front-back direction, and the clamping members 131 on the first block 140 are arranged at intervals in the front-back direction.

[0040] It is conceivable that in some other embodiments, the back plate positioning mechanism 130 may be provided with only one first threaded fastener. When the first threaded fastener abuts against one side of the back plate, the other end of the back plate may abut against the first block 140, so that a clamping member 131 can also clamp and fix the back plate between the two first blocks 140; or the back plate positioning mechanism 130 may be provided with two, three, four or more, and those skilled in the art may choose according to actual needs.

[0041] It is conceivable that the backplate positioning mechanism 130 can also be other structures. For example, the backplate positioning mechanism 130 includes a suction cup and an air pump. The suction cup is installed on the base 100, and the air pump is activated to position the backplate by adsorbing it through the suction cup. Alternatively, the backplate positioning mechanism 130 can use a gripper cylinder, which is fixed on the base 100 and positions the backplate by gripping it.

[0042] In this embodiment, a wire saw clearance groove 141 is provided on the upper side of the first block 140. The groove opening of the wire saw clearance groove 141 faces upward and extends in the left-right direction. The wire saw clearance groove 141 is vertically opposite to the wire saw 300. The wire saw clearance groove 141 allows the wire saw 300 to move to a lower position without interfering with the first block 140, facilitating deep grinding of the target material in the vertical direction.

[0043] In this embodiment, the wire saw 300 further includes a saw frame 320, with both ends of the grinding wire 310 connected to the saw frame 320. The second guide frame 220 includes a frame body 222 and a pressure plate 223. The frame body 222 is slidably mounted on the first guide frame 210 in the left-right direction. The pressure plate 223 is detachably mounted on the frame body 222. The saw frame 320 is located between the frame body 222 and the pressure plate 223, and the pressure plate 223 and the frame body 222 clamp the saw frame 320. By clamping and fixing the saw frame 320 with the pressure plate 223 and the frame body 222, the wire saw 300 is fixed on the second guide frame 220, which is a relatively simple fixing method. The pressure plate 223 is detachable, meaning that when the wire saw 300 is damaged, the pressure plate 223 can be removed to take off the wire saw 300 for repair or to replace the wire saw 300, improving the maintainability of the target gap grinding mechanism.

[0044] In this embodiment, the second guide frame 220 further includes a second threaded fastener 224, and the pressure plate 223 is locked to the frame body 222 by the second threaded fastener 224. The pressure plate 223 is detachably installed on the frame body 222 by means of the second threaded fastener 224, which is a simple and reliable installation method.

[0045] It is conceivable that in other embodiments, the pressure plate 223 may also be detachably fixed to the frame body 222 by means of, for example, snap-fit, etc., and those skilled in the art may choose according to actual needs.

[0046] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0047] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A target gap polishing mechanism, comprising: include: The machine base (100) is provided with a workpiece placement area (110); A guide assembly (200) is disposed on the base (100). The guide assembly (200) includes a first guide frame (210) and a second guide frame (220). The first guide frame (210) is movably disposed on the base (100) along a first direction, and the second guide frame (220) is movably disposed on the first guide frame (210) along a second direction. The first direction is a vertical direction, and the second direction is a horizontal direction, or the first direction is a horizontal direction, and the second direction is a vertical direction. A wire saw (300) is disposed on the second guide frame (220). The wire saw (300) is provided with a grinding line (310) which is arranged in the left-right direction. The wire saw (300) is located above the workpiece placement area (110).

2. The target interstitial polishing mechanism of claim 1, wherein: The base (100) is provided with an elastic element (400), which cooperates with a guide frame movable in the vertical direction and is used to provide an upward elastic force to the guide frame.

3. The target interstitial polishing mechanism of claim 2, wherein: The base (100) is provided with a first slide rail (120) in the vertical direction, the first guide frame (210) is provided with a first slider (211), the first slider (211) is slidably connected to the first slide rail (120), the first guide frame (210) is provided with a second slide rail (212) in the horizontal direction, the second guide frame (220) is provided with a second slider (221), the second slider (221) is slidably connected to the second slide rail (212).

4. The target interstitial polishing mechanism of claim 1, wherein: The base (100) is provided with a back plate positioning mechanism (130), which is opposite to the workpiece placement area (110) and can fix or release the position of the workpiece located in the workpiece placement area (110).

5. The target interstitial polishing mechanism of claim 4, wherein: The base (100) is provided with two first blocks (140), which are arranged side by side with a gap between them, and the workpiece placement area (110) is formed between the two first blocks (140). The back plate positioning mechanism (130) includes a clamping member (131), which is adjustable in position on the first block (140) in the left and right direction, and one end of the clamping member (131) forms a back plate against the top.

6. The target interstitial polishing mechanism of claim 5, wherein: The clamping member (131) is a first threaded fastener, and the first block (140) is provided with a threaded through hole in the left and right direction. The first threaded fastener is threadedly connected to the threaded through hole.

7. The target gap grinding mechanism according to claim 5, characterized in that: At least two clamping members (131) are provided and are respectively provided on the two first blocks (140), with the clamping members (131) on the two first blocks (140) facing each other.

8. The target interstitial polishing mechanism of claim 5, wherein: The first block (140) is provided with a wire saw clearance groove (141) on its upper side. The opening of the wire saw clearance groove (141) is facing upward. The wire saw clearance groove (141) extends in the left and right direction. The wire saw clearance groove (141) is vertically opposite to the wire saw (300).

9. The target interstitial polishing mechanism of claim 1, wherein: The wire saw (300) also includes a saw frame (320), both ends of the grinding wire (310) are connected to the saw frame (320), the second guide frame (220) includes a frame body (222) and a pressure plate (223), the frame body (222) is slidably disposed on the first guide frame (210) in the left and right direction, the pressure plate (223) is detachably disposed on the frame body (222), the saw frame (320) is located between the frame body (222) and the pressure plate (223), and the pressure plate (223) and the frame body (222) clamp the saw frame (320).

10. The target interstitial polishing mechanism of claim 9, wherein: The second guide frame (220) further includes a second threaded fastener (224), and the pressure plate (223) is locked to the frame body (222) by the second threaded fastener (224).

Images