Sand blasting machine

Abstract

The utility model relates to a sand blasting machine which comprises a shell, a feeding mechanism arranged in the middle of the shell, a circulating mechanism arranged above the shell and a dust removal mechanism arranged on one side of the shell, the dust removal mechanism communicates with the circulating mechanism through a pipeline, the feeding mechanism comprises a rotating disc rotationally arranged in the shell, and a plurality of sets of suction cup assemblies used for fixing silicon wafers are arranged on the rotating disc; a plurality of partition plates are arranged in the shell, the partition plates divide the interior of the shell into a feeding and discharging station, a transition station, a sand blasting station and a cleaning station, the rotary disc drives the suction cup assembly to sequentially enter the feeding and discharging station, the transition station, the sand blasting station and the cleaning station through rotation, and a sand blasting mechanism is arranged in the sand blasting station. And a cleaning mechanism is arranged above the cleaning station. The sand blasting device has the advantages that the silicon wafer is adsorbed and fixed, the silicon wafer is prevented from being damaged in the operation process, sand blasting operation on the silicon wafer is achieved, and the sand blasting fineness is higher.

Description

Technical Field

[0001] This application relates to the field of surface treatment equipment technology, and in particular to a sandblasting machine. Background Technology

[0002] A sandblasting machine is a device that uses compressed air to transport powdery particles (1-4mm in diameter) from one place to another in a pipeline. During the process of converting kinetic energy into potential energy, the high-speed moving sand particles scour the surface of an object, thereby improving the surface quality of the object.

[0003] Existing sandblasting machines require operators to place silicon wafers inside the machine during sandblasting operations, and then remove the wafers after sandblasting is completed, replace them with new wafers, and then perform sandblasting again. This requires manual loading and unloading, resulting in low efficiency and inability to meet production needs. Furthermore, silicon wafers have low strength and are easily damaged during loading, unloading, and sandblasting. Ordinary sandblasting machines are unable to perform sandblasting operations on silicon wafers effectively. Utility Model Content

[0004] To address the problem that existing sandblasting machines require operators to place silicon wafers inside the machine during sandblasting operations, remove the wafers after sandblasting, and then replace them with new wafers for the next sandblasting operation, which necessitates manual loading and unloading, resulting in low operational efficiency and inability to meet production demands, this application provides a sandblasting machine.

[0005] This application provides a sandblasting machine with the following technical solution: A sandblasting machine includes a housing, a feeding mechanism in the middle of the housing, a circulation mechanism above the housing, and a dust removal mechanism on one side of the housing. The dust removal mechanism is connected to the circulation mechanism through a pipe. The feeding mechanism includes a rotating disk rotatably disposed inside the housing. Several sets of suction cup assemblies for fixing silicon wafers are disposed on the rotating disk. Several partitions are disposed inside the housing, dividing the interior of the housing into loading / unloading stations, transition stations, sandblasting stations, and cleaning stations. The rotating disk drives the suction cup assemblies to sequentially enter the loading / unloading stations, the transition stations, the sandblasting stations, and the cleaning stations by rotation. A sandblasting mechanism is disposed inside the sandblasting station, and a cleaning mechanism is disposed above the cleaning station.

[0006] By adopting the above technical solution, during sandblasting, the silicon wafer is placed on the suction cup assembly from the loading / unloading station. The suction cup assembly adsorbs and fixes the silicon wafer. The rotary disk drives the suction cup assembly to rotate, moving the suction cup assembly to the transition station. After rotation, the operator places the silicon wafer on the suction cup assembly from the loading / unloading station again. The rotary disk continues to rotate, conveying the silicon wafer to the sandblasting station. The sandblasting mechanism inside the sandblasting station performs sandblasting on the silicon wafer. After sandblasting, the rotary disk rotates and conveys the silicon wafer to the cleaning station. The cleaning mechanism in the cleaning station cleans the silicon wafer, removing fine sand and impurities. Then, the rotary disk conveys the silicon wafer to the loading / unloading station. The operator removes the processed silicon wafer, installs the processed silicon wafer, and repeats the above operation. During the sandblasting process, the circulation mechanism collects and recycles the sprayed fine sand, and the dust removal mechanism removes dust from the collected fine sand.

[0007] Optionally, the suction cup assembly includes two suction cups rotatably connected to the rotary disk, the two suction cups being connected by a transmission belt, and a suction cup drive mechanism for driving the suction cups to rotate is provided inside the sandblasting station.

[0008] By adopting the above technical solution, when the rotary disk drives the suction cup assembly to the sandblasting station, the suction cup assembly is connected to the suction cup drive mechanism. The suction cup drive mechanism drives the two suction cups to rotate synchronously, and the suction cups drive the silicon wafer to rotate for sandblasting, thereby improving the quality of the operation.

[0009] Optionally, the circulation mechanism includes a collection funnel disposed below the interior of the housing and a cyclone separator disposed above the housing. The collection funnel and the cyclone separator are connected by a pipe. A heating box is connected below the cyclone separator, and a storage box is connected below the heating box.

[0010] By adopting the above technical solution, during the sandblasting process, fine sand falls into the collection funnel below. The fine sand inside the collection funnel enters the cyclone separator through the pipeline. The fine sand rotates in the cyclone separator and is separated by centrifugal force. The fine sand with larger mass falls into the heating box. The heating box heats the fine sand to remove the moisture and prevent the fine sand from condensing. The heated fine sand is stored in the storage box to be used for sandblasting operations.

[0011] Optionally, the sandblasting mechanism includes a mounting shaft rotatably disposed above the interior of the sandblasting station, with a plurality of spray guns disposed below the mounting shaft, the spray guns being connected to the mounting shaft via brackets, and the spray guns being connected to the storage tank via pipes.

[0012] By adopting the above technical solution, the spray gun is connected to the storage box through a pipe, and high-pressure gas is introduced into the spray gun. The high-pressure gas sprays fine sand. During the sandblasting process, the mounting shaft rotates and drives the spray gun to move through the bracket, thereby adjusting the angle of the spray gun and improving the quality of the operation.

[0013] Optionally, the dust removal mechanism includes a housing disposed on one side of the casing, a fan disposed above the housing, the air inlet of the fan being connected to the interior of the housing, a dust collection funnel disposed below the housing, one side of the dust collection funnel being connected to the cyclone separator via a conveying pipe, and a plurality of filter cartridges disposed inside the housing.

[0014] By adopting the above technical solution, the fan starts during the sandblasting process, and the fan transports the air inside the box to the outside. The box and the dust collection funnel are generated with negative pressure. The negative pressure transports the fine sand inside the collection funnel to the cyclone separator through the pipeline. The dust and impurities separated in the cyclone separator are transported to the dust collection funnel through the conveying pipe. The air mixed with dust moves upward and passes through the filter cartridge. The filter cartridge filters and removes dust from the air, thereby discharging the purified air and avoiding environmental pollution.

[0015] Optionally, a backflush valve is provided above the middle of the filter cartridge, and an air pipe is connected to one side of the backflush valve.

[0016] By adopting the above technical solution, compressed air is delivered inside the air pipe. The compressed air is blown into the filter cartridge through the backflush valve. The backflush valve causes the air to form a vortex in the middle of the filter cartridge. The centrifugal force of the rotation removes the dust and impurities mixed in the air, thus achieving dust removal.

[0017] Optionally, a rotating shaft is arranged vertically inside the housing, and a rotation drive mechanism for driving the rotating shaft is arranged above the housing. The rotating disk is connected to the rotating shaft, and a pneumatic slip ring is arranged above the rotating shaft. The pneumatic slip ring is connected to the suction cup through a pipe.

[0018] By adopting the above technical solution, the rotary drive mechanism drives the rotating seat to rotate through the rotating shaft, and the pneumatic slip ring is connected to the vacuum pump. The pneumatic slip ring ensures that the vacuum pump is always connected to the suction cup through the pipe during the rotation of the rotating shaft, thereby ensuring that the suction cup can adsorb the silicon wafer.

[0019] Optionally, movable plates are provided at the bottom of the partitions on both sides of the loading and unloading station, and a cylinder is provided above the housing to drive the movable plates to move up and down along the partitions.

[0020] By adopting the above technical solution, during the sandblasting process, the cylinder drives the two movable plates to descend, and the movable plates and partitions enclose the loading and unloading stations to prevent dust and impurities from leaking out during the operation. When the rotary table rotates, the cylinder drives the two movable plates to rise, and the rotary table drives the suction cup assembly to move to the next station.

[0021] In summary, this application includes at least one of the following beneficial technical effects:

[0022] 1. In this application, a rotating disk is set inside the housing, and multiple sets of suction cup assemblies are set on the rotating disk. The inside of the housing is divided into loading and unloading station, transition station, sandblasting station and cleaning station. The rotation of the rotating disk drives the silicon wafer to enter the loading and unloading station, transition station, sandblasting station and cleaning station in sequence, realizing automated continuous sandblasting operation, effectively improving the efficiency of sandblasting operation and reducing the labor intensity of operators.

[0023] 2. This application includes a circulation mechanism and a dust removal mechanism. The circulation mechanism can collect and separate fine sand, realizing the recycling of fine sand, reducing production costs, and saving resources. The dust removal mechanism can filter and collect the separated impurities and dust, avoiding environmental pollution during operation.

[0024] 3. This application includes a suction cup assembly with multiple suction cups. The suction cups can be used to adsorb silicon wafers, thus achieving the adsorption and fixation of silicon wafers and avoiding damage to silicon wafers during operation. In addition, this application includes two cyclone separators, which can separate finer sand, and together with the sandblasting mechanism, achieve the sandblasting operation of silicon wafers, resulting in higher sandblasting precision. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall front structure of a sandblasting machine according to an embodiment of this application.

[0026] Figure 2 This is a schematic diagram of the overall back structure of a sandblasting machine according to an embodiment of this application.

[0027] Figure 3 This is a top view of the internal structure of a sandblasting machine according to an embodiment of this application.

[0028] Figure 4 This is a schematic diagram of the feeding mechanism of a sandblasting machine according to an embodiment of this application.

[0029] Figure 5 This is a schematic diagram of the internal structure of a sandblasting machine according to an embodiment of this application.

[0030] Figure 6 This is a schematic diagram of the piston drive mechanism of a sandblasting machine according to an embodiment of this application.

[0031] Explanation of reference numerals in the attached drawings: 1. Shell; 2. Feeding mechanism; 3. Circulation mechanism; 4. Dust removal mechanism; 5. Partition plate; 6. Movable plate; 7. Cylinder; 8. Conveying pipe; 9. Dust collection funnel; 10. Collection funnel; 11. Rotary disc; 12. Suction cup assembly; 13. Loading / unloading station; 14. Transition station; 15. Sandblasting station; 16. Cleaning station; 17. Sandblasting mechanism; 18. Suction cup drive mechanism; 19. Suction cup; 20. Rotating shaft; 21. Pneumatic slip ring; 22. Rotary drive mechanism; 23. Fan; 24. Air pipe; 25. Backflush valve; 26. Filter cartridge; 27. Heating box; 28. Storage box; 29. ​​Spray gun drive mechanism; 30. Mounting shaft; 31. Spray gun; 32. Bracket; 33. Pulley; 34. Transmission belt; 35. Drive motor; 36. Cleaning mechanism; 37. Cyclone separator; 38. Box body. Detailed Implementation

[0032] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification.

[0033] Please see Figure 1-6 It should be understood that the structures, proportions, sizes, etc., illustrated in the accompanying drawings are merely for illustrative purposes to aid those skilled in the art and to facilitate understanding. They are not intended to limit the scope of this application and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of this application, should still fall within the scope of the technical content disclosed in this application. Furthermore, the terms such as "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and not intended to limit the scope of this application. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of this application's implementation.

[0034] The following is in conjunction with the appendix Figure 1-6 This application will be described in further detail.

[0035] This embodiment discloses a sandblasting machine.

[0036] Reference Figure 1 and Figure 2 The device includes a housing 1, a feeding mechanism 2 inside the housing 1, an opening on one side of the housing 1 connected to the feeding mechanism 2, a circulation mechanism 3 above the housing 1, a collection funnel 10 at the bottom of the housing 1, the collection funnel 10 being connected to the circulation mechanism 3 via a pipe, and a dust removal mechanism 4 on one side of the housing 1, the dust removal mechanism 4 being connected to the circulation mechanism 3 via a conveying pipe 8.

[0037] Reference Figure 3The feeding mechanism 2 includes a rotating disk 11 rotatably disposed inside the housing 1. The rotating disk 11 is provided with four sets of suction cup assemblies 12. Several partitions 5 are provided inside the housing 1, which divide the interior of the housing 1 into loading and unloading stations 13, transition stations 14, sandblasting stations 15 and cleaning stations 16. The rotating disk 11 drives the suction cup assemblies 12 to enter the loading and unloading stations 13, transition stations 14, sandblasting stations 15 and cleaning stations 16 in sequence by rotating. The sandblasting station 15 is provided with a sandblasting mechanism 17.

[0038] Reference Figure 4 and Figure 6 Inside the housing 1, a rotating shaft 20 is vertically arranged. A rotary drive mechanism 22 is located above the housing 1, connected to the rotating shaft 20. A rotating disk 11 is also connected to the rotating shaft 20. Four suction cup assemblies 12 are mounted on the rotating disk 11. Each suction cup assembly 12 includes two suction cups 19 rotatably connected to the rotating disk 11, connected via belt drive. A pneumatic slip ring 21 is located at the upper end of the rotating shaft 20, connected to a vacuum pump and the suction cups 19 via a pipe. A suction cup drive mechanism is also located inside the sandblasting station 15. The suction cup drive mechanism 18 includes multiple pulleys 33 disposed on the inner wall of the sandblasting station 15. The multiple pulleys 33 are connected to each other by a transmission belt 34. A drive motor 35 is connected below one of the pulleys 33. When the suction cup assembly 12 rotates into the sandblasting station 15 via the rotary disk 11, the transmission belt connecting the two suction cups 19 in the suction cup assembly 12 contacts the transmission belt 34. The transmission belt 34 moves under the drive of the pulleys 33, and drives the two suction cups 19 to rotate synchronously through the transmission belt.

[0039] Reference Figure 5 The circulation mechanism 3 includes a cyclone separator 37 disposed above the housing 1. The cyclone separator 37 is connected to a collection funnel 10 via a pipe. A heating box 27 is connected below the cyclone separator 37, and a storage box 28 is connected below the heating box 27. The dust removal mechanism 4 is disposed on one side of the housing 1. The dust removal mechanism 4 includes a housing 38. A fan 23 is disposed above the housing 38, and the air inlet of the fan 23 is connected to the housing 38. A dust collection funnel 9 is disposed at the bottom of the housing 38. One side of the dust collection funnel 9 is connected to the cyclone separator 37 via a conveying pipe 8. Three filter cartridges 26 are disposed in the middle of the housing 38. A backflush valve 25 is provided above the space. Three backflush valves 25 are connected to an air pipe 24 through a pipe. A sandblasting mechanism 17 is located inside the sandblasting station 15. The sandblasting mechanism 17 includes a mounting shaft 30 that is rotatably connected to the housing 1. A spray gun drive mechanism 29 that drives the mounting shaft 30 to rotate is provided above the housing 1. Multiple spray guns 31 are connected to the mounting shaft 30 through a bracket 32. The spray guns 31 are connected to a storage box 28 through a pipe. A cleaning mechanism 36 is provided above the cleaning station 16. The cleaning mechanism 36 includes an air pipe. Several cleaning pipes extending into the cleaning station 16 are connected to one side of the air pipe.

[0040] The implementation principle of a sandblasting machine in this embodiment is as follows:

[0041] During sandblasting, the silicon wafer is first placed on the suction cup 19 from the loading / unloading station 13. The vacuum pump drives the suction cup 19 through the pipeline to pick up the silicon wafer. After the silicon wafer is loaded, the movable plates 6 on both sides of the loading / unloading station 13 rise under the drive of the cylinder 7. The rotary drive mechanism 22 drives the rotating disk 11 to rotate counterclockwise through the rotating shaft 20. The rotating disk 11 transports the suction cup assembly 12 with the silicon wafer to the transition station 14. The operator then loads the silicon wafer onto the suction cup assembly 12 without silicon wafer from the loading / unloading station. The rotating disk 11 rotates again, causing the suction cup assembly 12 to move to the sandblasting station 15. When the suction cup assembly 12 moves into the sandblasting station 15, the suction cup assembly 12... The bottom drive belt is connected to the drive belt 34 in the suction cup drive mechanism 18. When the sandblasting machine is started, high-pressure gas is input into the spray gun 31. The high-pressure gas propels fine sand from the spray gun 31 onto the surface of the silicon wafer. During the sandblasting process, the suction cup drive mechanism 18 drives the suction cup 19 to rotate, while the spray gun drive mechanism 29 drives the mounting shaft 30 to rotate reciprocally, thereby moving the spray gun 31 and changing its angle. During the sandblasting process, the fan 23 is started, and the fan 23 exhausts the air inside the housing 38 to the outside, thereby generating a negative pressure inside the housing 38 and the shell 1. During the sandblasting process, the fine sand falls into the collection funnel 10. Under the action of negative pressure, the fine sand mixed with dust enters the cyclone separator through the pipe. 37. Fine sand mixed with dust rotates and separates inside the cyclone separator 37. The larger fine sand falls into the heating box 27, where it is heated to prevent clumping. The heated fine sand then falls into the storage box 28 for storage. The spray gun 31 is connected to the storage box 28 through a pipe, and the storage box 28 supplies material to the spray gun 31. Lighter dust and impurities are transported to the dust collection funnel 9 through the conveying pipe 8. The fan 23 blows the air inside the dust collection funnel 9 outward. The air mixed with dust and impurities moves upward inside the housing 38. The air moves upward through the filter cartridge 26. High-pressure air enters the backflush valve 25 through the air pipe 24. The backflush valve 25 backflushes the filter cartridge, causing the air inside the filter cartridge to move upward. The rotating disc 11 filters dust and impurities in the air through centrifugal force. The filtered air is discharged upward by the fan 23, while the dust and impurities are stored inside the housing 38. After the silicon wafer sandblasting operation is completed, the rotating disc 11 rotates, causing the sandblasted silicon wafer to move to the cleaning station 16. The cleaning mechanism 36 above the cleaning station 16 sprays high-pressure gas onto the surface of the silicon wafer, using the high-pressure gas to remove the fine sand and impurities remaining on the silicon wafer. Then, the rotating disc 11 rotates to transport the cleaned silicon wafer to the loading and unloading station 13. The operator removes the processed silicon wafer and replaces it with a new one, repeating the above operation, thereby realizing continuous automated sandblasting of silicon wafers.

[0042] In summary, this application incorporates a rotating disk within the housing, with multiple suction cup assemblies mounted on it. The housing is divided into loading / unloading stations, transition stations, sandblasting stations, and cleaning stations. The rotation of the rotating disk sequentially drives silicon wafers into these stations, achieving automated continuous sandblasting operations. This effectively improves sandblasting efficiency and reduces the labor intensity of operators. The application also includes a circulation mechanism and a dust removal mechanism. The circulation mechanism collects and separates fine sand, enabling its recycling, reducing production costs, and conserving resources. The dust removal mechanism filters and collects separated impurities and dust, preventing environmental pollution during operation. Furthermore, the suction cup assembly, containing multiple suction cups, adsorbs and fixes the silicon wafers, preventing damage during operation. Additionally, two cyclone separators separate finer sand, working in conjunction with the sandblasting mechanism to achieve higher sandblasting precision. Therefore, this application effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0043] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this application should still be covered within the protection scope of this application.

Claims

1. A sandblasting machine, characterized in that, The system includes a housing (1), a feeding mechanism (2) in the middle of the housing (1), a circulation mechanism (3) above the housing (1), a dust removal mechanism (4) on one side of the housing (1), and the dust removal mechanism (4) connected to the circulation mechanism (3) via a pipe. The feeding mechanism (2) includes a rotating disk (11) rotatably disposed inside the housing (1), and several sets of suction cup assemblies (12) for fixing silicon wafers are disposed on the rotating disk (11). Several partitions (5) are disposed inside the housing (1). The partition (5) divides the interior of the housing (1) into loading and unloading station (13), transition station (14), sandblasting station (15) and cleaning station (16). The rotating disk (11) drives the suction cup assembly (12) to enter the loading and unloading station (13), the transition station (14), the sandblasting station (15) and the cleaning station (16) in sequence by rotating. The sandblasting station (15) is equipped with a sandblasting mechanism (17), and the cleaning station (16) is equipped with a cleaning mechanism (36) above it.

2. A sandblasting machine according to claim 1, characterized in that: The suction cup assembly (12) includes two suction cups (19) rotatably connected to the rotating disk (11). The two suction cups (19) are connected by a transmission belt. The sandblasting station (15) is equipped with a suction cup drive mechanism (18) that drives the suction cups (19) to rotate.

3. A sandblasting machine according to claim 1, characterized in that: The circulation mechanism (3) includes a collection funnel (10) disposed below the interior of the housing (1) and a cyclone separator (37) disposed above the housing (1). The collection funnel (10) and the cyclone separator (37) are connected by a pipe. A heating box (27) is connected below the cyclone separator (37), and a storage box (28) is connected below the heating box (27).

4. A sandblasting machine according to claim 3, characterised in that: The sandblasting mechanism (17) includes a mounting shaft (30) rotatably disposed above the interior of the sandblasting station (15). Several spray guns (31) are disposed below the mounting shaft (30). The spray guns (31) are connected to the mounting shaft (30) via a bracket (32). The spray guns (31) are connected to the storage box (28) via a pipe.

5. A sandblasting machine according to claim 3, characterized in that: The dust removal mechanism (4) includes a box (38) disposed on one side of the housing (1), a fan (23) disposed above the box (38), the air inlet of the fan (23) being connected to the interior of the box (38), a dust collection funnel (9) disposed below the box (38), and one side of the dust collection funnel (9) being connected to the cyclone separator (37) through a conveying pipe (8). Several filter cartridges (26) are disposed inside the box (38).

6. A sandblasting machine according to claim 5, characterised in that: A backflush valve (25) is provided above the middle of the filter cartridge (26), and an air pipe (24) is connected to one side of the backflush valve (25).

7. A sandblasting machine according to claim 2, characterized in that: The housing (1) has a rotating shaft (20) arranged vertically inside. A rotating drive mechanism (22) for driving the rotating shaft (20) to rotate is arranged above the housing (1). The rotating disk (11) is connected to the rotating shaft (20). A pneumatic slip ring (21) is arranged above the rotating shaft (20). The pneumatic slip ring (21) is connected to the suction cup (19) through a pipe.

8. A sandblasting machine according to claim 1, characterized in that: The bottom of the partition (5) on both sides of the loading and unloading station (13) is provided with a movable plate (6) that moves up and down. A cylinder (7) is provided above the housing (1) to drive the movable plate (6) to move up and down along the partition (5).

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