Centering clamp applied to wafer

Abstract

The utility model discloses a centering clamp applied to a wafer, and relates to the technical field of wafer centering equipment, the centering clamp comprises a fixed support with a bearing tray, two clamping pieces arranged on the fixed support, a driving assembly and a linkage assembly, and the bearing tray is used for bearing the wafer; the two clamping pieces are slidably connected to the two opposite sides of the fixing support respectively, at least one clamping piece is connected with the driving assembly, and the driving assembly is used for driving one clamping piece to move towards the bearing tray; wherein the linkage assembly is used for connecting the two opposite ends of the two clamping pieces, when one clamping piece moves towards the bearing tray, the linkage assembly is used for synchronously driving the other clamping piece to relatively move towards the bearing tray, and through the arrangement, the center of the wafer can be pushed to coincide with the center of the bearing tray.

Description

Technical Field

[0001] This utility model relates to the field of wafer centering equipment technology, specifically a centering fixture applied to wafers. Background Technology

[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits; its raw material is silicon. High-purity polycrystalline silicon is dissolved, doped with silicon crystal seeds, and then slowly pulled out to form a cylindrical single-crystal silicon ingot. After grinding, polishing, and slicing, the silicon crystal ingot is formed into a silicon wafer, or crystal.

[0003] Currently, in the wafer manufacturing process, it is usually necessary to align the center of the wafer with the center of the support platform to facilitate precision machining of the wafer surface. To achieve this, in existing technology, a guide sleeve with a conical surface is placed on the support platform. The wafer is placed inside the guide sleeve, and under the influence of gravity, the wafer will automatically fall along the conical surface and land on the support platform. However, since the wafer will rub against the conical surface during the fall, it will tilt during the fall, resulting in a large error during use and affecting subsequent processing steps.

[0004] Therefore, the existing method of centering wafers will cause a certain deviation between the center of the wafer and the center of the support platform, which will affect the subsequent processing effect of the wafer. Utility Model Content

[0005] Based on this, the purpose of this utility model is to provide a centering fixture for wafers to solve the problem that existing wafer centering methods in the background art cause a deviation between the center of the wafer and the center of the support platform.

[0006] The present invention provides an alignment fixture for wafers, comprising a fixed bracket with a support tray, two clamping members disposed on the fixed bracket, a drive assembly, and a linkage assembly, wherein the support tray is used to support wafers.

[0007] The two clamping members are slidably connected to opposite sides of the fixed bracket, and at least one of the clamping members is connected to the driving assembly, which is used to drive one of the clamping members to move toward the carrying tray.

[0008] The linkage component is used to connect the opposite ends of the two clamping members. When one clamping member moves toward the carrier tray, the linkage component synchronously drives the other clamping member to move relative to the carrier tray, so that the center of the wafer is moved to coincide with the center of the carrier tray.

[0009] Furthermore, the centering clamp includes a first clamping member and a second clamping member, which are slidably connected to opposite sides of the fixed bracket.

[0010] Furthermore, the drive assembly includes a drive member, a threaded rod connected to the drive member, and a threaded block sleeved on the threaded rod, the threaded block being used to connect with the first clamping member.

[0011] Furthermore, the drive assembly also includes a connecting frame and a first connecting plate that are connected to each other. The connecting frame is connected to the first clamping member, and the threaded block is connected to the first connecting plate.

[0012] Furthermore, the drive assembly also includes a rotating bracket, which is located at the bottom of the fixed bracket and is used to be fitted onto the straight portion of the threaded rod.

[0013] Furthermore, the centering clamp also includes a slide rail located at the bottom of the fixed bracket and a sliding sleeve slidably connected to the slide rail, the sliding sleeve being connected to the first connecting plate.

[0014] Furthermore, the linkage assembly includes a balance plate rotatably connected to the fixed bracket, a second connecting plate for connecting with the second clamping member, and two connecting rods;

[0015] One of the connecting rods is used to rotatably connect the first connecting plate to the balance plate, and the other connecting rod is used to rotatably connect the second connecting plate to the balance plate.

[0016] Furthermore, the centering fixture also includes a vacuum pump and a support tube, the vacuum pump being connected to the support tray via the support tube.

[0017] Furthermore, the support tray is provided with a through hole that communicates with the support tube.

[0018] Furthermore, the through hole coincides with the center of the support tray.

[0019] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0020] In this invention, applied to a wafer alignment fixture, the arrangement of two clamping members, a driving component, and a linkage component allows one clamping member to move when the center of the wafer is aligned with the center of the carrier tray. This movement, driven by the driving component, causes the other clamping member to move synchronously under the action of the linkage component. Through the synchronous relative movement of the two clamping members, the center of the wafer is pushed to align with the center of the carrier tray, thus solving the problem that existing wafer alignment methods cause a deviation between the center of the wafer and the center of the carrier platform. Attached Figure Description

[0021] Figure 1 This is a first-view perspective perspective view of an alignment fixture applied to a wafer in one embodiment of the present invention;

[0022] Figure 2 This is a second-view perspective perspective view of an alignment fixture applied to a wafer in one embodiment of the present invention;

[0023] Figure 3 This is a third-view perspective view of an alignment fixture applied to a wafer in one embodiment of the present invention.

[0024] In the diagram: 100, fixed bracket; 110, carrying tray; 200, first clamping component; 300, second clamping component; 400, drive assembly; 410, drive component; 420, threaded rod; 430, threaded block; 440, connecting frame; 450, first connecting plate; 460, rotating bracket; 500, linkage assembly; 510, balance plate; 520, second connecting plate; 530, connecting rod; 600, slide rail; 700, sliding sleeve; 800, vacuum pump; 900, support tube. Detailed Implementation

[0025] To facilitate understanding of this utility model, a more complete description of it will be given below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this utility model will be more thorough and complete.

[0026] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0028] Please see Figure 1-3The image shows an alignment fixture for wafers in one embodiment of the present invention, including a fixed bracket 100 with a support tray 110, two clamping members disposed on the fixed bracket 100, a drive assembly 400 and a linkage assembly 500, wherein the support tray 110 is used to support wafers.

[0029] Two clamping members are slidably connected to opposite sides of the fixed bracket 100, and at least one clamping member is connected to the drive assembly 400. The drive assembly 400 is used to drive one clamping member to move toward the carrying tray 110.

[0030] The linkage component 500 is used to connect the two opposite ends of the two clamping members. When one clamping member moves toward the carrier tray 110, the linkage component 500 synchronously drives the other clamping member to move relative to the carrier tray 110, so that the center of the wafer is moved to coincide with the center of the carrier tray 110.

[0031] In practical implementation, the wafer is placed on the support tray 110. At this time, the center of the wafer does not coincide with the center of the support tray 110. The drive component 400 drives a clamping member to move, so that the clamping member drives the other clamping member to move synchronously under the action of the linkage component 500. Through the synchronous relative movement of the two clamping members, the center of the wafer can be pushed to coincide with the center of the support tray 110, thereby solving the problem that the existing wafer centering method will cause the center of the wafer to deviate from the center of the support platform.

[0032] Specifically, in this embodiment, the two clamping members are a first clamping member 200 and a second clamping member 300, and the first clamping member 200 and the second clamping member 300 are slidably connected to opposite sides of the fixed bracket 100.

[0033] To facilitate the movement of a clamping member, in some preferred embodiments, the driving assembly 400 includes a driving member 410, a threaded rod 420 connected to the driving member 410, and a threaded block 430 sleeved on the threaded rod 420. The threaded block 430 is used to connect with the first clamping member 200. It should be noted that the driving member 410 can be a servo motor in the prior art. The driving member 410 drives the threaded rod 420 to rotate, so that the threaded block 430 can drive the first clamping member 200 to move.

[0034] Specifically, the drive assembly 400 also includes a connecting frame 440 and a first connecting plate 450 that are connected to each other. The connecting frame 440 is connected to the first clamping member 200, and the threaded block 430 is connected to the first connecting plate 450.

[0035] Furthermore, to ensure the stability of the threaded rod 420 during rotation, the drive assembly 400 also includes a rotating bracket 460. The rotating bracket 460 is located at the bottom of the fixed bracket 100 and is used to fit onto the straight portion of the threaded rod 420. It should be noted that the threaded rod 420 shown in the embodiment can be divided into two sections, one with threads and the other with a straight portion. By using the rotating bracket 460 to fit onto the straight portion, the stability of the threaded rod 420 during rotation can be ensured.

[0036] In some other preferred embodiments, the centering clamp also includes a slide rail 600 located at the bottom of the fixed bracket 100 and a sliding sleeve 700 slidably connected to the slide rail 600. The sliding sleeve 700 is connected to the first connecting plate 450. The slide rail 600 and the sliding sleeve 700 can further ensure the stability of the first clamping member 200 during operation.

[0037] To facilitate the synchronous relative movement of the first clamping member 200 and the second clamping member 300, in this embodiment, the linkage assembly 500 includes a balance plate 510 rotatably connected to the fixed bracket 100, a second connecting plate 520 for connecting to the second clamping member 300, and two connecting rods 530. One connecting rod 530 is used to rotatably connect the first connecting plate 450 to the balance plate 510, and the other connecting rod 530 is used to rotatably connect the second connecting plate 520 to the balance plate 510.

[0038] When the first clamping member 200 moves via the driving member 410, the corresponding first connecting plate 450 drives the first link 530 to move. At this time, the balance plate 510 rotates relative to the fixed bracket 100. The rotation of the balance plate 510 drives the second link 530 to move the second connecting plate 520. Through the movement of the second connecting plate 520, the second clamping member 300 and the first clamping member 200 move synchronously relative to each other.

[0039] It should be noted that in this embodiment, a second set of slide rails 600 and slide sleeves 700 are also provided at the bottom of the fixed bracket 100. That is, a total of two sets of slide rails 600 and two sets of slide sleeves 700 are arranged at the bottom of the fixed bracket 100. The two sets of slide rails 600 and two sets of slide sleeves 700 can be used to ensure the stability of the first connecting plate 450 and the second connecting plate 520 when they move.

[0040] In addition, in this embodiment, the centering fixture also includes a vacuum pump 800 and a support tube 900. The vacuum pump 800 is connected to the carrier tray 110 through the support tube 900. Specifically, the carrier tray 110 is provided with a through hole that communicates with the support tube 900, and the through hole coincides with the center of the carrier tray 110. The vacuum pump 800 can be used to stably adsorb the wafer onto the carrier tray 110.

[0041] In summary, the wafer centering fixture of the first embodiment of this utility model has at least the following advantages compared with the traditional wafer centering method:

[0042] In the wafer alignment fixture of this invention, the arrangement of two clamping members, a drive assembly 400, and a linkage assembly 500 enables the drive assembly 400 to drive one clamping member to move when aligning the center of the wafer with the center of the carrier tray 110. Under the action of the linkage assembly 500, one clamping member drives the other clamping member to perform synchronous relative movement. Through the synchronous relative movement of the two clamping members, the center of the wafer can be pushed to coincide with the center of the carrier tray 110, thereby solving the problem that existing wafer alignment methods cause a deviation between the center of the wafer and the center of the carrier platform.

[0043] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0044] The above embodiments only illustrate several implementation methods of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A centering jig for application to a wafer, characterized by, It includes a fixed bracket with a support tray, two clamping members disposed on the fixed bracket, a drive assembly, and a linkage assembly, wherein the support tray is used to support wafers; The two clamping members are slidably connected to opposite sides of the fixed bracket, and at least one of the clamping members is connected to the driving assembly, which is used to drive one of the clamping members to move toward the carrying tray. The linkage component is used to connect the opposite ends of the two clamping members. When one clamping member moves toward the carrier tray, the linkage component synchronously drives the other clamping member to move relative to the carrier tray, so that the center of the wafer is moved to coincide with the center of the carrier tray.

2. The centering clamp for wafer according to claim 1, wherein: The centering clamp includes a first clamping member and a second clamping member, which are slidably connected to opposite sides of the fixed bracket.

3. The centering clamp for wafer according to claim 2, wherein: The drive assembly includes a drive member, a threaded rod connected to the drive member, and a threaded block sleeved on the threaded rod, the threaded block being used to connect with the first clamping member.

4. The centering clamp for wafer according to claim 3, wherein: The drive assembly also includes a connecting frame and a first connecting plate that are connected to each other. The connecting frame is connected to the first clamping member, and the threaded block is connected to the first connecting plate.

5. The centering fixture for wafer according to claim 3, wherein: The drive assembly also includes a rotating bracket, which is located at the bottom of the fixed bracket and is used to be fitted onto the straight portion of the threaded rod.

6. The centering fixture for wafer according to claim 4, wherein: The centering clamp also includes a slide rail located at the bottom of the fixed bracket and a sliding sleeve slidably connected to the slide rail, the sliding sleeve being connected to the first connecting plate.

7. The centering fixture for wafer according to claim 4, wherein: The linkage assembly includes a balance plate rotatably connected to the fixed bracket, a second connecting plate for connecting with the second clamping member, and two connecting rods. One of the connecting rods is used to rotatably connect the first connecting plate to the balance plate, and the other connecting rod is used to rotatably connect the second connecting plate to the balance plate.

8. The centering fixture for wafer sheets according to claim 1, characterized in that: The centering fixture also includes a vacuum pump and a support tube, with the vacuum pump connected to the support tray via the support tube.

9. The centering clamp for wafer according to claim 8, wherein: The support tray is provided with a through hole that communicates with the support tube.

10. The centering clamp for wafer according to claim 9, wherein: The through hole coincides with the center of the support tray.

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