Quartz crucible melting mold

Abstract

The utility model discloses a quartz crucible founding mold, relates to the technical field of quartz crucible founding, and aims to solve the problem that the proportion of microbubbles of a quartz crucible founded by an existing mold is high. The mold comprises a mold body, and the mold body comprises a cylinder part and a cambered surface part connected to the bottom of the cylinder part; a plurality of inclined first air holes are formed in the circumferential direction of the cylinder part, the included angle between the center line of each first air hole and the vertical line of the inner wall of the cylinder part is 30 degrees, and a plurality of second air holes perpendicular to the wall face of the arc face part are formed in the arc face part, so that the rate of fluid passing through the quartz crucible melting mold is increased, and the microbubble proportion of the molten quartz crucible is reduced.

Description

Technical Field

[0001] This utility model relates to the field of quartz crucible melting technology, and more specifically, to a quartz crucible melting mold. Background Technology

[0002] As the substrate for semiconductor devices, silicon wafers are in high demand due to the rapid development of semiconductor technology. Silicon wafer manufacturing typically relies on the production of single-crystal silicon ingots, which are then sliced ​​to obtain the desired silicon wafers.

[0003] Single-crystal silicon ingots are typically manufactured using the Czochralski method, which requires a quartz crucible. With the increasing demand for larger diameter single-crystal silicon ingots, higher requirements have been placed on the performance and quality of quartz crucibles. Quartz crucibles need to have larger diameters and lower impurity content, and stricter requirements have been placed on the proportion of microbubbles in the crucible's transparent layer. This is because the presence of microbubbles can lead to defects in the resulting single-crystal silicon ingot, thereby affecting the performance and reliability of semiconductor devices.

[0004] However, existing molds for manufacturing quartz crucibles have a common problem: they tend to result in a high proportion of microbubbles in the molten quartz crucible.

[0005] Therefore, how to solve the problem of high microbubble ratio in quartz crucibles melted by existing molds is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0006] In view of this, the purpose of this utility model is to provide a quartz crucible melting mold that reduces the proportion of microbubbles in the quartz crucible during melting by increasing the rate at which fluid passes through the quartz crucible melting mold.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A quartz crucible melting mold includes: a mold body, the mold body including a cylindrical part and an arc-shaped part connected to the bottom of the cylindrical part, the cylindrical part having a plurality of inclined first vent holes in the circumference, the center line of the first vent holes forming an angle of 30 degrees with the vertical line of the inner wall of the cylindrical part, and the arc-shaped part having a plurality of second vent holes perpendicular to its own wall.

[0009] Preferably, at least two sets of first vent holes are provided along the axial direction of the cylindrical part, and several first vent holes in each set are arranged in a uniform circumferential direction.

[0010] Preferably, the two sets of adjacent first vent holes along the axial direction of the cylindrical portion are staggered circumferentially.

[0011] Preferably, the curved surface includes a small-diameter arc segment and a large-diameter arc segment, wherein the small-diameter arc segment is used to connect the bottom of the cylindrical part with the large-diameter arc segment.

[0012] Preferably, at least two sets of second vent holes are provided along the axial direction of the small-diameter arc segment, and several second vent holes in each set are arranged evenly and sequentially in the circumferential direction, and at least two sets of second vent holes are arranged correspondingly along the axial direction of the small-diameter arc segment.

[0013] Preferably, at least two sets of second vent holes are provided along the axial direction of the large-diameter arc segment, and several second vent holes in each set are arranged in a uniform circumferential direction, with the two adjacent sets of second vent holes being staggered circumferentially along the axial direction of the large-diameter arc segment.

[0014] Preferably, both the first vent and the second vent include a through hole and a countersunk hole that are interconnected. The through hole is located on the outside of the mold body and communicates with the outer wall of the mold body, while the countersunk hole is located on the inside of the mold body and communicates with the inner wall of the mold body. The diameter of the countersunk hole is larger than the diameter of the through hole.

[0015] Preferably, the hole spacing between two adjacent first vent holes arranged along the circumference of the cylindrical part is 25mm, and the vertical hole spacing between two adjacent first vent holes arranged along the axial direction of the cylindrical part is 25mm.

[0016] Preferably, the depth of the countersunk hole of the first vent hole in the cylindrical part is 14mm, the diameter of the through hole of the first vent hole near the port of the cylindrical part is 5.5mm, the diameter of the countersunk hole is 7.9mm, and the diameter of the through hole of the first vent hole at other positions in the cylindrical part is 4.5mm, and the diameter of the countersunk hole is 5.9mm.

[0017] Preferably, the depth of the countersunk hole of the second vent hole in the small-diameter arc segment and the large-diameter arc segment is 14mm, the through hole diameter of the second vent hole in the small-diameter arc segment is 4mm, the diameter of the countersunk hole is 5.9mm, and the hole spacing between two adjacent second vent holes is 50mm; the through hole diameter of the second vent hole in the large-diameter arc segment is 4mm, the diameter of the countersunk hole is 5.9mm, and the hole spacing between two adjacent second vent holes is 35mm.

[0018] The quartz crucible melting mold provided by this utility model includes a mold body, which includes a cylindrical part and an arc-shaped part connected to the bottom of the cylindrical part. The cylindrical part has multiple inclined first vent holes in its circumference, and the arc-shaped part has multiple second vent holes perpendicular to its own wall surface. By setting the first and second vent holes, the gas generated during the melting of the quartz crucible can be discharged through the first and second vent holes. Setting the first vent holes to be inclined can accelerate the discharge speed of the gas in the mold body. The center line of the first vent hole makes an angle of 30 degrees with the vertical line of the inner wall of the cylindrical part, so that the gas can diffuse more evenly during the discharge process, thereby reducing the local accumulation of gas in the first vent hole and reducing the backflow phenomenon of gas during the discharge process, improving the gas discharge efficiency, thereby reducing the microbubble residue in the quartz crucible and improving the melting quality of the quartz crucible. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0020] Figure 1 A schematic diagram of the quartz crucible melting mold provided by this utility model;

[0021] Figure 2 This is a schematic diagram of the structure of the mold body provided by this utility model;

[0022] Figure 3 This is a cross-sectional view of the mold body provided by this utility model.

[0023] Figure label:

[0024] 1-Mold body, 11-Cylindrical section, 12-Arcted section, 121-Small diameter arc segment, 122-Large diameter arc segment;

[0025] 2- First vent hole;

[0026] 3-Second vent;

[0027] 4-Water cooling jacket. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] The core of this invention is to provide a quartz crucible melting mold, which reduces the proportion of microbubbles in the quartz crucible by increasing the rate at which fluid passes through the quartz crucible melting mold.

[0031] Please refer to Figure 1 , Figure 2 and Figure 3 A quartz crucible melting mold includes a mold body 1.

[0032] Specifically, the mold body 1 includes a cylindrical part 11 and an arc-shaped part 12 connected to the bottom of the cylindrical part 11. The cylindrical part 11 has a plurality of inclined first vent holes 2 in its circumference, and the arc-shaped part 12 has a plurality of second vent holes 3 perpendicular to its own wall. By setting the first vent holes 2 and the second vent holes 3, the gas generated during the melting of the quartz crucible can be discharged through the first vent holes 2 and the second vent holes 3. Setting the first vent holes 2 to be inclined can accelerate the discharge speed of the gas in the mold body 1. The center line of the first vent hole 2 makes an angle of 30 degrees with the vertical line of the inner wall of the cylindrical part 11, so that the gas can diffuse more evenly during the discharge process, thereby reducing the local accumulation of gas in the first vent holes 2 and reducing the backflow phenomenon of gas during the discharge process, improving the gas discharge efficiency, thereby reducing the microbubble residue in the quartz crucible and improving the melting quality of the quartz crucible.

[0033] The first vent 2 is designed as an inclined hole, providing a non-vertical discharge path for the gas. This guides the gas to flow along the inclined direction of the vent, rather than simply vertically upwards. In a vertical vent, the gas is prone to colliding with the inner wall of the mold body 1 during its ascent, leading to gas dispersion and a slower flow rate. The inclined vent reduces this collision, allowing the gas to discharge more smoothly. The inclined vent forms a larger opening on the inner wall of the mold body 1, providing a larger effective discharge area compared to a vertical vent. This gives the gas more space to discharge, reducing the residence time of the gas within the vent. Especially when the gas flow rate is high, the inclined vent better accommodates rapid gas discharge, improving gas discharge efficiency and reducing the possibility of gas forming bubbles in the melt, thereby improving the quality of the melting crucible.

[0034] In this application, the quartz crucible melting mold is divided into two parts: a water-cooled jacket 4 and a mold body 1. The water-cooled jacket 4 is fitted outside the mold body 1, and a vacuum gap (vacuum chamber) is left between the mold body 1 and the water-cooled jacket 4. The mold body 1 has a plurality of first vent holes 2 and second vent holes 3 that are connected to the vacuum gap (vacuum chamber). The water-cooled jacket 4 has a main vacuum pipe that is connected to the vacuum gap (vacuum chamber).

[0035] The quartz crucible melting mold set in the above manner, with holes punched at a 30-degree angle to the vertical line of the inner wall of the mold body 1, can effectively increase the fluid flow rate, reduce the local accumulation of gas in the first vent hole 2, and also reduce the backflow phenomenon of gas during the discharge process, improve the gas discharge efficiency, thereby reducing the microbubble residue in the quartz crucible and improving the melting quality of the quartz crucible.

[0036] In the above embodiment, at least two sets of first vent holes 2 are provided along the axial direction of the cylindrical portion 11, and a plurality of first vent holes 2 in each set are arranged in a uniform circumferential direction.

[0037] It should be noted that multiple sets of first vent holes 2 are provided along the axial direction of the cylindrical part 11, which can adjust the airflow in and out in segments according to the airflow direction and flow requirements. Since each set of first vent holes 2 is evenly distributed along the circumference of the cylindrical part 11, the airflow can be evenly discharged through these first vent holes 2, which can avoid the airflow being too concentrated in a local area, thereby reducing airflow turbulence and excessive local pressure, and making the airflow flow more smoothly inside or around the entire cylindrical part 11.

[0038] In the above case, the two sets of adjacent first vent holes 2 are circumferentially misaligned along the axial direction of the cylindrical portion 11.

[0039] Understandably, the staggered arrangement of the first vent holes 2 avoids direct airflow collisions between adjacent groups of first vent holes 2. When airflow enters or exits through one group of first vent holes 2, it will not directly impact the airflow of another group of first vent holes 2, thereby reducing mutual interference between airflows and making the airflow flow more smoothly. Moreover, this staggered arrangement can guide the airflow to form a spiral flow path, which can more effectively distribute the airflow, improve the uniformity of the airflow, and reduce local airflow stagnation and eddy phenomena. In addition, dust and impurities are less likely to stay at the first vent holes 2, thereby reducing the risk of dust accumulation and blockage.

[0040] The staggered first vent 2 disperses stress concentration caused by airflow, reducing excessive local stress and thus improving the strength and durability of the cylindrical section 11. The staggered first vent 2 also better adapts to airflow from different directions, enhancing the equipment's adaptability under various operating conditions.

[0041] Furthermore, the curved section 12 includes a small-diameter arc segment 121 and a large-diameter arc segment 122, with the small-diameter arc segment 121 used to connect the bottom of the cylindrical section 11 with the large-diameter arc segment 122.

[0042] It should be noted that the small-diameter arc segment 121, as a transition section, enables a smooth geometric transition between the bottom of the cylindrical section 11 and the large-diameter arc segment 122, effectively reducing stress concentration and thus improving the overall structural strength and stability. The smooth transition of the small-diameter arc segment 121 reduces fluid flow resistance between the cylindrical section 11 and the large-diameter arc segment 122. When the fluid passes through this transition section, it can more smoothly change its flow direction, avoiding eddies and energy loss caused by sharp transitions, thereby improving fluid dynamics performance. Furthermore, the transition design of the small-diameter arc segment 121 reduces processing difficulty and cost, and facilitates subsequent welding, assembly, and other processes, improving production efficiency. Because the transition of the small-diameter arc segment 121 is relatively smooth, dimensional and shape accuracy are easier to control during processing, contributing to improved overall quality and reliability and reducing performance degradation caused by processing errors.

[0043] In the above embodiment, at least two sets of second vent holes 3 are provided along the axial direction of the small diameter arc segment 121. Several second vent holes 3 in each set are arranged in a uniform circumferential direction, and at least two sets of second vent holes 3 are arranged correspondingly along the axial direction of the small diameter arc segment 121.

[0044] Understandably, the three sets of second vents arranged along the axial direction of the small-diameter arc segment 121 can form symmetrical airflow channels, which helps to further balance the airflow and reduce vibration and instability caused by asymmetrical airflow. Each set of second vents 3 is evenly distributed circumferentially along the small-diameter arc segment 121, which can disperse stress concentration caused by airflow, reduce excessive local stress, and thus improve the structural strength and durability of the small-diameter arc segment 121. It also ensures that airflow enters or exits evenly around the small-diameter arc segment 121, avoiding excessive concentration of airflow in local areas, thereby reducing airflow turbulence and excessive local pressure, and making the airflow flow more smoothly throughout the entire small-diameter arc segment 121 area. The evenly distributed second vents 3 can reduce the accumulation of dust and impurities near the second vents 3. Because the airflow forms a smooth flow between the second vents 3, dust and impurities are less likely to remain at the second vents 3, thus reducing the risk of dust accumulation and blockage.

[0045] Based on the above embodiment, at least two sets of second vent holes 3 are provided along the axial direction of the large diameter arc segment 122. Several second vent holes 3 in each set are arranged in a uniform circumferential direction. The two sets of adjacent second vent holes 3 are staggered circumferentially along the axial direction of the large diameter arc segment 122.

[0046] It should be noted that the staggered arrangement of the second vent holes 3 avoids direct airflow collisions between adjacent groups of second vent holes 3. When airflow enters or exits through one group of second vent holes 3, it will not directly impact the airflow of another group of second vent holes 3, thereby reducing mutual interference between airflows and making the airflow flow more smoothly. The staggered arrangement can guide the airflow to form a spiral flow path. After passing through one group of second vent holes 3, due to the staggered relationship, the airflow will form a spiral rising or falling flow pattern along the inner wall or surrounding area of ​​the large-diameter arc segment 122. This spiral airflow can more effectively distribute the airflow, improve the uniformity of the airflow, and reduce local airflow stagnation and eddy phenomena. The smooth flow of the spiral airflow also helps to reduce structural vibration caused by airflow impact and improve the operational stability of the equipment. The staggered arrangement of the second vent holes 3 can disperse the impact force of the airflow and disperse the stress concentration caused by the airflow. Since the airflow does not directly collide, the stress is more evenly distributed on the wall of the large-diameter arc segment 122, reducing the phenomenon of excessive local stress, thereby improving the structural strength and durability of the large-diameter arc segment 122. The staggered placement of the second vent 3 reduces the accumulation of dust and impurities near it. Because the airflow forms a spiral flow between the second vent 3, dust and impurities are less likely to remain there, thus reducing the risk of dust accumulation and clogging. This design makes cleaning and maintenance of the second vent 3 easier. Due to the more complex airflow path, dust and impurities are less likely to accumulate, and even if a small amount of dust accumulates, it is more easily discharged through the spiral airflow, reducing cleaning frequency and maintenance costs.

[0047] In the above embodiments, the first vent hole 2 and the second vent hole 3 both include a through hole and a countersunk hole that are interconnected. The through hole is located on the outside of the mold body 1 and is connected to the outer wall of the mold body 1. The countersunk hole is located on the inside of the mold body 1 and is connected to the inner wall of the mold body 1. The diameter of the countersunk hole is larger than the diameter of the through hole.

[0048] Understandably, the countersunk hole design promotes air convection and reduces stress concentration. The countersunk hole's diameter is larger than that of a through hole, reducing airflow resistance when entering or exiting the mold body 1. A larger countersunk hole provides a wider channel for airflow, allowing it to pass more smoothly and improving flow efficiency; it also better disperses airflow, resulting in a more uniform distribution within the mold body 1, helping to reduce localized airflow concentration and avoid pressure fluctuations and energy losses caused by airflow turbulence. Due to the larger diameter of the countersunk hole, stress is more evenly distributed when entering the mold body 1, avoiding stress concentration caused by sharp transitions, thus improving the structural strength of the mold body 1. A larger countersunk hole provides a more stable channel for airflow, reducing vibration and structural damage caused by airflow impact, further extending the service life of the mold body 1; it also reduces airflow impact. Because the airflow has more space when entering the countersunk hole, the possibility of direct airflow impact on the inner wall of the mold body 1 is reduced, thereby reducing noise and vibration caused by airflow impact. Larger countersunk holes can reduce the accumulation of dust and impurities near the vents. Because the airflow has more space in the countersunk holes, dust and impurities are less likely to stay at the vents, thus reducing the risk of dust accumulation and blockage.

[0049] In a preferred embodiment, the hole spacing of two adjacent first vent holes 2 arranged circumferentially along the cylindrical portion 11 is 25 mm, and the vertical hole spacing of two adjacent first vent holes 2 arranged axially along the cylindrical portion 11 is 25 mm.

[0050] It should be noted that the distance between each first vent hole 2 is fixed at 25mm, preventing excessive concentration of airflow in localized areas. This reduces airflow turbulence and excessively high local pressure, resulting in a smoother airflow throughout the cylindrical section 11. The uniformly distributed first vent holes 2 create a stable airflow path, allowing airflow to pass evenly through them in both the circumferential and axial directions. This avoids airflow disturbances caused by uneven spacing between the first vent holes 2, improving airflow stability. The fixed hole spacing standardizes the design and manufacturing of the first vent holes 2, simplifying the manufacturing process, reducing processing errors, and improving production efficiency. In practical applications, the hole diameter and spacing can be adjusted according to the required airflow velocity in different areas to balance the overall flow field velocity uniformity and prevent excessively high local velocities or eddies.

[0051] In the above case, the depth of the countersunk hole of the first vent hole 2 of the cylindrical part 11 is 14mm, the diameter of the through hole of the first vent hole 2 near the port of the cylindrical part 11 is 5.5mm, the diameter of the countersunk hole is 7.9mm, and the diameter of the through hole of the first vent hole 2 at other positions of the cylindrical part 11 is 4.5mm, and the diameter of the countersunk hole is 5.9mm.

[0052] Understandably, the larger size of the first vent 2 near the port (through hole diameter 5.5mm, countersunk hole diameter 7.9mm) provides a larger airflow channel, meeting the higher airflow requirements at the port while ensuring the strength of the cylindrical section 11. In this application, six sets of the first vent 2 with a through hole diameter of 5.5mm and a countersunk hole diameter of 7.9mm are provided, while the smaller size of the first vent 2 at other locations on the cylindrical section 11 (through hole diameter 4.5mm, countersunk hole diameter 5.9mm) reduces the gas flow rate, allowing for more precise control of airflow distribution and ensuring uniform airflow distribution throughout the cylindrical section 11.

[0053] Although the dimensions of the first vent 2 vary, this design still allows for a degree of standardization. For example, vents near the port and those at other locations can be manufactured using standardized designs and processes, simplifying the production process and reducing machining errors. This design also facilitates quality control. During manufacturing, it is easier to check whether the dimensions and positions of the first vent 2 meet design requirements, thus ensuring product quality.

[0054] In the above embodiment, the depth of the countersunk hole of the second vent 3 of the small diameter arc segment 121 and the large diameter arc segment 122 is 14mm, the through hole diameter of the second vent 3 of the small diameter arc segment 121 is 4mm, the countersunk hole diameter is 5.9mm, and the hole spacing of two adjacent second vent holes 3 is 50mm. The through hole diameter of the second vent 3 of the large diameter arc segment 122 is 4mm, the countersunk hole diameter is 5.9mm, and the hole spacing of two adjacent second vent holes 3 is 35mm.

[0055] It should be noted that the second vent 3 of the small-diameter arc segment 121 and the large-diameter arc segment 122 have the same dimensions (through hole diameter 4mm, countersunk hole diameter 5.9mm), but the hole spacing is different. The hole spacing of the small-diameter arc segment 121 is larger (50mm), which is suitable for areas with relatively low airflow demand and can reduce excessive airflow concentration; while the hole spacing of the large-diameter arc segment 122 is smaller (35mm), which is suitable for areas with high airflow demand and can provide a denser airflow channel to ensure more uniform airflow distribution.

[0056] In summary, the quartz crucible melting mold provided by this utility model has cylindrical parts 11 with oblique holes, and the center line of the oblique holes makes an angle of 30 degrees with the vertical line of the inner wall of the cylindrical part 11. This can effectively increase the fluid flow rate, reduce the microbubble residue in the quartz crucible being melted, and improve the melting quality of the quartz crucible.

[0057] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0058] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0059] The above provides a detailed description of a quartz crucible melting mold provided by this utility model. Specific examples have been used to illustrate the principle and implementation of this utility model. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core idea of ​​this utility model. It should be noted that those skilled in the art can make several improvements and modifications to this utility model without departing from the principle of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A quartz crucible melting mold, characterized in that, include: The mold body (1) includes a cylindrical part (11) and an arc-shaped part (12) connected to the bottom of the cylindrical part (11). The cylindrical part (11) has a plurality of inclined first vent holes (2) in the circumferential direction. The center line of the first vent hole (2) makes an angle of 30 degrees with the vertical line of the inner wall of the cylindrical part (11). The arc-shaped part (12) has a plurality of second vent holes (3) perpendicular to its own wall surface.

2. The quartz crucible melt mold according to claim 1, characterized by, At least two sets of the first vent holes (2) are provided along the axial direction of the cylindrical part (11), and a plurality of the first vent holes (2) in each set are arranged in a uniform circumferential direction.

3. The quartz crucible melt mold according to claim 2, characterized by, The two sets of adjacent first vent holes (2) along the axial direction of the cylindrical part (11) are circumferentially offset.

4. The quartz crucible melt mold according to claim 1, characterized by, The arc-shaped part (12) includes a small-diameter arc segment (121) and a large-diameter arc segment (122), wherein the small-diameter arc segment (121) is used to connect the bottom of the cylindrical part (11) with the large-diameter arc segment (122).

5. The quartz crucible melting mold according to claim 4, characterized in that, At least two sets of second vent holes (3) are provided along the axial direction of the small diameter arc segment (121). Several second vent holes (3) in each set are arranged in a uniform circumferential direction, and at least two sets of second vent holes (3) are arranged correspondingly along the axial direction of the small diameter arc segment (121).

6. The quartz crucible melt mold according to claim 5, wherein At least two sets of second vent holes (3) are provided along the axial direction of the large diameter arc segment (122). Several second vent holes (3) in each set are arranged in a uniform circumferential direction. The two sets of adjacent second vent holes (3) are staggered circumferentially along the axial direction of the large diameter arc segment (122).

7. A quartz crucible melt mold according to any one of claims 4 to 6, characterized in that, The first vent (2) and the second vent (3) each include a through hole and a countersunk hole that are interconnected. The through hole is located on the outside of the mold body (1) and is connected to the outer wall of the mold body (1). The countersunk hole is located on the inside of the mold body (1) and is connected to the inner wall of the mold body (1). The diameter of the countersunk hole is larger than the diameter of the through hole.

8. The quartz crucible melt mold according to claim 7, characterized by The hole spacing of two adjacent first vent holes (2) arranged along the circumference of the cylindrical part (11) is 25 mm, and the vertical hole spacing of two adjacent first vent holes (2) arranged along the axial direction of the cylindrical part (11) is 25 mm.

9. The quartz crucible melt mold according to claim 7, characterized by The depth of the countersunk hole of the first vent hole (2) of the cylindrical part (11) is 14 mm. The diameter of the through hole of the first vent hole (2) near the port of the cylindrical part (11) is 5.5 mm, and the diameter of the countersunk hole is 7.9 mm. The diameter of the through hole of the first vent hole (2) at other positions of the cylindrical part (11) is 4.5 mm, and the diameter of the countersunk hole is 5.9 mm.

10. The quartz crucible melt mold according to claim 8, characterized by The depth of the countersunk hole of the second vent (3) of the small diameter arc segment (121) and the large diameter arc segment (122) is 14 mm. The diameter of the through hole of the second vent (3) of the small diameter arc segment (121) is 4 mm. The diameter of the countersunk hole is 5.9 mm. The hole spacing of two adjacent second vents (3) is 50 mm. The diameter of the through hole of the second vent (3) of the large diameter arc segment (122) is 4 mm. The diameter of the countersunk hole is 5.9 mm. The hole spacing of two adjacent second vents (3) is 35 mm.

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