Substrate detection device and system

Abstract

The utility model discloses a substrate detection device and system. The substrate detection device is arranged at a detection station of the bearing mechanism and comprises a camera, first to third reflectors, and first and second light sources; the bearing mechanism is used for bearing a substrate; reflecting surfaces of the first to third reflectors intersect with a first direction, the first direction is perpendicular to a bearing surface of the bearing mechanism, the first reflector is arranged on one side of the bearing mechanism in a second direction, the second direction is perpendicular to the first direction, and the second and third reflectors are respectively arranged on two sides of the bearing mechanism in the first direction; the first light source is used for forming imaging light of the top surface and the bottom surface, the second reflector and the third reflector are respectively used for reflecting the imaging light of the top surface and the bottom surface to the first reflector, the second light source is used for forming imaging light of the side surface, and the first reflector is used for reflecting the imaging light of the side surface, the top surface and the bottom surface to the camera.

Description

Technical Field

[0001] This utility model relates to the field of testing technology. More specifically, it relates to a substrate testing device and system. Background Technology

[0002] In the display panel industry, particularly in the manufacturing of liquid crystal display (LCD) and organic light-emitting diode (OLED) panels, the quality requirements for substrates made of materials such as glass are extremely high. The quality of the substrate's end face directly affects the quality of the display panel; damage to the end face can even lead to the entire substrate shattering. Therefore, the industry uses cameras to inspect the end face of the substrate to determine if it has any defects that could cause problems. The inventors have discovered that current substrate inspection methods suffer from high inspection costs, low inspection efficiency, and large space requirements for the inspection equipment. Utility Model Content

[0003] The purpose of this invention is to provide a substrate testing device and system to solve at least one of the problems existing in the prior art.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] The first aspect of this utility model provides a substrate inspection device, which is disposed at the inspection station of a support mechanism. The substrate inspection device includes: a camera, a first reflector, a second reflector, a third reflector, a first light source, and a second light source.

[0006] The support mechanism is used to support the substrate;

[0007] The reflecting surfaces of the first reflector, the second reflector, and the third reflector are respectively configured to intersect with a first direction, which is perpendicular to the bearing surface of the bearing mechanism. The first reflector is disposed on one side of the bearing mechanism in a second direction, which is perpendicular to the first direction. The second reflector and the third reflector are respectively disposed on both sides of the bearing mechanism in the first direction.

[0008] The first light source emits light onto the top and bottom surfaces of the substrate supported on the support mechanism to form imaging light on the top surface and imaging light on the bottom surface. The second reflector reflects the imaging light from the top surface back to the first reflector. The third reflector reflects the imaging light from the bottom surface back to the first reflector. The second light source emits light onto the side surface of the substrate supported on the support mechanism to form imaging light on the side surface. The first reflector reflects the imaging light from the side surface, the top surface, and the bottom surface back to the camera.

[0009] Alternatively, the carrier mechanism can be a carrier conveying mechanism for carrying and conveying the substrate along a third direction, which is perpendicular to the first direction and the second direction respectively. The first light source is used to emit light onto the top and bottom surfaces of the substrate being conveyed at the inspection station to form imaging light on the top surface and the bottom surface, and the second light source is used to emit light onto the side surfaces of the substrate being conveyed at the inspection station to form imaging light on the side surfaces.

[0010] Alternatively, the angles between the reflecting surfaces of the first, second, and third reflectors and the first direction can be set to 30°-60° respectively.

[0011] Alternatively, the second light source may include a first point light source and a second point light source respectively disposed on both sides of the first reflector in the third direction, wherein the light emission axes of the first point light source and the second point light source intersect the second direction.

[0012] Alternatively, the intersection of the light-emitting axes of the first point light source and the second point light source is located on the extension line of the center of the reflecting surface of the first reflector in the second direction, and the intersection is located on the side of the substrate being transported at the inspection station.

[0013] Alternatively, the orthographic projection of the first reflector onto the first plane may cover the orthographic projections of the second and third reflectors onto the first plane, wherein the first plane is the plane formed by the first direction and the third direction.

[0014] Alternatively, the first, second, and third reflectors may have equal lengths in the third direction.

[0015] Alternatively, the first light source is a surface light source disposed on the side of the first reflector away from the support mechanism, the second reflector is further used to reflect the light emitted from the first light source to the top surface of the substrate supported on the support mechanism to form imaging light on the top surface, and the third reflector is further used to reflect the light emitted from the first light source to the bottom surface of the substrate supported on the support mechanism to form imaging light on the bottom surface.

[0016] Alternatively, the orthographic projection of the first reflector onto the first plane is located within the orthographic projection of the light-emitting surface of the first light source onto the first plane, where the first plane is the plane formed by the first direction and the third direction.

[0017] The second aspect of this utility model provides a substrate inspection system, including a support mechanism and a substrate inspection device provided in the first aspect of this utility model.

[0018] The third aspect of this utility model provides a substrate inspection system, including a support mechanism and two substrate inspection devices provided in the first aspect of this utility model. A first reflector of one substrate inspection device is disposed on a first side of the support mechanism in a second direction, and a first reflector of the other substrate inspection device is disposed on a second side of the support mechanism in a second direction.

[0019] The beneficial effects of this utility model are as follows:

[0020] The substrate inspection device provided by this utility model can simultaneously acquire images of the top, bottom, sides, and corners (including the corners from the top and bottom views) of a substrate by using a camera and three reflectors set up in one inspection station. This effectively improves inspection efficiency, reduces costs, and saves space. Furthermore, the image acquired by the camera simultaneously includes images of the top, bottom, sides, and corners of the substrate, saving computational costs for subsequent execution of defect detection algorithms based on vision inspection technology. Additionally, the supplementary lighting from the first and second light sources ensures effective image acquisition, enhances the contrast between the substrate and the background, makes defects more prominent, and thus improves the accuracy of the defect detection algorithm. Attached Figure Description

[0021] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings.

[0022] Figure 1 The image shows a front view of a detection device for detecting the top, bottom, and side surfaces of a substrate, which is installed at a detection station in a substrate inspection apparatus of the related art.

[0023] Figure 2 This is a front view of a detection device for detecting the corner of a substrate, which is set at another detection station in a substrate inspection apparatus of the related art.

[0024] Figure 3 This is a front view of the substrate testing device provided by the present invention.

[0025] Figure 4 This is a top view of the substrate testing device of the present invention.

[0026] Figure 5 The substrate is shown being transferred to Figure 4 This is a schematic diagram of images continuously captured by the camera at the indicated position. Detailed Implementation

[0027] To more clearly illustrate this utility model, the preferred embodiments and accompanying drawings will be used for further description. Similar components in the drawings are indicated by the same reference numerals. Those skilled in the art should understand that the specific description below is illustrative rather than restrictive and should not be construed as limiting the scope of protection of this utility model.

[0028] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] In this invention, unless otherwise expressly specified and limited, the first feature being "above" or "below" the second feature may include direct contact between the first and second features, or contact between the first and second features not being in direct contact but through another feature between them.

[0030] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0031] For the inspection requirements of the top, bottom, side, and corner surfaces of the substrate, the inspection device in the relevant technology needs to be equipped with a total of three cameras at two inspection stations, as detailed below:

[0032] A first inspection station for inspecting the top, bottom, and side surfaces of a substrate, such as... Figure 1 As shown, the system includes a first camera 101, a second camera 102, a supplementary light source 103, a supplementary light source 104, and a reflector 105. The first camera 101 is used to acquire a first image containing the boundary area between the bottom and side surfaces of the substrate 110 with the cooperation of the reflector 105. The second camera is used to acquire a second image containing the boundary area between the top and side surfaces of the substrate with an oblique viewing axis. Subsequently, a defect detection algorithm based on visual inspection technology detects whether there are defects on the top, bottom, and side surfaces of the substrate based on the first image containing the boundary area between the bottom and side surfaces of the substrate and the second image containing the boundary area between the top and side surfaces of the substrate.

[0033] In the first inspection station, the first camera 101 and the second camera 102 respectively acquire images of the boundary area between two adjacent surfaces. However, because the acquisition angle of these two boundary area images is tilted relative to the top and bottom surfaces of the substrate 110, the corner images of the substrate include corner feature distortion, which cannot clearly reflect the size, shape, and other features of the substrate corners. Therefore, a second inspection station is needed to inspect the substrate corners, such as... Figure 2 As shown, it includes a third camera 106 and a supplementary light source 107. The third camera 106 acquires a third image containing the corner of the substrate (corner of the top view) with a line of sight perpendicular to the top surface of the substrate. Subsequently, a defect detection algorithm based on visual inspection technology detects whether there is a defect at the corner of the substrate based on the third image containing the corner image of the substrate.

[0034] It is evident that the relevant technologies include detection devices with two detection stations and a total of three cameras. These devices are costly, have low detection efficiency, and occupy a large amount of space.

[0035] In view of this, one embodiment of the present invention provides a substrate inspection device. The substrate inspection device is disposed at the inspection station of the support mechanism, and the substrate inspection device includes: a camera, a first reflector, a second reflector, a third reflector, a first light source, and a second light source;

[0036] The support mechanism is used to support the substrate;

[0037] The reflecting surfaces of the first reflector, the second reflector, and the third reflector are respectively configured to intersect with a first direction, which is perpendicular to the bearing surface of the bearing mechanism. The first reflector is disposed on one side of the bearing mechanism in a second direction, which is perpendicular to the first direction. The second reflector and the third reflector are respectively disposed on both sides of the bearing mechanism in the first direction.

[0038] The first light source emits light onto the top and bottom surfaces of the substrate supported on the support mechanism to form imaging light on the top surface and imaging light on the bottom surface. The second reflector reflects the imaging light from the top surface back to the first reflector. The third reflector reflects the imaging light from the bottom surface back to the first reflector. The second light source emits light onto the side surface of the substrate supported on the support mechanism to form imaging light on the side surface. The first reflector reflects the imaging light from the side surface, the top surface, and the bottom surface back to the camera.

[0039] In an optional embodiment, the carrying mechanism is a carrying and conveying mechanism for carrying and conveying the substrate along a third direction, which is perpendicular to the first direction and the second direction respectively. The first light source is used to emit light onto the top and bottom surfaces of the substrate being conveyed at the inspection station to form imaging light on the top surface and the bottom surface. The second light source is used to emit light onto the side surface of the substrate being conveyed at the inspection station to form imaging light on the side surface.

[0040] In a specific example, the substrate inspection device provided in this embodiment, which is set at the inspection station of the carrier conveying mechanism, is as follows: Figure 3 and Figure 4 As shown, the system includes a camera 301, a first reflector 302, a second reflector 303, a third reflector 304, a first light source 305, and a second light source 306. The arrangement of the first reflector 302 is shown in the diagram to avoid obscuring its view. Figure 3 The second light source 306 is not shown in the diagram. Figure 4 Camera 301 is not shown in the image.

[0041] The carrier-transfer mechanism (not shown in the figure) is used to carry and transfer the substrate 310 along a third direction, which is... Figure 3 and Figure 4 The Y direction is shown. During the detection process, the transport mechanism is configured to continuously transport the substrate 310 along the Y direction. The transported substrate 310, for example, along... Figure 4 The movement direction from bottom to top is as follows: from not entering the inspection station, to entering the inspection station and being conveyed within the inspection station, and finally leaving the inspection station. Figure 4 The state shown represents the moment when the carrier conveyor transports the substrate 310 to the center of the inspection station. For example, the conveyor belt of the carrier conveyor transports only the middle area of ​​the substrate 310 and avoids the edge area of ​​the substrate 310, or the carrier conveyor transport includes rollers with a certain gap to prevent the carrier conveyor transport from acquiring substrate images from the substrate inspection device.

[0042] The reflecting surfaces of the first reflector 302, the second reflector 303, and the third reflector 304 are respectively configured to intersect with a first direction, which is perpendicular to the bearing surface of the conveying mechanism. The first direction is... Figure 3 and Figure 4 In the Z direction shown, the bearing surface of the transport mechanism is parallel to the top and bottom surfaces of the substrate 310 laid flat on the transport mechanism. Figure 3 and Figure 4 The XY plane is shown. The first reflector 302 is disposed on one side of the carrying and conveying mechanism in the second direction, which is... Figure 3 and Figure 4In the diagram, the second direction X is perpendicular to the third direction Y and the first direction Z, respectively. The second reflector 303 and the third reflector 304 are respectively disposed on both sides of the conveying mechanism in the first direction Z. For example... Figure 3 As shown, the cross-sections of the second reflector 303 and the third reflector 304 in the XZ plane formed by the first direction Z and the second direction X are right trapezoids, and the surface where the hypotenuse of the right trapezoid is located is the reflecting surface. The second reflector 303 and the third reflector 304 can be referred to as right trapezoidal prisms.

[0043] The first light source 305 emits light onto the top and bottom surfaces of the substrate 310 being transported at the inspection station to form imaging light 3101 on the top surface and imaging light 3103 on the bottom surface. The second reflector 303 reflects the imaging light 3101 on the top surface to the first reflector 302. The third reflector 304 reflects the imaging light 3103 on the bottom surface to the first reflector 302. The second light source 306 emits light onto the side surface of the substrate 310 being transported at the inspection station to form imaging light 3102 on the side surface. The first reflector 302 reflects the imaging light 3102 on the side surface, the imaging light 3101 on the top surface, and the imaging light 3103 on the bottom surface to the camera 301.

[0044] like Figure 3 and Figure 4 As shown, the reflective surfaces of the tilted first reflector 302 are respectively positioned opposite to the reflective surfaces of the second reflector 303 and the third reflector 304. After the carrier conveyor transports the substrate 310 to the inspection station, during the transport process of the substrate 310 within the inspection station, the first light source 305 emits light to the top and bottom surfaces of the substrate 310 to form imaging light 3101 on the top surface and imaging light 3103 on the bottom surface. The second light source 306 emits light to the side surface of the substrate 310 to form imaging light 3102 on the side surface. The second reflector 303 reflects the imaging light 3101 from the top surface to the first reflector 304. The first mirror 302 reflects the imaging light 3101 from the top surface to the camera 301. The third mirror 304 reflects the imaging light 3103 from the bottom surface to the first mirror 302, which then reflects the imaging light 3103 from the bottom surface to the camera 301. The imaging light 3102 from the side surface is directly reflected by the first mirror 302 to the camera 301. Thus, with the cooperation of the first mirror 302, the second mirror 303, and the third mirror 304, the camera 301 can acquire images of the top, bottom, and side surfaces of the substrate 310 that has been transferred to the inspection station.

[0045] Furthermore, after the substrate 310 enters the inspection station and before it leaves the inspection station, the imaging light 3101 on the top surface and the imaging light 3103 on the bottom surface reflect the corner images of the substrate 310 from the top and bottom viewpoints, respectively. Thus, the camera 301 can also acquire images of the corners (including the corners from the top and bottom viewpoints) of the substrate 310 transported to the inspection station in cooperation with the first reflector 302, the second reflector 303, and the third reflector 304.

[0046] By adjusting the angles between the viewing axis of camera 301 and the reflective surfaces of the first reflector 302, the second reflector 303, and the third reflector 304 and the first direction Z, camera 301 can simultaneously acquire substrate images during a single transmission process. These images include a top surface image of substrate 310 acquired from a top-side frontal view, a bottom surface image of substrate 310 acquired from a bottom-side frontal view, a side surface image of substrate 310 acquired from a side-side frontal view, and corner images of substrate 310 acquired from both top-side and bottom-side frontal views. The features in each region of the substrate images are undeformed, especially the corner features in the corner images. This allows for the simultaneous detection of defects on the top, bottom, side, and corner surfaces of substrate 310 at a single inspection station, effectively improving inspection efficiency, reducing costs, and saving space. Furthermore, it can save the computing power cost of subsequent execution of defect detection algorithms based on visual inspection technology. In addition, the supplementary lighting of the first light source 305 and the second light source 306 can ensure the image acquisition effect, improve the contrast between the substrate 310 and the background, make the defects more prominent, and thus improve the accuracy of the defect detection algorithm.

[0047] In an optional embodiment, the angles between the reflecting surfaces of the first mirror, the second mirror, and the third mirror and the first direction are respectively set to 30°-60°.

[0048] Furthermore, the camera's line of sight is set to a first direction, and the angles between the reflecting surfaces of the first, second, and third mirrors and the first direction are each set to 45°.

[0049] For example Figure 3 and Figure 4As shown, the viewing axis of camera 301 is set to the first direction Z, and the angles between the reflecting surfaces of the first reflector 302, the second reflector 303, and the third reflector 304 and the first direction Z are all set to 45°. By configuring the viewing axis of camera 301 and the angles between the reflecting surfaces of the first reflector 302, the second reflector 303, and the third reflector 304 and the first direction Z in this embodiment, camera 301 can simultaneously acquire a substrate image during a single transmission process, including a top surface image of substrate 310 acquired from a top-side frontal view, a bottom surface image of substrate 310 acquired from a bottom-side frontal view, a side surface image of substrate 310 acquired from a side-side frontal view, and corner images of substrate 310 acquired from both top-side and bottom-side frontal views.

[0050] In an optional embodiment, the second light source includes a first point light source and a second point light source respectively disposed on both sides of the first reflector in the third direction, and the light emission axes of the first point light source and the second point light source intersect the second direction.

[0051] For example Figure 4 As shown, the second light source 306 includes a first point light source 3061 and a second point light source 3062 respectively disposed on both sides of the first reflector 302 in the third direction Y. The light emission axes of the first point light source 3061 and the second point light source 3062 intersect the second direction X. For example, the angles between the light emission axes of the first point light source 3061 and the second point light source 3062 and the second direction X are respectively set to 20°-40°. This is beneficial to improving the supplementary lighting effect of the second light source 306 on the side of the substrate 310 and to ensuring that the second light source 306 does not block the imaging light.

[0052] In an optional embodiment, the intersection of the light output axes of the first point light source and the second point light source is located on the extension line of the center of the reflective surface of the first reflector in the second direction, and the intersection is located on the side of the substrate being transported in the inspection station.

[0053] For example Figure 4 As shown, the intersection of the light-emitting axes of the first point light source 3061 and the second point light source 3062 is located on the extension line of the center of the reflecting surface of the first reflector 302 in the second direction X, and the intersection point is located on the side of the substrate 310 being transported at the inspection station. This further enhances the supplementary lighting effect of the second light source 306 on the side of the substrate 310. For example... Figure 4 As shown, the first point light source 3061 and the second point light source 3062 are symmetrically arranged on both sides of the first reflector in the third direction Y. The angle between the first point light source 3061 and the second direction X and the angle between the light output axis of the second point light source 3062 and the second direction X are the same.

[0054] In an optional embodiment, the light-emitting axis of the first point light source, the light-emitting axis of the second point light source, and the center of the reflecting surface of the first reflector are respectively located in a second plane containing the side center of the substrate being transported at the detection station, and the second plane is parallel to the bearing surface.

[0055] For example Figure 3 and Figure 4 As shown, the light-emitting axis of the first point light source 3061, the light-emitting axis of the second point light source 3062, and the center of the reflective surface of the first reflector 302 are respectively located in a second plane containing the center of the side surface of the substrate 310 being transported at the detection station. The second plane parallel to the bearing surface is the XY plane formed by the third direction Y and the second direction X. Therefore, it is more conducive to improving the supplementary lighting effect of the second light source 306 on the side of the substrate 310, and more conducive to the side image of the substrate 310 captured by the camera 301 from a side frontal view.

[0056] In an optional embodiment, the orthographic projection of the first reflector onto the first plane covers the orthographic projections of the second and third reflectors onto the first plane, wherein the first plane is the plane formed by the first direction and the third direction.

[0057] For example Figure 3 and 4 As shown, the orthographic projection of the first reflector 302 onto the first plane covers the orthographic projections of the second reflector 303 and the third reflector 304 onto the first plane, which is the YZ plane formed by the third direction Y and the first direction Z. This ensures that the imaging light 3101 from the top surface, the imaging light 3103 from the bottom surface, and the imaging light 3102 from the side surface can be reflected by the first reflector 302 to the camera 301, avoiding imaging light loss.

[0058] In an optional embodiment, the first reflector, the second reflector, and the third reflector have equal lengths in the third direction.

[0059] For example Figure 4 As shown, the first reflector 302, the second reflector 303, and the third reflector 304 have equal lengths in the third direction Y. This facilitates the camera 301 in continuously acquiring data from the acquisition area of ​​the substrate 310 during transmission. Figure 3 and Figure 4 A complete image of the left side region of substrate 310 shown.

[0060] In an optional embodiment, the first light source is a surface light source disposed on the side of the first reflector away from the support mechanism, the second reflector is further used to reflect the light emitted from the first light source to the top surface of the substrate supported on the support mechanism to form imaging light on the top surface, and the third reflector is further used to reflect the light emitted from the first light source to the bottom surface of the substrate supported on the support mechanism to form imaging light on the bottom surface.

[0061] For example Figure 3 and Figure 4 As shown, the first light source 305 is a surface light source disposed on the side of the first reflector 302 away from the carrier conveying mechanism (the side away from the carrier conveying mechanism in the second direction X). The second reflector 303 is also used to reflect the light emitted from the first light source 305 onto the top surface of the substrate 310 being conveyed at the inspection station to form the top surface imaging light 3101. The third reflector 304 is also used to reflect the light emitted from the first light source 305 onto the bottom surface of the substrate 310 being conveyed at the inspection station to form the bottom surface imaging light 3103. This improves the supplementary lighting effect of the first light source 305 on the top and bottom surfaces of the substrate 310.

[0062] In an optional embodiment, the orthographic projection of the first reflector onto the first plane is located within the orthographic projection of the light-emitting surface of the first light source onto the first plane, wherein the first plane is the plane formed by the first direction and the third direction.

[0063] For example Figure 3 and Figure 4 As shown, the orthographic projection of the first reflector 302 onto the first plane lies within the orthographic projection of the light-emitting surface of the first light source 305, which is a surface light source, onto the first plane. The first plane is the YZ plane formed by the third direction Y and the first direction Z. This is beneficial for improving the supplementary lighting effect of the first light source 305 on the top and bottom surfaces of the substrate 310.

[0064] In the substrate inspection device provided in this embodiment, the camera 301 starts acquiring data when the substrate 310 is about to be conveyed to the inspection station, and continues to acquire data until the substrate 310 is conveyed to the inspection station. Figure 3 and 4 The substrate image obtained when the substrate is located at the center of the inspection station is shown below. Figure 5 As shown, Figure 5 The left side of the substrate image shown contains a top image and a corner image captured from a top-view perspective, the middle side image contains a side image captured from a side-view perspective, and the right side image contains a bottom image and a corner image captured from a bottom-view perspective.

[0065] Another embodiment of this utility model provides a substrate inspection system, including a support mechanism and a substrate inspection device provided in the above embodiment. For example Figure 3 and Figure 4As shown, this substrate inspection system, for example, with a carrier transport mechanism as the carrier mechanism, can acquire a substrate image of the left side region of the substrate 310 and inspect the top surface, bottom surface, side surface, and corner of the left side region of the substrate 310. Additionally, after the first inspection, the substrate 310 can be rotated 180° around the first direction Z and retransmitted to the inspection station for inspection once more, thereby inspecting the top surface, bottom surface, side surface, and corner of the right side region of the substrate 310.

[0066] Another embodiment of this utility model provides a substrate inspection system, including a carrier mechanism and two substrate inspection devices provided in the above embodiments. A first reflector of one substrate inspection device is disposed on a first side of the carrier mechanism in a second direction, and a first reflector of the other substrate inspection device is disposed on a second side of the carrier conveying mechanism in the second direction. For example, in a substrate inspection system where the carrier mechanism is a carrier conveying mechanism, one substrate inspection device is... Figure 3 and Figure 4 As shown, a substrate inspection device is located on the left side of the carrier conveying mechanism to inspect the top surface, bottom surface, side surface, and corner of the right side region of the substrate 310. Another substrate inspection device is located on the right side of the carrier conveying mechanism to inspect the top surface, bottom surface, side surface, and corner of the right side region of the substrate 310. In this way, the top surface, bottom surface, side surface, and corner (four corners) of the left and right sides of the substrate 310 can be inspected simultaneously during one conveying process.

[0067] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. All obvious variations or modifications derived from the technical solutions of this utility model are still within the protection scope of this utility model.

Claims

1. A substrate detecting apparatus characterized by comprising: The substrate testing device, located at the testing station of the support mechanism, includes: a camera, a first reflector, a second reflector, a third reflector, a first light source, and a second light source. The support mechanism is used to support the substrate; The reflecting surfaces of the first reflector, the second reflector, and the third reflector are respectively configured to intersect with a first direction, which is perpendicular to the bearing surface of the bearing mechanism. The first reflector is disposed on one side of the bearing mechanism in a second direction, which is perpendicular to the first direction. The second reflector and the third reflector are respectively disposed on both sides of the bearing mechanism in the first direction. The first light source emits light onto the top and bottom surfaces of the substrate supported on the support mechanism to form imaging light on the top surface and imaging light on the bottom surface. The second reflector reflects the imaging light from the top surface back to the first reflector. The third reflector reflects the imaging light from the bottom surface back to the first reflector. The second light source emits light onto the side surface of the substrate supported on the support mechanism to form imaging light on the side surface. The first reflector reflects the imaging light from the side surface, the top surface, and the bottom surface back to the camera.

2. The apparatus of claim 1, wherein, The carrying mechanism is a carrying and conveying mechanism used to carry and convey the substrate along a third direction, which is perpendicular to the first direction and the second direction respectively. The first light source is used to emit light to the top and bottom surfaces of the substrate being conveyed at the inspection station to form imaging light on the top surface and the bottom surface. The second light source is used to emit light to the side surface of the substrate being conveyed at the inspection station to form imaging light on the side surface.

3. The apparatus of claim 1 or 2, wherein, The angles between the reflecting surfaces of the first, second, and third reflectors and the first direction are respectively set to 30°-60°.

4. The apparatus of claim 2, wherein, The second light source includes a first point light source and a second point light source respectively disposed on both sides of the first reflector in the third direction, and the light output axes of the first point light source and the second point light source intersect the second direction respectively.

5. The apparatus of claim 4, wherein, The intersection of the light output axes of the first point light source and the second point light source is located on the extension line of the center of the reflective surface of the first reflector in the second direction, and the intersection is located on the side of the substrate being transported in the inspection station.

6. The apparatus of claim 2, wherein, The orthographic projection of the first reflector onto the first plane covers the orthographic projections of the second and third reflectors onto the first plane, where the first plane is the plane formed by the first direction and the third direction.

7. The apparatus of claim 2, wherein, The first reflector, the second reflector, and the third reflector have equal lengths in the third direction.

8. The apparatus of claim 6, wherein, The first light source is a surface light source disposed on the side of the first reflector away from the support mechanism. The second reflector is also used to reflect the light emitted from the first light source to the top surface of the substrate supported on the support mechanism to form imaging light on the top surface. The third reflector is also used to reflect the light emitted from the first light source to the bottom surface of the substrate supported on the support mechanism to form imaging light on the bottom surface.

9. The apparatus of claim 8, wherein, The orthographic projection of the first reflector onto the first plane lies within the orthographic projection of the light-emitting surface of the first light source onto the first plane, where the first plane is the plane formed by the first direction and the third direction.

10. A substrate inspection system, characterized by, It includes a support mechanism and a substrate testing device as described in any one of claims 1-9.

11. A substrate inspection system, characterized by, The device includes a support mechanism and two substrate detection devices as described in any one of claims 1-9, wherein a first reflector of one substrate detection device is disposed on a first side of the support mechanism in a second direction, and a first reflector of the other substrate detection device is disposed on a second side of the support mechanism in a second direction.

Images