Cooling drainage device

Abstract

The utility model discloses a cooling drainage device, which relates to the technical field of semiconductor processing and comprises a main body mechanism, a recovery mechanism is arranged on the bottom surface of the main body mechanism, and a cleaning mechanism is arranged in the recovery mechanism. By arranging the main body mechanism composed of the box body, the water inlet, the insertion hole, the sealing cover, the insertion block, the placement drawer, the placement groove, the leakage hole, the pull rod and the supporting feet, a semiconductor needing to be processed can be cooled, when the semiconductor needs to be used, a user only needs to lift a handle on the sealing cover upwards, then the insertion block is pulled out of the insertion hole, and the semiconductor can be cooled. A semiconductor to be processed is placed in the placing groove, then the sealing cover is reset, cold water is added into the box body through the water inlet, the semiconductor placed in the placing groove can be cooled, and after cooling is completed, the pull rod can be pulled to enable the placing drawer fixedly connected with the pull rod to be pulled out of the pull-out groove. And then the cooled semiconductor is taken out of the placing groove.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and specifically to a cooling drainage device. Background Technology

[0002] A cooling drainage system for semiconductor processing is a device specifically designed for semiconductor processing. It is used to cool semiconductor processing equipment and, when necessary, drain water from the cooling system.

[0003] Patent publication number CN 214701445 U discloses a cooling device for semiconductor manufacturing and processing, including a cooling box. Two U-shaped plates are fixedly connected to both sides of the inner wall of the cooling box. A support plate is slidably connected between the four U-shaped plates. A baffle is movably engaged between the four U-shaped plates. Two collars are fixedly connected to both sides of the top of the support plate. Connecting ropes are fixedly connected to the outer walls of the four collars. Vertical plates are symmetrically fixedly connected to both sides of the top of the support plate. A handle is fixedly connected to the top of the vertical plates.

[0004] To address the issue that semiconductors need to be in contact with cold water to conduct heat from the semiconductor body to the water during cooling, thus reducing their own heat, but semiconductors tend to float, leading to poor cooling efficiency, existing technologies use a combination of a support plate and baffles to place the semiconductor in a cooling tank for cooling. The baffles limit the semiconductor's movement to prevent it from floating, thereby improving the cooling effect. However, this approach still suffers from the problem that, due to the strong adhesive properties of chemicals used in semiconductor processing, these chemicals may remain on the semiconductor surface. When cold water is recycled, they can easily stick to the filter screen, causing clogging and reducing the device's usability. Utility Model Content

[0005] The purpose of this invention is to provide a cooling drainage device to solve the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0007] A cooling drainage device includes a main body, a recycling mechanism on the bottom surface of the main body, and a cleaning mechanism inside the recycling mechanism.

[0008] The main structure includes a box, four supporting feet are fixedly connected to the bottom corner of the box, a water inlet is fixedly connected to the side of the box and the water inlet is connected to the box, and an insertion hole is opened at the top corner of the box, a plug is inserted into the insertion hole, and a sealing cover is fixedly connected to the top of the plug.

[0009] A further improvement of this utility model is that: a pull-out groove is provided on the surface of the box body, a drawer is slidably connected in the pull-out groove on the surface of the box body, a placement groove is provided inside the placement drawer, a plurality of drainage holes are provided on the bottom surface of the placement drawer, the drainage holes are connected to the placement groove, and a pull rod is fixedly connected to the surface of the placement drawer.

[0010] A further improvement of the present invention is that the recycling mechanism includes a conical sleeve, a mounting frame, and a plug-in groove. The mounting frame is fixedly installed on the bottom surface of the box. Four plug-in fixing blocks are fixedly installed at the corner of the bottom surface of the mounting frame. Limiting holes are provided on the side of the plug-in fixing blocks.

[0011] A further improvement of the present invention is that: the plug-in fixing block is plugged into the plug-in groove, the plug-in groove is opened at the top corner of the conical sleeve, a water outlet pipe is fixedly installed on the bottom surface of the conical sleeve, and a solenoid valve is provided in the middle of the water outlet pipe.

[0012] A further improvement of this utility model is that: a limiting groove is formed on the inner wall of the insertion groove, a sliding groove is formed on the outer side of the limiting groove, a damping rod is fixedly connected to the bottom of the limiting groove, a spring is sleeved on the outer wall of the damping rod, a limiting rod is fixedly connected to one end of the damping rod, the limiting rod is inserted into the limiting insertion hole, a slider is fixedly connected to the outer wall of the outer side of the limiting rod, and the slider is slidably connected to the sliding groove.

[0013] A further improvement of the present invention is that the cleaning mechanism includes a connecting rod and a motor. The motor is fixedly installed on the side of the conical sleeve. The output shaft of the motor passes through the side wall of the conical sleeve and is rotatably connected to the side wall of the conical sleeve. A screw is fixedly connected to the output shaft of the motor, and a brush is threadedly connected to the outer wall of the screw.

[0014] A further improvement of this utility model is that: the other end of the brush is slidably connected to the connecting rod, the connecting rod is fixedly connected to the inner wall of the conical sleeve, and a filter plate is provided below the brush, the filter plate being fixedly installed on the inner wall of the conical sleeve.

[0015] Due to the adoption of the above technical solution, the technological progress achieved by this utility model compared to the prior art is as follows:

[0016] 1. This utility model provides a cooling and drainage device. By setting up a main structure consisting of a box, water inlet, insertion hole, sealing cover, insertion block, placement drawer, placement slot, drain hole, pull rod, and support foot, it can cool the semiconductor to be processed. When needed, simply pull up the handle on the sealing cover, then pull the insertion block out of the insertion hole, then place the semiconductor to be processed in the placement slot, then reset the sealing cover, and then add cold water to the box through the water inlet to cool the semiconductor placed in the placement slot. After cooling is complete, pull the pull rod to pull out the placement drawer fixedly connected to the pull rod from the pull slot, and then take out the cooled semiconductor from the placement slot.

[0017] 2. This utility model provides a cooling drainage device. By setting up a recycling mechanism consisting of a conical sleeve, a water outlet pipe, a solenoid valve, a plug groove, a sliding groove, a limiting groove, a damping rod, a spring, a limiting rod, a slider, a plug-in fixing block, a mounting frame, and a limiting insertion hole, and a cleaning mechanism consisting of a filter plate, a brush, a connecting rod, a screw, and a motor, it can clean semiconductor processing residues adhering to the filter plate, preventing clogging during cold water recycling. When needed, simply start the motor; the motor's output shaft drives the screw to rotate, causing one end of the brush, threadedly connected to the screw, to move on the screw while the other end slides on the connecting rod, thus cleaning the filter plate of any adhering substances. When cleaning the inside of the conical sleeve, simply pull the slider, causing it to slide inward in the sliding groove. This pushes the limiting rod inward, retracting the damping rod, compressing the spring, and disengaging the limiting rod from the limiting insertion hole. This separates the plug-in fixing block from the plug groove, allowing the conical sleeve to be removed for cleaning. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0019] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0020] Figure 3 This is an exploded structural diagram of the main body of this utility model;

[0021] Figure 4 This is a schematic diagram of the explosion structure of the recycling mechanism of this utility model;

[0022] Figure 5 This is a schematic diagram of the cleaning mechanism of this utility model.

[0023] In the diagram: 1. Main body; 11. Box body; 12. Water inlet; 13. Insertion hole; 14. Sealing cover; 15. Insertion block; 16. Drawer; 17. Placement slot; 18. Leakage hole; 19. Pull rod; 110. Support foot; 2. Recycling mechanism; 21. Conical sleeve; 22. Water outlet pipe; 23. Solenoid valve; 24. Insertion slot; 25. Slide groove; 26. Limiting slot; 27. Damping rod; 28. Spring; 29. ​​Limiting rod; 210. Slider; 211. Insertion fixing block; 212. Mounting frame; 213. Limiting insertion hole; 3. Cleaning mechanism; 31. Filter plate; 32. Brush; 33. Connecting rod; 34. Screw; 35. Motor. Detailed Implementation

[0024] The present invention will be further described in detail below with reference to embodiments:

[0025] Example 1

[0026] like Figure 1-5 As shown, this utility model provides a cooling drainage device, including a main body 1, a recycling mechanism 2 on the bottom surface of the main body 1, a cleaning mechanism 3 inside the recycling mechanism 2, a box 11, four supporting feet 110 fixedly connected to the corner of the bottom surface of the box 11, a water inlet 12 fixedly connected to the side of the box 11, the water inlet 12 communicating with the box 11, an insertion hole 13 opened at the corner of the top surface of the box 11, an insertion block 15 inserted into the insertion hole 13, a sealing cover 14 fixedly connected to the top surface of the insertion block 15, a pull groove opened on the surface of the box 11, a drawer 16 slidably connected in the pull groove opened on the surface of the box 11, a placement groove 17 provided inside the drawer 16, a plurality of drainage holes 18 opened on the bottom surface of the drawer 16, the drainage holes 18 communicating with the placement groove 17, and a pull rod 19 fixedly connected to the surface of the drawer 16.

[0027] In this embodiment, by setting up a main body mechanism 1 consisting of a housing 11, a water inlet 12, a socket 13, a sealing cover 14, a plug 15, a placement drawer 16, a placement slot 17, a drain hole 18, a pull rod 19, and a support foot 110, the semiconductor to be processed can be cooled. When needed, simply pull up the handle on the sealing cover 14, then pull the plug 15 out of the socket 13, place the semiconductor to be processed in the placement slot 17, then reset the sealing cover 14, and then add cold water to the housing 11 through the water inlet 12 to cool the semiconductor placed in the placement slot 17. After cooling is complete, pull the pull rod 19 to pull out the placement drawer 16, which is fixedly connected to the pull rod 19, from the pull slot, and then take out the cooled semiconductor from the placement slot 17.

[0028] Example 2

[0029] like Figure 1-5 As shown, based on Embodiment 1, this utility model provides a technical solution: Preferably, the recycling mechanism 2 includes a conical sleeve 21, a mounting frame 212, and an insertion groove 24. The mounting frame 212 is fixedly installed on the bottom surface of the box 11. Four insertion fixing blocks 211 are fixedly installed at the corner of the bottom surface of the mounting frame 212. Limiting insertion holes 213 are opened on the side of the insertion fixing blocks 211. The insertion fixing blocks 211 are inserted into the insertion groove 24. The insertion groove 24 is opened at the corner of the top surface of the conical sleeve 21. A water outlet pipe 22 is fixedly installed on the bottom surface of the conical sleeve 21. A solenoid valve 23 is provided in the middle of the water outlet pipe 22. A limiting groove 26 is opened on the inner wall of the insertion groove 24. A sliding groove 25 is opened on the outer side of the limiting groove 26. A damping rod 27 is fixedly connected to the bottom of the limiting groove 26. The outer wall of the damping rod 27... A spring 28 is sleeved on the sleeve. One end of the damping rod 27 is fixedly connected to a limiting rod 29. The limiting rod 29 is inserted into the limiting hole 213. A slider 210 is fixedly connected to the outer wall of the outer side of the limiting rod 29. The slider 210 is slidably connected to the slide groove 25. The cleaning mechanism 3 includes a connecting rod 33 and a motor 35. The motor 35 is fixedly installed on the side of the conical sleeve 21. The output shaft of the motor 35 passes through the side wall of the conical sleeve 21 and is rotatably connected to the side wall of the conical sleeve 21. The output shaft of the motor 35 is fixedly connected to a screw 34. A brush 32 is threadedly connected to the outer wall of the screw 34. The other end of the brush 32 is slidably connected to the connecting rod 33. The connecting rod 33 is fixedly connected to the inner wall of the conical sleeve 21. A filter plate 31 is provided below the brush 32. The filter plate 31 is fixedly installed on the inner wall of the conical sleeve 21.

[0030] In this implementation, by setting up a recycling mechanism 2 consisting of a conical sleeve 21, a water outlet pipe 22, a solenoid valve 23, a plug-in groove 24, a slide groove 25, a limiting groove 26, a damping rod 27, a spring 28, a limiting rod 29, a slider 210, a plug-in fixing block 211, a mounting frame 212, and a limiting insertion hole 213, and a cleaning mechanism 3 consisting of a filter plate 31, a brush 32, a connecting rod 33, a screw 34, and a motor 35, semiconductor processing residues adhering to the filter plate 31 can be cleaned, preventing the filter plate 31 from becoming clogged during cold water recycling. When needed, only the motor 35 needs to be started, and the output of the motor 35... The shaft drives the screw 34 to rotate, which in turn causes one end of the brush 32, which is threadedly connected to the screw 34, to move on the screw 34 and the other end to slide on the connecting rod 33. This allows the filter plate 31 to be cleaned to prevent the sticky substances from adhering. When it is necessary to clean the inside of the conical sleeve 21, simply pull the slider 210 to make the slider 210 slide inward in the slide groove 25. This causes the limiting rod 29 to push the damping rod 27 inward to retract, which in turn compresses the spring 28. This causes the limiting rod 29 to disengage from the limiting insertion hole 213, which in turn separates the insertion fixing block 211 from the insertion groove 24. This allows the conical sleeve 21 to be removed for cleaning.

[0031] The working principle of this cooling and drainage device will be explained in detail below.

[0032] like Figure 1-5 As shown, in use, first pull up the handle on the sealing cover 14, then pull the insert 15 out of the insertion hole 13, then place the semiconductor to be processed in the placement slot 17, then reset the sealing cover 14, and then add cold water to the housing 11 through the water inlet 12 to cool the semiconductor placed in the placement slot 17. After cooling, pull the lever 19 to pull out the placement drawer 16 fixedly connected to the lever 19 from the pull slot, then remove the cooled semiconductor from the placement slot 17, and then start the motor 35. The output shaft of the motor 35 drives the screw 34 to rotate. This allows the brush 32, which is threadedly connected to the screw 34, to move on the screw 34 at one end and slide on the connecting rod 33 at the other end, thus cleaning the filter plate 31 to prevent the sticky substances from adhering. When it is necessary to clean the inside of the conical sleeve 21, simply pull the slider 210 to make the slider 210 slide inward in the slide groove 25, thereby causing the limiting rod 29 to push the damping rod 27 inward to retract, thereby compressing the spring 28, thereby causing the limiting rod 29 to disengage from the limiting insertion hole 213, thereby separating the insertion fixing block 211 from the insertion groove 24, and thus the conical sleeve 21 can be removed for cleaning.

[0033] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the protection scope of the present invention.

Claims

1. Cooling water draining device comprising a body mechanism (1), characterized in that: The bottom surface of the main body (1) is provided with a recycling mechanism (2), and the inside of the recycling mechanism (2) is provided with a cleaning mechanism (3). The main body (1) includes a box (11), four supporting feet (110) are fixedly connected to the bottom corner of the box (11), a water inlet (12) is fixedly connected to the side of the box (11), the water inlet (12) is connected to the box (11), and an insertion hole (13) is opened at the top corner of the box (11). A plug (15) is inserted into the insertion hole (13), and a sealing cover (14) is fixedly connected to the top surface of the plug (15).

2. A cooling water draining device according to claim 1, characterized in that: The surface of the box (11) is provided with a pull-out groove, and a drawer (16) is slidably connected in the pull-out groove on the surface of the box (11). The interior of the drawer (16) is provided with a placement groove (17). The bottom surface of the drawer (16) is provided with multiple drainage holes (18), which are connected to the placement groove (17). A pull rod (19) is fixedly connected to the surface of the drawer (16).

3. A cooling water drainage device according to claim 2, characterised in that: The recycling mechanism (2) includes a conical sleeve (21), a mounting frame (212), and a plug-in groove (24). The mounting frame (212) is fixedly installed on the bottom surface of the box (11). Four plug-in fixing blocks (211) are fixedly installed at the corner of the bottom surface of the mounting frame (212). Limiting holes (213) are opened on the side of the plug-in fixing blocks (211).

4. A cooling water drainage device according to claim 3, wherein: The plug-in fixing block (211) is plugged into the plug-in groove (24), the plug-in groove (24) is opened at the top corner of the conical sleeve (21), the bottom surface of the conical sleeve (21) is fixedly installed with a water outlet pipe (22), and a solenoid valve (23) is provided in the middle of the water outlet pipe (22).

5. A cooling water drainage device according to claim 4, characterised in that: The inner wall of the insertion slot (24) is provided with a limiting groove (26), and the limiting groove (26) is provided with a sliding groove (25) on the outer side. A damping rod (27) is fixedly connected to the bottom of the limiting groove (26), and a spring (28) is sleeved on the outer wall of the damping rod (27). A limiting rod (29) is fixedly connected to one end of the damping rod (27), and the limiting rod (29) is inserted into the limiting insertion hole (213). A slider (210) is fixedly connected to the outer wall of the limiting rod (29) on the outer side, and the slider (210) is slidably connected to the sliding groove (25).

6. A cooling water drainage device according to claim 5, wherein: The cleaning mechanism (3) includes a connecting rod (33) and a motor (35). The motor (35) is fixedly installed on the side of the conical sleeve (21). The output shaft of the motor (35) passes through the side wall of the conical sleeve (21) and is rotatably connected to the side wall of the conical sleeve (21). The output shaft of the motor (35) is fixedly connected to a screw (34). A brush (32) is threadedly connected to the outer wall of the screw (34).

7. A cooling water drainage device according to claim 6, characterised in that: The other end of the brush (32) is in sliding connection with a connecting rod (33), the connecting rod (33) is in fixed connection with the inner wall of the conical sleeve (21), and the lower portion of the brush (32) is provided with a filter plate (31), and the filter plate (31) is fixedly installed on the inner wall of the conical sleeve (21).

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