Silicon wafer anti-adhesion cleaning flower basket

Abstract

The utility model relates to the technical field of silicon wafer cleaning baskets, in particular to a silicon wafer anti-adhesion cleaning basket which comprises two side plates, two transverse rods, a bottom rod and a top rod, the two side plates are oppositely arranged in parallel, the transverse rods are connected between the two side plates, the two transverse rods are symmetrically arranged on the two opposite sides of the side plates respectively, and the bottom rod is connected with the bottom rod. The bottom rod is connected between the two side plates, the cross rod and the bottom rod are arranged in parallel, the bottom rod is located below the cross rod, the top rod is fixedly connected with inserting plates, the two ends of the top rod are each provided with one inserting plate, the top rod and the inserting plates are arranged perpendicular to each other, and the side plates are provided with inserting grooves allowing the inserting plates to be inserted therein. The side plates are provided with locking assemblies used for rapidly locking the inserting plates, a plurality of first separation teeth are arranged on the transverse rods and the bottom rods at equal intervals, and a plurality of second separation teeth corresponding to the first separation teeth are arranged on the top rods at equal intervals. According to the invention, the connection of the upper toothed bar is convenient and stable, and the effect that adjacent silicon wafers are not adhered is ensured.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer cleaning basket technology, and in particular to a silicon wafer anti-adhesion cleaning basket. Background Technology

[0002] In semiconductor device manufacturing, silicon wafers must undergo rigorous cleaning because even trace amounts of contamination can lead to device failure. The purpose of cleaning is to remove surface contaminants, including both organic and inorganic substances. There are two methods for removing contaminants: physical cleaning and chemical cleaning.

[0003] When cleaning silicon wafers, using a silicon wafer cleaning basket is beneficial not only because the chemical agents are corrosive, but also because the slots in the cleaning basket help to evenly separate the silicon wafers, preventing them from sticking together and affecting the cleaning effect.

[0004] In addition, to prevent the upper part of the silicon wafers from deforming and sticking together during the cleaning process, existing silicon wafer cleaning baskets have an upper toothed bar at the top of the basket. To fix the upper toothed bar, it is generally inserted into the slots of the two side plates and the two are connected by an interference fit, thereby fixing the upper toothed bar to the side plates. However, fixing the top toothed bar with an interference fit has problems such as difficult installation and easy damage to the silicon wafers. The interference fit requires precise operation, and improper operation may cause deformation of the toothed bar or side plates. Moreover, it is easy to wear during frequent disassembly and assembly, affecting stability and causing the silicon wafers to stick together. Utility Model Content

[0005] In order to make the upper toothed rod connection convenient and stable, and to ensure that adjacent silicon wafers do not stick together, this application provides a cleaning basket for preventing silicon wafers from sticking together.

[0006] The cleaning basket for preventing silicon wafer adhesion provided in this application adopts the following technical solution:

[0007] A cleaning basket for preventing silicon wafer adhesion includes side plates, crossbars, a bottom bar, and a top bar. Two side plates are provided, arranged parallel to each other. Two crossbars are connected between the two side plates, symmetrically arranged on opposite sides of each side plate. The bottom bar is connected between the two side plates, with the crossbar and bottom bar parallel to each other and located below the crossbars. A plug-in plate is fixedly connected to the top bar, with one plug-in plate at each end of the top bar. The top bar and plug-in plate are perpendicular to each other. The side plates have plug-in slots for inserting the plug-in plates and locking components for quickly locking the plug-in plates. The crossbars and bottom bar each have a plurality of first separating teeth arranged at equal intervals, and the top bar has a plurality of second separating teeth arranged at equal intervals corresponding to the first separating teeth.

[0008] Preferably, the locking assembly includes a fixed cylinder, a cylinder cover, a locking rod, a sliding plate, and a spring. The fixed cylinder is fixedly connected to the side plate and is arranged in a direction perpendicular to the side plate. The fixed cylinder is provided on each of the two side plates. The cylinder cover is connected to the opening of the fixed cylinder. The locking rod passes through the cylinder cover, the fixed cylinder, and the side plate in sequence. The cylinder cover, the fixed cylinder, and the side plate are all provided with through holes for the locking rod to pass through. The plug-in plate is provided with locking holes for the locking rod to enter. The axis of the locking rod is collinear with the axis of the fixed cylinder. The sliding plate is fixedly connected to the rod body of the locking rod located inside the fixed cylinder. The side wall of the sliding plate slides against the inner wall of the fixed cylinder. The spring is sleeved on the rod body of the locking rod located inside the fixed cylinder. One end of the spring abuts against the sliding plate, and the other end abuts against the cylinder cover.

[0009] Preferably, a lever is connected to the locking rod, and the lever is located at the end of the locking rod that does not penetrate the fixing cylinder.

[0010] Preferably, the locking rod is provided with a chamfer, which is located at the end of the locking rod that passes through the locking hole.

[0011] Preferably, the insertion slot is provided with a guide surface, which is chamfered at 45° at the entrance of the insertion slot.

[0012] Preferably, the length of the plug plate is greater than twice the length of the second separator tooth.

[0013] In summary, this application includes the following beneficial technical effects:

[0014] 1. The cleaning basket for preventing silicon wafers from sticking provided by this utility model adopts a spring-driven locking rod in conjunction with a plug-in plate, replacing the traditional interference fit. After the plug-in plate is inserted, the spring automatically pushes the locking rod through the locking hole on the plug-in plate to achieve quick fixation without the need for precise alignment or excessive external force, simplifying the installation process. This achieves the effect of making the upper toothed rod connection convenient and stable, ensuring that adjacent silicon wafers do not stick together.

[0015] 2. The cleaning basket for preventing silicon wafer sticking provided by this utility model has a chamfered design at the end of the locking rod to facilitate automatic guidance when inserted into the locking hole and reduce jamming; the lever provides a manual operation fulcrum, and the disassembly can be unlocked by simply pulling the lever to compress the spring. The operation is simple and does not require special tools, making it suitable for cleaning scenarios with frequent disassembly and assembly.

[0016] 3. The cleaning basket for preventing silicon wafer adhesion provided by this utility model has a 45° guide surface at the entrance of the insertion slot that can guide the insertion plate to quickly enter the insertion slot, which is beneficial to improving the installation efficiency of the top rod.

[0017] 4. The cleaning basket for preventing silicon wafers from sticking provided by this utility model has a plug-in plate length greater than twice the length of the second dividing tooth, ensuring that the second dividing tooth on the top rod will not contact the silicon wafer prematurely during the plug-in process, thus avoiding damage to the silicon wafer due to vibration when the second dividing tooth contacts the silicon wafer during plug-in. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the cleaning basket for preventing silicon wafer adhesion in the embodiments of this application;

[0019] Figure 2 yes Figure 1 Enlarged view of point A in the middle;

[0020] Figure 3 This is a schematic diagram illustrating the locking component in an embodiment of this application.

[0021] Explanation of reference numerals in the attached drawings: 1. Side plate; 11. Guide surface; 2. Crossbar; 3. Bottom bar; 4. Top bar; 41. Insert plate; 5. Locking assembly; 51. Fixing cylinder; 52. Cylinder cover; 53. Locking rod; 531. Toggle block; 54. Slide plate; 55. Spring; 6. First separating tooth; 7. Second separating tooth. Detailed Implementation

[0022] To enable those skilled in the art to better understand the present invention, the solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0023] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation or specific orientation structure and operation, and therefore should not be construed as a limitation of this utility model; the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In addition, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0024] This application discloses a cleaning basket for preventing silicon wafers from sticking together. (See also...) Figure 1 , Figure 2 and Figure 3 The cleaning basket for preventing silicon wafer adhesion includes a side plate 1, a crossbar 2, a bottom bar 3, and a top bar 4. Two side plates 1 are provided, arranged parallel to each other. A crossbar 2 connects the two side plates 1, with two crossbars symmetrically arranged on opposite sides of each side plate 1. The bottom bar 3 connects the two side plates 1, with the crossbar 2 and bottom bar 3 arranged parallel to each other, and the bottom bar 3 located below the crossbar 2. A plug-in plate 41 is fixedly connected to the top bar 4, with one plug-in plate 41 at each end of the top bar 4. The top bar 4 and the plug-in plate 41 are arranged perpendicular to each other. A plug-in slot for inserting the plug-in plate 41 is provided on the side plate 1. A locking assembly 5 for quickly locking the plug-in plate 41 is provided on the side plate 1. Several first separating teeth 6 are equidistantly arranged on the crossbar 2 and the bottom bar 3, and several second separating teeth 7 are equidistantly arranged on the top bar 4 corresponding to the first separating teeth 6.

[0025] The locking assembly 5 includes a fixed cylinder 51, a cylinder cover 52, a locking rod 53, a sliding plate 54, and a spring 55. The fixed cylinder 51 is fixedly connected to the side plate 1 and is arranged in a direction perpendicular to the side plate 1. The fixed cylinder 51 is provided on each of the two side plates 1. The cylinder cover 52 is connected to the opening of the fixed cylinder 51. The locking rod 53 passes through the cylinder cover 52, the fixed cylinder 51, and the side plate 1 in sequence. The cylinder cover 52, the fixed cylinder 51, and the side plate 1 are all provided with through holes for the locking rod 53 to pass through. The plug plate 41 is provided with locking holes for the locking rod 53 to pass into. The axis of the locking rod 53 is collinear with the axis of the fixed cylinder 51. The sliding plate 54 is fixedly connected to the rod of the locking rod 53 located inside the fixed cylinder 51. The side wall of the sliding plate 54 slides against the inner wall of the fixed cylinder 51. The spring 55 is sleeved on the rod of the locking rod 53 located inside the fixed cylinder 51. One end of the spring 55 abuts against the sliding plate 54, and the other end abuts against the cylinder cover 52.

[0026] A lever 531 is connected to the locking lever 53. The lever 531 is located at the end of the locking lever 53 that does not penetrate the fixing cylinder 51. The lever 531 provides a manual operation fulcrum. When disassembling, simply pull the lever 531 to compress the spring 55 to unlock. The operation is simple and does not require special tools, making it suitable for cleaning scenarios that require frequent disassembly and assembly.

[0027] The locking rod 53 is provided with a chamfer. The chamfer is located at the end of the locking rod 53 that goes into the locking hole. The chamfer design at the end of the locking rod 53 facilitates automatic guidance when inserted into the locking hole and reduces jamming.

[0028] The insertion slot is provided with a guide surface 11, which is set at a 45° chamfer at the entrance of the insertion slot. The 45° guide surface 11 at the entrance of the insertion slot can guide the insertion plate 41 to quickly enter the insertion slot, which is beneficial to improving the installation efficiency of the top rod 4.

[0029] The length of the plug plate 41 is greater than twice the length of the second separator tooth 7. This ensures that the second separator tooth 7 on the push rod 4 will not contact the silicon wafer prematurely during the plugging process, thus preventing the second separator tooth 7 from contacting the silicon wafer due to vibration and damaging the silicon wafer during plugging.

[0030] The implementation principle of the cleaning basket for preventing silicon wafer adhesion in this application embodiment is as follows: When installing the top rod 4, first insert the plug plate 41 into the plug slot, and then manually pull the lever 531 outward. The lever 531 drives the locking rod 53 to retract into the through hole of the side plate 1. At this time, the plug plate 41 can be fully inserted into the plug slot. Then release the lever 531, and use the spring 55 to push the slide plate 54 to drive the locking rod 53 to insert into the locking hole of the plug plate 41 to fix the plug plate 41. The locking rod 53 driven by the spring 55 cooperates with the plug plate 41, replacing the traditional interference fit. After the plug plate 41 is inserted, the spring 55 automatically pushes the locking rod 53 through the locking hole on the plug plate 41 to achieve quick fixation without the need for precise alignment or excessive external force, simplifying the installation process. This achieves the effect of making the upper toothed rod connection convenient and stable, and ensuring that adjacent silicon wafers do not stick together.

[0031] Finally, it should be noted that the above description is only a preferred embodiment of this utility model, and the protection scope of this utility model is not limited to the above embodiments. All technical solutions within the scope of this utility model's concept are within the protection scope of this utility model. It should be pointed out that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A cleaning basket for preventing wafer sticking, characterized by: The system includes side plates (1), crossbars (2), bottom bars (3), and top bars (4). Two side plates (1) are provided, arranged parallel to each other. A crossbar (2) connects the two side plates (1), with two crossbars (2) symmetrically arranged on opposite sides of each side plate (1). A bottom bar (3) connects the two side plates (1), with the crossbars (2) and bottom bars (3) arranged parallel to each other. The bottom bar (3) is located below the crossbars (2). A plug-in plate is fixedly connected to the top bar (4). (41) The plug plate (41) is provided at both ends of the top rod (4). The top rod (4) and the plug plate (41) are arranged perpendicular to each other. The side plate (1) is provided with a plug groove for the plug plate (41) to be inserted. The side plate (1) is provided with a locking component (5) for quickly locking the plug plate (41). The cross rod (2) and the bottom rod (3) are respectively provided with a number of first separating teeth (6) arranged at equal intervals. The top rod (4) is provided with a number of second separating teeth (7) arranged at equal intervals corresponding to the first separating teeth (6).

2. The anti-sticking cleaning wafer basket according to claim 1, wherein: The locking assembly (5) includes a fixed cylinder (51), a cylinder cover (52), a locking rod (53), a sliding plate (54), and a spring (55). The fixed cylinder (51) is fixedly connected to the side plate (1) and is arranged in a direction perpendicular to the side plate (1). The fixed cylinder (51) is provided on each of the two side plates (1). The cylinder cover (52) is connected to the opening of the fixed cylinder (51). The locking rod (53) passes through the cylinder cover (52), the fixed cylinder (51), and the side plate (1) in sequence. The cylinder cover (52), the fixed cylinder (51), and the side plate (1) are all provided with openings. There is a through hole for the locking rod (53) to pass through, and a locking hole for the locking rod (53) to pass through is provided on the plug plate (41). The axis of the locking rod (53) is collinear with the axis of the fixed cylinder (51). The sliding plate (54) is fixedly connected to the rod of the locking rod (53) located inside the fixed cylinder (51). The side wall of the sliding plate (54) slides against the inner wall of the fixed cylinder (51). The spring (55) is sleeved on the rod of the locking rod (53) located inside the fixed cylinder (51). One end of the spring (55) abuts against the sliding plate (54), and the other end abuts against the cylinder cover (52).

3. The anti-sticking cleaning wafer basket of claim 2, wherein: A lever (531) is connected to the locking rod (53), and the lever (531) is located at the end of the locking rod (53) that does not penetrate the fixing cylinder (51).

4. The anti-sticking cleaning wafer basket of claim 2, wherein: The locking rod (53) is provided with a chamfer, which is located at the end of the locking rod (53) that passes through the locking hole.

5. The anti-sticking cleaning wafer basket of claim 1, wherein: The insertion slot is provided with a guide surface (11), which is chamfered at 45° at the entrance of the insertion slot.

6. The anti-stiction cleaning wafer boat of claim 1, wherein: The length of the plug plate (41) is greater than twice the length of the second separator tooth (7).

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