Cleaning tank and sound wave cleaning equipment

Abstract

The utility model relates to a cleaning tank and sound wave cleaning equipment. In one aspect, the cleaning tank is provided and used for cleaning a to-be-cleaned part in the cleaning tank through liquid medicine, and the inner surface of the bottom of a tank body of the cleaning tank is in the form of a concave V-shaped tank. Therefore, the bubbles attached and gathered at the bottom of the tank body can be eliminated in time, so that the bubbles are effectively prevented from exploding at the bottom of the tank body, and the bottom is prevented from being broken.

Description

Technical Field

[0001] This disclosure relates to the field of cleaning technology, and more specifically, to cleaning tanks and ultrasonic cleaning equipment. Background Technology

[0002] Tank cleaning equipment is commonly used for cleaning semiconductor materials, electronic devices, optical components, etc. In tank cleaning equipment, the parts to be cleaned are typically cleaned using chemical solutions within their quartz cleaning tanks.

[0003] However, the bottom of the quartz cleaning tank and the side walls connected to the bottom are prone to cracking, which may lead to problems such as leakage of cleaning solution, reduced cleaning effect, or even equipment failure. Utility Model Content

[0004] This section provides a general overview of this disclosure, rather than a full disclosure of the entire scope or all features of this disclosure.

[0005] The purpose of this disclosure is to provide a cleaning tank that can promptly eliminate air bubbles adhering to and accumulating at the bottom of the tank during the cleaning process using a chemical solution.

[0006] To achieve the above objectives, according to one aspect of this disclosure, a cleaning tank is provided for cleaning the workpiece to be cleaned therein with a chemical solution, wherein the inner surface of the bottom of the cleaning tank body is in the form of a concave V-shaped groove.

[0007] In some implementations, the bottom may be in the form of a V-shaped groove.

[0008] In some implementations, the V-groove may be symmetrical about its vertical central axis.

[0009] In some embodiments, the angle between the two inclined sides of the V-shaped groove and the horizontal plane can both be in the range of 1 to 3°.

[0010] In some embodiments, the tank may be provided with a drain outlet for discharging the liquid medicine from the tank, and the drain outlet is located at the lowest point of the bottom.

[0011] In some embodiments, the cleaning tank may also include a liquid supply line, which may be located inside the tank and near the bottom, for supplying the liquid medicine into the tank.

[0012] In some implementations, the liquid supply line may be provided with an outlet, which discharges the liquid outwards from the bottom.

[0013] In some implementations, the liquid supply line and the tank can be two independent structures.

[0014] In some implementations, the liquid supply line may extend from an opening at the top of the tank to the bottom.

[0015] In some implementations, the tank may be made of quartz, and the liquid supply lines may be made of polytetrafluoroethylene.

[0016] In some embodiments, the cleaning tank may further include an overflow tank disposed on the circumferential outer side of the tank body. The overflow tank includes a first part and a second part that are connected to each other. The first part has a circulating outlet at its bottom for communicating with the inlet of the liquid supply line, and the depth of the first part is greater than the depth of the second part.

[0017] In some embodiments, the bottom of the cleaning tank may be provided with reinforcing ribs on its outer surface.

[0018] According to another aspect of this disclosure, an acoustic cleaning apparatus is also provided, comprising:

[0019] The cleaning tank according to any of the above embodiments;

[0020] A water bath and a cleaning tank are arranged inside the water bath; and

[0021] A sound wave generator is used to emit sound waves, and the sound wave generator is arranged inside the water bath and outside the cleaning tank.

[0022] According to the above technical solution, by designing the inner surface of the bottom of the cleaning tank as a concave V-shaped groove, the bubbles generated in the liquid can float to the highest position at both ends of the V-shape through the two inclined sides of the V-shaped groove. In this way, the bubbles attached to and accumulated at the bottom of the tank can be eliminated in time, thereby effectively preventing the bubbles from exploding at the bottom of the tank and causing the bottom to rupture. Attached Figure Description

[0023] The features and advantages of embodiments of the present disclosure will become more readily understood from the following description with reference to the accompanying drawings. The drawings are not drawn to scale and some features may be enlarged or reduced to show detail of specific parts. In the drawings:

[0024] Figure 1 This is a structural schematic diagram of an acoustic cleaning device based on relevant technologies.

[0025] Figure 2 for Figure 1 A schematic perspective view of the cleaning tank shown.

[0026] Figure 3 This is a schematic perspective view of a cleaning tank according to an embodiment of the present disclosure.

[0027] Figure 4 for Figure 3 The diagram shows the structure of the cleaning tank.

[0028] Figure 5 This is a schematic perspective view of a cleaning tank according to another embodiment of the present disclosure.

[0029] Figure 6 for Figure 5 The diagram shows the structure of the cleaning tank.

[0030] Figure 7 This is a schematic perspective view of a cleaning tank according to yet another embodiment of the present disclosure.

[0031] Figure 8 Schematally shown from the end view Figure 7 The structure of the cleaning tank shown is illustrated.

[0032] Figure 9 It is shown schematically from a frontal view. Figure 7 The structure of the cleaning tank shown is illustrated.

[0033] Figure 10 This is a schematic perspective view of a cleaning tank according to another embodiment of the present disclosure.

[0034] Figure 11 Schematally shown from the end view Figure 10 The structure of the cleaning tank shown is illustrated.

[0035] Figure 12 It is shown schematically from a frontal view. Figure 10 The structure of the cleaning tank shown is illustrated.

[0036] Figure 13 This is a schematic diagram of the structure of an acoustic cleaning apparatus according to an embodiment of the present disclosure.

[0037] In the accompanying drawings, the same or corresponding technical features, parts or components are represented by the same or corresponding reference numerals. Detailed Implementation

[0038] The present disclosure will now be described in detail with reference to the accompanying drawings and exemplary embodiments. It should be noted that the following detailed description of the present disclosure is for illustrative purposes only and is not intended to limit the scope of the disclosure.

[0039] It should be noted that, for clarity, not all features of a particular embodiment are described or shown in the specification and drawings. Furthermore, to avoid unnecessary details obscuring the technical solutions of interest in this disclosure, only the device structures and parts closely related to the technical solutions of this disclosure are described and shown in the specification and drawings, while other details that are not closely related to the technical content of this disclosure and are known to those skilled in the art are omitted.

[0040] First, refer to Figure 1 and Figure 2 A brief description of the acoustic cleaning device 1' based on the relevant technology will be provided. It should be noted that the acoustic cleaning device 1' of the relevant technology is not a prior art acoustic cleaning device, but is only provided for the purpose of explanation.

[0041] like Figure 1 As shown, the acoustic cleaning device 1' includes a cleaning tank 10', a water bath 20', and an acoustic generator 30'.

[0042] The cleaning tank 10' is arranged inside the water bath 20', and the sound wave generator 30' is arranged inside the water bath 20' and located outside the cleaning tank 10'.

[0043] Combined with reference Figure 2 The cleaning solution 2' can be supplied to the tank 100', for example, through the outlet 1101' of a supply pipe 110' located near the bottom 1001' of the tank body 100'. The part to be cleaned 3' is also placed inside the tank 100' so that the cleaning solution 2' can be used to clean the part 3' within the tank 100'. During the cleaning process, the sound wave generator 30' emits sound waves, which travel through the water bath 20' containing a liquid that is typically water. Figure 1 The liquid surface (shown as a dashed line) propagates to the bottom 1001' of the tank 100' and through the bottom 1001' into the interior of the tank 100'. With the help of the vibration of the sound waves, the liquid 2' inside the tank 100' can accelerate its movement to clean the parts 3' to be cleaned in the liquid 2'.

[0044] It should be noted that, for the purpose of clearly showing and explaining the other structures of the cleaning tank 10' in the acoustic cleaning equipment 1', Figure 2 The liquid level of the medicine solution 2' and the part to be cleaned 3' are omitted in the text.

[0045] The tank body 100' of the cleaning tank 10' is usually made of materials such as quartz or ceramic. As mentioned before, the bottom 1001' of the tank body 100' of the cleaning tank 10' and the side wall 1002' connected to the bottom 1001' are prone to cracking.

[0046] In response, the inventors discovered that during the cleaning process using the chemical solution, a large number of air bubbles would appear within the 100' tank. Figure 1 (Indicated by hollow dots) Bubbles are generated, especially when using SC-1 solution (a mixture of NH4OH, H2O2, and H2O) for cleaning, producing more bubbles compared to other solutions. These bubbles tend to adhere to and accumulate at the bottom 1001' of the tank 100', where they explode. Over time, this leads to the rupture of the bottom 1001' of the tank 100'.

[0047] Furthermore, when cleaning is performed using sound waves, bubbles will also be generated in the chemical solution 2' within the tank 100' due to the action of the sound waves, especially in the SC-1 chemical solution, where even more bubbles will be generated. Similarly, these bubbles tend to adhere to and accumulate at the bottom 1001' and can explode, which is a major cause of the rupture of the bottom 1001' of the tank 100'.

[0048] In response, according to embodiments of this disclosure, a cleaning tank is provided for cleaning the workpiece to be cleaned therein with a chemical solution. Referring below... Figures 3 to 9 The cleaning tank 10 will be described in detail.

[0049] First, refer to Figure 3 and Figure 4 The cleaning tank 10 includes a tank body 100. The tank body 100 is exemplarily shown as a cuboid, however, it may also be any other suitable shape. The tank body 100 is used to contain the medicinal solution 2 within it. Figure 4 As shown, the part to be cleaned 3 can be suspended in the tank 100, for example, by the support 100a, so that the part to be cleaned 3 can be cleaned by the solution 2.

[0050] It should be noted that, for the purpose of clearly showing and explaining the other structures of the cleaning tank 10, Figure 3 , Figures 5 to 9 The support part 100a and the part to be cleaned 3 are omitted. Furthermore, Figure 3 , Figure 8 , Figure 7 and Figure 9 The surface of liquid 2, shown by the dashed line, is omitted.

[0051] In this embodiment, the inner surface 1001a of the bottom 1001 of the groove 100 is in the form of a concave V-shaped groove.

[0052] In other words, when viewed from one side of the tank 100, the V-shape formed by the inner surface 1001a of the bottom 1001 is a downwardly projecting V-shape, or in other words, the cross-section of the inner surface 1001a is a concave V-shape or a downwardly projecting V-shape. For example... Figure 4 As shown, the inner surface 1001a of the bottom 1001 includes a first inclined surface 1011a and a second inclined surface 1012a. Both the first inclined surface 1011a and the second inclined surface 1012a are relative to the horizontal plane S1 (…). Figure 4 and Figure 6 (shown as dashed lines) are inclined and form angles β1 and β2 with the horizontal plane S1, respectively. The first inclined surface 1011a and the second inclined surface 1012a intersect as two inclined sides of the V-shaped groove, forming a concave V-shaped groove.

[0053] As mentioned above, the liquid medicine 2 located in the tank 100 of the cleaning tank 10 is prone to generating bubbles. These bubbles adhere to and accumulate at the bottom 1001 of the tank 100 and may explode, potentially causing the tank 100 to rupture.

[0054] By designing the inner surface 1001a of the bottom 1001 of the tank 100 into a concave V-shaped groove, bubbles adhering to and accumulating on the inner surface 1001a will pass through the two inclined sides of the V-shaped groove that form the V shape, i.e. Figure 4 The first inclined plane 1011a and the second inclined plane 1012a float upwards toward the highest point of these two inclined sides, that is, upwards toward the top of the first inclined plane 1011a and the top of the second inclined plane 1012a.

[0055] In this way, bubbles adhering to and accumulating on the inner surface 1001a of the bottom 1001 can be eliminated in a timely manner, thereby effectively preventing bubble explosions on the inner surface 1001a of the bottom 1001 and subsequent rupture of the bottom 1001. Moreover, compared to the case of a single inclined plane, the probability of bubbles encountering obstruction during the upward movement is lower, and the upward movement is smoother and faster, thus more effectively preventing bubble accumulation and further reducing the possibility of the bottom 1001 rupturing.

[0056] Furthermore, this embodiment only requires modification to the bottom 1001 of the tank 100, without the need for additional components, which is not only convenient but also does not increase the size of the cleaning equipment. In addition, when cleaning is performed using sound waves, the inclined inner surface 1001a of the bottom 1001 facilitates the propagation of sound waves through the bottom 1001 into the tank 100, thereby improving the cleaning effect of the workpiece 3 to be cleaned using sound waves.

[0057] The inventors noted that in the case of acoustic cleaning using sound waves such as ultrasound, megasonic waves, etc., in the water bath 20 (see Figure 13 Bubbles will also be generated on the outer surface 1001b of the bottom 1001 of the cleaning tank 10 inside the water bath 20. These bubbles are generated in the water, for example, in the water bath 20, and similarly, they will adhere to and accumulate on the outer surface 1001b and cause the bubbles to explode, which may also cause the bottom 1001 to rupture.

[0058] In this regard, such as Figure 5 and Figure 6 As shown, in some embodiments, the bottom 1001 may be in the form of the aforementioned recessed V-shaped groove.

[0059] In other words, in addition to the inner surface 1001a of the bottom 1001 of the cleaning tank 10 being a concave V-shaped groove, the outer surface 1001b, opposite to the inner surface 1001a, is also a concave V-shaped groove. Or, the cross-section of the bottom 1001 is a concave V-shape.

[0060] For example, such as Figure 6 As shown, the outer surface 1001b of the bottom 1001 includes a third inclined surface 1011b and a fourth inclined surface 1012b. Both the third inclined surface 1011b and the fourth inclined surface 1012b are relative to the horizontal plane S2 (…). Figure 6 (shown as dashed lines) are inclined and form angles β3 and β4 with the horizontal plane S2, respectively. The third inclined plane 1011b and the fourth inclined plane 1012b intersect as two inclined sides of the V-shaped groove, forming a concave V-shaped groove.

[0061] Similarly, bubbles attached to and accumulating on the outer surface 1001b of the bottom 1001 will pass through the two inclined sides of the V-shaped groove that form the V-shape, i.e. Figure 6 The third inclined plane 1011b and the fourth inclined plane 1012b float upwards toward the highest point of these two inclined sides, that is, upwards toward the top of the third inclined plane 1011b and the top of the fourth inclined plane 1012b.

[0062] In this way, bubbles that adhere to and accumulate on the outer surface 1001b of the bottom 1001 can be eliminated in time, thereby preventing bubbles from exploding on the outer surface 1001b of the bottom 1001 and causing the bottom 1001 to rupture.

[0063] In some implementations, such as Figure 4 and Figure 6 As shown, the V-groove can be symmetrical about its vertical central axis.

[0064] In other words, such as Figure 4 As shown, the included angles β1 and β2 are equal, or, as... Figure 6 As shown, the included angles β1 and β2, as well as β3 and β4, are equal.

[0065] In this situation, the bubbles generated in the liquid 2 and the bubbles generated in the water bath can disperse towards the top of the two inclined sides of the V-shaped groove at the fastest speed.

[0066] In this way, the elimination effect of bubbles adhering to and accumulating at the bottom of the tank can be improved, further reducing the possibility of the bottom of the tank breaking due to the explosion of accumulated bubbles.

[0067] In some implementations, such as Figure 4 and Figure 6As shown, the angle between the two inclined sides of the V-shaped groove and the horizontal plane can both be in the range of 1 to 3°.

[0068] In other words, such as Figure 4 As shown, the included angles β1 and β2 are both in the range of 1~3°, or, as... Figure 6 As shown, the included angles β1, β2, β3, and β4 are all in the range of 1 to 3°.

[0069] In this way, the propagation effect of sound waves through the bottom 1001 into the tank 100 can be improved, making the cleaning effect of the workpiece 3 to be cleaned by sound waves better.

[0070] In some implementations, such as Figures 3 to 6 As shown, the tank 100 is provided with a drain port 1020 for discharging the liquid medicine 2 from the tank 100. The drain port 1020 is located at the lowest point of the bottom 1001. That is, the drain port 1020 is located at the lowest end of the concave V-shaped groove.

[0071] In this way, when the liquid medicine 2 in the tank body 100 of the cleaning tank 10 needs to be discharged, the drain port 1020 is opened. Since the drain port 1020 is located at the lowest point of the bottom 1001, the liquid medicine 2 can be discharged quickly and smoothly through the drain port 1020, and the discharge is clean and not easy to remain at the bottom 1001 of the tank body 100.

[0072] It should be noted that drainage is usually only for changing the liquid in tank 100. During the cleaning process, the drain port 1020 is always kept closed.

[0073] In some implementations, such as Figures 7 to 9 As shown, the cleaning tank 10 also includes a liquid supply line 110, which is disposed inside the tank body 100 and near the bottom 1001, for supplying the medicine solution 2 into the tank body 100.

[0074] By arranging the liquid supply line 110 close to the bottom 1001, the liquid medicine 2 can be diffused and distributed from bottom to top to various areas within the tank 100, reducing bubbles generated by liquid impact. As a result, these bubbles do not accumulate in large quantities at the bottom 1001 and side wall 1002 of the tank 100, and thus may cause damage to the bottom 1001 and side wall 1002.

[0075] For example, such as Figure 8 and Figure 9 As shown, the liquid supply line 110 can be fixed by the slot 120 to improve the stability of the flow of the liquid medicine 2 in the liquid supply line 110.

[0076] The inventors noted that in related technologies, such as Figure 1As shown, the outlet 1101' of the liquid supply line 110' discharges the liquid towards the bottom 1001', which impacts the bottom 1001' and generates bubbles due to the impact. The impact on the bottom 1001' increases the possibility of the bottom 1001' rupturing, and the bubbles generated by the impact also adhere to and accumulate on the bottom 1001', further increasing the possibility of the bottom 1001' rupturing.

[0077] In some implementation methods, such as Figure 8 As shown, the liquid supply pipeline 110 may be provided with a liquid outlet 1101, which discharges the liquid medicine 2 away from the bottom 1001. That is to say, the liquid outlet 1101 discharges the liquid medicine 2 upwards.

[0078] In this way, the liquid medicine 2 discharged from the outlet 1101 can be prevented from impacting the bottom 1001 and generating additional bubbles. This further reduces the risk of the bottom 1001 of the tank 100 breaking.

[0079] In addition, by discharging the liquid 2 from the outlet 1101 away from the bottom 1001, it is possible to prevent the downward flowing liquid 2 from obstructing the bubbles at the bottom 1001 from rising, thereby reducing the risk of the bottom 1001 of the tank 100 rupturing.

[0080] For liquid supply lines, the industry typically integrates them with the tank design, such as... Figure 1 and Figure 2 As shown, the liquid supply line 110' passes through the side wall of the tank 100' and is integrally manufactured with the side wall. In this way, the liquid supply line can be prepared at the same time as the tank, which simplifies the design process and reduces the installation steps.

[0081] Compared to composite structures formed by connecting multiple independent components, monolithic structures are generally considered to have fewer stress concentration points and provide a smoother load transfer path. Therefore, they exhibit better fatigue resistance, greater structural stability, and are less prone to fracture compared to composite structures. Consequently, the fracture of quartz tanks is typically attributed to external loads, such as mechanical vibrations during cleaning causing the tank to crack, or collisions between the parts to be cleaned and the tank during handling.

[0082] However, the inventors discovered that the rupture of quartz tanks is often caused by internal stress concentration. Specifically, the inventors found that the liquid supply pipeline and the tank are generally integrated into a single structure by means of welding, for example. There are a large number of welding points between the liquid supply pipeline and the tank. Stress concentration is easily generated at the welding points, which can induce cracks. The cracks will gradually extend from the welding points to other parts of the tank and eventually cause the tank to rupture.

[0083] In some implementation methods, such as Figure 7 and Figure 9 As shown, the liquid supply line 110 and the tank 100 are designed as two independent structures.

[0084] By making the liquid supply pipeline 110 and the tank 100 separate structures, that is, independent of each other, it is possible to avoid the tank 100 from cracking due to stress concentration.

[0085] It is conceivable that, for example Figures 7 to 9 As shown, the liquid supply line 110 can extend from the opening at the top of the tank 100 to the bottom 1001.

[0086] In other words, the liquid supply line 110 can extend into the tank 100 from the opening at the top of the tank 100 until it reaches the bottom 1001. In this way, the liquid supply line 110 and the tank 100 can be manufactured as independent structures to avoid the tank 100 from cracking due to stress concentration.

[0087] It is also conceivable that the liquid supply line 110 could be made of polytetrafluoroethylene (PFA).

[0088] Therefore, the liquid supply line 110 and the quartz tank 100 can be set up as independent structures, avoiding the tank 100 from cracking due to stress concentration. Furthermore, the PFA liquid supply line 110 is easy to process and form, and PFA material has excellent corrosion resistance and crack resistance, while also being flexible and wear-resistant, making the liquid supply line 110 less prone to damage. Moreover, as a non-metallic material, PFA will not cause metal ion contamination to the parts being cleaned 3.

[0089] In some cleaning processes, it is necessary to strictly control particle residue. For this purpose, it is also conceivable to use a quartz liquid supply line 110. However, in this case, the liquid supply line 110 must be constructed as an independent structure from the tank 100 to avoid the tank 100 from cracking due to stress concentration.

[0090] Quartz has a dense surface and strong chemical inertness. Unless the cleaning solution is hydrofluoric acid or hot phosphoric acid, which react with quartz, particulate contaminants can be avoided in the supply line 110. Therefore, particulate residues during the cleaning process can be kept at a low level.

[0091] In some implementations, refer to Figures 10 to 12The cleaning tank 10 may also include an overflow tank 200, which is disposed on the circumferential outer side of the tank body 100. The overflow tank 200 includes a first part 201 and a second part 202 that are connected to each other. The first part 201 has a circulation outlet 2010 at its bottom for communicating with the inlet of the liquid supply pipeline 110, and the depth of the first part 201 is greater than the depth of the second part 202.

[0092] An overflow trough 200 is provided on the circumferential outer side of the tank 100. The overflow trough 200 can receive the medicine overflowing from the tank 100. The medicine can flow out through the circulation outlet 2010 in the overflow trough 200 and re-enter the tank 100 through the inlet of the supply pipe 110, thereby forming a circulating supply.

[0093] Furthermore, by designing the overflow tank 200 as two interconnected parts and deepening the first part 201 where the circulation outlet 2010 is provided, the control of the circulation and flow of the liquid medicine can be optimized, the drainage capacity can be enhanced, and the control of the liquid medicine temperature can be optimized.

[0094] Specifically, in optimizing the control of the circulation and flow of the medicinal solution, the above-mentioned methods not only increase the liquid capacity within the overflow tank 200 to ensure sufficient liquid supply to the circulation pump, thereby preventing the pump from running dry and improving the stability of the circulating liquid flow rate, thus increasing circulation efficiency; they also promote the flow of the medicinal solution within the overflow tank 200, preventing localized stagnation and reducing dead zones. Regarding enhanced drainage capacity, the above-mentioned methods allow the medicinal solution within the overflow tank 200 to flow towards the circulation outlet 2010 due to gravity, preventing liquid accumulation, reducing residue, and facilitating cleaning or replacement of the medicinal solution in the overflow tank 200. In terms of optimizing the control of the medicinal solution temperature, the above-mentioned methods increase the volume of medicinal solution that the overflow tank 200 can hold, thereby slowing down the rate of temperature increase or decrease and reducing temperature variations in the circulating medicinal solution.

[0095] It is conceivable that, for example Figures 10 to 12 As shown, the first part 201 can be configured to be closer to the inlet of the liquid supply line 110 than the second part 202.

[0096] In this way, the distance between the liquid medicine outlet 2010 and the inlet of the supply pipeline 110 is shortened, which can further improve the circulation efficiency of the liquid medicine.

[0097] In some implementations, such as Figures 10 to 12 As shown, the top of the groove 100 may have a serrated structure 100b.

[0098] In this way, when the liquid level in the tank 100 rises, the liquid can overflow evenly through the serrated structure 100b, thereby keeping the liquid level in the tank 100 stable, avoiding affecting the cleaning effect, and also preventing the liquid from splashing when it overflows from the tank 100, so as to reduce the waste of the liquid and avoid the pollution that may be caused by the splashing of the liquid.

[0099] In some implementations, such as Figures 7 to 12 As shown, the bottom 1001 may have a reinforcing rib 130 on its outer surface 1001b.

[0100] For example, such as Figure 7 As shown, a plurality of reinforcing ribs 130 are spaced apart from each other on the outer surface 1001b of the bottom 1001.

[0101] In this way, the structural strength of the bottom 1001 of the tank 100 can be further improved, making the bottom 1001 more impact-resistant and reducing the risk of breakage. Moreover, placing the reinforcing rib 130 on the outer surface 1001b rather than the inner surface 1001a can avoid reducing the cleaning effect on the workpiece 3 to be cleaned by interfering with the flow of the medicine in the tank 100.

[0102] According to another aspect of this disclosure, referring to Figure 13 Furthermore, an acoustic cleaning device 1 was proposed.

[0103] The acoustic cleaning device 1 includes:

[0104] Cleaning tank 10;

[0105] Water bath 20 and cleaning tank 10 are arranged inside water bath 20; and

[0106] A sound wave generator 30 is used to emit sound waves, and the sound wave generator 30 is arranged inside the water bath 20 and outside the cleaning tank 10.

[0107] While this disclosure has been described with reference to exemplary embodiments, it should be understood that this disclosure is not limited to the specific embodiments described and shown herein. Various changes to the exemplary embodiments can be made by those skilled in the art without departing from the scope defined by the claims of this disclosure.

[0108] The features mentioned and / or shown in the foregoing description of exemplary embodiments of this disclosure may be combined in the same or similar manner with one or more other embodiments, combined with features in other embodiments, or substituted for corresponding features in other embodiments. Such combinations or substitutions should also be considered as including within the scope of protection of this disclosure.

Claims

1. A cleaning tank for cleaning parts to be cleaned with a chemical solution therein, characterized in that, The bottom inner surface of the cleaning tank is in the form of a concave V-shaped groove.

2. The cleaning tank of claim 1, wherein, The bottom is in the form of the V-shaped groove.

3. The cleaning tank according to claim 1 or 2, characterized in that The V-groove is symmetrical about its vertical central axis.

4. The cleaning tank of claim 1 or 2, wherein The angle between the two inclined sides of the V-shaped groove and the horizontal plane is in the range of 1 to 3 degrees.

5. The cleaning tank according to claim 1 or 2, characterized in that, The tank is provided with a drain outlet for discharging the liquid medicine from the tank, and the drain outlet is located at the lowest point of the bottom.

6. The cleaning tank of claim 1 or 2, wherein It also includes a liquid supply line disposed in the tank and near the bottom for supplying the drug solution into the tank.

7. The cleaning tank of claim 6, wherein, The liquid supply pipeline is provided with a liquid outlet, and the liquid outlet discharges the medicine from the bottom.

8. The cleaning tank of claim 6, wherein, The liquid supply pipeline and the tank are two independent structures.

9. The cleaning tank of claim 8, wherein, The liquid supply pipe extends from the opening at the top of the tank to the bottom.

10. The cleaning tank of claim 6, wherein, The tank is made of quartz, and the liquid supply pipe is made of polytetrafluoroethylene.

11. The cleaning tank of claim 6, wherein, It also includes an overflow trough, which is disposed on the circumferential outer side of the tank body. The overflow trough includes a first part and a second part that are connected to each other. The first part has a circulation outlet at its bottom for communicating with the inlet of the liquid supply pipeline, and the depth of the first part is greater than the depth of the second part.

12. The cleaning tank of claim 1 or 2, wherein, The bottom has reinforcing ribs on its outer surface.

13. An apparatus for acoustic cleaning, characterized by include: The cleaning tank according to any one of claims 1 to 12; A water bath, wherein the cleaning tank is arranged inside the water bath; as well as A sound wave generator for emitting sound waves, and the sound wave generator is arranged inside the water bath and outside the cleaning tank.

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