Integrated ZR module

Abstract

The utility model relates to the field of semiconductor packaging equipment, and discloses an integrated ZR module, which comprises a base, a linear motion assembly is arranged on the base, a rotary mounting seat is arranged on the linear motion assembly, a rotary motor and a rotary shaft connected with the rotary motor are arranged in the rotary mounting seat, a heating head is connected onto the rotary shaft, and the heating head is connected with the linear motion assembly. A cold air inlet is formed in the rotating mounting seat, an annular cold air channel is arranged between the rotating shaft and the rotating mounting seat, a cold air outlet is formed in the rotating shaft, and a cold air outlet is reserved between the rotating shaft and the heating head; the cold air inlet, the annular cold air channel, the cold air outlet and the cold air outlet are sequentially communicated. The surface of the heating head can be cooled, the temperature of the heating head can be conveniently controlled, and the service life of the heating head is prolonged.

Description

Technical Field

[0001] This utility model relates to an integrated ZR module, belonging to the field of semiconductor packaging equipment. Background Technology

[0002] ZR modules are the core actuators in semiconductor packaging equipment, possessing motion freedom along the Z-axis (linear motion) and R-axis (rotational motion). Traditional ZR modules suffer from the following drawbacks:

[0003] (1) Although traditional ZR modules have pressure control functions, their force control method uses current open-loop control, and the moving parts are easily affected by external interference, resulting in poor accuracy of the actual pressure at the end.

[0004] (2) Traditional ZR modules have low output force or large size.

[0005] (3) Traditional ZR modules do not have pulse heating function.

[0006] (4) Traditional ZR modules do not have multiple vacuum paths, or their multiple vacuum paths cannot rotate continuously at 360°.

[0007] In the prior art, although the prior art (publication number CN118041022B) discloses a high-thrust, high-precision linear rotary motor and the output method executed therefrom, its technical solution discloses that "a high thrust is output by using a lead screw with a small lead and a first drive motor with a large torque in a linear drive assembly, while using a linear driver or linear motor to compensate for the problem that the accuracy of the first drive motor cannot meet the output requirements when outputting high thrust," and also discloses that "a heating head is also sleeved on the upper part of the suction nozzle"; that is, this patent can achieve the effects of high output force, small size, and pulse heating. However, this patent also has the following defects: it does not have multiple vacuum paths, and it cannot cool the surface of the heating head, thus affecting its temperature control effect and service life. Utility Model Content

[0008] The present invention aims to provide an integrated ZR module that can cool the surface of the heating head, has good temperature control, and a long service life.

[0009] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0010] An integrated ZR module includes a base, a linear motion component on the base, a rotary mounting base on the linear motion component, a rotary motor and a rotary shaft connected to the rotary motor inside the rotary mounting base, a heating head connected to the rotary shaft, a cold air inlet on the rotary mounting base, an annular cold air channel between the rotary shaft and the rotary mounting base, a cold air outlet on the rotary shaft, and a cold air outlet between the rotary shaft and the heating head; the cold air inlet, the annular cold air channel, the cold air outlet, and the cold air outlet are sequentially connected.

[0011] Furthermore, the rotating mounting base is provided with several air inlets and outlets, several annular channels are provided between the rotating shaft and the rotating mounting base, several connecting air ports are provided on the rotating shaft, and several gas inlets and outlets are provided on the heating head; the several air inlets and outlets, annular channels, connecting air ports, and gas inlets and outlets are sequentially connected.

[0012] Furthermore, a tension / compression sensor is provided between the rotating shaft and the heating head. The rotating shaft is connected to the tension / compression sensor via an adapter, and the tension / compression sensor is connected to the heating head via a connecting seat. The adapter has an adapter passage communicating with the cold air outlet, and the connecting seat has a connecting passage communicating with the adapter passage. The cold air outlet is located between the heating head and the connecting seat.

[0013] Furthermore, a tension / compression sensor is provided between the rotating shaft and the heating head. The rotating shaft is connected to the tension / compression sensor via an adapter, and the tension / compression sensor is connected to the heating head via a connecting seat. The adapter has several adapter passages that are respectively connected to the cold air outlet and the connecting air outlet. The connecting seat has several connecting passages that are respectively connected to the adapter passages. The cold air outlet is located between the heating head and the connecting seat, and the several connecting passages are respectively connected to the cold air outlet and the gas inlet / outlet.

[0014] Furthermore, the rotating shaft is a hollow shaft, and a cable is installed inside the hollow shaft. One end of the hollow shaft is connected to a conductive slip ring. One end of the cable is connected from the conductive slip ring to an external circuit, and the other end is connected to a heating head and / or a tension / compression sensor.

[0015] Furthermore, a cable outlet channel is provided between the rotating shaft and the heating head, and the cable outlet channel is located in the adapter; one end of the cable located in the hollow shaft passes through the cable outlet channel and is connected to the heating head and / or the tension / compression sensor respectively.

[0016] Furthermore, the linear motion assembly includes a Z-axis motor fixed on the base and a Z-axis lead screw connected to the Z-axis motor, and the rotary mounting seat is slidably disposed on the base and connected to the Z-axis lead screw.

[0017] Furthermore, the base is provided with a slide rail and a slide table slidably connected to the slide rail, the rotary mounting seat is fixed to the slide table, and the slide table is connected to the Z-axis lead screw.

[0018] Compared with the prior art, the beneficial effects of this utility model are:

[0019] By configuring a series of interconnected cold air inlets, annular cold air channels, cold air outlets, and cold air exits, this integrated ZR module can dissipate heat and cool the surface of the heating head, facilitating temperature control and extending its service life. With several sequentially connected inlets / outlets, annular channels, connecting ports, and gas inlets / exits, this integrated ZR module has multiple vacuum paths, which can rotate continuously 360°, making it more convenient to use and extending its service life. By incorporating tension and compression sensors, this integrated ZR module features closed-loop pressure control, enabling real-time acquisition of load data when the loading part is pressed down, achieving precise pressure control. Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0021] Figure 2 This is a cross-sectional structural schematic diagram from another perspective of this utility model;

[0022] Figure 3 This is a partial structural cross-sectional view of the present invention;

[0023] Figure 4 This is a partial structural diagram of the heating head and the tension / compression sensor of this utility model;

[0024] Figure 5 This is a partial structural schematic diagram of the heating head and tension / compression sensor from another perspective of the present invention.

[0025] In the figure

[0026] 1. Base; 2. Rotary mounting base; 21. Cold air inlet; 22. Inlet and outlet; 3. Rotary motor; 4. Rotary shaft; 41. Annular cold air channel; 42. Cold air outlet; 43. Annular channel; 44. Connecting air port; 5. Heating head; 51. Gas inlet and outlet; 6. Conductive slip ring; 7. Tension and compression sensor; 8. Adapter; 81. Adapter passage; 82. Outlet channel; 83. First air connector; 9. Connecting base; 91. Cold air outlet; 92. Second air connector; 10. Z-axis motor; 11. Z-axis lead screw; 12. Slide rail; 13. Slide table; 14. Deep groove ball bearing; 15. Angular contact ball bearing; 16. Encoder reading head; 17. Encoder disk; 18. Sealing ring; 19. Wiring panel; 20. Piping. Detailed Implementation

[0027] The present invention will be described in detail below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in the embodiments of the present invention can be combined with each other. For ease of description, the terms "upper," "lower," "left," and "right" appearing below only indicate that they correspond to the upper, lower, left, and right directions in the accompanying drawings and do not limit the structure.

[0028] Example 1

[0029] like Figures 1 to 5 As shown, an integrated ZR module includes a base 1, a linear motion component, a rotary mounting base 2, a rotary motor 3, a rotary shaft 4, a heating head 5, a cold air inlet 21, an annular cold air channel 41, a cold air outlet 42, and a cold air outlet 91. The base 1 can have any structure and is used to mount the other components. The linear motion component is installed inside the base 1 and is used to drive the connected components to move linearly. The rotary mounting base 2 is connected to the linear motion component; the rotary motor 3 is a frameless motor and is fixed inside the rotary mounting base 2; the rotary shaft 4 is connected to the rotary motor 3 and rotatably mounted inside the rotary mounting base 2, and is used to output rotational torque. The heating head 5 is connected to the output end of the rotary shaft 4, and the heating head 5 can output pulsed high temperature to heat the adsorbed object. The cold air inlet 21 is located on the rotary mounting base 2 and is used to connect to an external cold air source, serving as a cold air inlet. The annular cold air channel 41 is located between the rotary shaft 4 and the rotary mounting base 2, ensuring that the cold air inlet 21 and the cold air outlet 42 are always connected. The cold air outlet 42 is located at the output end of the rotating shaft 4. The cold air outlet 91 is located between the rotating shaft 4 and the heating head 5, so that the cold air coming out of the cold air outlet 91 can dissipate heat and control the temperature of the surface of the heating head 5. The cold air inlet 21, the annular cold air channel 41, the cold air outlet 42, the cold air passage, and the cold air outlet 91 are connected in sequence to form a cold air path.

[0030] In this embodiment, the rotating shaft 4 is a hollow shaft, and a cable is installed inside the hollow shaft. One end of the hollow shaft is connected to a conductive slip ring 6. One end of the cable is connected to the conductive slip ring 6 and connected to an external circuit, while the other end is connected to the heating head 5. In this way, the cable can rotate continuously 360°, providing a stable electrical signal, and the structural arrangement is more neat and concise.

[0031] In this embodiment, the rotating mounting base 2 is provided with an air inlet / outlet 22, an annular channel 43 is provided between the rotating shaft 4 and the rotating mounting base 2, the output end of the rotating shaft 4 is provided with a connecting air port 44, and the heating head 5 is provided with a gas inlet / outlet 51. The air inlet / outlet 22 is used to connect with an external air extraction / discharge device, serving as the inlet / outlet during air extraction or discharge. The annular channel 43 ensures that the air inlet / outlet 22 and the connecting air port 44 are always connected. The gas inlet / outlet 51 is used for gas to enter and exit the heating head 5, for adsorbing or releasing the extracted object. The air inlet / outlet 22, the annular channel 43, the connecting air port 44, and the gas inlet / outlet 51 are sequentially connected, forming a vacuum path for adsorbing or releasing objects.

[0032] In this embodiment, the linear motion component includes a Z-axis motor 10 fixed on the base 1 and a Z-axis lead screw 11 connected to the Z-axis motor 10; the rotary mounting seat 2 is slidably disposed on the base 1 and connected to the Z-axis lead screw 11; the Z-axis motor 10 drives the Z-axis lead screw 11 to rotate, thereby causing the rotary mounting seat 2 to slide linearly on the base 1.

[0033] In this embodiment, the base 1 is provided with a slide rail 12 and a slide table 13 slidably connected to the slide rail 12. The bottom of the rotary mounting base 2 is fixed to the slide table 13 through any connecting structure, and the bottom of the slide table 13 is also connected to the Z-axis lead screw 11 through any connecting structure. By setting the slide rail 12 and the slide table 13, the linear movement of the rotary mounting base 2 and its components can be made smoother, the structure more stable, and the use more convenient.

[0034] In this embodiment, a plurality of deep groove ball bearings 14 and angular contact ball bearings 15 are also provided inside the rotary mounting base 2; the rotating shaft 4 is respectively sleeved in the deep groove ball bearings 14 and angular contact ball bearings 15; the bearings facilitate the rotation and support of the rotating shaft 4. An encoder reading head 16 and an encoder disk 17 are also provided at the end of the rotary mounting base 2 for position feedback and to achieve high-precision rotational movement. Sealing rings 18 are provided on both sides of the annular cold air channel 41 and both sides of the annular channel 43 for stroke sealing. The annular cold air channel 41 and the annular channel 43 are both set as annular grooves on the rotating shaft 4; the bottom of the annular groove is provided with a radial through hole for connecting the cold air inlet 21 and the cold air outlet 42, and for connecting the inlet / outlet 22 and the connecting air port 44. A wiring panel 19 is also provided at the end of the base 1 for wiring the circuit and air circuit of the entire module, that is, the wiring integration of the cables and air circuit lines 20, which facilitates quick wiring application.

[0035] The working principle of this embodiment is as follows:

[0036] The linear motion component operates, with the Z-axis motor 10 driving the Z-axis lead screw 11 to rotate, causing the rotating mounting base 2 and its components (heating head 5, etc.) to slide linearly on the base 1 and apply a working load. The rotary motor 3 drives the rotating shaft 4 to rotate, causing the heating head 5 (and the objects connected to it) to rotate, thereby adjusting the entire module to a suitable position or angle. During the picking and placing operation, air is drawn in sequentially from the air inlet / outlet 22, the annular channel 43, the connecting air port 44, and the gas inlet / outlet 51 through the external air extraction and release device, thereby adsorbing the object. Conversely, air is released sequentially to disconnect the adsorption and place the object. During heat dissipation or temperature control, cold air flows along the cold air path, that is, sequentially from the cold air inlet 21, the annular cold air channel 41, the cold air outlet 42, the cold air passage, and the cold air outlet 91 to the surface of the heating head 5.

[0037] During implementation, when there is no need to dissipate heat and control the temperature of the heating head 5, the cold air inlet 21 can be connected to the external air extraction and release device. At this time, the original cold air path of the entire module becomes a vacuum path that can adsorb or release objects. That is, the entire module has two vacuum paths, and these two vacuum paths can rotate continuously at 360°, making it more convenient to use and with a longer service life.

[0038] The beneficial effects of this embodiment are as follows: by setting up a cold air inlet 21, an annular cold air channel 41, a cold air outlet 42, and a cold air outlet 91 connected in sequence, this integrated ZR module can dissipate heat and cool the surface of the heating head 5, which facilitates temperature control and extends its service life.

[0039] Example 2

[0040] The difference between this embodiment and Embodiment 1 is that this integrated ZR module has two vacuum paths capable of adsorbing or releasing objects. Specifically, the rotating mounting base 2 has two air inlets and outlets 22, the rotating shaft 4 and the rotating mounting base 2 have two annular channels 43, the output end of the rotating shaft 4 has two connecting air ports 44, and the heating head 5 has two gas inlets and outlets 51. The two air inlets and outlets 22, the two annular channels 43, the two connecting air ports 44, and the two gas inlets and outlets 51 are sequentially connected to form two vacuum paths for adsorbing or releasing objects.

[0041] In this embodiment, the two vacuum air paths can be divided into a nozzle adsorption air path for suction and a product adsorption air path for adsorbing the product. If one vacuum air path fails, the other can serve as a backup, thus extending the overall lifespan of the module and increasing its versatility. This integrated ZR module has three air paths (one cold air path and two vacuum air paths), and all three paths can rotate continuously 360°, enabling multi-path air control during continuous rotation of the rotating shaft 4.

[0042] In this embodiment, the two air inlets and outlets 22 are respectively used to connect to external air extraction and release devices, serving as inlets and outlets for air extraction or release. Two annular channels 43 ensure that the corresponding two air inlets and outlets 22 and the two connecting air ports 44 are always connected. Two gas inlets and outlets 51 are used for gas to enter and exit the heating head 5; one is used to adsorb or release the suction nozzle, and the other is used to adsorb or release the product.

[0043] The working principle of this embodiment is as follows:

[0044] The linear motion component operates, with the Z-axis motor 10 driving the Z-axis lead screw 11 to rotate, causing the rotating mounting base 2 and its components (heating head 5, etc.) to slide linearly on the base 1 and apply a working load. The rotary motor 3 drives the rotating shaft 4 to rotate, causing the heating head 5 (and the objects connected to it) to rotate, thereby adjusting the entire module to a suitable position or angle. During pick-up and placement operations, air is drawn in or released from one or two vacuum paths through an external air extraction and release device, i.e., air is drawn in sequentially from the air inlet / outlet 22, the annular channel 43, the connecting air port 44, and the gas inlet / outlet 51, thereby adsorbing objects (such as sucking up a nozzle or product). Conversely, air is released sequentially to disconnect the adsorption and place objects (such as releasing a nozzle or product). During heat dissipation or temperature control, cold air flows along the cold air path, i.e., from the cold air inlet 21, the annular cold air channel 41, the cold air outlet 42, the cold air passage, and the cold air outlet 91, to the surface of the heating head 5.

[0045] The beneficial effects of this embodiment are as follows: By setting several sequentially connected air inlets / outlets 22, annular channels 43, connecting air ports 44, and gas inlets / outlets 51, this integrated ZR module has multiple vacuum air paths, and these multiple vacuum air paths can rotate continuously at 360°, making it more convenient to use, extending its service life, and increasing its applicability. By setting sequentially connected cold air inlets 21, annular cold air channels 41, cold air outlets 42, and cold air outlets 91, this integrated ZR module can dissipate heat and cool the surface of the heating head 5, facilitating temperature control and extending its service life.

[0046] Example 3

[0047] The difference between this embodiment and embodiment one is that a tension / compression sensor 7 is provided between the rotating shaft 4 and the heating head 5. The rotating shaft 4 is connected to the tension / compression sensor 7 through an adapter 8, and the tension / compression sensor 7 is connected to the heating head 5 through a connecting seat 9. An adapter passage 81 communicating with the cold air outlet 42 is provided in the adapter 8, and a connecting passage communicating with the adapter passage 81 is provided in the connecting seat 9. The cold air outlet 91 is located between the heating head 5 and the connecting seat 9.

[0048] In this embodiment, the connection between the adapter path 81 and the connecting path is achieved by the following setup: a first air connector 83 is provided outside the adapter 8 to connect with the adapter path 81, and a second air connector 92 is provided outside the connecting path 9 to connect with the connecting path. An air pipe is used to connect the first air connector 83 and the second air connector 92.

[0049] In this embodiment, a cable outlet channel 82 is provided between the rotating shaft 4 and the heating head 5, and the cable outlet channel 82 is located in the adapter 8. The cable outlet channel 82 is generally arranged in an L-shape, that is, the cable outlet channel 82 passes through the adapter 8 from two perpendicular directions, or the cable outlet channel 82 extends into the adapter 8 from the direction of the rotating shaft 4 (i.e., the hollow shaft) and then extends out from the other side at an angle to that direction, thus passing through the adapter 8. One end of the cable located in the hollow shaft passes through the cable outlet channel 82 (i.e., the cable enters from one end of the adapter 8 and then exits from the other end of the adapter 8 in a different direction from the entry end), and then is connected to the heating head 5 and the tension / compression sensor 7 respectively, or connected to a separate heating head 5 or a separate tension / compression sensor 7, in which case the separate heating head 5 and the separate tension / compression sensor 7 are electrically connected. The cable is used for circuit connection, and the cable outlet channel 82 is used to ensure that the cable can rotate continuously for 360°. Through the setting of conductive slip ring 6, hollow shaft, cable outlet channel 82, etc., the cable can be guaranteed to rotate continuously for 360°. When the heating head 5 and its corresponding components rotate, a stable electrical signal can be provided, and the structural layout is more neat and simple.

[0050] The working principle of this embodiment is as follows:

[0051] The linear motion component operates, with the Z-axis motor 10 driving the Z-axis lead screw 11 to rotate, causing the rotary mounting base 2 and its components (heating head 5, tension / compression sensor 7, etc.) to slide linearly on the base 1 and apply a working load. During loading, the tension / compression sensor 7 acquires the load data of the working head in real time, thereby adjusting the applied force and achieving precise pressure control. The rotary motor 3 drives the rotary shaft 4 to rotate, causing the heating head 5 (and the objects connected to it) to rotate, thereby adjusting the entire module to a suitable position or angle. During the picking and placing operation, air is drawn in sequentially from the air inlet / outlet 22, the annular channel 43, the connecting air port 44, and the gas inlet / outlet 51 through the external air extraction / release device, thereby adsorbing the object. Conversely, air is released sequentially to disconnect the adsorption and place the object. During heat dissipation or temperature control, cold air flows along the cold air path, that is, sequentially from the cold air inlet 21, the annular cold air channel 41, the cold air outlet 42, the cold air passage, and the cold air outlet 91 to the surface of the heating head 5.

[0052] The beneficial effects of this embodiment are as follows: By setting up the tension / compression sensor 7, this integrated ZR module has a pressure closed-loop control function, which can acquire the load data of the loading part (the position of the heating head 5) when it is pressed down in real time, and achieve precise pressure control. By setting up the cold air inlet 21, the annular cold air channel 41, the cold air outlet 42, and the cold air outlet 91 connected in sequence, this integrated ZR module can dissipate heat and cool the surface of the heating head 5, which is convenient for temperature control and extends its service life. This integrated ZR module integrates temperature and pressure control technology (i.e., temperature control through the cold air path and pressure control through the tension / compression sensor 7), which can be used for high-precision mounting work in the advanced packaging industry, with high accuracy and ease of use.

[0053] Example 4

[0054] The difference between this embodiment and embodiment two (or embodiment three) is that, as Figure 4 and Figure 5 As shown, a tension / compression sensor 7 is provided between the rotating shaft 4 and the heating head 5. The rotating shaft 4 is connected to the tension / compression sensor 7 via an adapter 8, and the tension / compression sensor 7 is connected to the heating head 5 via a connecting seat 9. Three adapter passages 81 are provided in the adapter 8, one of which is connected to the cold air outlet 42, and the other two are respectively connected to the two connecting air ports 44. Three connecting passages are provided in the connecting seat 9, which are connected to the adapter passages 81. The cold air outlet 91 is located between the heating head 5 and the connecting seat 9. One of the three connecting passages is connected to the cold air outlet 91, and the other two are respectively connected to the two gas inlets / outlets 51.

[0055] In this embodiment, the connection between the three transition paths 81 and the three connecting paths is achieved by the following arrangement: three first air connectors 83 are provided on the outer circumference of the adapter 8, corresponding to the three transition paths 81; three second air connectors 92 are provided on the outer circumference of the connecting seat 9, corresponding to the three connecting paths; and three air pipes are used to connect the three first air connectors 83 and the three second air connectors 92 respectively.

[0056] In this embodiment, a cable outlet channel 82 is provided between the rotating shaft 4 and the heating head 5, and the cable outlet channel 82 is located in the adapter 8. The cable outlet channel 82 is generally arranged in an L-shape, that is, the cable outlet channel 82 passes through the adapter 8 from two perpendicular directions, or the cable outlet channel 82 extends into the adapter 8 from the direction of the rotating shaft 4 (i.e., the hollow shaft) and then extends out from the other side at an angle to that direction, thus passing through the adapter 8. One end of the cable located in the hollow shaft passes through the cable outlet channel 82 (i.e., the cable enters from one end of the adapter 8 and then exits from the other end of the adapter 8 in a different direction from the entry end), and then is connected to the heating head 5 and the tension / compression sensor 7 respectively, or connected to a separate heating head 5 or a separate tension / compression sensor 7, in which case the separate heating head 5 and the separate tension / compression sensor 7 are electrically connected. The cable is used for circuit connection, and the cable outlet channel 82 is used to ensure that the cable can rotate continuously for 360°. Through the setting of conductive slip ring 6, hollow shaft, cable outlet channel 82, etc., the cable can be guaranteed to rotate continuously for 360°. When the heating head 5 and its corresponding components rotate, a stable electrical signal can be provided, and the structural layout is more neat and simple.

[0057] The working principle of this embodiment is as follows:

[0058] The linear motion component operates, namely, the Z-axis motor 10 drives the Z-axis lead screw 11 to rotate, causing the rotary mounting base 2 and its components (heating head 5, tension / compression sensor 7, etc.) to slide linearly on the base 1 and apply a working load. During loading, the tension / compression sensor 7 obtains the load data of the working head applying pressure in real time, thereby adjusting the applied force and achieving precise pressure control. The rotary motor 3 drives the rotary shaft 4 to rotate, causing the heating head 5 (and the objects connected to it) to rotate, thereby adjusting the entire module to a suitable position or angle. During the picking and placing operations, air is drawn in or released from one or two vacuum paths through an external air extraction and release device. That is, air is drawn in sequentially from the air inlet / outlet 22, the annular channel 43, the connecting air port 44, and the gas inlet / outlet 51 to adsorb objects (such as sucking up the nozzle or product). Conversely, air is released sequentially to disconnect the adsorption and place objects (such as releasing the nozzle or product). When dissipating heat or controlling temperature, cold air flows along the cold air path, that is, from the cold air inlet 21, the annular cold air channel 41, the cold air outlet 42, the cold air passage, and the cold air outlet 91 to the surface of the heating head 5.

[0059] The beneficial effects of this embodiment are as follows: By setting several sequentially connected air inlets / outlets 22, annular channels 43, connecting air ports 44, and gas inlets / outlets 51, this integrated ZR module has multiple vacuum air paths, and these multiple vacuum air paths can rotate continuously for 360°, making it more convenient to use, extending its service life, and enhancing its applicability. By setting a tension / compression sensor 7, this integrated ZR module has a pressure closed-loop control function, which can acquire the load data of the loading part (the position of the heating head 5) when it is pressed down in real time, achieving precise pressure control. By setting a sequentially connected cold air inlet 21, annular cold air channel 41, cold air outlet 42, and cold air outlet 91, this integrated ZR module can dissipate heat and cool the surface of the heating head 5, facilitating temperature control and extending its service life. This integrated ZR module integrates temperature and pressure control technology (i.e., temperature control through the cold air path and pressure control through the tension / compression sensor 7), enabling it to be used for high-precision mounting work in the advanced packaging industry, offering high accuracy and ease of use.

[0060] The above embodiments should be understood as being used only to illustrate the present invention more clearly, and not to limit the scope of the present invention. After reading the present invention, any modifications of the embodiments by those skilled in the art in various equivalent forms fall within the scope defined by the appended claims.

Claims

1. An integrated ZR module, comprising a base (1), wherein a linear motion component is provided on the base (1), a rotary mounting seat (2) is provided on the linear motion component, a rotary motor (3) and a rotary shaft (4) connected to the rotary motor (3) are provided in the rotary mounting seat (2), and a heating head (5) is connected to the rotary shaft (4), characterized in that, The rotating mounting base (2) is provided with a cold air inlet (21), and an annular cold air channel (41) is provided between the rotating shaft (4) and the rotating mounting base (2). The rotating shaft (4) is provided with a cold air outlet (42), and a cold air outlet (91) is provided between the rotating shaft (4) and the heating head (5). The cold air inlet (21), the annular cold air channel (41), the cold air outlet (42), and the cold air outlet (91) are connected in sequence.

2. The integrated ZR module of claim 1, wherein, The rotating mounting base (2) is provided with several air inlets and outlets (22), and several annular channels (43) are provided between the rotating shaft (4) and the rotating mounting base (2). Several connecting air ports (44) are provided on the rotating shaft (4), and several gas inlets and outlets (51) are provided on the heating head (5). The several air inlets and outlets (22), annular channels (43), connecting air ports (44), and gas inlets and outlets (51) are connected in sequence.

3. The integrated ZR module of claim 1, wherein, A tension / compression sensor (7) is provided between the rotating shaft (4) and the heating head (5). The rotating shaft (4) is connected to the tension / compression sensor (7) through an adapter (8). The tension / compression sensor (7) is connected to the heating head (5) through a connecting seat (9). The adapter (8) is provided with an adapter passage (81) that communicates with the cold air outlet (42). The connecting seat (9) is provided with a connecting passage that communicates with the adapter passage (81). The cold air outlet (91) is located between the heating head (5) and the connecting seat (9).

4. The integrated ZR module of claim 2, wherein, A tension / compression sensor (7) is provided between the rotating shaft (4) and the heating head (5). The rotating shaft (4) is connected to the tension / compression sensor (7) via an adapter (8). The tension / compression sensor (7) is connected to the heating head (5) via a connecting seat (9). The adapter (8) is provided with several adapter passages (81) that are respectively connected to the cold air outlet (42) and the connecting air outlet (44). The connecting seat (9) is provided with several connecting passages that are respectively connected to the adapter passages (81). The cold air outlet (91) is located between the heating head (5) and the connecting seat (9). Several connecting passages are respectively connected to the cold air outlet (91) and the gas inlet / outlet (51).

5. The integrated ZR module of any one of claims 1 to 4, wherein, The rotating shaft (4) is a hollow shaft, and a cable is provided inside the hollow shaft. One end of the hollow shaft is connected to a conductive slip ring (6). One end of the cable is connected to the conductive slip ring (6) and connected to an external circuit, and the other end is connected to the heating head (5) and / or the tension and compression sensor (7).

6. The integrated ZR module of claim 5, wherein, A cable outlet channel (82) is provided between the rotating shaft (4) and the heating head (5), and the cable outlet channel (82) is located in the adapter (8); one end of the cable located in the hollow shaft passes through the cable outlet channel (82) and is connected to the heating head (5) and / or the tension and pressure sensor (7) respectively.

7. The integrated ZR module of claim 1, wherein, The linear motion assembly includes a Z-axis motor (10) fixed on the base (1) and a Z-axis lead screw (11) connected to the Z-axis motor (10). The rotary mounting base (2) is slidably disposed on the base (1) and connected to the Z-axis lead screw (11).

8. The integrated ZR module of claim 7, wherein, The base (1) is provided with a slide rail (12) and a slide table (13) in sliding connection with the slide rail (12), the rotary mounting base (2) is fixed with the slide table (13), and the slide table (13) is connected with a Z-axis lead screw (11).

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