Rotary material taking structure
By designing a rotary material handling structure, the problem of low material handling efficiency of robotic arms is solved by utilizing the rotation of the mounting base and the nozzle, as well as the reciprocating movement of the adjustment components. This enables multiple nozzles to operate simultaneously, improving equipment utilization and processing efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU QIANMING SEMICON EQUIP CO LTD
- Filing Date
- 2025-05-30
- Publication Date
- 2026-04-21
AI Technical Summary
Existing robotic arms are inefficient in the material handling process, occupy a large amount of equipment space, are costly, and can only handle one material at a time.
It adopts a rotary material handling structure, including a mounting frame, a mounting base, a suction nozzle, a drive component, and an adjustment component. The drive component drives the mounting base to rotate, and the suction nozzle rotates around the center point. The adjustment component controls the reciprocating movement of the suction nozzle, enabling multiple suction nozzles to pick up and put out materials simultaneously.
It improves material handling efficiency, makes better use of equipment space, reduces equipment costs, and can process multiple materials simultaneously, thus improving processing efficiency.
Smart Images

Figure CN224147163U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of material handling, and in particular to a rotary material handling structure. Background Technology
[0002] The wafer processing involves multiple steps. After the wafers are cut, they are inspected and graded to facilitate subsequent sorting operations. At this point, the cut wafers are on steel rings covered with blue film. The material handling device needs to remove the wafers from the blue film according to different grades, placing wafers of the same grade onto a new steel ring.
[0003] First, the picking device removes the wafers placed on the material stage, then places the wafers into the inspection device for testing. Finally, the picking device places the inspected wafers onto a new blue film. The current operation uses a robotic arm, which extends towards the wafer during picking and placing, and needs to reset upon reaching the inspection position. The existing robotic arm has a large operating space, and each set can only pick up one wafer at a time, completing the entire process before picking up another, resulting in low picking efficiency. Using multiple sets of robotic arms would increase the equipment space and cost. Utility Model Content
[0004] In order to improve material handling efficiency, make reasonable use of equipment space, and reduce equipment processing costs, this application provides a rotary material handling structure.
[0005] This application provides a rotary material handling structure, which adopts the following technical solution:
[0006] A rotary material handling structure includes a mounting frame, a mounting seat mounted on the mounting frame, a plurality of suction nozzles evenly arranged on the mounting seat and along the circumference of the mounting seat, and a drive component mounted on the mounting frame for driving the mounting seat to rotate. The center point of the plurality of suction nozzles is located on the rotation axis of the drive component. The mounting seat is provided with a positioning rod for positioning the suction nozzles, and the mounting frame is provided with an adjustment component for driving the positioning rod to reciprocate.
[0007] By adopting the above technical solution, the mounting frame is used to install the mounting base and the first driving component. The first driving component is used to drive the mounting base to rotate. The rotation of the mounting base drives several suction nozzles to rotate, which facilitates the movement of the suction nozzles to different operating surfaces. The positioning rod is used to extend the material picking range of the suction nozzles. The adjustment component is used to drive the suction nozzles to reciprocate and extend, which facilitates the suction nozzles to pick up and put down materials. Several suction nozzles can perform material picking and putting operations simultaneously, improving material picking efficiency and thus improving material processing efficiency.
[0008] Preferably, the top surface of the mounting base is provided with an adjustment groove, and the side of the positioning rod facing the adjustment groove is provided with an adjustment block inserted into the adjustment groove. The adjustment assembly is used to drive the adjustment block to move back and forth along the length direction of the adjustment groove.
[0009] By adopting the above technical solution, the adjustment groove facilitates the adjustment component to drive the adjustment block to move, thereby driving the suction nozzle to move back and forth, which facilitates the suction nozzle to pick up and put in materials.
[0010] Preferably, the mounting base is provided with a slide rail along the nozzle driving direction, and the positioning rod is provided with a slider located on the slide rail, and the length extension direction of the slide rail is consistent with the length extension direction of the adjustment groove.
[0011] By adopting the above technical solutions, the slide rail and slider improve the stability of the nozzle movement.
[0012] Preferably, one end of the adjusting block that contacts the adjusting assembly is provided with a roller.
[0013] By adopting the above technical solution, the roller reduces the moving friction between the adjusting block and the adjusting component, making it easier for the adjusting component to adjust the position of the adjusting block.
[0014] Preferably, the adjustment assembly includes a connecting sleeve disposed on the mounting base, a plurality of adjusting cams disposed on the connecting sleeve, an adjusting gear disposed on the connecting sleeve and connected at one end to the adjusting cams, and a driving component two for driving the adjusting gear to rotate.
[0015] By adopting the above technical solution, the connecting sleeve is used to connect the mounting base, thereby improving the stability of the adjusting cam and the adjusting gear. The second driving component is used to drive the adjusting gear to rotate, which in turn drives the adjusting cam to rotate. The rotation of the adjusting cam causes the adjusting block to reciprocate within the adjusting groove.
[0016] Preferably, a bearing is provided between the connecting sleeve and the mounting base.
[0017] By adopting the above technical solution, bearing one facilitates the rotatable connection between the connecting sleeve and the mounting base. When the drive component one rotates, the rotation of the mounting base does not affect the connecting sleeve through bearing one, and the rotation of the connecting sleeve does not affect the mounting base. This makes it easy to adjust the cam to control the reciprocating movement of the suction nozzle.
[0018] Preferably, the second driving component includes a drive motor, a drive gear disposed at the output end of the drive motor, and a timing belt, wherein the timing belt is used to connect the drive gear and the adjusting gear.
[0019] By adopting the above technical solution, the drive motor drives the drive gear to rotate, the drive gear rotates to drive the synchronous belt to move synchronously, the synchronous belt moves to drive the adjustment gear to rotate, the adjustment gear rotates to drive the adjustment cam to rotate, and then drives the adjustment block to move back and forth along the length of the adjustment groove, thereby facilitating the control of the suction nozzle to extend and retract to pick up and put in materials.
[0020] In summary, this application controls the nozzle to pick up and put down materials by adjusting the component. At the same time, it can control whether the nozzle needs to move back and forth according to the wafer processing flow, which effectively improves the practicality of the material picking structure. In addition, the simultaneous operation of multiple nozzles effectively improves the material picking efficiency of the material picking structure, thereby improving the processing efficiency of the product. Attached Figure Description
[0021] Figure 1 This is a schematic diagram of a rotary material handling structure according to this application. Figure 1 ;
[0022] Figure 2 This is a schematic diagram of a rotary material handling structure according to this application. Figure 2 ;
[0023] Figure 3 This is a schematic diagram of a rotary material handling structure according to this application. Figure 3 ;
[0024] Figure 4 This is a schematic diagram of the adjusting component in a rotary material handling structure of this application;
[0025] Figure 5 This is a cross-sectional view of the adjusting component in a rotary material handling structure of this application;
[0026] Figure 6 This is a cross-sectional view of the adjusting component in a rotary material handling structure according to this application.
[0027] Explanation of reference numerals in the attached drawings: 1. Mounting bracket; 2. Mounting base; 3. Suction nozzle; 4. Drive component one; 5. Positioning rod; 6. Adjustment assembly; 61. Connecting sleeve; 62. Adjusting cam; 63. Adjusting gear; 64. Drive component two; 641. Drive motor; 642. Drive gear; 643. Synchronous belt; 7. Adjustment groove; 8. Adjustment block; 9. Slide rail; 10. Slider; 11. Roller; 12. Bearing one. Detailed Implementation
[0028] The following is in conjunction with the appendix Figures 1-6 The present invention will be further described below. The following embodiments are only used to more clearly illustrate the technical solution of this application, and should not be used to limit the protection scope of the present invention.
[0029] In the description of this application, it should be noted that the orientations or positional relationships indicated by terms such as "center", "up", "down", "left", "right", "vertical", "horizontal", "inner", and "outer" are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0030] This application discloses a rotary material handling structure. (Refer to...) Figure 1 and Figure 2 The system includes a mounting frame 1, a mounting base 2 mounted on the mounting frame 1, a plurality of suction nozzles 3 mounted on the mounting base 2, and a drive component 4 mounted on the mounting frame 1. In this embodiment, the mounting base 2 is mounted on the top surface of the mounting frame 1, and the plurality of suction nozzles 3 are located on the top surface of the mounting base 2 and are evenly arranged circumferentially around the center of the top surface of the mounting base 2. The drive component 4 drives the mounting base 2 to rotate, and the rotation of the mounting base 2 drives the plurality of suction nozzles 3 to rotate synchronously, facilitating the rotation of the suction nozzles 3 from one processing surface to another. To improve the accuracy of the drive component 4 in driving the mounting base 2 to rotate, the center point of the plurality of suction nozzles 3 is located on the rotation axis of the drive component 4, facilitating the drive component 4 to uniformly control the rotation path of the plurality of suction nozzles 3.
[0031] Reference Figure 2 and Figure 3 To extend the material-picking path of the suction nozzle 3, a positioning rod 5 is installed on the mounting base 2. The suction nozzle 3 is located at the end of the positioning rod 5 away from the mounting base 2. In this application, to facilitate material picking by the suction nozzle 3 and to avoid components such as the mounting frame 1, the positioning rod 5 is bent, lifting the suction nozzle 3 upwards and creating a height difference between it and the top surface of the mounting frame 1, which facilitates material picking by the suction nozzle 3. An adjustment component 6 is also installed on the mounting frame 1. The adjustment component 6 is used to drive the positioning rod 5 to reciprocate along its length extension direction.
[0032] Reference Figure 2 and Figure 3 To improve the stability of the suction nozzle 3 during movement, an adjustment groove 7 is provided on the top surface of the mounting base 2 along the length of the positioning rod 5. An adjustment block 8, inserted into the adjustment groove 7, is fixed to the side wall of the positioning rod 5 facing the adjustment groove 7. The adjustment block 8 is controlled by the adjustment component 6 to reciprocate along the length of the adjustment groove 7. To further improve the stability of the suction nozzle 3 during movement, a slide rail 9 is fixed on the mounting base 2 along the length of the adjustment groove 7. A slider 10 is fixed on the slide rail 9 on the side of the positioning rod 5 facing the slide rail 9. When the adjustment component 6 pushes the adjustment block 8 to move within the adjustment groove 7, the slider 10 slides on the slide rail 9, improving the stability of the suction nozzle 3 during movement and facilitating the extension and retraction of the suction nozzle 3 for loading and unloading materials.
[0033] Reference Figure 3 and Figure 4 Since the adjusting component 6 is in contact with the adjusting block 8, it mainly pushes the adjusting block 8 to move within the adjusting groove 7. In order to reduce the friction between the adjusting component 6 and the adjusting block 8, a roller 11 is provided on the side wall of the adjusting block 8 that is in contact with the adjusting component 6. The roller 11 effectively reduces the friction between the adjusting block 8 and the adjusting component 6.
[0034] Reference Figure 3 and Figure 4 The adjusting assembly 6 includes a connecting sleeve 61 mounted on the mounting base 2, several adjusting cams 62 fitted on the connecting sleeve 61, adjusting gears 63 fitted on the connecting sleeve 61 and connected to one end of the adjusting cams 62, and a second driving component 64. The second driving component 64 drives the adjusting gears 63 to rotate, thereby driving the adjusting cams 62 to rotate. The adjusting cams 62 contact the rollers 11. When the adjusting cams 62 rotate, they drive the rollers 11 to rotate and simultaneously push the adjusting block 8 to move within the adjusting groove 7. The second driving component 64 includes a drive motor 641, a drive gear 642 fixed to the output end of the drive motor 641, and a synchronous belt 643. The two ends of the synchronous belt 643 mesh with the drive gear 642 and the adjusting gear 63, respectively, to facilitate the synchronous rotation of the drive gear 642 and the adjusting gear 63 by the drive motor 641. To prevent the connecting sleeve 61 from affecting the mounting base 2 when rotating or the mounting base 2 from affecting the connecting sleeve 61 when rotating, a bearing 12 is installed between the connecting sleeve 61 and the mounting bracket 1.
[0035] Reference Figure 5 and Figure 6 In this embodiment, four sets of suction nozzles 3 are provided, and four sets of positioning rods 5 for positioning the suction nozzles 3 are provided. In this embodiment, two symmetrical suction nozzles 3 are responsible for picking up and putting down materials. Therefore, two sets of adjusting cams 62 are provided, and correspondingly, two sets of adjusting gears 63 and driving components 64 are provided. One adjusting cam 62 corresponds to one picking up and putting down suction nozzle 3. In order to save the installation space of the adjusting component 6, the adjusting cam 62 and the adjusting gear 63 are fixedly connected in this embodiment. The bottom surface of the adjusting cam 62 extends towards the adjusting gear 63 with a fixed sleeve, which is fixed sleeve one. The other set of adjusting cams 62 and the fixed sleeve of the adjusting gear 63 is fixed sleeve two. Fixed sleeve two is fitted on fixed sleeve one, so that the distance between the two sets of adjusting cams 62 is shortened, thereby shortening the driving distance of the adjusting block 8. A bearing is installed between fixed sleeve one and fixed sleeve two, so that the driving component 64 can control the rotation of a certain set of adjusting cams 62 and adjusting gears 63 independently. The operator can control the rotation of two sets of adjusting cams 62 and adjusting gears 63 simultaneously as needed, improving the adaptability of the picking structure.
[0036] Reference Figure 5 and Figure 6The mounting base 2 of this application has a fixed plate on its bottom surface that is fitted onto the connecting sleeve 61. Bearing 12 is disposed on the inner wall of the fixed plate and fitted onto the outer wall of the connecting sleeve 61. In this embodiment, the driving component 4 includes a motor and a fixed rod fixed to the output end of the motor. One end of the fixed rod is connected to the fixed end of the motor, and the other end is connected to the bottom surface of the mounting base 2. The fixed rod is inserted into the connecting sleeve 61, and a bearing is installed between the fixed rod and the connecting sleeve 61 to reduce the impact of the movement of the mounting base 2 on the connecting sleeve 61. In specific implementations, to save vertical installation space for the material handling structure, the motor can be installed in the side space, and the mounting base 2 can be rotated using a synchronous pulley and synchronous belt.
[0037] The implementation principle of the rotary material handling structure in this embodiment is as follows: Driver 4 starts and drives the mounting base 2 to rotate. The rotation of the mounting base 2 drives the suction nozzle 3 to rotate. When the suction nozzle 3 rotates to the material handling table, driver 64 starts, driving the adjusting cam 62 to rotate. The rotation of the adjusting cam 62 causes the adjusting block 8 to extend and retract along the length of the adjusting groove 7 to handle the material. This embodiment can set a corresponding number of adjusting cams 62 according to the material handling operation steps required for wafer processing, and can specifically control the extension and retraction operation of the suction nozzle 3.
[0038] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.
Claims
1. A rotary draw structure, characterized by: It includes a mounting frame (1), a mounting base (2) set on the mounting frame (1), a plurality of suction nozzles (3) set on the mounting base (2) and evenly arranged around the mounting base (2), and a drive component (4) set on the mounting frame (1) for driving the mounting base (2) to rotate. The center point of the plurality of suction nozzles (3) is located on the rotation axis of the drive component (4). The mounting base (2) is provided with a positioning rod (5) for positioning the suction nozzles (3), and the mounting frame (1) is provided with an adjustment component (6) for driving the positioning rod (5) to reciprocate.
2. A rotary picking arrangement according to claim 1, characterized in that The top surface of the mounting base (2) is provided with an adjustment groove (7), and the positioning rod (5) is provided with an adjustment block (8) inserted into the adjustment groove (7) on the side facing the adjustment groove (7). The adjustment component (6) is used to drive the adjustment block (8) to move back and forth along the length direction of the adjustment groove (7).
3. A rotary picking arrangement according to claim 2, characterized in that The mounting base (2) is provided with a slide rail (9) along the driving direction of the suction nozzle (3), and the positioning rod (5) is provided with a slider (10) located on the slide rail (9). The length extension direction of the slide rail (9) is consistent with the length extension direction of the adjustment groove (7).
4. The rotary material pickup structure according to claim 2, wherein: The adjusting block (8) has a roller (11) at one end that contacts the adjusting assembly (6).
5. The rotary material handling structure according to claim 1, characterized in that: The adjustment assembly (6) includes a connecting sleeve (61) disposed on the mounting base (2), a plurality of adjusting cams (62) sleeved on the connecting sleeve (61), an adjusting gear (63) sleeved on the connecting sleeve (61) and connected at one end to the adjusting cams (62), and a second driving member (64) for driving the adjusting gear (63) to rotate.
6. A rotary picking arrangement according to claim 5, characterized in that A bearing (12) is provided between the connecting sleeve (61) and the mounting base (2).
7. A rotary draw structure according to claim 5 wherein: The second driving component (64) includes a drive motor (641), a drive gear (642) disposed at the output end of the drive motor (641), and a timing belt (643). The timing belt (643) is used to connect the drive gear (642) and the adjusting gear (63).