Probe for testing
By designing an adjustable probe electrode structure, the problem of the inability to adjust existing probe electrodes was solved, achieving measurement accuracy and cost-effectiveness even under electrode wear conditions.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- BEIJING HIGH PRECISION TECH DEV
- Filing Date
- 2025-04-17
- Publication Date
- 2026-04-21
AI Technical Summary
The existing probe electrodes are not adjustable, resulting in poor contact with small-sized samples and electrode wear affecting measurement accuracy, which is also uneconomical.
A probe structure including a drive shaft, mounting post, electrode, elastic element and limiting element is designed. The arm of the electrode can be adjusted along the Z-axis. The elastic element and limiting element keep the electrode tip flush to ensure consistent contact resistance.
It achieves measurement accuracy even with electrode wear, reduces consumable costs, and adapts to the measurement needs of samples of different sizes.
Smart Images
Figure CN224152550U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor measurement, and in particular to a probe for testing. Background Technology
[0002] Electrochemical capacitance-voltage (ECV) testing is a key technology in semiconductor material research and development. It evaluates device performance by measuring the doping concentration distribution of semiconductor materials. This technology is crucial for controlling carrier concentration, doping thickness, and impurity distribution in semiconductor devices. ECV testing utilizes the contact between an electrolyte and the semiconductor to form a potential barrier, and applies a forward or reverse bias voltage to the semiconductor. Through electrochemical etching, the material is peeled off layer by layer, and the concentration distribution of electroactivated impurities is measured.
[0003] During ECV testing, probe electrodes are used in pairs. The tips of both electrodes must make good contact with the sample surface. The contact resistance between the electrode tips and the sample surface directly affects the measurement of the capacitance value of the corroded area, and consequently, the final carrier concentration calculation result. Existing probe electrodes are typically fixed to the drive shaft, lacking adjustability and unable to achieve contact at different points on the sample surface. For small samples, it is necessary to continuously adjust the sample's position on the stage to ensure contact with the electrodes. Furthermore, the tips of existing probe electrodes wear down over long-term use, adversely affecting measurement accuracy. Typically, worn electrodes need to be replaced entirely, which is uneconomical. Utility Model Content
[0004] In view of this, embodiments of this application provide a probe for testing to solve at least one problem existing in the background art.
[0005] This application provides a probe for testing, comprising:
[0006] Drive shaft, used to drive the test equipment;
[0007] A first mounting post and a second mounting post, which extend along the Z-axis direction and are connected to the drive shaft;
[0008] A first electrode and a second electrode, each including an arm and a needle, wherein the arm is movably sleeved on the first mounting post and the second mounting post respectively; the arm extends along the X-axis direction, which is perpendicular to the Z-axis direction, and the needle extends along the Z-axis direction for contacting the surface of the sample to be tested, and the needle is located at one end of the arm along the X-axis direction;
[0009] A first elastic element and a second elastic element, wherein the first elastic element abuts against the first electrode to apply an elastic force to it along the Z-axis direction, and the second elastic element abuts against the second electrode to apply an elastic force to it along the Z-axis direction;
[0010] A first limiting member and a second limiting member, wherein the first limiting member abuts against the first electrode to limit its movement distance along the Z-axis, and the second limiting member abuts against the second electrode to limit its movement distance along the Z-axis.
[0011] In one optional embodiment, both the first elastic element and the second elastic element are springs. The first elastic element and the second elastic element are respectively sleeved on the first mounting post and the second mounting post. The two ends of the first elastic element abut against the surface of the drive shaft and the first electrode, respectively, and the two ends of the second elastic element abut against the surface of the drive shaft and the second electrode, respectively.
[0012] In one optional embodiment, both the first limiting member and the second limiting member are nuts. The first limiting member and the second limiting member are threadedly connected to the first mounting post and the second mounting post, respectively. The first limiting member abuts against the side of the first electrode away from the first elastic member, and the second limiting member abuts against the side of the second electrode away from the second elastic member.
[0013] In one optional embodiment, the arm portion has a sliding groove extending along the X-axis direction, and the first electrode and the second electrode are respectively sleeved on the first mounting post and the second mounting post through the sliding groove; when the first electrode and the second electrode move along the X-axis direction, the first mounting post and the second mounting post can slide within the sliding groove along the X-axis direction.
[0014] In one optional embodiment, the two sides of the first mounting post and the second mounting post along the Y-axis are at least partially planar, and fit against the inner walls of the sliding groove along the Y-axis; the Y-axis and the X-axis are both along a horizontal plane, and the Y-axis is perpendicular to the X-axis.
[0015] In one optional embodiment, both the first mounting post and the second mounting post include a cylindrical segment and a prism segment. The cylindrical segment is connected to either the first limiting member or the second limiting member. The two ends of the prism segment are respectively connected to the cylindrical segment and the drive shaft. The prism segment is fitted into the sliding groove.
[0016] In one optional embodiment, one end of the prism segment has a stud, and one side of the drive shaft has a threaded hole. The prism segment is fixed to the drive shaft by connecting the stud and the threaded hole.
[0017] In one optional embodiment, the length of the first electrode or the second electrode is 100 mm and the width is 10 mm; the length of the sliding groove is 20 mm to 85 mm and the width is 5 mm to 8 mm.
[0018] In one alternative embodiment, one or both surfaces of the arm portion along the Z-axis direction are frosted.
[0019] In one optional embodiment, the drive shaft, the first mounting post, the second mounting post, the first electrode, and the second electrode are all made of gold-plated copper alloy.
[0020] The testing probe provided in this embodiment has a mounting post on its drive shaft. The arm of the electrode is sleeved on the mounting post and can be raised and lowered in the Z-axis direction. The height of the electrode arm along the Z-axis is flexibly adjustable in its normal state by means of elastic and limiting elements sleeved on the mounting post. Thus, when the wear of the needle tips on the first and second electrodes differs, the probe provided in this embodiment can be adjusted by moving the electrode arm along the Z-axis to make the needle tips of the two electrodes aligned, ensuring the accuracy of the probe measurement.
[0021] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description
[0022] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments of this application and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:
[0023] Figure 1 This is a schematic diagram of a probe structure for testing provided in an embodiment of this application;
[0024] Figure 2 This is a schematic diagram of the Z-axis adjustment effect of the probe used for testing, provided in an embodiment of this application.
[0025] Figure 3 This is a schematic diagram of the X-axis adjustment effect of the probe used for testing, provided in an embodiment of this application.
[0026] Figure 4 This is a schematic diagram of the mounting column structure provided in the embodiments of this application;
[0027] Figure 5 This is a schematic diagram showing the connection relationship between the drive shaft and the mounting post provided in an embodiment of this application.
[0028] The attached figures are labeled as follows:
[0029] 1. Drive shaft; 11. First mounting post; 12. Second mounting post; 13. Screw hole;
[0030] 111. Cylindrical segment; 112. Prismatic segment; 113. Stud;
[0031] 2. First electrode; 3. Second electrode; 21. Arm section; 211. Sliding groove; 22. Needle tip;
[0032] 4. First elastic element; 5. Second elastic element;
[0033] 6. First limiting component; 7. Second limiting component
[0034] 8. The object to be tested. Detailed Implementation
[0035] To make the technical solution and beneficial effects of this utility model more apparent and understandable, a detailed description is provided below by listing specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.
[0036] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this utility model and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In other words, they should not be construed as limitations on this utility model.
[0037] In this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, a feature specified as "first" or "second" can explicitly indicate that at least one of those features is included. In the description of this utility model, "multiple" means at least two, such as two, three, etc.; "several" means at least one, such as one, two, three, etc., unless otherwise explicitly specified.
[0038] In this utility model, unless otherwise explicitly defined, the terms "installation," "connection," "linking," "fixing," and "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0039] In this utility model, unless otherwise explicitly defined, the terms "above," "on top of," "above," "over," "below," "below," "below," or "below" for "first feature above second feature" can refer to direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Furthermore, "above," "above," and "over" for "first feature above second feature" can mean the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is higher than the horizontal height of the second feature. Similarly, "below," "below," and "below" for "first feature below second feature" can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than the horizontal height of the second feature.
[0040] In this invention, unless otherwise explicitly defined, the X-axis direction, Y-axis direction, or Z-axis direction includes both positive and negative directions. For example, when the Z-axis is vertical, the Z-axis direction can be either upward or downward.
[0041] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solution of this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.
[0042] This application provides a probe for testing, such as... Figure 1 As shown, it includes: a drive shaft 1, a first mounting post 11 and a second mounting post 12, a first electrode 2 and a second electrode 3, a first elastic element 4 and a second elastic element 5, and a first limiting element 6 and a second limiting element 7.
[0043] The first mounting post 11 and the second mounting post 12 extend along the Z-axis and are connected to the drive shaft 1.
[0044] Both the first electrode 2 and the second electrode 3 include an arm portion 21 and a needle 22. The arm portions 21 of the first electrode 2 and the second electrode 3 are movably sleeved on the first mounting post 11 and the second mounting post 12, respectively. The arm portion 21 extends along the X-axis direction, which is perpendicular to the Z-axis direction. The needle 22 extends along the Z-axis direction and is used to contact the surface of the sample to be tested. The needle 22 is located at one end of the arm portion 21 along the X-axis direction. The arm portion 21 has the required length so that the needle 22 on it can contact the contact point of the object to be tested 8. The function of the needle 22 is to make accurate and sufficient contact with the contact point of the object to be tested 8. When the needles 22 of the first electrode 2 and the second electrode 3 make accurate and sufficient contact with the contact point of the object to be tested 8, the testing equipment obtains an ideal circuit for measuring capacitance.
[0045] The first elastic element 4 and the second elastic element 5 abut against the first electrode 2 to apply an elastic force to it along the Z-axis direction, and the second elastic element 5 abut against the second electrode 3 to apply an elastic force to it along the Z-axis direction.
[0046] The first limiting member 6 and the second limiting member 7 are used to restrict the movement distance of the first electrode 2 along the Z-axis, that is, to limit the first electrode 2 which is subjected to the elastic force of the first elastic member 4, so that the first electrode 2 is in a certain position under normal conditions. The second limiting member 7 is used to restrict the movement distance of the second electrode 3 along the Z-axis, that is, to limit the movement distance of the second electrode 3 which is subjected to the elastic force of the second elastic member 5, so that the second electrode 3 is in a certain position under normal conditions.
[0047] The drive shaft 1 is driven by the testing equipment. When the testing equipment drives the drive shaft 1, the drive shaft 1 rotates, and the arm parts 21 on the first electrode 2 and the second electrode 3 connected to the drive shaft 1 rise or fall accordingly. The needle tip 22 then displaces to contact or move away from the object being tested. The drive shaft 1 is used to lift / lower the metal probe and has a vacuum switch. When the metal probe is lowered by the drive shaft 1, the sample stage vacuum is opened to hold the sample; when the metal probe is lifted by the drive shaft 1, the sample stage vacuum is closed to release the sample.
[0048] In actual use, the wear of the needles 22 on the first electrode 2 and the second electrode 3 is generally different, resulting in inconsistent contact resistance between the two electrodes and the sample surface, which seriously affects the measurement accuracy. The probe provided in this embodiment has an electrode arm 21 fitted onto a mounting post, allowing for height adjustment along the Z-axis. Elastic and limiting elements fitted onto the mounting post allow for flexible adjustment of the height of the electrode arm 21 along the Z-axis in its normal state. Thus, when the wear of the needles 22 on the first electrode 2 and the second electrode 3 is different, the probe provided in this embodiment can be adjusted by moving the electrode arm 21 along the Z-axis to make the tips of the needles 22 of both electrodes aligned, ensuring probe measurement accuracy. This eliminates the need to replace the probe, reducing consumable costs.
[0049] like Figure 2 As shown in the figure, the probe used for testing in this embodiment may experience a wear condition after long-term use. The wear of the needle 22 on the second electrode 3 is greater than that of the needle 22 on the first electrode 2. At this time, the operator adjusts the position of the second limiting member 7 along the Z-axis direction, thereby adjusting the height of the arm part 21 of the second electrode 3 along the Z-axis direction, so that the tips of the needles 22 on the first electrode 2 and the second electrode 3 are aligned. In this way, when the probe is used for measurement, there is no significant difference in the contact resistance between the two electrodes and the surface of the object 8 to be measured, and the accuracy of the measurement results can be guaranteed.
[0050] In an alternative embodiment, such as Figure 1 , Figure 2 As shown, in this embodiment, both the first elastic element 4 and the second elastic element 5 are springs. The first elastic element 4 and the second elastic element 5 are respectively sleeved on the first mounting post 11 and the second mounting post 12. The two ends of the first elastic element 4 abut against the surface of the drive shaft 1 and the first electrode 2, respectively, and the two ends of the second elastic element 5 abut against the surface of the drive shaft 1 and the second electrode 3, respectively. In this embodiment, using springs as elastic elements results in a simple structure and ease of use. The springs are sleeved on the mounting posts so that the direction of the elastic force is along the Z-axis, simplifying the installation method and making it easy to control the spring compression. Figure 2 As shown, when the first limiting member 6 or the second limiting member 7 is adjusted to its position along the Z-axis, the free extension and retraction characteristic of the spring allows it to extend or shorten accordingly.
[0051] In an alternative embodiment, such as Figure 1 , Figure 2As shown, both the first limiting member 6 and the second limiting member 7 are nuts. The first limiting member 6 and the second limiting member 7 are threadedly connected to the first mounting post 11 and the second mounting post 12, respectively. The first limiting member 6 abuts against the side of the first electrode 2 away from the first elastic member 4, and the second limiting member 7 abuts against the side of the second electrode 3 away from the second elastic member 5. In this embodiment, using nuts as the first limiting member 6 and the second limiting member 7, their threaded connection allows for convenient linear adjustment of the distance in the Z-axis direction, enabling linear adjustment of the movement of the first electrode 2 or the second electrode 3 along the Z-axis. The nuts can be adjusted using a wrench or an electric screwdriver, and the nuts can also have anti-slip textures on their circumferential surface for manual rotation.
[0052] In an alternative embodiment, such as Figure 3 As shown, the arm portion 21 has a sliding groove 211 extending along the X-axis direction. The first electrode 2 and the second electrode 3 are respectively sleeved on the first mounting post 11 and the second mounting post 12 through the sliding groove 211. When the first electrode 2 and the second electrode 3 move along the X-axis direction, the first mounting post 11 and the second mounting post 12 can slide within the sliding groove 211 along the X-axis direction. In this embodiment, the sliding groove 211 extends along the X-axis direction, which is equivalent to a guide rail along the X-axis direction, so that when the first electrode 2 moves relative to the first mounting post 11, or when the second electrode 3 moves relative to the second mounting post 12, it can move only along the X-axis direction.
[0053] The structure mentioned in this embodiment, where the first electrode 2 and the second electrode 3 move along the X-axis, can be applied to the use of the probe in this embodiment to measure objects 8 of different sizes. When the diameter of the object 8 is small, such as... Figure 3 As shown, the first electrode 2 and the second electrode 3 are pushed along the X-axis to bring their needles 22 closer to the drive shaft 1 for measurement. When the diameter of the object 8 to be measured is large, the first electrode 2 and the second electrode 3 are pushed along the X-axis to move their needles 22 away from the drive shaft 1 for measurement. This structure can also be applied to measurement needs at different points on the same object 8.
[0054] Understandably, when the operator adjusts the first electrode 2 and the second electrode 3 to push along the X-axis, the first electrode 2 and the second electrode 3 can maintain their position in the X-axis direction because the first elastic member 4 and the second elastic member 5 abut against the first electrode 2 and the second electrode 3 respectively, and the first limiting member 6 and the second limiting member 7 also abut against the first electrode 2 and the second electrode 3 respectively. The arm part 21 of the first electrode 2 and the second electrode 3 is subjected to pressure in the Z-axis direction, and then to frictional force in the X-axis direction. Under the action of this frictional force, the arm part 21 cannot move freely except when the operator is operating it.
[0055] In an optional embodiment, one or both surfaces of the arm portion 21 along the Z-axis direction are frosted to increase the aforementioned friction and prevent accidental movement of the arm portion 21 during use.
[0056] In other embodiments, the first electrode 2 and the second electrode 3 may also have a sliding groove 211 extending along the Y-axis direction, so that the distance between the first electrode 2 and the second electrode 3 can be adjusted to meet other measurement requirements of the object to be measured 8.
[0057] In an alternative embodiment, such as Figure 4 As shown, at least part of the two sides of the first mounting post 11 and the second mounting post 12 along the Y-axis are planar, and they fit against the inner walls of the sliding groove 211 along the Y-axis. Both the Y-axis and X-axis are horizontal, and the Y-axis is perpendicular to the X-axis. In this embodiment, the fit between the two sides of the first mounting post 11 and the second mounting post 12 along the Y-axis and the inner walls of the sliding groove 211 improves the smoothness of the sliding groove 211's guidance.
[0058] In an alternative embodiment, such as Figure 4 As shown, both the first mounting post 11 and the second mounting post 12 include a cylindrical segment 111 and a prism segment 112. The cylindrical segment 111 is connected to the first limiting member 6 or the second limiting member 7. The two ends of the prism segment 112 are respectively connected to the cylindrical segment 111 and the drive shaft 1, and the prism segment 112 is fitted into the sliding groove 211. In this embodiment, the first mounting post 11 and the second mounting post 12 are designed in segments along the Z-axis direction. The cylindrical segment 111 is circumferential in shape to facilitate threaded connection with the first limiting member 6 or the second limiting member 7. The prism segment 112 is designed to form a plane along the Y-axis direction, which facilitates fitting with the inner wall of the sliding groove 211.
[0059] In an alternative embodiment, such as Figure 5 As shown, one end of the prism segment 112 has a stud 113, and one side of the drive shaft 1 has a screw hole 13. The prism segment 112 is fixed to the drive shaft 1 via the stud 113 and the screw hole 13. In this embodiment, the stud 113 facilitates the detachable fixing of the first mounting post 11 and the second mounting post 12 to the drive shaft 1, and also facilitates the first electrode 2 and the second electrode 3 to be first fitted onto the prism segment 112, and then the prism segment 112 is fixed to the drive shaft 1 via the stud 113 and the screw hole 13.
[0060] In other embodiments, the screw hole 13 on the drive shaft 1 can be replaced by a through hole, and the lower end of the prism segment 112 along the Z-axis direction can be designed with threads to be fixed to one side of the drive shaft 1 by a nut.
[0061] In one optional embodiment, the length of the first electrode 2 or the second electrode 3 is 100 mm and the width is 10 mm; the length of the sliding groove 211 is 20 mm to 85 mm, preferably 80 mm, and the width is 5 mm to 8 mm, preferably 5 mm. It is understood that in other embodiments, the length of the first electrode 2 or the second electrode 3 can also be designed as 80 mm, 90 mm, 120 mm, 150 mm, etc., depending on requirements.
[0062] In one optional embodiment, the length of the needle 22 along the Z-axis is 5mm to 10mm, preferably 10mm. It is understood that in other embodiments, the length of the needle 22 can also be designed to be 3mm, 4mm, 12mm, 15mm, etc., depending on requirements.
[0063] In an optional embodiment, the drive shaft 1, the first mounting post 11, the second mounting post 12, the first electrode 2, and the second electrode 3 are all made of gold-plated copper alloy to enhance conductivity and durability.
[0064] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this application that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this application and do not limit the scope of protection of this patent application.
Claims
1. A probe for testing, characterized by, include: Drive shaft (1); A first mounting post (11) and a second mounting post (12) extend along the Z-axis and are connected to the drive shaft (1); The first electrode (2) and the second electrode (3) each include an arm (21) and a needle (22). The arm (21) of the first electrode (2) and the second electrode (3) are respectively movably sleeved on the first mounting post (11) and the second mounting post (12). The arm (21) extends along the X-axis direction, which is perpendicular to the Z-axis direction. The needle (22) extends along the Z-axis direction and is used to contact the surface of the sample to be tested. The needle (22) is located at one end of the arm (21) along the X-axis direction. The first elastic element (4) and the second elastic element (5) abut against the first electrode (2) to apply a spring force to it along the Z-axis direction, and the second elastic element (5) abut against the second electrode (3) to apply a spring force to it along the Z-axis direction. A first limiting member (6) and a second limiting member (7), wherein the first limiting member (6) abuts against the first electrode (2) to limit its movement distance along the Z-axis, and the second limiting member (7) abuts against the second electrode (3) to limit its movement distance along the Z-axis.
2. The probe for testing according to claim 1, characterized in that, Both the first elastic element (4) and the second elastic element (5) are springs. The first elastic element (4) and the second elastic element (5) are respectively sleeved on the first mounting post (11) and the second mounting post (12). The two ends of the first elastic element (4) abut against the surface of the drive shaft (1) and the first electrode (2) respectively. The two ends of the second elastic element (5) abut against the surface of the drive shaft (1) and the second electrode (3) respectively.
3. The probe for testing according to claim 1, wherein, Both the first limiting member (6) and the second limiting member (7) are nuts. The first limiting member (6) and the second limiting member (7) are threadedly connected to the first mounting post (11) and the second mounting post (12) respectively. The first limiting member (6) abuts against the side of the first electrode (2) away from the first elastic member (4), and the second limiting member (7) abuts against the side of the second electrode (3) away from the second elastic member (5).
4. The probe for testing according to claim 1, wherein, The arm portion (21) has a sliding groove (211) extending along the X-axis direction. The first electrode (2) and the second electrode (3) are respectively sleeved on the first mounting post (11) and the second mounting post (12) through the sliding groove (211). When the first electrode (2) and the second electrode (3) move along the X-axis direction, the first mounting post (11) and the second mounting post (12) can slide in the sliding groove (211) along the X-axis direction.
5. The probe for testing according to claim 4, characterized in that, The two sides of the first mounting column (11) and the second mounting column (12) along the Y-axis direction are at least partially flat, and are fitted with the two side inner walls of the sliding groove (211) along the Y-axis direction; the Y-axis direction and the X-axis direction are both along the horizontal plane, and the Y-axis direction is perpendicular to the X-axis direction.
6. The probe for testing according to claim 5, characterized in that, The first mounting column (11) and the second mounting column (12) each include a cylindrical segment (111) and a prism segment (112), the cylindrical segment (111) is connected with the first limiting piece (6) or the second limiting piece (7), the two ends of the prism segment (112) are respectively connected with the cylindrical segment (111) and the driving shaft (1), and the prism segment (112) is sleeved with the sliding groove (211).
7. The probe for testing according to claim 6, characterized in that, One end of the prism segment (112) is provided with a threaded stud (113), one side of the driving shaft (1) is provided with a threaded hole (13), and the prism segment (112) is fixed with the driving shaft (1) by connecting the threaded stud (113) with the threaded hole (13).
8. A probe for testing according to any of claims 4-7, characterized in that, The length of the first electrode (2) or the second electrode (3) is 100 mm, and the width is 10 mm; the length of the sliding groove (211) is 20 mm to 85 mm, and the width is 5 mm to 8 mm.
9. A probe for testing according to any of claims 4-7, characterized in that, The surface of one side or both sides of the arm part (21) along the Z-axis direction is a frosted surface.
10. A probe for testing according to any one of claims 4-7, characterized in that, The driving shaft (1), the first mounting column (11), the second mounting column (12), the first electrode (2) and the second electrode (3) are all made of copper alloy material with surface gold plating.