Device for recovering photoresist

Abstract

The utility model discloses a photoresist recycling device which comprises a main body mechanism, the main body mechanism is trapezoidal and hollow, an operating table is fixedly arranged on the inclined surface of the main body mechanism, an operating button is arranged on the operating table, an opening is formed in the top of the main body mechanism, and a screen is arranged at the top of the main body mechanism. Wherein a plurality of fixedly arranged holes are formed in the exterior of the screen, mounting frames are arranged at the two ends of the outer side of the top of the main body mechanism, the shaking assembly is mounted at the back of the main body mechanism and used for conducting screening and filtering when photoresist is recycled, the mounting frames are fixedly mounted at the two ends of the exterior of the main body mechanism, and baffles are fixedly connected to the middles of the mounting frames. According to the photoresist recycling device disclosed by the utility model, through the arrangement of the shaking assembly, effective screening filtration, impurity removal and improvement of the purity of photoresist can be carried out when the photoresist is recycled, so that high-efficiency recycling is realized, a filter screen does not need to be frequently disassembled for cleaning, and the working efficiency is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of recycling equipment technology, specifically to a device for recycling photoresist. Background Technology

[0002] Traditional photoresist recycling devices often suffer from problems such as unreasonable structure, inconvenient operation, limited functionality, and insufficient stability. Structurally, they may lack a reasonable layout, resulting in a large footprint and inconvenience for placement and operation. Operationally, they lack convenient control buttons and smooth moving parts, making the operation process cumbersome and complex. Functionally, they may only have simple recycling functions and cannot meet diverse needs such as filtration and sieving. In terms of stability, traditional devices may be prone to shaking and loose connections during operation, affecting recycling results and work efficiency.

[0003] 202223342089.9, this photoresist production and recycling structure facilitates the removal of contaminants adhering to the filter plate, solving the problem of contaminants clogging the filter plate and reducing the frequency of filter plate replacement.

[0004] In view of this, we will study and improve the existing structure and its shortcomings, and provide a device for recycling photoresist in order to achieve a more practical purpose. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] To address the shortcomings of existing technologies, this invention provides a device for recycling photoresist, thus solving the aforementioned problems.

[0007] (II) Technical Solution

[0008] To achieve the aforementioned objectives, this utility model provides the following technical solution: a device for recycling photoresist, comprising a main body structure, the main body structure being trapezoidal and hollow inside, an operating table fixedly mounted on the inclined surface of the main body structure, and an operating button provided on the operating table, an opening provided at the top of the main body structure, and a screen installed at the top, wherein the screen has multiple fixedly arranged holes on its outer surface, and mounting brackets are provided at both ends of the top outer side of the main body structure, characterized in that it further comprises:

[0009] The shaking component is installed on the back of the main body and is used for sieving and filtering when recycling photoresist. Mounting brackets are fixedly installed at both ends of the main body, and a baffle is fixedly connected in the middle of the mounting bracket. The bottom of the baffle has holes for connecting the support column.

[0010] Preferably, a connecting plate is fixedly connected to the top of the main body, and a support plate is fixedly installed on the top of the connecting plate. A fixing frame is connected to the top of the support plate via a pipe. The fixing frame has a sliding groove inside and its bottom is fixedly connected to the top of the support plate.

[0011] Preferably, a belt is slidably connected to the inner groove of the fixing frame, and one end of the belt is rotatably connected to a gear, while the other end is also fixedly connected to the gear. Furthermore, upper fixing plates are fixedly connected to the top of both ends of the fixing frame.

[0012] Preferably, a motor is fixedly connected to the top of the upper fixing plate on the right side, and a hole is opened inside the upper fixing plate. A gear is fixedly installed at the bottom of the hole, and the bottom of the gear is fixedly connected to the top of the mounting base. A movable mounting platform is slidably connected to the outside of the belt.

[0013] Preferably, the front end of the mobile mounting platform is fixedly connected to an extension plate, and a funnel is fixedly installed at the front end of the extension plate, wherein a mesh is installed at the bottom of the funnel and multiple holes are provided.

[0014] Preferably, the shaking component includes a connecting post slidably connected to a hole opened inside the baffle, and a spring is sleeved on the outside of the connecting post, wherein one end of the spring is connected to the baffle and the other end is connected to the outside of the fixing frame.

[0015] Preferably, a motor is fixedly connected inside the fixed frame 2, and a support column is connected to the four corner pipes outside the motor 2. A spring 2 is sleeved on the outside of the support column, wherein the end of the spring 2 away from the motor 2 is fixedly connected to the inner wall of the fixed frame 2.

[0016] (III) Beneficial Effects

[0017] Compared with the prior art, the present invention provides a device for recycling photoresist, which has the following beneficial effects:

[0018] 1. The vibration component enables effective sieving and filtering during photoresist recycling, removing impurities and improving photoresist purity. This achieves high-efficiency recycling without the need for frequent filter disassembly and cleaning, significantly improving work efficiency.

[0019] 2. The holes at the bottom of the funnel allow the photoresist to flow slowly downwards, thus dissipating heat and spreading evenly on the screen, dissipating heat a second time. Furthermore, the gears cause the belt to move, which in turn moves the mounting frame and the funnel left and right, ensuring that the photoresist falls evenly onto the screen. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2This is a schematic diagram of the belt structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the vibration component structure of this utility model.

[0023] In the diagram: 1. Main structure; 2. Operating table; 3. Screen; 4. Connecting plate; 5. Mounting frame; 6. Support plate; 7. Mounting base; 8. Belt; 9. Motor 1; 10. Fixing frame 1; 11. Extension plate; 12. Funnel; 13. Movable mounting platform; 14. Gear; 15. Upper fixing plate; 16. Fixing frame 2; 17. Connecting column; 18. Baffle; 19. Spring 1; 20. Motor 2; 21. Support column; 22. Spring 2. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figure 1-3 An apparatus for recycling photoresist includes a main body 1, which is trapezoidal and hollow inside. An operating table 2 is fixedly mounted on the inclined surface of the main body 1, and the operating table 2 is equipped with operating buttons. An opening is provided at the top of the main body 1, and a screen 3 is mounted on the top. The screen 3 has multiple fixedly arranged holes on its exterior. Mounting brackets 5 are provided at both ends of the top outer side of the main body 1. The apparatus is characterized by further comprising:

[0026] The shaking component is installed on the back of the main body 1 and is used for sieving and filtering when recycling photoresist. Mounting brackets 5 are fixedly installed at both ends of the main body 1, and a baffle 18 is fixedly connected in the middle of the mounting bracket 5. The bottom of the baffle 18 has holes for connecting the support column.

[0027] Furthermore, a connecting plate 4 is fixedly connected to the top of the main body 1, and a support plate 6 is fixedly installed on the top of the connecting plate 4. A fixing bracket 10 is connected to the top of the support plate 6 via a pipe. The fixing bracket 10 has a sliding groove inside and is fixedly connected to the top of the support plate 6. The connecting plate 4 and the support plate 6 can fix the fixing bracket 10 to the main body 1.

[0028] Furthermore, a belt 8 is slidably connected to the slide groove inside the fixing frame 10, and one end of the belt 8 is rotatably connected to the gear 14, while the other end is also fixedly connected to the gear. The top of both ends of the fixing frame 10 is fixedly connected to an upper fixing plate 15.

[0029] Furthermore, a motor 9 is fixedly connected to the top of the upper fixed plate 15 on the right side, and a hole is opened inside the upper fixed plate 15. A gear 14 is fixedly installed at the bottom of the hole, and the bottom of the gear 14 is fixedly connected to the top of the mounting base 7. A movable mounting platform 13 is slidably connected to the outside of the belt 8. When the motor 9 is started, the gear rotates and drives the belt to move the mounting base 7 to the outside.

[0030] Furthermore, an extension plate 11 is fixedly connected to the front end of the mobile installation platform 13, and a funnel 12 is fixedly installed at the front end of the extension plate 11. A mesh is installed at the bottom of the funnel 12, and multiple holes are provided. The extension plate 11 drives the funnel 12 to move left and right so that it can spread the adhesive evenly.

[0031] Furthermore, the shaking assembly includes a second fixed frame 16, a connecting column 17, a baffle 18, and a first spring 19. The connecting column 17 is slidably connected to the hole opened inside the baffle 18, and the first spring 19 is sleeved on the outside of the connecting column 17. One end of the first spring 19 is connected to the baffle 18 and the other end is connected to the outside of the second fixed frame 16. The shaking assembly causes the connecting column 17 and the spring inside the baffle 18 to move left and right, which drives the mounting frame 5 to shake the screen.

[0032] Furthermore, a motor 20 is fixedly connected inside the fixed frame 2 16, and a support column 21 is connected to the four corner pipes outside the motor 20. A spring 22 is sleeved on the outside of the support column 21. The end of the spring 22 away from the motor 20 is fixedly connected to the inner wall of the fixed frame 2 16. After the motor 20 is started, the external support column 21 drives the spring 22 to move up and down, causing the fixed frame 2 16 to shake.

[0033] Working principle: The device is activated by the operation button on the component operation table 2, which is fixedly installed on the inclined surface of the main structure 1. When photoresist recycling is performed, the shaking component installed on the back of the main structure 1 starts to work. The structural connecting column 17 in the shaking component slides on the hole opened inside the structural baffle 18. The structural spring 19 is connected to the outside of the structural baffle 18 and the structural fixing frame 16, which plays a role in stabilization and power transmission. Through the movement of the shaking component, the photoresist inside the main structure 1 is screened and filtered to improve the recycling quality. At the top of the device, the structural connecting plate 4 connects the main structure 1 and the structural support plate 6. The structural fixing frame 10, which is connected to the top of the structural support plate 6, has a sliding groove inside. The structural belt 8 slides on the sliding groove. One end of the structural belt 8 is rotatably connected to the structural gear 14, and the other end... The connecting gear, through its rotation and the support of the structural gear 14, drives the structural belt 8 to slide on the slide groove. The top of the structural fixing plate 15, which is fixedly connected to both ends of the structural fixing frame 10, serves to fix and support the structure. The top of the right structural fixing plate 15 is fixedly connected to the structural motor 9. Holes are opened inside the structural fixing plate 15, and the structural gear 14 is fixedly installed at the bottom of the holes. The external of the structural belt 8 is slidably connected to the structural moving mounting platform 13. The front end of the structural moving mounting platform 13 is fixedly connected to the structural extension plate 11. The front end of the structural extension plate 11 is fixedly installed to the structural funnel 12. A mesh with multiple holes is installed at the bottom of the structural funnel 12 to further filter the photoresist. Through the coordinated action of various components, the entire device realizes the functions of photoresist recovery and sieving filtration, improving the efficiency and quality of photoresist recovery.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A device for recycling photoresist, comprising a main body mechanism (1) which is trapezoidal and hollow inside, an operation table (2) is fixedly installed on the slope of the main body mechanism (1), an operation button is arranged on the operation table (2), an opening is arranged on the top of the main body mechanism (1), a screen (3) is installed on the top, a plurality of fixedly arranged holes are arranged outside the screen (3), and mounting racks (5) are arranged at the two ends outside the top of the main body mechanism (1), characterized in that, Also includes: The shaking component is installed on the back of the main body (1) for sieving and filtering when recycling photoresist. The main body (1) is fixedly mounted with mounting brackets (5) at both ends. A baffle (18) is fixedly connected in the middle of the mounting bracket (5). The bottom of the baffle (18) has holes for connecting the support column.

2. The apparatus for recycling photoresist according to claim 1, wherein: The top of the main body (1) is fixedly connected to a connecting plate (4), and a support plate (6) is fixedly installed on the top of the connecting plate (4). The top of the support plate (6) is connected to a fixing frame (10), wherein the fixing frame (10) has a sliding groove inside and is fixedly connected to the top of the support plate (6) at the bottom.

3. The apparatus for recovering photoresist according to claim 2, wherein: A belt (8) is slidably connected to the groove inside the first fixing frame (10), and one end of the belt (8) is rotatably connected to the gear (14), and the other end is also fixedly connected to the gear. The top of both ends of the first fixing frame (10) is fixedly connected to the upper fixing plate (15).

4. The apparatus for recycling photoresist according to claim 3, wherein: The top of the upper fixed plate (15) on the right side is fixedly connected to a motor (9), and the upper fixed plate (15) has a hole inside, and a gear (14) is fixedly installed at the bottom of the hole. The bottom of the gear (14) is fixedly connected to the top of the mounting base (7), and a movable mounting platform (13) is slidably connected to the outside of the belt (8).

5. The apparatus for recycling photoresist according to claim 4, wherein: The front end of the mobile mounting platform (13) is fixedly connected to an extension plate (11), and a funnel (12) is fixedly installed at the front end of the extension plate (11). A mesh is installed at the bottom of the funnel (12), and multiple holes are provided.

6. The apparatus for recycling photoresist according to claim 1, wherein: The shaking component includes a connecting post (17) slidably connected to a hole opened inside the baffle (18), and a spring (19) is sleeved on the outside of the connecting post (17), wherein one end of the spring (19) is connected to the baffle (18) and the other end is connected to the outside of the fixing frame (16).

7. A device for recovering photoresist according to claim 6, characterized in that: The second fixed frame (16) is internally fixedly connected to the second motor (20), and the four corner pipes of the second motor (20) are connected to the support column (21), and the support column (21) is externally fitted with the second spring (22), wherein the end of the second spring (22) away from the second motor (20) is fixedly connected to the inner wall of the second fixed frame (16).

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