Cleaning device of mask gluing machine

Abstract

The utility model discloses a cleaning device of a mask plate gumming machine, which belongs to the technical field of gumming machines and comprises a workbench, a gumming machine turntable arranged at the top of the workbench, two linear guide rails arranged on the workbench, a lifting frame arranged between the two linear guide rails, a turntable cover plate arranged at the bottom of the lifting frame, and a motor arranged on the turntable cover plate. A chemical liquid pipe spray head is arranged on the workbench, and the top of the gluing machine turntable is sleeved with a placement seat. According to the rotary table cover plate cleaning device, the top of the rotary table of the gluing machine is sleeved with the containing base, the electric push rod is used for driving the extrusion block to move to extrude the side face of the rotary table of the gluing machine, and therefore the containing base is fixed to the rotary table of the gluing machine; and sewage generated by cleaning directly falls into the water receiving tank to be collected, so that the sewage is prevented from falling onto the rotary table of the gluing machine.

Description

Technical Field

[0001] This utility model relates to the field of glue coating machine technology, and more specifically, to a cleaning device for a mask glue coating machine. Background Technology

[0002] A photomask, also known as a photomask or photomask, uses quartz or soda glass as a substrate. First, a layer of chromium is deposited on the glass substrate. Then, photoresist is coated on the chromium layer to make it a photosensitive material. The designed circuit pattern is exposed to light through an electron laser device, and the exposed areas are developed and etched onto the chromium to form the circuit pattern, creating a photomask master similar to a negative after exposure. Coating the photoresist is a very important and crucial step in the photomask manufacturing process. The photoresist coating involves applying a layer of photosensitive material onto the photomask, and the coating machine needs to be cleaned after each use.

[0003] A search revealed that utility model patent CN211956116U discloses a cleaning device for a photomask coating machine. This device solves the problems of existing photomasks where, during spin coating, photoresist is splashed onto the coating machine's rotating disk and cover, causing it to solidify and clump, affecting photomask quality, and posing health risks to operators who inhale chemical solutions during removal. This utility model includes a main structure comprising an upper crossbar and a lower crossbar, with a support rod between them. The lower crossbar is detachably connected to the coating machine's rotating disk, and a cleaning component is mounted on the upper crossbar. This patent offers advantages such as replacing manual labor, avoiding chemical hazards, and improving production yield and efficiency. However, the aforementioned patent has the following shortcomings: waste liquid generated during cleaning falls directly onto the coating machine's rotating disk, making subsequent cleaning difficult; and cleaning the rotating disk with only a single brush is inefficient. Therefore, we propose a cleaning device for a photomask coating machine. Utility Model Content

[0004] In view of the problems existing in the prior art, the purpose of this utility model is to provide a cleaning device for a mask coating machine.

[0005] To solve the above problems, the present invention adopts the following technical solution:

[0006] A cleaning device for a photomask coating machine includes a workbench with a coating machine turntable on top. Two linear guide rails are mounted on the workbench, and a lifting frame is positioned between the two linear guide rails. A turntable cover is located at the bottom of the lifting frame. A chemical spray nozzle is mounted on the workbench. A placement seat is fitted onto the top of the coating machine turntable. A water collection trough is provided on the top surface of the placement seat, and multiple cleaning mechanisms are provided within the inner cavity of the water collection trough. A slot is provided on the bottom surface of the placement seat. The top of the coating machine turntable is movably fitted into the inner cavity of the slot. Multiple movable grooves are formed on the inner wall of the slot. Multiple electric push rods are fixedly mounted on the side of the placement seat, and the output ends of each electric push rod extend into the inner cavity of the movable groove and are fixedly connected to an extrusion block.

[0007] As a preferred embodiment of this utility model, the cleaning mechanism includes a mounting base fixedly installed at the bottom of the inner cavity of the water receiving tank. Two support columns are fixedly connected to the top surface of the mounting base. A U-shaped seat is fixedly connected to the top of the two support columns. A brush roller is rotatably connected to the inner side of the U-shaped seat. A servo motor is fixedly installed at the end of the U-shaped seat. The output shaft of the servo motor is connected to one end of the brush roller shaft. A protective cover is fixedly connected to the end of the U-shaped seat and outside the servo motor.

[0008] In a preferred embodiment of this utility model, an electrical control box is fixedly connected to the side of the placement base, a door is hinged to the outside of the electrical control box, a storage battery is provided on the inner wall of the electrical control box, and a control panel is fixedly installed on the inner wall of the electrical control box.

[0009] As a preferred embodiment of this utility model, a drain valve is fixedly installed on the outer side of the placement seat, and the end of the drain valve extends to the bottom of the inner cavity of the water receiving tank.

[0010] As a preferred embodiment of this utility model, a bolt is fitted on the mounting base, and the bottom end of the bolt is threaded to the bottom of the water receiving tank cavity.

[0011] In a preferred embodiment of this utility model, the side of the glue applicator turntable and the inner wall of the slot are in contact.

[0012] Compared with existing technologies, the advantages of this utility model are:

[0013] (1) In this utility model, the placement seat is placed on the top of the glue applicator turntable. The electric push rod drives the extrusion block to move and extrude the side of the glue applicator turntable, thereby fixing the placement seat on the glue applicator turntable. When the bottom surface of the turntable cover is cleaned by the cleaning mechanism and the chemical liquid nozzle, the wastewater generated by cleaning falls directly into the water collection tank for collection, thus preventing the wastewater from falling onto the glue applicator turntable.

[0014] (2) In this utility model, multiple mounting seats are installed in the inner cavity of the water receiving tank. Each mounting seat is equipped with a brush roller. Multiple servo motors are started to drive multiple brush rollers to rotate synchronously. When cleaning the bottom surface of the turntable cover, the synchronous cleaning of multiple brush rollers ensures the quality and efficiency of cleaning. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is an exploded view of the overall structure of this utility model;

[0017] Figure 3 This is a schematic diagram of the structure of the placement base of this utility model;

[0018] Figure 4 This is a schematic diagram of the structure of the U-shaped seat of this utility model.

[0019] The following are the labels in the diagram: 1. Workbench; 2. Glue applicator turntable; 3. Linear guide rail; 4. Lifting frame; 5. Turntable cover; 6. Chemical liquid nozzle; 7. Placement seat; 8. Movable slot; 9. Electric push rod; 10. Extrusion block; 11. Slot; 12. Water collection tank; 13. Cleaning mechanism; 14. Mounting seat; 15. Support column; 16. U-shaped seat; 17. Brush roller; 18. Servo motor; 19. Protective cover; 20. Electrical control box; 21. Box door; 22. Drain valve; 23. Battery; 24. Control panel; 25. Bolt. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0021] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "top / bottom," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "sleeved / connected," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0023] Example:

[0024] Please see Figure 1-4 A cleaning device for a photomask coating machine includes a workbench 1, a coating machine turntable 2 on the top of the workbench 1, two linear guide rails 3 on the workbench 1, a lifting frame 4 between the two linear guide rails 3, a turntable cover plate 5 at the bottom of the lifting frame 4, a chemical liquid nozzle 6 on the workbench 1, a placement seat 7 on the top of the coating machine turntable 2, a water receiving trough 12 on the top surface of the placement seat 7, multiple cleaning mechanisms 13 in the inner cavity of the water receiving trough 12, a slot 11 on the bottom surface of the placement seat 7, the top of the coating machine turntable 2 movably fitting into the inner cavity of the slot 11, multiple movable grooves 8 on the inner wall of the slot 11, and multiple electric push rods 9 fixedly installed on the side of the placement seat 7, the output ends of the multiple electric push rods 9 extending into the inner cavity of the movable grooves 8 and fixedly connected to an extrusion block 10.

[0025] For details, please refer to Figures 1 to 4 The cleaning mechanism 13 includes a mounting base 14 fixedly installed at the bottom of the inner cavity of the water receiving tank 12. Two support columns 15 are fixedly connected to the top surface of the mounting base 14. A U-shaped seat 16 is fixedly connected to the top of the two support columns 15. A brush roller 17 is rotatably connected to the inner side of the U-shaped seat 16. A servo motor 18 is fixedly installed at the end of the U-shaped seat 16. The output shaft of the servo motor 18 is connected to one end of the rotating shaft of the brush roller 17. A protective cover 19 is fixedly connected to the end of the U-shaped seat 16 and outside the servo motor 18.

[0026] In this embodiment, the servo motor 18 is protected by a protective cover 19.

[0027] For details, please refer to Figure 2 and Figure 3 An electrical control box 20 is fixedly connected to the side of the placement seat 7. A door 21 is hinged to the outside of the electrical control box 20. A storage battery 23 is installed on the inner wall of the electrical control box 20. A control panel 24 is fixedly installed on the inner wall of the electrical control box 20.

[0028] In this embodiment, the battery 23 is used to power the control panel 24, the electric push rod 9, and the servo motor 18, and the control panel 24 is used to control the electric push rod 9 and the servo motor 18.

[0029] For details, please refer to Figure 3 A drain valve 22 is fixedly installed on the outside of the placement seat 7, and the end of the drain valve 22 extends to the bottom of the inner cavity of the water receiving tank 12.

[0030] In this embodiment, the wastewater collected in the water tank 12 is released by opening the drain valve 22.

[0031] For details, please refer to Figure 3 and Figure 4 A bolt 25 is fitted on the mounting base 14, and the bottom end of the bolt 25 is threaded to the bottom of the inner cavity of the water receiving tank 12.

[0032] In this embodiment, the mounting base 14 is installed in the water receiving tank 12 by bolts 25.

[0033] For details, please refer to Figures 1 to 3 The side of the glue applicator turntable 2 fits against the inner wall of the slot 11.

[0034] In this embodiment, the stability of the placement seat 7 on top of the glue applicator turntable 2 is ensured.

[0035] Working principle: When it is necessary to clean the bottom surface of the turntable cover 5, first, place the placement seat 7 on the glue applicator turntable 2, and insert the top of the glue applicator turntable 2 into the inner cavity of the slot 11. At this time, start the electric push rod 9 to drive the extrusion block 10 to move. Use the extrusion block 10 to extrude the side of the glue applicator turntable 2 to fix the placement seat 7 on the glue applicator turntable 2. Then, start the linear guide rail 3 to drive the turntable cover 5 to move down, so that the bottom surface of the turntable cover 5 contacts the top surface of the brush roller 17. Start the glue applicator turntable 2 to drive the placement seat 7 and multiple brush rollers 17 to rotate synchronously. Then, start the servo motor 18 to drive the brush rollers 17 to rotate. At the same time, spray chemical liquid from the chemical liquid nozzle 6 to the bottom of the turntable cover 5 so that the bottom surface of the turntable cover 5 can be cleaned by the brush rollers 17. Finally, the wastewater generated from cleaning falls into the water receiving tank 12 to prevent wastewater from falling onto the glue applicator turntable 2.

[0036] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model based on the technical solution and its improved concept should be covered within the protection scope of the present utility model.

Claims

1. A cleaning device for a photomask coating machine, comprising a workbench (1), characterized in that: The top of the workbench (1) is provided with a glue applicator turntable (2). Two linear guide rails (3) are provided on the workbench (1), and a lifting frame (4) is provided between the two linear guide rails (3). A turntable cover plate (5) is provided at the bottom of the lifting frame (4). A chemical liquid nozzle (6) is provided on the workbench (1). A placement seat (7) is fitted on the top of the glue applicator turntable (2). A water receiving trough (12) is provided on the top surface of the placement seat (7). The inner cavity of the groove (12) is provided with multiple cleaning mechanisms (13), the bottom surface of the placement seat (7) is provided with a slot (11), the top of the glue applicator turntable (2) is movably sleeved into the inner cavity of the slot (11), the inner wall of the slot (11) is provided with multiple movable slots (8), and multiple electric push rods (9) are fixedly installed on the side of the placement seat (7). The output ends of the multiple electric push rods (9) extend into the inner cavity of the movable slots (8) and are fixedly connected to the extrusion block (10).

2. The cleaning device for a photomask coating machine according to claim 1, characterized in that: The cleaning mechanism (13) includes a mounting base (14) fixedly installed at the bottom of the inner cavity of the water receiving tank (12). Two support columns (15) are fixedly connected to the top surface of the mounting base (14). A U-shaped seat (16) is fixedly connected to the top of the two support columns (15). A brush roller (17) is rotatably connected to the inner side of the U-shaped seat (16). A servo motor (18) is fixedly installed at the end of the U-shaped seat (16). The output shaft of the servo motor (18) is connected to one end of the rotating shaft of the brush roller (17). A protective cover (19) is fixedly connected to the end of the U-shaped seat (16) and outside the servo motor (18).

3. The cleaning device for a photomask coating machine according to claim 1, characterized in that: An electrical control box (20) is fixedly connected to the side of the placement seat (7). A door (21) is hinged to the outside of the electrical control box (20). A storage battery (23) is provided on the inner wall of the electrical control box (20). A control panel (24) is fixedly installed on the inner wall of the electrical control box (20).

4. The cleaning device for a photomask coating machine according to claim 1, characterized in that: A drain valve (22) is fixedly installed on the outside of the placement seat (7), and the end of the drain valve (22) extends to the bottom of the inner cavity of the water receiving tank (12).

5. The cleaning device for a photomask coating machine according to claim 2, characterized in that: The mounting base (14) is fitted with a bolt (25), and the bottom end of the bolt (25) is threaded to the bottom of the inner cavity of the water receiving tank (12).

6. The cleaning device for a photomask coating machine according to claim 1, characterized in that: The side of the glue applicator turntable (2) and the inner wall of the slot (11) are in contact.

Images