Probe card cleaning device

Abstract

The utility model relates to the technical field of cleaning devices, in particular to a probe card cleaning device which comprises a washing box, a drying box, a storage box and an electric sliding rail. One side of the washing box is connected with a drying box through bolts, one side of the drying box is connected with a storage box through bolts, the drying box communicates with the storage box through a pipeline, the bottoms of the washing box, the drying box and the storage box are connected with a base, and the upper portion of the base is connected with two sets of electric sliding rails through stand columns. A sliding block is slidably connected between the two sets of electric sliding rails, and an electric push rod is connected into the sliding block in a penetrating mode. According to the probe card cleaning device, the clamp is placed in the drying box, the air blower is started to heat air through the electric heating wire and blow the air to the hollow-out cylinder from the air blowing disc, the probe card in the clamp is dried, meanwhile, the driving motor is started to drive the hollow-out cylinder to rotate, the probe card in the clamp is centrifugally spin-dried, and then the probe card cleaning device is rapidly dried.

Description

Technical Field

[0001] This utility model relates to the field of cleaning device technology, specifically a probe card cleaning device. Background Technology

[0002] A probe card is a test interface mainly used for testing bare chips. It connects the tester and the chip to transmit signals and complete the testing of chip parameters. After repeated use, probe cards are often contaminated, which affects their performance. They need to be cleaned with a cleaning device. However, existing probe card cleaning devices still have certain shortcomings in use.

[0003] Chinese utility model patent CN209969058U discloses a probe card cleaning device. The device includes: a cleaning tank for containing cleaning fluid, with a drain outlet at the bottom; a bracket fixed within the cleaning tank for supporting the probe card; at least one ultrasonic transducer connected to the cleaning tank for driving the cleaning fluid in the tank to vibrate at an ultrasonic frequency; and at least one first nozzle located within the cleaning tank for spraying gas onto the probe card to remove residual cleaning fluid from its surface. This utility model achieves efficient cleaning of the probe card while avoiding damage to the probe surface, thus improving the probe card's lifespan. However, this device has the following problems: While using a fixed nozzle to directly blow hot nitrogen for drying results in significant residual moisture on the probe card's surface after removal from the cleaning fluid, the drying process is slow and uneven. Utility Model Content

[0004] The purpose of this invention is to provide a probe card cleaning device to achieve rapid cleaning and drying of probe cards and maintain the uniformity of drying.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a probe card cleaning device, comprising: a washing box, a drying box, a storage box, and an electric slide rail;

[0006] A drying box is bolted to one side of the washing tank, and a storage box is bolted to one side of the drying box. The drying box and the storage box are connected by a pipe. A base is connected to the bottom of the washing tank, drying box, and storage box. Two sets of electric slide rails are connected to the top of the base via a column. A slider is slidably connected between the two sets of electric slide rails. An electric push rod is connected through the slider. The moving end of the electric push rod is connected to a storage mechanism. A drying mechanism and a rinsing mechanism are connected to the inner walls of the drying box and the storage box. An ultrasonic transducer is connected to the lower inner wall of the washing tank.

[0007] The storage mechanism includes a plate shell with an electric actuator moving end connected by bolts, and a hollow cylinder that rotates through the inner wall of the plate shell via a sealed bearing. A clamp is slidably connected inside the hollow cylinder.

[0008] Preferably, the upper surface of the shell is connected to a drive motor via a motor mount, and the output end of the drive motor passes through the inner wall of the shell and is connected to a gear via a coupling. One side of the gear is meshed with an external gear ring, which is connected to the outside of the hollow cylinder.

[0009] Preferably, the drying mechanism includes an air blowing plate connected to one side of the inner wall of the drying chamber by bolts, a U-shaped air pipe penetrating the front part of the inner wall of the air blowing plate, the U-shaped air pipe penetrating the front part of the inner wall of the drying chamber, and an irregularly shaped air pipe connected below the U-shaped air pipe.

[0010] Preferably, the end of the irregularly shaped air tube away from the U-shaped air tube penetrates the inner wall of the storage box and is connected to an empty shell, which is connected to the inner wall of the storage box by a bracket.

[0011] Preferably, a blower is connected to the bottom of the empty shell via a pipe, the blower is bolted to the inner wall of the storage box, and an electric heating wire is connected to the inner wall of the empty shell.

[0012] Preferably, the rinsing mechanism includes a water spray plate that is bolted to one side of the inner wall of the drying chamber near the back of the air blowing plate. A U-shaped water pipe is connected through the rear part of the inner wall of the water spray plate. The U-shaped water pipe is connected through the rear part of the inner wall of the drying chamber, and a non-circular water pipe is connected below the U-shaped water pipe.

[0013] Preferably, the end of the irregularly shaped water pipe away from the U-shaped water pipe passes through the inner wall of the storage box and is connected to a water pump, and the water pump is connected to one side of the partition of the storage box.

[0014] Preferably, a filter element is slidably connected to the inner wall of the storage box via a baffle, and a filter screen is slidably connected to the inner wall of the storage box near the filter element via a baffle.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows: This probe card cleaning device dries the probe cards inside the fixture by placing the fixture in a drying oven, starting a blower to heat air via a heating wire, and blowing air from an air blowing plate onto a perforated cylinder. Simultaneously, a drive motor is started to rotate the perforated cylinder, causing the probe cards inside the fixture to be centrifugally dried. This allows the probe card cleaning device to dry the probe cards quickly. The specific details are as follows:

[0016] 1. By placing the probe card into the fixture and cleaning it in the washing tank, the plate shell is placed above the drying box. The blower is started to send air into the empty shell and heat it to form hot air. Then the hot air is blown from the air blowing plate onto the hollow cylinder to dry the probe card in the fixture. At the same time, the drive motor is started to drive the fixture to rotate, centrifugally remove water from the probe card and dry it evenly, thus allowing the probe card cleaning device to dry quickly.

[0017] 2. By starting the drive motor to drive the fixture and the fixture to rotate, the water pump is started to spray water from the spray plate onto the hollow cylinder to rinse the probe card in the fixture, removing dust and other impurities. The wastewater is filtered through the filter screen and filter element and then pumped back to circulate continuously to prevent impurities from contaminating the washing liquid, thereby pre-cleaning the probe card cleaning device. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0019] Figure 2 This is a schematic diagram of the three-dimensional cross-sectional structure of the washing box of this utility model;

[0020] Figure 3 This is a schematic diagram of the main cross-sectional structure of the washing box of this utility model;

[0021] Figure 4 This is a schematic diagram of the rear view structure of this utility model;

[0022] Figure 5 This is a three-dimensional structural diagram of the irregular-shaped water pipe of this utility model;

[0023] Figure 6 This is a schematic diagram of the three-dimensional cross-sectional structure of the hollowed-out cylinder of this utility model.

[0024] In the diagram: 1. Washing box; 2. Drying box; 3. Storage box; 4. Electric slide rail; 5. Slider; 6. Electric push rod; 7. Storage mechanism; 701. Shell; 702. Hollow cylinder; 703. Clamp; 704. Drive motor; 705. Gear; 706. External gear ring; 8. Drying mechanism; 801. Air blowing plate; 802. U-shaped air pipe; 803. Irregularly shaped air pipe; 804. Empty shell; 805. Blower; 806. Heating wire; 9. Washing mechanism; 901. Water spray plate; 902. U-shaped water pipe; 903. Irregularly shaped water pipe; 904. Water pump; 905. Filter element; 906. Filter screen; 10. Ultrasonic transducer; 11. Base. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Please see Figures 1-4 and Figure 6 This utility model provides a technical solution: a probe card cleaning device, comprising: a washing tank 1, a drying tank 2, a storage tank 3, and an electric slide rail 4; the drying tank 2 is bolted to one side of the washing tank 1, and the storage tank 3 is bolted to one side of the drying tank 2, with the drying tank 2 and the storage tank 3 connected by a pipe; the storage tank 3 has holes for heat dissipation, and a cooling fan and filter are installed on the inner wall of the storage tank 3 for heat dissipation; a base 11 is connected to the bottom of the washing tank 1, the drying tank 2, and the storage tank 3; two sets of electric slide rails 4 are connected to the top of the base 11 via a column; a slider 5 is slidably connected between the two sets of electric slide rails 4; an electric push rod 6 is connected through the slider 5; and a storage mechanism 7 is connected to the moving end of the electric push rod 6; the drying tank 2 and the storage tank 3 are connected to the storage mechanism 7. A drying mechanism 8 and a rinsing mechanism 9 are connected to the inner wall of the box 3. An ultrasonic transducer 10 is connected to the lower inner wall of the washing box 1. The storage mechanism 7 includes a plate shell 701 whose moving end of an electric push rod 6 is connected by bolts. A hollow cylinder 702 is rotatably passed through the inner wall of the plate shell 701 through a sealed bearing. A clamp 703 is slidably connected inside the hollow cylinder 702. A protrusion is provided on the outer side of the bottom plate of the clamp 703 to prevent the clamp 703 from rotating inside the hollow cylinder 702. A drive motor 704 is connected to the upper surface of the plate shell 701 through a motor base. The output end of the drive motor 704 passes through the inner wall of the plate shell 701 and is connected to a gear 705 through a coupling. An external gear ring 706 is meshed on one side of the gear 705 and is connected to the outside of the hollow cylinder 702.

[0027] In practice, the probe is clamped onto the fixture 703, then the hollow cylinder 702 is opened, the fixture 703 is placed inside the hollow cylinder 702 and the cover plate of the hollow cylinder 702 is closed, the drive motor 704 is started to drive the gear 705 to drive the external gear ring 706 to rotate, and the external gear ring 706 drives the hollow cylinder 702 to rotate inside the shell 701, so that the probe in the fixture 703 is evenly rinsed during spraying, and then spun dry after rinsing, and evenly dried while blowing hot air.

[0028] See Figures 1-3 and Figure 5It is known that the drying mechanism 8 includes an air blowing plate 801 connected to one side of the inner wall of the drying chamber 2 by bolts. A U-shaped air pipe 802 is connected through the front part of the inner wall of the air blowing plate 801. The U-shaped air pipe 802 is connected through the front part of the inner wall of the drying chamber 2. A special-shaped air pipe 803 is connected below the U-shaped air pipe 802. The end of the special-shaped air pipe 803 away from the U-shaped air pipe 802 is connected through the inner wall of the storage box 3 and connected to an empty shell 804. The empty shell 804 is connected to the inner wall of the storage box 3 by a bracket. A blower 805 is connected to the bottom of the empty shell 804 by a pipe. The blower 805 is connected to the inner wall of the storage box 3 by bolts. An electric heating wire 806 is connected to the inner wall of the empty shell 804.

[0029] In practice, after cleaning, the shell 701 is placed above the drying oven 2, and the blower 805 is started to send air into the shell 804 to heat the heating wire 806 to form hot air. Then the hot air enters the blowing plate 801 from the shaped air pipe 803 and the U-shaped air pipe 802 and blows onto the hollow cylinder 702 to dry the probe card in the clamp 703, so that the probe card cleaning device can be dried quickly.

[0030] See Figures 1-5 It is known that the rinsing mechanism 9 includes a water spray plate 901 connected to the inner wall of the drying box 2 near the back of the air blowing plate 801 by bolts. A U-shaped water pipe 902 is connected through the rear part of the inner wall of the water spray plate 901. The U-shaped water pipe 902 is connected through the rear part of the inner wall of the drying box 2, and a special-shaped water pipe 903 is connected below the U-shaped water pipe 902. The end of the special-shaped water pipe 903 away from the U-shaped water pipe 902 passes through the inner wall of the storage box 3 and is connected to a water pump 904. The water pump 904 is connected to one side of the partition of the storage box 3. A filter element 905 is slidably connected to the inner wall of the storage box 3 by a baffle. A filter screen 906 is slidably connected to the inner wall of the storage box 3 near the filter element 905 by a baffle.

[0031] In practice, clean water is added to the drying box 2, the drive motor 704 is started to drive the clamp 703 and the clamp 703 to rotate, and the water pump 904 is started to send water through the special-shaped water pipe 903 and the special-shaped water pipe 903 into the spray plate 901. The water is sprayed from the spray plate 901 onto the hollow cylinder 702 to rinse the probe card in the clamp 703, removing dust, dirt and other impurities. The wastewater enters the collection box 3, is filtered by the filter screen 906 and the filter element 905, and is then pumped back by the water pump 904 for continuous circulation to prevent impurities from floating on the surface of the washing liquid or contaminating the washing liquid. At the same time, the washing liquid can be rinsed off after washing to pre-clean the probe card cleaning device.

[0032] In summary: When using this probe card cleaning device, firstly, add washing liquid to the washing tank 1 and clean water to the drying tank 2. Operate the controller on the column to start the electric push rod 6 to lift the plate 701, start the electric slide rail 4 to move the slider 5 above the drying tank 2, place the plate 701 on the drying tank 2, open the cover plate on the hollow cylinder 702, clamp the probe card to be cleaned on the clamp 703, then put the clamp 703 into the hollow cylinder 702 and close the cover plate of the hollow cylinder 702. Start the drive motor 704 to rotate the hollow cylinder 702 and the clamp 703. Then start the water pump 904 to spray water from the spray plate 901 to rinse the probe card in the clamp 703, removing dust and some floating impurities. Then start the electric slide rail 4 and the electric push rod 6 to place the plate 701 on the dryer. On the washing tank 1, the hollow cylinder 702 and the clamp 703 are inserted into the washing liquid inside the washing tank 1. The ultrasonic transducer 10 causes the washing liquid to vibrate and generate bubbles, which impact the probe card inside the clamp 703 to remove impurities and oxides. Then, the electric slide rail 4 and the electric push rod 6 are started again to place the plate shell 701 on the drying box 2. The drive motor 704 is started to rotate the hollow cylinder 702 and the clamp 703. The water pump 904 is started again to rinse away the washing liquid. Then the water pump 904 is turned off. When the hollow cylinder 702 and the clamp 703 rotate, most of the clean water is brushed away. Then the blower 805 and the heating wire 806 are started to blow hot air from the air plate 801 for drying. The cover plate of the hollow cylinder 702 is opened, the clamp 703 is pulled out, and the probe card is removed. The contents not described in detail in this description belong to the prior art known to those skilled in the art.

[0033] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A probe card cleaning device, characterized in that, include: Washing box (1), drying box (2), storage box (3) and electric slide rail (4); A drying box (2) is bolted to one side of the washing box (1), and a storage box (3) is bolted to one side of the drying box (2). The drying box (2) and the storage box (3) are connected by a pipe. A base (11) is connected to the bottom of the washing box (1), the drying box (2) and the storage box (3). Two sets of electric slide rails (4) are connected to the top of the base (11) by a column. A slider (5) is slidably connected between the two sets of electric slide rails (4). An electric push rod (6) is connected through the slider (5). A storage mechanism (7) is connected to the moving end of the electric push rod (6). A drying mechanism (8) and a rinsing mechanism (9) are connected to the inner walls of the drying box (2) and the storage box (3). An ultrasonic transducer (10) is connected to the lower part of the inner wall of the washing box (1). The storage mechanism (7) includes a plate shell (701) with the moving end of an electric push rod (6) connected by bolts. A hollow cylinder (702) is rotatably passed through the inner wall of the plate shell (701) by a sealed bearing. A clamp (703) is slidably connected inside the hollow cylinder (702).

2. The probe card cleaning device according to claim 1, characterized in that: The upper surface of the shell (701) is connected to a drive motor (704) via a motor mount. The output end of the drive motor (704) passes through the inner wall of the shell (701) and is connected to a gear (705) via a coupling.

3. The probe card cleaning device according to claim 2, characterized in that: The gear (705) is meshed with an external gear ring (706) on one side.

4. The probe card cleaning device according to claim 3, characterized in that: The external toothed ring (706) is connected to the outside of the hollow cylinder (702).

5. The probe card cleaning device according to claim 1, characterized in that: The drying mechanism (8) includes an air blowing plate (801) that is bolted to one side of the inner wall of the drying box (2).

6. The probe card cleaning device according to claim 5, characterized in that: A U-shaped air tube (802) is connected through the front part of the inner wall of the air blowing plate (801).

7. The probe card cleaning device according to claim 6, characterized in that: The U-shaped air tube (802) is connected through the front of the inner wall of the drying oven (2), and a non-circular air tube (803) is connected below the U-shaped air tube (802).

8. The probe card cleaning device according to claim 7, characterized in that: The end of the irregularly shaped air tube (803) away from the U-shaped air tube (802) penetrates the inner wall of the storage box (3) and is connected to the empty shell (804).

9. A probe card cleaning device according to claim 8, characterized in that: The empty shell (804) is connected to the inner wall of the storage box (3) by a bracket.

10. A probe card cleaning device according to claim 8, characterized in that: The bottom of the empty shell (804) is connected to a blower (805) via a pipe. The blower (805) is bolted to the inner wall of the storage box (3). A heating wire (806) is connected to the inner wall of the empty shell (804).

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