Roller mark detection equipment
By designing a roller print inspection device, a fixed light source and a rotating mechanism are used in conjunction with a camera to achieve efficient and accurate inspection of the silicon wafer surface. This solves the problem of timely detection and handling of roller print issues, thereby improving the production efficiency and quality of solar cells.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TONGWEI SOLAR ENERGY (MEISHAN) CO LTD
- Filing Date
- 2025-01-09
- Publication Date
- 2026-04-24
AI Technical Summary
In existing technologies, silicon wafers are easily damaged by roller marks during transportation, which leads to a decrease in the surface quality of solar cells. Moreover, roller mark problems are usually only discovered during the finished product inspection stage and cannot be dealt with in a timely manner.
A roller print detection device was designed, including a base frame, a first light source, a rotating mechanism, and a detection mechanism. Through the coordinated work of a fixed light source, a moving light source, and a camera, it can achieve efficient and accurate detection of the silicon wafer surface and detect roller print anomalies in advance during the production process.
It enables timely detection of roller marks on silicon wafer surfaces, improves production efficiency, reduces silicon wafer degradation, increases finished product yield, and solves the problem of the difficulty in judging and verifying machine anomalies.
Smart Images
Figure CN224163589U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of solar cells, and in particular to a roller print detection device. Background Technology
[0002] During the fabrication of solar cells, silicon wafers are easily damaged when they come into contact with the rollers of the production equipment during the transport phase, leaving roller marks on the wafer surface. These roller marks reduce the surface quality of the silicon wafer, thereby weakening the photoelectric conversion efficiency of the solar cell.
[0003] Roller marks are typically revealed during the finished product inspection stage using electroluminescence (EL) testing, manifesting as blackening of the solar cells. Because EL testing usually requires the solar cells to be powered on, roller mark issues are often only detected during this phase. However, this delayed detection means that roller mark problems are often not identified and addressed in a timely manner. Utility Model Content
[0004] In order to detect roller marks in a timely manner and to promptly report and handle abnormalities in finished solar cells caused by roller marks, this utility model discloses a roller mark detection device.
[0005] A roller print detection device, comprising:
[0006] A base frame having a detection area for placing a silicon wafer to be tested;
[0007] A first light source is mounted on the base frame and is used to illuminate the silicon wafer to light the surface of the silicon wafer;
[0008] A rotating mechanism, which is mounted on the base frame;
[0009] The detection mechanism includes a camera and a second light source disposed around the periphery of the camera. The camera is connected to the rotating mechanism and is used to rotate around the side of the silicon wafer under the drive of the rotating mechanism. The camera is used to acquire image information of the silicon wafer, and the second light source is used to emit light towards the silicon wafer.
[0010] As an optional implementation, in an embodiment of this utility model, there are a plurality of silicon wafers, and the plurality of silicon wafers are placed in a flower basket;
[0011] One side of the flower basket is located within the illumination area of the first light source, and the side of the flower basket is located within the detection area of the detection mechanism.
[0012] As an optional implementation, in one embodiment of this utility model, the flower basket has four corner areas on one side.
[0013] There are four first light sources, and each of the four first light sources is located near one of the four corner areas.
[0014] As an optional implementation, in an embodiment of this utility model, a connecting sleeve is provided on the camera surface, the connecting sleeve covering the camera surface except for the camera lens, and the second light source is fixed to the camera surface relative to the connecting sleeve.
[0015] As an optional implementation, in an embodiment of this utility model, the connecting sleeve includes:
[0016] First shell;
[0017] The second housing is connected to one end of the first housing;
[0018] The lens is located in the second housing, and the second light source is fixed to the surface of the first housing.
[0019] As an optional implementation, in an embodiment of this utility model, the first shell is in the shape of a hollow cuboid and has four sides;
[0020] There are four second light sources, which are respectively fixed to the four sides of the first housing. The second light sources are tilted relative to the sides of the first housing, and the tilt angle of the second light sources relative to the first housing is C, where C is 30°~35°.
[0021] And / or,
[0022] The second shell is in the shape of a hollow cylinder.
[0023] As an optional implementation, in an embodiment of this utility model, the base frame includes:
[0024] Base;
[0025] A first connecting rod is disposed on one side of the base. The first connecting rod is vertically disposed relative to the base. There are at least two first connecting rods and they are distributed opposite each other on opposite sides of the base.
[0026] The second link is disposed between the two first links, and the second link is horizontally disposed relative to the first link. The rotating mechanism is mounted on the second link.
[0027] The detection area is located on the surface of the base, and the height of the lens relative to the surface of the base is H, where H is 800mm~850mm.
[0028] As an optional implementation, in an embodiment of this utility model, the rotating mechanism includes:
[0029] A power component, which is connected to the second connecting rod;
[0030] A swing arm, one end of which is connected to the rotation shaft of the power component and the other end of which is connected to the camera, is used to drive the camera to rotate under the drive of the power component.
[0031] As an optional implementation, in an embodiment of this utility model, the swing arm is horizontally arranged relative to the surface of the base, the swing arm is connected to the first housing, and the angle between the first housing and the swing arm is D, where D is 40°~45°.
[0032] As an optional implementation, in an embodiment of this utility model, the roller print detection device includes a detection feedback system, the detection feedback system comprising:
[0033] A wafer picking and filling device is used to pick up and isolate the silicon wafers with the roller markings and fill the empty spaces in the basket;
[0034] A feeding machine is used to read the information of the basket and the silicon wafer bearing the roller print, and to feed the information back to the manufacturing execution system;
[0035] The manufacturing execution system determines the production line where the roller print abnormality occurs based on the information transmitted by the unloading machine.
[0036] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0037] This invention provides a roller mark detection device that achieves efficient and accurate detection of roller marks on silicon wafer surfaces through the coordinated action of a fixed first light source, a movable second light source, a camera, and a rotating mechanism. This device does not require the solar cells to be powered on in their finished state to detect roller marks, thus it can be used in the production process. For example, by installing the device near RCA cleaning equipment, abnormal silicon wafers with roller marks can be detected in advance, enabling rapid isolation of abnormal wafers, reducing degradation, and improving finished product yield. More importantly, the timely detection of roller marks that may appear on the silicon wafer surface effectively solves the problem of the difficulty in judging and verifying abnormal points on specific equipment due to the numerous and complex processes in solar cell manufacturing, thereby promoting improved production efficiency. Specifically, in this invention, the first light source is mounted on a base frame, and its position remains unchanged relative to the detection area, serving as a stable background light source to continuously provide uniform illumination to the silicon wafer surface. The second light source and camera rotate together with the swing arm under the drive of the rotating mechanism. During the rotation and movement, the second light source can illuminate the silicon wafer surface from multiple angles, thus achieving simultaneous observation and illumination of the silicon wafer from multiple angles. By cooperating with the fixed first light source and the synchronously moving camera and second light source, surface images of the silicon wafer can be captured from different angles, thereby significantly enhancing the accuracy and reliability of roller print recognition on the silicon wafer surface. Attached Figure Description
[0038] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0039] Figure 1 This is a schematic diagram of the overall structure of the roller print detection device disclosed in this embodiment of the utility model;
[0040] Figure 2 yes Figure 1 Enlarged structural diagram of section A in the middle;
[0041] Figure 3 yes Figure 1 Enlarged structural diagram of section B in the middle;
[0042] Figure 4 This is a schematic diagram illustrating the tilt angle C of the second light source relative to the first housing;
[0043] Figure 5 This is a schematic diagram illustrating that the second light source has four.
[0044] Figure 6This is a schematic diagram illustrating the height H of the camera lens relative to the base;
[0045] Figure 7 This is a schematic diagram illustrating the included angle D between the first housing and the swing arm.
[0046] Icons: 1. Base frame; 11. Detection area; 12. Base; 13. First connecting rod; 14. Second connecting rod; 2. First light source; 3. Rotation mechanism; 31. Power component; 32. Swing arm; 4. Detection mechanism; 41. Camera; 42. Second light source; 43. Connecting sleeve; 431. First housing; 432. Second housing; 5. Silicon wafer; 51. Roller print; 6. Flower basket. Detailed Implementation
[0047] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0048] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.
[0049] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances.
[0050] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.
[0051] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.
[0052] Roller marks are typically distributed in an intermittent pattern on the surface of silicon wafers. The presence of roller marks on a silicon wafer surface is generally not directly observable and requires specific lighting conditions to become visible. Therefore, this invention provides a roller mark detection device to promptly and accurately detect any abnormal roller marks on the surface of silicon wafers.
[0053] The technical solution of this utility model will be further described below with reference to the embodiments and accompanying drawings.
[0054] A roller print detection device, referring to Figure 1 and Figure 2 ,include:
[0055] The base frame 1 has a detection area 11, which is used to place the silicon wafer 5 to be tested;
[0056] First light source 2, the first light source 2 is mounted on the base frame 1, the first light source 2 is used to illuminate the silicon wafer 5 to illuminate the surface of the silicon wafer 5;
[0057] Rotating mechanism 3 is mounted on base frame 1;
[0058] The detection mechanism 4 includes a camera 41 and a second light source 42 disposed on the outer periphery of the camera 41. The camera 41 is connected to the rotating mechanism 3. The camera 41 is used to rotate around the side of the silicon wafer 5 under the drive of the rotating mechanism 3. The camera 41 is used to acquire image information of the silicon wafer 5. The second light source 42 is used to emit light in the direction of the silicon wafer 5.
[0059] This invention's roller mark detection device achieves efficient and accurate detection of roller marks 51 on the surface of silicon wafers 5 through the coordinated action of a fixed first light source 2, a movable second light source 42, a camera 41, and a rotating mechanism 3. This device does not require the solar cells to be powered on in their finished state to detect roller marks 51, thus it can be used in the production process. For example, by installing this device near RCA cleaning equipment, abnormal silicon wafers 5 with roller marks 51 can be detected in advance, enabling rapid isolation of abnormal silicon wafers 5, reducing degradation, and improving finished product yield. More importantly, the timely detection of roller marks 51 that may appear on the surface of silicon wafers 5 effectively solves the problem of the difficulty in judging and verifying abnormal points on specific machines due to the numerous and complex processes in solar cell manufacturing, thus promoting improved production efficiency. Specifically, in this invention, the first light source 2 is mounted on the base 1, and its position remains unchanged relative to the detection area 11, thus serving as a stable background light source to continuously provide uniform illumination to the surface of the silicon wafers 5. The second light source 42 and camera 41 rotate around the side of the silicon wafer 5 under the action of the rotating mechanism 3. During this rotation, the second light source 42 can illuminate the surface of the silicon wafer 5 from multiple angles, thus achieving simultaneous observation and illumination of the silicon wafer 5 from multiple angles. Figure 3 As shown, by using a fixed first light source 2 in conjunction with a synchronously moving camera 41 and a second light source 42, the surface image of the silicon wafer 5 can be observed and captured from different angles, thereby significantly enhancing the accuracy and reliability of identifying the roller print 51 on the surface of the silicon wafer 5.
[0060] It should be noted that the silicon wafer 5 in this utility model not only includes the original silicon wafer 5, but also includes intermediate product forms on the silicon wafer 5 that have been processed and deposited with specific functional films. That is, silicon wafers 5 at any processing stage are included within the scope of this utility model.
[0061] Reference Figure 1 In some embodiments, there are several silicon wafers 5, and several silicon wafers 5 are placed in a basket 6;
[0062] One side of the flower basket 6 is within the illumination range of the first light source 2, and the side of the flower basket 6 is within the detection range of the detection mechanism 4.
[0063] When several silicon wafers 5 are simultaneously placed in the basket 6 for inspection, the light from the fixed first light source 2 and the movable second light source 42 both illuminate a portion of the surface of the silicon wafer 5 through the gaps between adjacent silicon wafers 5. Since the roller marks 51 are generally distributed at intervals on the surface of the silicon wafer 5, the presence of roller marks 51 on the surface of the silicon wafer 5 can be determined by recording the image information of a portion of the surface of the silicon wafer 5. Therefore, by placing several silicon wafers 5 in the basket 6 and placing one side of the basket 6 within the illumination range of the first light source 2, while ensuring that this side is also within the moving detection range of the inspection mechanism 4, the detection of roller marks 51 on all silicon wafers 5 within the basket 6 can be achieved.
[0064] This method not only improves inspection efficiency but also avoids the tedious and time-consuming process of loading and unloading silicon wafers 5 one by one, thus significantly improving overall production efficiency. Secondly, the basket 6, a commonly used transportation and storage tool for silicon wafers 5, can be used directly during the inspection process without additional loading and unloading steps. This not only saves time and labor costs but also effectively prevents damage or contamination of the silicon wafers 5 that may occur during loading and unloading. This convenient inspection method allows the roller print inspection equipment to be more closely integrated into the production process.
[0065] Reference Figure 1 In some embodiments, one side of the flower basket 6 has four corner areas;
[0066] There are four first light sources 2, and the four first light sources 2 are located near the four corner areas respectively.
[0067] Considering that the flower basket 6 has four corner areas, this invention installs a first light source 2 near each of these four corner areas. This allows the first light source 2 to illuminate the silicon wafer 5 surface more evenly, ensuring a more balanced light distribution within the detection area 11. By emitting light simultaneously from the four corner areas of the flower basket 6, detection errors caused by uneven lighting can be minimized, improving the accuracy and reliability of identifying the roller mark 51 on the silicon wafer 5. Furthermore, the synergistic effect of the four first light sources 2 also helps to enhance the brightness of the entire detection area 11, enabling the camera 41 to capture more clearly the detailed information on the surface of the silicon wafer 5, further improving the detection effect.
[0068] Reference Figure 2 In some embodiments, a connecting sleeve 43 is fitted on the surface of the camera 41, covering the surface of the camera 41 except for the lens of the camera 41, and the second light source 42 is fixed to the surface of the camera 41 relative to the connecting sleeve 43.
[0069] The aforementioned connecting sleeve 43 ensures a stable connection between the second light source 42 and the camera 41, maintaining a relatively fixed position and stable illumination direction even as the camera 41 rotates around the side of the silicon wafer 5. This stable connection not only improves the accuracy of light illumination during the inspection process but also effectively avoids inspection errors caused by light source movement or position changes. Furthermore, because the connecting sleeve 43 is intentionally positioned to avoid the lens portion of the camera 41, it ensures that the camera 41 can properly capture image information of the silicon wafer 5 surface, thereby guaranteeing the clarity and accuracy of the inspection results.
[0070] Reference Figure 2 In some embodiments, the connecting sleeve 43 includes:
[0071] First shell 431;
[0072] The second housing 432 is connected to one end of the first housing 431;
[0073] The lens is located in the second housing 432, and the second light source 42 is fixed to the surface of the first housing 431.
[0074] The lens is housed in the second housing 432, while the second light source 42 is fixed to the surface of the first housing 431. This arrangement allows the light emitted by the second light source 42 to form a more uniform and optimized distribution in front of the lens. By optimizing the light distribution, the camera 41 can better capture image information of the silicon wafer 5 surface even in low-light environments, thereby further improving the accuracy and reliability of the roller print 51 detection.
[0075] Reference Figure 2 , Figure 4 and Figure 5 In some embodiments, the first housing 431 is in the shape of a hollow cuboid and has four sides;
[0076] There are four second light sources 42, which are fixed to the four sides of the first housing 431 respectively. The second light sources 42 are inclined relative to the sides of the first housing 431, such as... Figure 4 As shown, the tilt angle of the second light source 42 relative to the first housing 431 is C, where C is 30°~35°. For example, C can be 30°, 31°, 33° or 35°, etc.
[0077] Four second light sources 42 are fixed to the four sides of the first housing 431, forming multi-directional incident light. This synergistic effect of multi-directional incident light allows the camera 41 to capture more information about the surface details of the silicon wafer 5, thereby improving the accuracy and reliability of the roller mark 51 detection. Furthermore, the tilted arrangement not only ensures that the light is evenly distributed on the surface of the silicon wafer 5, increasing the likelihood of detecting the roller mark 51, but also enhances the brightness of the second light sources 42, enabling the camera 41 to capture more clearly the detailed information on the surface of the silicon wafer 5, further improving the detection effect.
[0078] Reference Figure 2 In some embodiments, the second housing 432 is in the shape of a hollow cylinder.
[0079] The second housing 432 is designed as a hollow cylinder, a shape that not only closely matches the shape of most camera lenses 41, but also ensures the stability and accuracy of the lens during installation and use.
[0080] Reference Figure 1 In some embodiments, the base frame 1 includes:
[0081] Base 12;
[0082] The first connecting rod 13 is disposed on one side of the base 12. The first connecting rod 13 is vertically disposed relative to the base 12. There are at least two first connecting rods 13, which are distributed opposite to each other on opposite sides of the base 12.
[0083] The second link 14 is located between the two first links 13. The second link 14 is horizontally arranged relative to the first links 13, and the rotating mechanism 3 is mounted on the second link 14.
[0084] Detection area 11 is located on the surface of base 12, such as Figure 6 As shown, the height of the lens relative to the surface of the base 12 is H, where H is 800mm to 850mm. For example, H can be 800mm, 810mm, 825mm, or 850mm, etc.
[0085] This height design not only matches the height specifications of most flower baskets 6 (the height of flower baskets 6 is usually between 260 mm and 280 mm), but also ensures that the second light source 42 and the camera 41 can fully illuminate the entire side of the flower basket 6, thereby effectively avoiding missed detection due to insufficient illumination range.
[0086] Reference Figure 1 In some embodiments, there are four first connecting rods 13, which are distributed in pairs on opposite sides of the base 12;
[0087] There are several second links 14, and these links 14 are connected in sequence to four first links 13.
[0088] By increasing the number of first link 13 and second link 14, the first link 13 and second link 14 are connected to each other, thereby improving the stability of the base frame 1.
[0089] Reference Figure 1 In some embodiments, the rotating mechanism 3 includes:
[0090] Power component 31, which is connected to the second link 14;
[0091] The swing arm 32 has one end connected to the rotation shaft of the power component 31 and the other end connected to the camera 41. The swing arm 32 is used to drive the camera 41 to rotate under the drive of the power component 31, thereby realizing comprehensive detection of the roller print 51 at different angles and positions.
[0092] Reference Figure 1 and Figure 2 In some embodiments, the swing arm 32 is horizontally positioned relative to the surface of the base 12, and the swing arm 32 is connected to the first housing 431, such as... Figure 7 As shown, the angle between the first housing 431 and the swing arm 32 is D, where D is 40°~45°. For example, D can be 40°, 42°, 44° or 45°, etc.
[0093] By limiting the illumination angle between the second light source 42 and the camera 41, it is ensured that the light can cover the area to be detected 11 more evenly, reducing the chance of missed detection due to insufficient light or improper angle, thereby effectively improving the detection effect.
[0094] In some embodiments, the roller print detection device includes a detection feedback system, which includes:
[0095] The wafer picking and filling equipment is used to pick up and isolate silicon wafers 5 with roller markings 51 and fill the empty spaces in the basket 6;
[0096] The unloading machine is used to read the information of the basket 6 and silicon wafer 5 with roller markings 51, and to feed the information back to the manufacturing execution system;
[0097] The manufacturing execution system identifies the production line where the roller mark 51 error occurs based on the information transmitted by the feeder.
[0098] The detection feedback system in this embodiment consists of a wafer picking and replacement device, a material unloading machine, and a manufacturing execution system (MES). Once a roller mark 51 is detected on a silicon wafer 5, the wafer picking and replacement device removes the specific silicon wafer 5 with the roller mark 51 and automatically fills the empty space in the basket 6 from the spare silicon wafers 5, ensuring the continuity of the production process. Simultaneously, the material unloading machine can read and record the information of the basket 6 and the silicon wafer 5 with the roller mark 51, and promptly feed this information back to the MES. Based on this information, the MES accurately locates the production line where the roller mark 51 anomaly occurs, providing strong support for subsequent troubleshooting and production optimization. This series of intelligent operations not only improves the efficiency of roller mark 51 detection and processing but also enhances the overall controllability and reliability of the production line.
[0099] The working process of the roller print detection device according to an embodiment of this utility model is described below:
[0100] First, a basket 6 containing several silicon wafers 5 is placed in the detection area 11 of the base frame 1. The first light source 2 is turned on, illuminating the side of the basket 6 while simultaneously illuminating a portion of the surface of the silicon wafers 5. Then, the rotation mechanism 3 is activated, causing the camera 41 of the detection mechanism 4 to rotate around the side of the silicon wafers 5 in the basket 6. During the rotation, the second light source 42 around the camera 41 also illuminates the silicon wafers 5. The roller mark 51 on the surface of the silicon wafers 5 is displayed under the combined action of the fixed first light source 2 and the movable second light source 42. The camera 41, which moves synchronously with the second light source 42, can capture images of a portion of the surface of the silicon wafers 5 through the gap between adjacent silicon wafers at the side position of the silicon wafers 5, thus obtaining image information on whether the surface of the silicon wafers 5 has the roller mark 51. This allows it to be determined whether the surface of the silicon wafers 5 has the roller mark 51. For silicon wafers 5 that are detected with roller mark 51, the wafer picking and replacement equipment of the detection feedback system will remove the silicon wafers 5 with roller mark 51 and replace the empty spaces in the basket 6 with spare silicon wafers 5. The unloading machine reads and records the information of the basket 6 and silicon wafers 5 with roller mark 51, and feeds this information back to the manufacturing execution system in a timely manner. The information fed back by the unloading machine of the manufacturing execution system can accurately locate the production line with roller mark 51, and the operator can then troubleshoot the production line, thereby resolving the roller mark 51 problem in a timely manner and improving product yield and production efficiency.
[0101] The roller print detection device disclosed in the embodiments of this utility model has been described in detail above. Specific examples have been used to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the roller print detection device and its core idea. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.
Claims
1. A roller print detection device, characterized in that, include: A base frame having a detection area for placing a silicon wafer to be tested; A first light source is mounted on the base frame and is used to illuminate the silicon wafer to light the surface of the silicon wafer; A rotating mechanism, which is mounted on the base frame; The detection mechanism includes a camera and a second light source disposed around the periphery of the camera. The camera is connected to the rotating mechanism and is used to rotate around the side of the silicon wafer under the drive of the rotating mechanism. The camera is used to acquire image information of the silicon wafer, and the second light source is used to emit light towards the silicon wafer.
2. The roller print detection device according to claim 1, characterized in that, The silicon wafers are of a plurality, and the plurality of silicon wafers are placed in a flower basket; One side of the flower basket is located within the illumination area of the first light source, and the side of the flower basket is located within the detection area of the detection mechanism.
3. The roller print detection device according to claim 2, characterized in that, The flower basket has four corner areas on one side; There are four first light sources, and each of the four first light sources is located near one of the four corner areas.
4. The roller print detection device according to claim 1, characterized in that, A connecting sleeve is fitted onto the camera surface, covering the camera surface except for the camera lens, and the second light source is fixed to the camera surface relative to the connecting sleeve.
5. The roller print detection device according to claim 4, characterized in that, The connecting sleeve includes: First shell; The second housing is connected to one end of the first housing; The lens is located in the second housing, and the second light source is fixed to the surface of the first housing.
6. The roller print detection device according to claim 5, characterized in that, The first shell is in the shape of a hollow cuboid and has four sides. There are four second light sources, which are respectively fixed to the four sides of the first housing. The second light sources are tilted relative to the sides of the first housing, and the tilt angle of the second light sources relative to the first housing is C, where C is 30°~35°. And / or, The second shell is in the shape of a hollow cylinder.
7. The roller print detection device according to claim 5, characterized in that, The base frame includes: Base; A first connecting rod is disposed on one side of the base. The first connecting rod is vertically disposed relative to the base. There are at least two first connecting rods and they are distributed opposite each other on opposite sides of the base. The second link is disposed between the two first links, and the second link is horizontally disposed relative to the first link. The rotating mechanism is mounted on the second link. The detection area is located on the surface of the base, and the height of the lens relative to the surface of the base is H, where H is 800 mm to 850 mm.
8. The roller print detection device according to claim 7, characterized in that, The rotating mechanism includes: A power component, which is connected to the second connecting rod; A swing arm, one end of which is connected to the rotation shaft of the power component and the other end of which is connected to the camera, is used to drive the camera to rotate under the drive of the power component.
9. The roller print detection device according to claim 8, characterized in that, The swing arm is horizontally positioned relative to the surface of the base. The swing arm is connected to the first housing. The angle between the first housing and the swing arm is D, where D is 40°~45°.
10. The roller print detection device according to claim 1, characterized in that, The roller print detection equipment includes a detection feedback system, which includes: A wafer picking and filling device is used to pick up and isolate the silicon wafers with the roller markings and fill the empty spaces in the basket; A feeding machine is used to read the information of the basket and the silicon wafer bearing the roller print, and to feed the information back to the manufacturing execution system; The manufacturing execution system determines the production line where the roller print abnormality occurs based on the information transmitted by the unloading machine.