Pin column surface cleaning tool

Abstract

The utility model provides a pin surface cleaning tool. The pin surface cleaning tool comprises a connector and a lining. A cylindrical first containing cavity with an opening in the lower portion is formed in the connector, and a driving shaft is arranged on the top of the connector in the vertical direction. The lining is fixedly arranged in the first containing cavity. The lining comprises a polishing section and a cutting section from top to bottom, a second containing cavity is formed in the polishing section, a third containing cavity is formed in the cutting section, a polishing layer used for polishing the surface of the pin column is arranged on the inner surface of the polishing section, and a cutting edge is arranged at the lower end of the cutting section in the circumferential direction. According to the technical scheme, the pin column can be sleeved with the third containing cavity and the second containing cavity, multi-section type cleaning can be conveniently and evenly carried out on crystal substances attached to the outer side of the pin column, and compared with a traditional mode that the pin columns are manually cleaned one by one through a blade or a scraper knife, the tool can remarkably improve the cleaning efficiency, reduce the downtime and improve the working efficiency. And normal development of subsequent processes is facilitated.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing, and more specifically, to a tool for cleaning the surface of pins. Background Technology

[0002] In semiconductor manufacturing, polishing machines are key pieces of equipment for producing high-quality semiconductor chips. Their primary function is to perform high-precision planarization on the surface of semiconductor wafers to ensure the smooth operation of subsequent processing steps. Polishing machines typically have multiple pins that engage with pin rings to ensure that all components (such as polishing discs, grinding heads, and planetary wheels) are correctly positioned and operate stably. During production, the gradual evaporation of water in the polishing slurry increases the solute concentration, making crystallization easier. Therefore, after a period of operation, a large amount of crystals usually adheres to the inner and outer pins of the polishing machine, causing the pin diameter to increase. Consequently, after replacing the pin ring, it may become impossible for the new pin ring to fit onto the pin.

[0003] In existing technologies, due to the lack of specialized cleaning tools, operators typically use blades or scrapers to manually scrape off the crystals adhering to the pin surface to facilitate the placement of the pin ring. However, in actual production, polishing machines may have hundreds of pins. Manually scraping each pin individually would consume a significant amount of manpower and require prolonged downtime, severely impacting production progress. This manual cleaning method is generally inefficient and often fails to achieve thorough cleaning, leaving some crystal residue. Furthermore, operators are prone to damaging the polishing machine's gaskets due to improper force control when scraping the pins, resulting in economic losses and further downtime. Therefore, there is a current need for a cleaning tool that can quickly and thoroughly remove crystals from polishing machine pins, reducing downtime, lowering costs, and minimizing the risk of polishing machine damage. Utility Model Content

[0004] The purpose of this application is to provide a pin surface cleaning tool, which can conveniently and evenly clean the crystals attached to the outside of the pin by fitting the pin inside the third and second receiving cavities. Compared with the traditional method of manually cleaning the pins one by one with blades or scrapers, this tool can significantly improve cleaning efficiency, reduce downtime, and facilitate the normal operation of subsequent processes.

[0005] This application provides a tool for cleaning the surface of a pin, including a connector and a liner. The connector has a cylindrical first receiving cavity with an opening at the bottom, and a drive shaft is vertically positioned at the top. The liner is fixedly disposed inside the first receiving cavity. The liner includes a polishing section and a cutting section from top to bottom. The polishing section has a second receiving cavity, and the cutting section has a third receiving cavity. The inner surface of the polishing section is provided with a polishing layer for grinding the pin surface, and the lower end of the cutting section has a circumferentially oriented cutting edge.

[0006] In one feasible embodiment, the inner diameter of the second receiving cavity remains consistent from top to bottom, while the inner diameter of the third receiving cavity gradually increases from top to bottom, and the inner diameter of the second receiving cavity is the same as the inner diameter of the upper opening of the third receiving cavity.

[0007] In one feasible embodiment, a first positioning hole is provided through the connector sidewall, and a corresponding second positioning hole is provided on the inner liner side. The pin surface cleaning tool also includes a positioner that passes through the first and second positioning holes in sequence, so that the connector and the inner liner remain relatively stationary during use.

[0008] In one feasible solution, internal threads are provided on the inner sides of both the first and second positioning holes, and the positioning device is a fixing screw, which is sequentially threaded to the first and second positioning holes.

[0009] In one feasible approach, the lower end of the cutting edge is provided with serrations along the circumference.

[0010] In one feasible approach, the cutting edge forms an angle of 30°–60° with the horizontal plane.

[0011] In one feasible embodiment, the pin surface cleaning tool also includes a driver that is poweredly connected to a drive shaft for driving the connector to rotate.

[0012] In one feasible solution, the connector is made of stainless steel.

[0013] In one feasible solution, the lining is made of homopolymer polypropylene.

[0014] In one feasible approach, the surface of the polished layer is provided with a textured surface to increase the friction between the polished layer and the crystallized material on the surface of the pin.

[0015] Compared with the prior art, the beneficial effects of this application include at least the following:

[0016] This application provides a pin surface cleaning tool that fits the pin inside a third and second receiving cavity. By cooperating with an external drive device, the connector and inner liner rotate around their own axis, facilitating the removal of crystalline deposits adhering to the outer side of the pin. Compared to the traditional method of manually cleaning pins one by one with blades or scrapers, this tool significantly improves cleaning efficiency and reduces downtime. Furthermore, this pin surface cleaning tool can scrape the pin surface more evenly, avoiding the excessive force that can occur with manual scraping, thus reducing the possibility of equipment damage and lowering the cost of equipment maintenance and replacement. In addition, since the inner liner includes a polishing section and a cutting section, multi-stage cleaning of the pin is possible. The cutting edge at the lower part of the cutting section can initially remove most of the crystalline deposits on the pin surface, while the inner wall of the polishing section can grind the pin surface, further cleaning any remaining crystalline deposits. Compared to traditional manual cleaning methods, this multi-stage cleaning method can more thoroughly clean the pin surface, reduce crystalline residue, and facilitate the normal operation of subsequent processes. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a first side view of a pin surface cleaning tool according to an embodiment of this application;

[0019] Figure 2 This is a second side view of a tool for cleaning the surface of a pin.

[0020] In the diagram: 1. Connector; 2. Liner; 3. Positioner; 4. Driver; 5. Pin;

[0021] 101. First receiving cavity; 102. Drive shaft; 111. First positioning hole;

[0022] 201. Polishing section; 202. Cutting section;

[0023] 212. Second receiving cavity; 213. Third receiving cavity; 221. Cutting edge; 222. Second positioning hole. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0026] like Figure 1 and Figure 2 As shown, this application provides a pin surface cleaning tool for removing crystals from the surface of a pin. The pin surface cleaning tool includes a connector 1 and an inner liner 2. The connector 1 has a cylindrical first receiving cavity 101 with an opening at the bottom, and a drive shaft 102 is vertically arranged at the top. The inner liner 2 is fixedly disposed inside the first receiving cavity 101. The inner liner 2 includes a polishing section 201 and a cutting section 202 from top to bottom. The polishing section 201 has a second receiving cavity 212, and the cutting section 202 has a third receiving cavity 213. The inner surface of the polishing section 201 is provided with a polishing layer for grinding the pin surface, and the lower end of the cutting section 202 has a cutting edge 221 arranged circumferentially.

[0027] Preferably, the inner diameter of the second receiving cavity 212 remains consistent from top to bottom, while the inner diameter of the third receiving cavity 213 gradually increases from top to bottom. Specifically, the inner diameter of the second receiving cavity 212 is the same as the inner diameter of the upper opening of the third receiving cavity 213, creating a smooth transition between the two accommodating cavities. The diameter of the second receiving cavity is larger than the diameter of the clean pin, but smaller than the diameter of the dirty pin covered with crystals. For example, in actual production, the diameter of the clean pin is 8 mm, the diameter of the dirty pin covered with crystals is typically 8.1-8.15 mm, the diameter of the lower opening of the third receiving cavity 213 can be 8.05 mm-8.08 mm, and the inner diameters of the second receiving cavity 212 and the upper openings of the third receiving cavity 213 can be 8.03-8.05 mm.

[0028] Preferably, the polishing layer can be made of high-precision abrasive materials, such as diamond particles, silicon carbide, or alumina. High-precision abrasive materials have high hardness and good wear resistance, enabling efficient removal of crystalline deposits during polishing while maintaining their structural stability. Furthermore, an uneven texture can be formed on the surface of the polishing layer to increase the friction between the polishing layer and the crystalline deposits on the pin surface. For example, wavy textures, mesh textures, dotted textures, or spiral textures can be formed; no further limitations are imposed here.

[0029] In use, the drive shaft 102 can be connected to an external drive device (such as an electric drill). Starting the drive device will cause the connector 1 and the inner liner 2 to rotate at high speed. Then, the pin surface cleaning tool is placed directly above the pin to be cleaned and moved downwards, causing the pin to sequentially insert into the third receiving cavity 213 and the second receiving cavity 212. During the movement, the cutting edge 221, through high-speed rotation, can initially remove the crystals on the pin surface. Furthermore, the removed crystals are flung out by the rotation, thus preventing crystal accumulation on the cutting edge 221 surface and ensuring the cleaning process proceeds smoothly. After the initial removal, the pin sequentially enters the third receiving cavity 213 and the second receiving cavity 212. As the inner diameter of the third receiving cavity 213 gradually decreases, the remaining crystal layer on the pin surface comes into contact with the inner walls of the third receiving cavity 213 and the second receiving cavity. Under the action of high-speed rotation, the crystals are further polished by the polishing layer of the second receiving cavity 212, thereby significantly reducing or completely removing the crystals on the pin surface. After removing all crystals, turn off the drive unit and lift the pin surface cleaning tool to detach it from the pin.

[0030] The pin surface cleaning tool of this application allows the pin to be fitted inside the third and second receiving cavities. By cooperating with an external drive device, the connector and liner rotate around their own axis, facilitating the removal of crystalline deposits adhering to the outer side of the pin. Compared to the traditional method of manually cleaning each pin individually with blades or scrapers, this tool significantly improves cleaning efficiency and reduces downtime. Furthermore, the pin surface cleaning tool of this application can scrape the pin surface more evenly, avoiding excessive force in certain areas that may occur with manual scraping, thus reducing the possibility of equipment damage and lowering the cost of equipment maintenance and replacement. In addition, since the liner includes a polishing section and a cutting section, multi-stage cleaning of the pin is possible. The cutting edge at the lower part of the cutting section can initially remove most of the crystalline deposits on the pin surface, while the inner wall of the polishing section can grind the pin surface, further cleaning any remaining crystalline deposits. Compared to traditional manual cleaning methods, this multi-stage cleaning method can more thoroughly clean the pin surface, reduce crystalline residue, and facilitate the normal operation of subsequent processes.

[0031] In one embodiment, such as Figure 1 As shown, a first positioning hole 111 is provided through the side wall of connector 1, and a corresponding second positioning hole 222 is provided on the side of the inner liner 2. The pin surface cleaning tool also includes a positioner 3, which passes through the first positioning hole 111 and the second positioning hole 222 in sequence, so that connector 1 and inner liner 2 remain relatively stationary during use. Specifically, the positioner 3 can be a fixing pin, and the diameter of the positioner 3, the inner diameter of the first positioning hole 111, and the inner diameter of the second positioning hole 222 are matched with each other, so that when an external drive device drives connector 1 to rotate, inner liner 2 can rotate synchronously with connector 1.

[0032] In one embodiment, internal threads may be provided on the inner sides of both the first positioning hole 111 and the second positioning hole 222. The locator 3 is a fixing screw (not shown in the figure), and the locator 3 is sequentially threaded to the first positioning hole 111 and the second positioning hole 222. Using a fixing screw as the locator 3 can better ensure that the connector 1 and the inner liner 2 are connected as a whole, preventing them from coming off during high-speed rotation. Preferably, the head of the fixing screw may be provided with a gripping part for easy manual operation by the operator.

[0033] In one embodiment, the lower end of the cutting edge 221 is provided with serrations (not shown in the figure) along the circumferential direction. The serrated design can increase the contact area and friction between the cutting edge 221 and the crystal, thereby improving cutting efficiency. After the serrations are provided, the cutting edge 221 can cut into the crystal more effectively, reduce cutting force, and increase cutting speed. In addition, the serrated design can disperse cutting force, reduce wear on the cutting edge, and extend tool life. Specifically, the serrations can be designed as triangles, rectangles, or other shapes. Triangular serrations can cut into the crystal better and are suitable for harder crystals, while rectangular serrations have a larger cutting area and are suitable for softer crystals. The serration size needs to be designed according to the characteristics of the crystal on the pin surface. For example, if the crystal is thick, a larger serration height and spacing can be designed, while if the crystal is thin, a smaller serration height and spacing can be designed. The specific serration shape and size (such as height, spacing, etc.) and other parameters can be selected according to actual needs and processing technology, and are not limited here.

[0034] In one embodiment, the cutting edge 221 forms an angle of 30°-60° with the horizontal plane, for example, 30°, 45°, or 60°. The main purpose of this design is to optimize the cutting performance of the cutting edge, making it more efficient and stable in removing crystals from the surface of the pin. The choice of angle has a significant impact on cutting efficiency, cutting force distribution, and tool durability. Specifically, when the angle is small, the cutting angle of the cutting edge 221 is relatively gentle, suitable for removing softer crystals, reducing cutting force and avoiding excessive wear of the cutting edge; when the angle is large, the cutting angle of the cutting edge 221 is relatively steep, suitable for removing harder crystals, enabling more effective cutting into the crystals and improving cutting efficiency.

[0035] In one embodiment, such as Figure 1 and Figure 2 As shown, the pin surface cleaning tool also includes a driver 4, which is poweredly connected to the drive shaft 102 and used to drive the connector 1 to rotate. Specifically, an electric driver, a pneumatic driver, or a manual driver can be used as the driver 4. For example, a hand drill capable of stepless speed regulation can be used as the driver 4, with the drive shaft 102 directly connected to the driver 4. During use, the driver 4 can adjust the speed and torque as needed to achieve precise control of the cleaning process.

[0036] In one embodiment, connector 1 can be made of stainless steel, and liner 2 can be made of homopolymer polypropylene (PPH). Stainless steel has high mechanical strength and good corrosion resistance, as well as good wear resistance and fatigue resistance, ensuring that the connector maintains good working condition during long-term use and reducing wear and deformation. Homopolymer polypropylene has excellent chemical corrosion resistance, resisting the erosion of various acids, alkalis, and solvents, making it particularly suitable for cleaning chemical equipment and chemical crystals. It also has good toughness, which can absorb impact to a certain extent, reducing the risk of tool damage during use.

[0037] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A tool for cleaning the surface of a pin, used to remove crystalline deposits from the surface of a pin, characterized in that, include: The connector (1) has a cylindrical first receiving cavity (101) with an opening at the bottom inside, and a drive shaft (102) is provided at the top in a vertical direction; The inner liner (2) is fixedly disposed inside the first receiving cavity (101); the inner liner (2) includes a polishing section (201) and a cutting section (202) from top to bottom, the polishing section (201) is provided with a second receiving cavity (212), and the cutting section (202) is provided with a third receiving cavity (213); the inner surface of the polishing section (201) is provided with a polishing layer for grinding the surface of the pin, and the lower end of the cutting section (202) is provided with a cutting edge (221) along the circumferential direction.

2. The pin surface cleaning tool according to claim 1, characterized in that, The inner diameter of the second receiving cavity (212) remains consistent from top to bottom, while the inner diameter of the third receiving cavity (213) gradually increases from top to bottom. The inner diameter of the second receiving cavity (212) is the same as the inner diameter of the upper opening of the third receiving cavity (213).

3. The pin surface cleaning tool according to claim 1, characterized in that, The connector (1) has a first positioning hole (111) through it on its side wall, and the inner liner (2) has a corresponding second positioning hole (222) on its side. The pin surface cleaning tool also includes a locator (3), which passes through the first locating hole (111) and the second locating hole (222) in sequence, so that the connector (1) and the liner (2) remain relatively stationary during use.

4. The pin surface cleaning tool according to claim 3, characterized in that, The first positioning hole (111) and the second positioning hole (222) are both provided with internal threads. The positioning device (3) is a fixing screw. The positioning device (3) is sequentially threaded to the first positioning hole (111) and the second positioning hole (222).

5. The pin surface cleaning tool according to claim 1, characterized in that, The lower end of the cutting edge (221) is provided with serrations along the circumference.

6. The pin surface cleaning tool according to claim 1, characterized in that, The cutting edge (221) forms an angle of 30°-60° with the horizontal plane.

7. The pin surface cleaning tool according to claim 1, characterized in that, It also includes a driver (4), which is poweredly connected to the drive shaft (102) for driving the connector (1) to rotate.

8. The pin surface cleaning tool according to claim 1, characterized in that, The connector (1) is made of stainless steel.

9. The pin surface cleaning tool according to claim 1, characterized in that, The inner lining (2) is made of homopolymer polypropylene.

10. The pin surface cleaning tool according to claim 1, characterized in that, The surface of the polished layer is provided with a textured surface to increase the friction between the polished layer and the crystals on the surface of the pin.

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