Bottle storage system

Abstract

The utility model discloses a storage bottle system which comprises a storage bottle and a control unit, and the control unit is connected with the storage bottle. The storage bottle comprises a height adjustable structure, and the height adjustable structure is used for adjusting the height of the storage bottle. By means of the system, the height of the liquid steel cylinder can be adjusted, process parameters can be automatically adjusted on line, the replacement period and the PM period of the steel cylinder can be prolonged, the more efficient and stable deposition process is achieved, and meanwhile manual intervention and operation cost are reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a storage bottle system. Background Technology

[0002] In the semiconductor industry, ALD (Atomic Layer Deposition) is a precise process for thin film deposition, characterized by the formation of atomic-level thin films on a substrate surface through layer-by-layer reactions. ALD employs methods such as... Figure 1 The process, as shown in the diagram, typically involves the following key steps: First, a first chemical precursor is introduced into the reaction chamber. This chemical source reacts with the substrate surface to form the first layer of the thin film. Next, an inert gas, such as nitrogen or argon, is introduced into the reaction chamber to purge it, removing unreacted chemical sources and byproducts, ensuring a clean environment within the reaction chamber to avoid affecting subsequent deposition processes. Then, a second chemical source is introduced, which typically reacts with the first chemical source to further promote film formation. Finally, an inert gas is introduced again for purging to remove excess chemical sources and byproducts. By repeatedly performing this series of cyclical steps, a thin film of the desired thickness is gradually accumulated and formed.

[0003] In some ALD (Alternating Current Discharge) devices, liquid or solid chemical sources are used as reaction precursors. In this case, a carrier gas guides the chemical source from the source container and introduces it into the reaction chamber for reaction. As the process cycle progresses, the total amount of liquid source gradually decreases, causing the liquid level to drop. Since the container volume is fixed, the drop in liquid level increases the void space at the top of the container, which affects the stability of the process and the deposition quality. To ensure stable film quality, many process schemes are adjusted based on parameters such as liquid level height and temperature. Therefore, when the liquid level drops outside the predetermined range, it is often necessary to optimize the process by adjusting the gas inlet time, replenishing the source liquid, adjusting the temperature, or replacing the source container. However, existing adjustment methods have certain limitations, including excessive manual intervention, low automation, and difficulty in effectively extending the liquid cylinder replacement cycle and PM (Preventive Maintenance Cycle) cycle.

[0004] Therefore, it is necessary to design a new system that can adjust the height of liquid cylinders, automatically adjust process parameters online, and extend cylinder replacement and PM cycles, thereby achieving a more efficient and stable deposition process while reducing manual intervention and operating costs. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a storage bottle system.

[0006] To solve the above-mentioned technical problems, the purpose of this utility model is achieved through the following technical solution: providing a storage bottle system, including: a storage bottle and a control unit, wherein the control unit is connected to the storage bottle; the storage bottle includes a height-adjustable structure, wherein the height-adjustable structure is used to adjust the height of the storage bottle.

[0007] The further technical solution is as follows: the storage bottle includes a bottle body, an opening is provided at the bottom of the bottle body, the height adjustable structure is assembled into the opening, and the control unit is connected to the height adjustable structure.

[0008] The further technical solution is as follows: the height-adjustable structure includes a power component, a base, and a compressible ring. The power component is connected to the base, the base is mounted on one end of the compressible ring, and the other end of the compressible ring is mounted on the opening. The power component is connected to the control unit.

[0009] A further technical solution is that the compressible ring body includes a bellows.

[0010] The further technical solution is as follows: the corrugated pipe is welded to the opening, and the corrugated pipe is welded to the base.

[0011] The further technical solution is as follows: the power assembly includes a drive structure and a power source, the drive structure is connected to the base, and the power source is connected to both the drive structure and the control unit.

[0012] The further technical solution is as follows: the control unit includes a sensor and a control component, one end of the sensor is built into the storage bottle, and the sensor is connected to the control component; the control component is connected to the power component.

[0013] The further technical solution is as follows: the control component includes a liquid level controller, a power controller, and an industrial computer; the power controller is connected to the power component; the liquid level controller is connected to the sensor; and the industrial computer is connected to both the liquid level controller and the power controller.

[0014] A further technical solution is that a valve is connected to the top of the storage bottle.

[0015] The further technical solution is that the valve is a pneumatic valve.

[0016] The advantages of this invention compared to existing technologies are as follows: This invention achieves automatic adjustment of the liquid cylinder height through a height-adjustable storage bottle and a connected control unit. The control unit monitors liquid level changes in real time and adjusts the liquid cylinder height and gas flow rate by precisely controlling the motor drive and pneumatic valves, ensuring balance between the liquid surface and the top space of the cylinder. This system not only achieves online automatic adjustment of process parameters and optimizes the deposition process, but also extends the cylinder replacement and PM (particulate matter) cycle, thereby improving system efficiency and stability and reducing manual intervention and operating costs.

[0017] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A schematic diagram of the structure of an ALD device provided for the prior art;

[0020] Figure 2 A schematic diagram of a storage bottle system provided in an embodiment of this utility model;

[0021] Explanation of the markings in the image:

[0022] 10. Storage bottle; 11. Base; 12. Compressible ring; 13. Bottle body; 20. Valve; 30. Sensor; 40. Drive structure. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0024] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0025] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0026] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0027] In the semiconductor industry, atomic layer deposition (ALD) is a precise thin-film deposition process that forms atomic-level thin films on a substrate surface through layer-by-layer reactions. The process involves introducing a chemical precursor, purging the reaction chamber, introducing a second chemical source, and purging again, repeating this cycle to gradually form the film. However, when using liquid or solid chemical sources, the liquid level in the container drops as the source liquid gradually decreases, affecting process stability and film quality. Existing adjustment methods suffer from problems such as high levels of manual intervention and low automation, and are difficult to effectively extend the cycle time of liquid cylinders and preventative maintenance.

[0028] Therefore, this utility model provides a storage bottle system that enables adjustable liquid cylinder height, online automatic adjustment of process parameters, and extended cylinder replacement and PM cycles, achieving a more efficient and stable deposition process while reducing manual intervention and operating costs.

[0029] Specifically, this storage bottle system achieves height adjustment of the liquid cylinder through a height-adjustable design. Its core is the connection between the control unit and the storage bottle 10, which, combined with the height-adjustable structure, power assembly, and compressible ring 12, allows for online automatic adjustment of process parameters. The system monitors the liquid level through sensors 30 and the control assembly, and, in conjunction with the power controller and liquid level controller, achieves automatic adjustment and optimization. The design of the valve 20 further enhances the system's control precision, reduces manual intervention, extends the cylinder replacement cycle and PM cycle, thereby improving the efficiency and stability of the deposition process and reducing operating costs. In this embodiment, the storage bottle is placed on a platform or the ground using a support.

[0030] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0031] Please see Figure 2 A storage bottle system includes a height-adjustable storage bottle 10 and a control unit connected to the storage bottle 10. Specifically, the storage bottle 10 includes a height-adjustable structure for adjusting the height of the storage bottle.

[0032] The core feature of this storage bottle system is the adjustable height of the liquid cylinder. By controlling the overall height of the liquid cylinder, the space between the liquid level and the top of the cylinder is kept relatively balanced. The system utilizes a liquid level sensor 30, a control unit, and a liftable tank base 11 to perform intelligent automatic adjustments during liquid storage, thereby achieving stable liquid level control and extending the service life of the liquid cylinder.

[0033] In one embodiment, please refer to Figure 2 The aforementioned storage bottle 10 includes a bottle body 13 and a height-adjustable structure. An opening is provided at the bottom of the bottle body 13, and the height-adjustable structure is assembled into the opening. The control unit is connected to the height-adjustable structure.

[0034] In this embodiment, the storage bottle 10 includes a bottle body 13 and a height-adjustable structure. An opening is provided at the bottom of the bottle body 13, and the control unit achieves linkage with the height-adjustable structure through a control connection.

[0035] Bottle body 13, as the main body of the liquid cylinder, stores the liquid chemical source. An opening at the bottom of bottle body 13 connects to a height-adjustable structure, which adjusts the overall height of the storage bottle 10 according to the decrease or increase of liquid level to maintain spatial balance between the liquid level and the top of bottle body 13. A control unit connected to the height-adjustable structure receives signals from the liquid level sensor 30 and adjusts the height of bottle body 13 according to changes in liquid level.

[0036] In one embodiment, please refer to Figure 2 The aforementioned height-adjustable structure includes a power component, a base 11, and a compressible ring 12. The power component is connected to the base 11, the base 11 is mounted on one end of the compressible ring 12, and the other end of the compressible ring 12 is mounted on an opening. The power component is connected to a control unit.

[0037] In this embodiment, the power assembly provides power through the drive structure 40 and the power source. The drive structure 40 is connected to the base 11 and drives the compressible ring 12 to extend or retract, adjusting the height of the bottle 13. The base 11 is fixedly connected to one end of the compressible ring 12 to ensure the stability of the entire structure. The base 11 can be welded to the compressible ring 12. The compressible ring 12 can extend and retract within its stroke range, adjusting the height of the bottle 13 through the extension and retraction of the bellows, while maintaining a seal during the extension and retraction process.

[0038] In one embodiment, please refer to Figure 2 The aforementioned compressible ring 12 includes a bellows.

[0039] In one embodiment, please refer to Figure 2 The aforementioned corrugated pipe is welded to the opening, and the corrugated pipe is welded to the base 11.

[0040] In this embodiment, the bellows is welded to the opening of the bottle body 13, and the base 11 is also welded to the bellows. This structure ensures the expansion and contraction function of the bellows and maintains good sealing performance.

[0041] One end of the bellows is welded to the opening of the bottle body 13, and the other end is welded to the base 11. In this way, the bellows can freely expand and contract in the vertical direction while maintaining the seal between the liquid and the gas.

[0042] The bellows design must be able to withstand a certain pressure to ensure that the liquid does not leak under different liquid levels. The welding process must ensure the stability and sealing performance of the joint.

[0043] In addition, in other embodiments, the height-adjustable structure described above can also be other structures with compression functions, such as an adjustment structure consisting of a base 11 and a lead screw.

[0044] In one embodiment, please refer to Figure 2 The aforementioned power components include a drive structure 40 and a power source. The drive structure 40 is connected to the base 11, and the power source is connected to both the drive structure 40 and the control unit.

[0045] In this embodiment, the drive structure 40 mainly consists of components such as a motor, a lead screw, and a coupling. The motor provides power, which is transmitted to the base 11 through the lead screw and coupling, driving the compressible ring 12 to extend and retract, thereby adjusting the height of the storage bottle 10. Besides the motor driving the lead screw, a pneumatic device or a hydraulic system can be used instead of an electric drive. A pneumatic device can provide a more stable and economical solution when speed and precision requirements are not high.

[0046] The power source is typically an electric motor or a pneumatic device, and the direction of movement and feed rate of the drive structure 40 are adjusted via commands from the control unit. The electric motor is precisely controlled by a motor controller.

[0047] In one embodiment, please refer to Figure 2 The aforementioned control unit includes a sensor 30 and a control component. One end of the sensor 30 is built into the storage bottle 10, and the sensor 30 is connected to the control component. The control component is connected to the power component.

[0048] In this embodiment, the control unit includes a liquid level controller, a power controller, and an industrial computer. The liquid level controller collects liquid level information through sensor 30 and transmits it to the industrial computer, which then issues commands to the power controller to drive the power components for adjustment.

[0049] Specifically, the level controller receives the signal from the level sensor 30, monitors the liquid level in the bottle in real time, and ensures the accurate transmission of liquid level information.

[0050] After receiving instructions from the industrial computer, the power controller controls the driving direction and speed of the motor and adjusts the power components to ensure that the height of the storage bottle 10 is adjusted as required.

[0051] The industrial control computer, as the core of the entire system, is responsible for processing liquid level data, issuing control commands, and communicating with the liquid level controller and power controller. The industrial control computer's data processing capabilities ensure the real-time response and precise control of the entire system.

[0052] In one embodiment, please refer to Figure 2 The aforementioned control components include a level controller, a power controller, and an industrial computer. The power controller is connected to the power component; the level controller is connected to the sensor 30; and the industrial computer is connected to both the level controller and the power controller.

[0053] In this embodiment, the liquid level sensor 30 can detect liquid levels of 90%, 70%, 50%, and 30%. When the liquid level reaches 50%, the control system drives the motor to feed upwards until the liquid level reaches 90%, at which point the feeding stops, completing the liquid level adjustment.

[0054] The liquid level sensor 30 is responsible for monitoring the actual liquid level inside the bottle 13 and transmitting the data to the liquid level controller. Multiple detection points (90%, 70%, 50%, 30%) enable the system to accurately determine changes in the liquid level.

[0055] When the liquid level reaches the set value (e.g., 50%), the industrial control computer, based on feedback from the liquid level controller, sends a command to the motor controller to drive the motor for feeding. The motor controller, according to the command from the liquid level control system, adjusts the motor's feeding direction and feed rate to ensure that feeding stops once the liquid level reaches the predetermined value (e.g., 90%).

[0056] In this embodiment, the sensor 30 mentioned above includes a liquid level sensor 30. In addition to the common float-type liquid level sensor 30, capacitive or ultrasonic liquid level sensors 30 can also be used. These sensors 30 have different advantages in different environments, such as not being affected by the physical properties of the liquid (such as density, conductivity, etc.).

[0057] In one embodiment, please refer to Figure 2 A valve 20 is connected to the top of the aforementioned storage bottle 10. Specifically, the valve 20 is a pneumatic valve.

[0058] The pneumatic valve is connected above the storage bottle 10 and is used to control the input of carrier gas.

[0059] Pneumatic valves are used to control the input of gas and influence the gas pressure or intake rate of the liquid in a liquid cylinder by adjusting the flow rate of the carrier gas. These valves are typically of different types, such as electric or manual pneumatic valves, selected according to system control requirements. They control the opening and closing of the gas flow through external signals (such as commands in the control system). The opening and closing of this pneumatic valve directly affects the amount of gas added to the liquid, thereby regulating the pressure and liquid level inside the cylinder and ensuring the stability of liquid storage.

[0060] A pneumatic valve typically consists of a valve body, a valve seat, a pneumatic actuator (such as a cylinder), and seals. The valve body and valve seat allow for very precise regulation of gas flow. The pneumatic actuator uses pneumatic control signals to open and close the valve 20.

[0061] When the pneumatic valve receives a signal from the control unit, the actuator drives valve 20 to open or close, controlling the flow of gas. In this system, the adjustment of the valve 20 opening is related to the liquid level in the liquid cylinder. By changing the gas flow rate, the liquid level and liquid surface height are indirectly adjusted to ensure the relative balance between the liquid surface in the liquid cylinder and the top space.

[0062] The liquid level sensor 30 monitors the liquid level information in the storage bottle 10 in real time, providing liquid level data at multiple points such as 90%, 70%, 50%, and 30%.

[0063] When the liquid level changes to a set threshold (e.g., when it reaches 50%), the system will adjust according to the set liquid level control strategy.

[0064] The system collects liquid level signals from the liquid level sensor 30 via a liquid level controller and transmits them to an industrial control computer. The industrial control computer determines whether to adjust the drive unit based on changes in the liquid level signal. When the liquid level drops to 50%, the control system instructs the motor to drive upward. This process is specifically achieved by the power controller controlling the power source, which in turn drives the base 11 upward via the drive structure 40, compressing the compressible ring 12 and thus raising the height of the liquid cylinder until the liquid level reaches 90%.

[0065] Throughout the process, the pneumatic valve controls the input of carrier gas, adjusts the gas flow rate as needed, and maintains the gas pressure balance of the liquid cylinder. Especially when the liquid level in the cylinder drops, valve 20 can control the amount of gas entering, ensuring a stable gas environment within the liquid storage tank.

[0066] No manual intervention is required during system operation. The level sensor 30 works in conjunction with the level controller to monitor and adjust the level in real time. When the level reaches a certain set point (e.g., 90%), the level control system will use pneumatic valves and motor control units to precisely adjust the level and change the tank height, ultimately completing the automatic adjustment process.

[0067] In this embodiment, the pneumatic valve is one of the core components of the entire automatic adjustment system. It not only adjusts the gas pressure inside the liquid cylinder by controlling the airflow input, but also ensures the balance between the liquid level and the top space of the cylinder through cooperation with the liquid level sensor 30 and the control system. Its working principle is closely integrated with the automatic adjustment of the liquid level control system, thereby realizing the height adjustment of the liquid cylinder and the gas management of the storage tank, ensuring the efficient and stable operation of the system.

[0068] In this embodiment, the bottle body 13 can be a steel cylinder, or it can be a bottle body 13 made of other materials.

[0069] The aforementioned storage bottle system achieves automatic adjustment of the liquid cylinder height through a height-adjustable storage bottle 10 and a connected control unit. The control unit monitors liquid level changes in real time and adjusts the liquid cylinder height and gas flow rate by precisely controlling the motor drive and pneumatic valves to ensure balance between the liquid level and the top space of the cylinder. This system not only achieves online automatic adjustment of process parameters and optimizes the deposition process, but also extends the cylinder replacement and PM (particulate matter) cycle, thereby improving system efficiency and stability and reducing manual intervention and operating costs.

[0070] It should be noted that those skilled in the art can clearly understand that the specific implementation process of the control method of the above-mentioned storage bottle system can be referred to the corresponding description in the aforementioned system embodiments. For the sake of convenience and brevity, it will not be repeated here.

[0071] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A storage bottle system, characterized in that, It includes: a storage bottle and a control unit, the control unit being connected to the storage bottle; the storage bottle includes a height-adjustable structure for adjusting the height of the storage bottle.

2. The storage bottle system according to claim 1, characterized in that, The storage bottle includes a bottle body with an opening at the bottom. The height-adjustable structure is assembled into the opening, and the control unit is connected to the height-adjustable structure.

3. A storage bottle system according to claim 2, characterized in that, The height-adjustable structure includes a power component, a base, and a compressible ring. The power component is connected to the base, the base is mounted on one end of the compressible ring, and the other end of the compressible ring is mounted on the opening. The power component is connected to the control unit.

4. A storage bottle system according to claim 3, characterized in that, The compressible ring body includes a bellows.

5. A storage bottle system according to claim 4, characterized in that, The corrugated pipe is welded to the opening, and the corrugated pipe is welded to the base.

6. A storage bottle system according to any one of claims 3 to 5, characterized in that, The power assembly includes a drive structure and a power source. The drive structure is connected to the base, and the power source is connected to both the drive structure and the control unit.

7. A storage bottle system according to claim 6, characterized in that, The control unit includes a sensor and a control component. One end of the sensor is built into the storage bottle, and the sensor is connected to the control component. The control component is connected to the power component.

8. A storage bottle system according to claim 7, characterized in that, The control component includes a level controller, a power controller, and an industrial computer. The power controller is connected to the power component; the level controller is connected to the sensor; and the industrial computer is connected to both the level controller and the power controller.

9. A storage bottle system according to claim 1, characterized in that, A valve is connected to the top of the storage bottle.

10. A storage bottle system according to claim 9, characterized in that, The valve is a pneumatic valve.

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