Sealing ring device of main turret

Abstract

The utility model provides a sealing ring device of a main turret, relates to the technical field of sealing ring structures, and aims to solve the problems that the vacuum degree of a machine is low, reworking and reprogramming are caused, and even water flows into a client, so that customer complaints are caused, a large amount of working hours are wasted, the production efficiency is influenced, and the quality cannot be well controlled due to the fact that the sealing ring is not wear-resistant. Comprising an assembly base, a reinforcing support ring and a support inner ring, a sealing ring body is arranged at the bottom of the assembling base, and an assembling open groove is formed in the inner side of the sealing ring body. The supporting inner ring is arranged on the inner side of the assembling open groove, an assembling side groove is formed in the outer side of the supporting inner ring, and a connecting open hole is formed in the side face of the assembling side groove. The reinforcing supporting ring and the positioning supporting column form an efficient rotating supporting structure, flexible rotation of the supporting inner ring is guaranteed, the supporting inner ring provides dynamic limiting supporting for the reinforcing supporting ring through the double limitation of the assembling open groove and the reinforcing supporting ring and is matched with the locking bolt to achieve tight fixing with the sealing ring body, and a reliable sealing supporting system is formed.

Description

Technical Field

[0001] This utility model belongs to the technical field of sealing ring structure, and more specifically, it relates to a main turret sealing ring device. Background Technology

[0002] With the rapid development of semiconductor packaging technology, higher requirements have been placed on packaging production efficiency and equipment utilization. Fully automated equipment is becoming more popular in the market and is an indispensable part of the back-end processes of semiconductor packaging.

[0003] Based on the above, the current problem is that the sealing ring is not wear-resistant, which can cause the machine vacuum to be low. This often results in material dropping, material throwing, components jumping up, and the sticking on the machine, leading to rework and re-machining. This can even result in the product flowing to the customer, causing customer complaints, wasting a lot of time, affecting production efficiency, and making it difficult to control the quality. Utility Model Content

[0004] To address the aforementioned technical problems, this utility model provides a main turret sealing ring device. This device solves the problem that the machine vacuum is too low due to the non-wear-resistant sealing ring, which frequently causes material loss, material spillage, component jumping, and lifting of the components, leading to rework and re-machining. In some cases, the components may even flow to the customer, causing customer complaints, wasting a lot of time, affecting production efficiency, and making it difficult to control quality.

[0005] This utility model discloses a main turret sealing ring device, which is achieved by the following specific technical means:

[0006] A main turret sealing ring device, the core components of which include the following parts: an assembly base, a reinforcing support ring, and a supporting inner ring;

[0007] A sealing ring is fixedly installed at the bottom of the assembly base. An assembly slot is opened on the inner side of the sealing ring, and an assembly hole is opened on the inner side of the assembly slot. A locking support hole is opened on the side of the sealing ring. The reinforcing support ring is fixedly installed on the inner side of the assembly slot. The supporting inner ring is installed on the inner side of the assembly slot. An assembly side groove is opened on the outer side of the supporting inner ring. A connecting hole is opened on the side of the assembly side groove. A locking support is fixedly installed on the side of the assembly side groove. A rotating support ring is rotatably installed on the inner side of the supporting inner ring.

[0008] Furthermore, a locking opening is provided through the side of the mounting base.

[0009] Furthermore, a connecting side tube and a connecting hose are fixedly provided on the side of the assembly opening; the connecting side tube is fixedly provided inside the assembly opening, and the connecting hose is sleeved on the outside of the connecting side tube.

[0010] Furthermore, the side of the reinforcing support ring is also provided with an assembly slot and a positioning support; the assembly slot is opened on the side of the reinforcing support ring, and the positioning support is fixedly installed on the side of the reinforcing support ring.

[0011] Furthermore, the inner ring of the support is provided with a locking hole and a locking bolt on its side; the locking hole is opened on the side of the inner ring of the support, and the locking bolt is located inside the locking hole and the locking support hole.

[0012] The main turret sealing ring device provided by this utility model has the following beneficial effects:

[0013] This utility model achieves the following optimization effects by providing an assembly base, a reinforcing support ring, and a supporting inner ring:

[0014] In terms of structural design, this solution achieves stable installation by locking the precise opening of the assembly base with the sealing ring body. The assembly slot of the sealing ring body provides a reliable bearing platform for the reinforcing support ring. At the same time, it works in conjunction with the assembly slot to precisely position and embed the inner support ring. The reinforcing support ring and the positioning column form an efficient rotation support structure, ensuring that the inner support ring can rotate flexibly. The dual limiting of the assembly slot and the reinforcing support ring further improves its positioning stability. The inner support ring provides dynamic limiting support for the reinforcing support ring with its rotation adjustment function. Together with the locking bolt, it achieves tight fixation with the sealing ring body, forming a reliable sealing support system.

[0015] The inner support ring is made of ceramic material, which effectively reduces frictional loss between components due to its excellent wear resistance and significantly improves the sealing performance of the sealing ring. This design not only extends the service life of the equipment, but also ensures the long-term stability of the equipment's vacuum state and greatly reduces the equipment failure rate. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the assembly of the sealing ring device components of this utility model;

[0017] Figure 2 This is a structural diagram showing the assembly and disassembly of the sealing ring device components of this utility model;

[0018] Figure 3 This is a structural diagram illustrating the assembly and disassembly of the overall components of the assembly base of this utility model;

[0019] Figure 4 This is a structural diagram illustrating the assembly and disassembly of the reinforcing support ring integral component of this utility model;

[0020] Figure 5 This is a structural diagram illustrating the assembly and disassembly of the supporting inner ring integral component of this utility model.

[0021] Figure label:

[0022] 1. Assemble the base;

[0023] 101. Locking opening; 102. Sealing ring; 103. Assembly slot; 104. Assembly opening; 105. Connecting side tube; 106. Connecting hose; 107. Locking support hole;

[0024] 2. Reinforce the support rings;

[0025] 201. Assembly slot; 202. Positioning support;

[0026] 3. Support the inner ring;

[0027] 301. Locking hole; 302. Locking bolt; 303. Assembly side groove; 304. Connection opening; 305. Locking support; 306. Rotating slot; 307. Rotating support ring. Detailed Implementation

[0028] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples.

[0029] Example 1: As Figures 1 to 5 As shown, the present invention provides a main turret sealing ring device, which includes an assembly base 1, a reinforcing support ring 2, and a supporting inner ring 3.

[0030] A sealing ring 102 is fixedly installed at the bottom of the assembly base 1. An assembly slot 103 is opened on the inner side of the sealing ring 102. An assembly opening 104 is opened on the inner side of the assembly slot 103. A locking support hole 107 is opened on the side of the sealing ring 102. A reinforcing support ring 2 is fixedly installed on the inner side of the assembly slot 103. A supporting inner ring 3 is installed on the inner side of the assembly slot 103. An assembly side groove 303 is opened on the outer side of the supporting inner ring 3. A connecting opening 304 is opened on the side of the assembly side groove 303. A locking support 305 is fixedly installed on the side of the assembly side groove 303. A rotating carrier groove 306 is opened on the inner side of the supporting inner ring 3. A rotating support ring 307 is rotatably installed on the inner side of the rotating carrier groove 306.

[0031] Example 2: Figures 2 to 5 As shown, the side of the reinforcing support ring 2 is also provided with an assembly slot 201 and a positioning support 202; the assembly slot 201 is opened on the side of the reinforcing support ring 2, and the positioning support 202 is fixedly installed on the side of the reinforcing support ring 2.

[0032] The inner ring 3 is also provided with a locking hole 301 and a locking bolt 302 on its side; the locking hole 301 is opened on the side of the inner ring 3, and the locking bolt 302 is located inside the locking hole 301 and the locking support hole 107.

[0033] Example 3: Figures 2 to 5 As shown, a locking hole 101 is provided through the side of the mounting base 1;

[0034] The side of the assembly opening 104 is also provided with a fixed connecting side tube 105 and a connecting hose 106; the connecting side tube 105 is fixedly installed inside the assembly opening 104, and the connecting hose 106 is sleeved on the outside of the connecting side tube 105.

[0035] The specific usage and function of this embodiment are as follows: In use, the sealing ring 102 is fixedly installed by the assembly base 1 in conjunction with the locking opening 101. The sealing ring 102 is fixed and supported by the assembly slot 103. The assembly slot 103 is used in conjunction with the reinforcing support ring 2 to position and assemble the inner support ring 3, so that the sealing ring 102 and the inner support ring 3 can provide sealing support.

Claims

1. A main turret sealing ring device, mainly comprising the following components: an assembly base (1), a reinforcing support ring (2), and a supporting inner ring (3); The assembly base (1) has a sealing ring (102) fixedly installed at its bottom. An assembly slot (103) is provided inside the sealing ring (102), and an assembly hole (104) is provided inside the assembly slot (103). A locking support hole (107) is provided on the side of the sealing ring (102). The characteristic feature is that... The reinforcing support ring (2) is fixedly installed inside the assembly slot (103); the supporting inner ring (3) is installed inside the assembly slot (103), the outer side of the supporting inner ring (3) is provided with an assembly side groove (303), the side of the assembly side groove (303) is provided with a connecting hole (304), the side of the assembly side groove (303) is fixedly provided with a locking support (305), the inner side of the supporting inner ring (3) is provided with a rotating loading groove (306), and the inner side of the rotating loading groove (306) is rotatably provided with a rotating support ring (307).

2. The main turret sealing ring device according to claim 1, characterized in that, The mounting base (1) has a locking hole (101) through the side.

3. The main turret sealing ring device according to claim 1, characterized in that, The side of the assembly opening (104) is also provided with a fixed connecting side tube (105) and a connecting hose (106); the connecting side tube (105) is fixedly installed inside the assembly opening (104), and the connecting hose (106) is sleeved on the outside of the connecting side tube (105).

4. The main turret sealing ring device according to claim 1, characterized in that, The side of the reinforcing support ring (2) is also provided with an assembly slot (201) and a positioning support (202); the assembly slot (201) is opened on the side of the reinforcing support ring (2), and the positioning support (202) is fixedly set on the side of the reinforcing support ring (2).

5. A main turret sealing ring device according to claim 1, characterized in that, The inner support ring (3) is also provided with a locking hole (301) and a locking bolt (302) on its side; the locking hole (301) is opened on the side of the inner support ring (3), and the locking bolt (302) is provided inside the locking hole (301) and the locking support hole (107).

Images