High-precision silicon wafer transportation support

Abstract

The utility model discloses a high-precision silicon wafer transportation support, which relates to the technical field of silicon wafer transportation and comprises a silicon wafer support, the silicon wafer support is obliquely arranged, a support beam is arranged on the silicon wafer support, fixing belts are respectively arranged on two sides of the silicon wafer support, and a silicon wafer base is arranged on one side of the silicon wafer support. A bracket base; the silicon wafer clamping plate is rotationally mounted on the silicon wafer base, and the silicon wafer clamping plate is used for clamping a silicon wafer on the silicon wafer bracket; and the silicon wafer clamping mechanism comprises a clamping assembly and a driving assembly, the clamping assembly is used for driving a silicon wafer clamping plate, and the driving assembly is used for driving a rotating rod in the clamping assembly to rotate. According to the utility model, the silicon wafer clamping plate is arranged, so that the problem that the silicon wafer shakes and is separated from the bracket when a vehicle turns due to the fact that the conventional silicon wafer transportation bracket is usually fixed by a rope is solved.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer transportation technology, and in particular to a high-precision silicon wafer transportation support. Background Technology

[0002] Silicon wafers are the most widely used semiconductor material in modern technology. Made of high-purity silicon, silicon wafers are between conductors and insulators and are the basic material of the semiconductor industry. They have a diamond lattice structure, high hardness, moderate conductivity, and stable performance as the temperature rises. As the basic material for chip manufacturing, they are used to build complex circuits through processes such as photolithography and ion implantation and are applied to core devices such as microprocessors, memory, and logic chips.

[0003] In the existing silicon wafer production and transportation processes, silicon wafer supports are required. During transportation, the silicon wafer supports need to fix the silicon wafers. Existing transport supports usually use ropes to fix the silicon wafers. However, ropes have tensile strength. When the vehicle turns or brakes suddenly, the silicon wafers cannot be firmly fixed and will shake, which can lead to the silicon wafers falling off the supports. Utility Model Content

[0004] The main objective of this invention is to provide a high-precision silicon wafer transport support, which effectively solves the problems in the prior art by using a silicon wafer clamping plate to flip and fix the silicon wafer.

[0005] To achieve the above objectives, this utility model provides a high-precision silicon wafer transport support, including a silicon wafer support, a support base, a silicon wafer clamping plate, and a silicon wafer clamping mechanism;

[0006] The silicon wafer support is inclined, and a support beam is provided on the silicon wafer support. Fixing straps are provided on both sides of the silicon wafer support, and a silicon wafer base is provided on one side of the silicon wafer support.

[0007] The support base is located on one side of the silicon wafer base;

[0008] The silicon wafer clamping plate is rotatably mounted on the silicon wafer base, and the silicon wafer clamping plate is used to clamp the silicon wafer on the silicon wafer support;

[0009] The silicon wafer clamping mechanism includes a clamping assembly and a driving assembly. The clamping assembly includes a transmission block, a rotating rod, a first connecting rod, and a second connecting rod. The transmission block is connected to one side of the silicon wafer clamping plate. One end of the rotating rod is rotatably mounted on one side of the silicon wafer base, and the other end of the rotating rod is rotatably connected to one end of the second connecting rod. The end of the second connecting rod away from the rotating rod is rotatably mounted on one side of the transmission block. An auxiliary rod is also rotatably mounted on one side of the silicon wafer base. One end of the first connecting rod is rotatably connected to one end of the auxiliary rod, and the other end of the first connecting rod is rotatably connected to one side of the transmission block. The center position of the first connecting rod is rotatably connected to the center position of the rotating rod. The driving assembly is used to drive the rotating rod to rotate.

[0010] Based on the above technical solution, the present invention can be further improved as follows.

[0011] Furthermore, there is an angle between the silicon wafer base and the support base.

[0012] Furthermore, buffer strips are provided on both the support beam and the silicon wafer base.

[0013] Furthermore, the bracket base is provided with slots and fixing holes.

[0014] Furthermore, a soft plastic cover is provided on the side of the silicon wafer holder away from the silicon wafer base.

[0015] Furthermore, the drive assembly includes a first gear and a second gear. The first gear is connected to the end of the rotating rod away from the second connecting rod. The second gear is rotatably mounted on the silicon wafer base and meshes with the first gear. A rotating handle is connected to one side of the second gear.

[0016] The beneficial effects of this utility model are as follows: This utility model provides a high-precision silicon wafer transport support, which has the following advantages:

[0017] 1. This utility model, by setting a silicon wafer clamping plate, stacks silicon wafers on both sides of a silicon wafer support, and then fixes the silicon wafers in the Y-axis direction with fixing straps. A motor drives a second gear to rotate at a certain angle, which in turn drives a first gear to rotate. One end of a rotating rod rotates around the central axis of the first gear, causing the rotating rod to move the first and second connecting rods. This, in turn, drives the second connecting rod to rotate towards the silicon wafer, and causes the silicon wafer clamping plate to rotate towards the silicon wafer, thus clamping the silicon wafer. This completes the fixation of the silicon wafer in the X-axis direction by the silicon wafer clamping plate. By setting a fixed silicon wafer clamping plate to fix one side of the silicon wafer, this invention solves the problem that existing transport supports typically use ropes to fix silicon wafers. However, ropes have tensile strength, and when the vehicle turns or brakes suddenly, the silicon wafer cannot be firmly fixed, causing it to shake and potentially detach from the support.

[0018] 2. This utility model, by setting slots and fixing holes, facilitates the overall movement of the transport bracket by forklift, thereby avoiding the disassembly of silicon wafers during short-distance transportation. The fixing holes fix the bracket base to the transport vehicle. A soft plastic cover is provided on the side of the silicon wafer bracket away from the silicon wafer base. After the silicon wafers are stacked on both sides of the silicon wafer bracket, the soft plastic cover is fitted onto one end of the silicon wafer, thereby further improving the connection between the silicon wafer and the transport bracket.

[0019] The above description is merely an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it according to the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. The specific implementation methods of this utility model are given in detail in the following embodiments and their accompanying drawings. Attached Figure Description

[0020] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings:

[0021] Figure 1 This is a schematic diagram of the overall structure of a high-precision silicon wafer transport support proposed in this utility model.

[0022] Figure 2 This is a schematic diagram of the support base in a high-precision silicon wafer transport support proposed in this utility model.

[0023] Figure 3 for Figure 1 Enlarged view of point A in the middle.

[0024] Figure 4 This is a schematic diagram of the soft plastic cover in a high-precision silicon wafer transport bracket proposed in this utility model.

[0025] In the diagram: 1. Silicon wafer support; 2. Support beam; 3. Silicon wafer base; 4. Support base; 5. Fixing strap; 6. Buffer strip; 7. Slot; 8. Fixing hole; 9. Soft plastic cover; 10. Silicon wafer clamping plate; 11. Silicon wafer clamping mechanism; 12. Clamping assembly; 13. Drive assembly; 14. Transmission block; 15. Rotating rod; 16. First connecting rod; 17. Second connecting rod; 18. First gear; 19. Second gear; 20. Auxiliary rod; 21. Rotating handle. Detailed Implementation

[0026] The following is in conjunction with the appendix Figure 1-4The principles and features of this utility model are described below. The examples given are for illustrative purposes only and are not intended to limit the scope of this utility model. The utility model is described more specifically in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of this utility model will become clearer from the following description and claims. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0027] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is described as "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is described as "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0029] This utility model provides a high-precision silicon wafer transport support, including a silicon wafer support 1, a support base 4, a silicon wafer clamping plate 10, and a silicon wafer clamping mechanism 11;

[0030] like Figure 1-2 As shown, the silicon wafer support 1 is inclined. In practical applications, the inclined arrangement provides greater stability for stacked silicon wafers. The silicon wafer support 1 is provided with a support beam 2, and fixing straps 5 are provided on both sides of the silicon wafer support 1. A silicon wafer base 3 is provided on one side of the silicon wafer support 1.

[0031] like Figure 1-2 As shown, the support base 4 is located on one side of the silicon wafer base 3, and there is an angle between the support base 4 and the silicon wafer base 3. Therefore, when the silicon wafer is placed on the silicon wafer base 3, one side of the stacked silicon wafer is tilted. Thus, when the vehicle turns, the silicon wafer base 3 on the side away from the silicon wafer support 1 has a certain limiting effect on the silicon wafer. Both the support beam 2 and the silicon wafer base 3 are provided with buffer strips 6. The setting of the buffer strips 6 reduces the impact force on the silicon wafer generated by the support beam 2 and the silicon wafer base 3 during movement, while increasing the friction between the support beam 2, the silicon wafer base 3 and the silicon wafer, thereby increasing the stability of the silicon wafer during transportation.

[0032] like Figure 2 and Figure 4 As shown, the bracket base 4 is provided with slots 7 and fixing holes 8. The bracket base 4 is designed to facilitate the overall transport bracket to be moved by forklift, thereby avoiding the disassembly of silicon wafers during short-distance transportation. The bracket base 4 is fixedly connected to the transport vehicle through the fixing holes 8. The silicon wafer bracket 1 is provided with a soft plastic cover 9 on the side away from the silicon wafer base 3. After the silicon wafers are stacked on both sides of the silicon wafer bracket 1, the soft plastic cover 9 is fitted onto one end of the silicon wafer, thereby further improving the connection between the silicon wafer and the transport bracket.

[0033] like Figure 1 As shown, the silicon wafer clamping plate 10 is rotatably mounted on the silicon wafer base 3. The silicon wafer clamping plate 10 is used to clamp the silicon wafer on the silicon wafer support 1. By setting the fixed silicon wafer clamping plate 10 to fix one side of the silicon wafer, the problem of the existing transport support usually using ropes to fix the silicon wafer is solved. However, the ropes have tensile strength, and when the vehicle turns or brakes suddenly, the silicon wafer cannot be fixed firmly, which will cause it to shake and thus cause the silicon wafer to fall off the support.

[0034] like Figure 3 As shown, the silicon wafer clamping mechanism 11 includes a clamping assembly 12 and a driving assembly 13. The clamping assembly 12 includes a transmission block 14, a rotating rod 15, a first connecting rod 16, and a second connecting rod 17. The transmission block 14 is connected to one side of the silicon wafer clamping plate 10. One end of the rotating rod 15 is rotatably mounted on one side of the silicon wafer base 3, and the other end of the rotating rod 15 is rotatably connected to one end of the second connecting rod 17. The end of the second connecting rod 17 away from the rotating rod 15 is rotatably mounted on one side of the transmission block 14. An auxiliary rod 20 is also rotatably mounted on one side of the silicon wafer base 3. One end of the first connecting rod 16 is rotatably connected to one end of the auxiliary rod 20, and the other end of the first connecting rod 16 is rotatably connected to the auxiliary rod 20. One end is rotatably connected to one side of the transmission block 14, and the center position of the first connecting rod 16 is rotatably connected to the center position of the rotating rod 15. The driving assembly 13 is used to drive the rotating rod 15 to rotate. The driving assembly 13 includes a first gear 18 and a second gear 19. The first gear 18 is connected to the end of the rotating rod 15 away from the second connecting rod 17. The second gear 19 is rotatably mounted on the silicon wafer base 3 and meshes with the first gear 18. A rotating handle 21 is connected to one side of the second gear 19. The rotating handle 21 is used to rotate the second gear 19. In practical applications, the second gear 19 can also be driven to rotate by a motor.

[0035] In this embodiment, the second gear 19 drives the first gear 18 to rotate. One end of the rotating rod 15 rotates around the central axis of the first gear 18. The rotating rod 15 drives the first connecting rod 16 and the second connecting rod 17 to move, thereby driving the second connecting rod 17 to flip towards the silicon wafer and drive the silicon wafer clamping plate 10 to flip towards the silicon wafer, thus completing the clamping of the silicon wafer.

[0036] The working principle is as follows:

[0037] The support base 4 is fixedly connected to the transport vehicle through the fixing holes 8. Workers stack silicon wafers on both sides of the silicon wafer support 1, which is tilted. An angle exists between the support base 4 and the silicon wafer base 3. Therefore, when the silicon wafers are placed on the silicon wafer base 3, one side of the stacked wafers is tilted. This allows the silicon wafer base 3, on the side furthest from the silicon wafer support 1, to provide some restraint when the vehicle turns. Both the support beam 2 and the silicon wafer base 3 are equipped with buffer strips 6. These buffer strips reduce the impact force on the silicon wafers during movement and increase the friction between the support beam 2, the silicon wafer base 3, and the silicon wafers, thereby increasing the stability of the silicon wafers during transport. After stacking the silicon wafers, the fixing straps 5 secure them in the Y-axis direction. Then, the motor drives the second gear 19 to rotate at a certain angle. The second gear 19 drives the first gear 18 to rotate. One end of the rotating rod 15 rotates around the central axis of the first gear 18. The rotating rod 15 drives the first connecting rod 16 and the second connecting rod 17 to move. This drives the second connecting rod 17 to rotate towards the silicon wafer and causes the silicon wafer clamping plate 10 to rotate towards the silicon wafer, thus completing the clamping of the silicon wafer. This completes the fixing of the silicon wafer in the X-axis direction by the silicon wafer clamping plate 10. By setting the fixed silicon wafer clamping plate 10 to fix one side of the silicon wafer, the problem of using ropes to fix the silicon wafer in the existing transport support is solved. However, ropes have tensile strength, and when the vehicle turns or brakes suddenly, the silicon wafer cannot be firmly fixed, which will cause shaking and the silicon wafer will fall off the support.

[0038] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model in any way. Those skilled in the art can readily implement this utility model based on the accompanying drawings and the above description. However, any modifications, alterations, or equivalent variations made by those skilled in the art without departing from the scope of the utility model's technical solution, utilizing the disclosed technical content, are considered equivalent embodiments of this utility model. Furthermore, any equivalent changes, alterations, or variations made to the above embodiments based on the essential technology of this utility model are still within the protection scope of this utility model's technical solution.

Claims

1. A high-precision silicon wafer transport support, characterized in that, include: A silicon wafer support (1) is inclined and has a support beam (2) on it. Fixing straps (5) are provided on both sides of the silicon wafer support (1). A silicon wafer base (3) is provided on one side of the silicon wafer support (1). A support base (4) is disposed on one side of a silicon wafer base (3); A silicon wafer clamping plate (10) is rotatably mounted on a silicon wafer base (3) and is used to clamp the silicon wafers on the silicon wafer support (1). A silicon wafer clamping mechanism (11) includes a clamping assembly (12) and a driving assembly (13). The clamping assembly (12) includes a transmission block (14), a rotating rod (15), a first connecting rod (16), and a second connecting rod (17). The transmission block (14) is connected to one side of the silicon wafer clamping plate (10). One end of the rotating rod (15) is rotatably mounted on one side of the silicon wafer base (3), and the other end of the rotating rod (15) is rotatably connected to one end of the second connecting rod (17). The end of the connecting rod (17) away from the rotating rod (15) is rotatably mounted on one side of the transmission block (14). An auxiliary rod (20) is also rotatably mounted on one side of the silicon wafer base (3). One end of the first connecting rod (16) is rotatably connected to one end of the auxiliary rod (20). The other end of the first connecting rod (16) is rotatably connected to one side of the transmission block (14). The center position of the first connecting rod (16) is rotatably connected to the center position of the rotating rod (15). The driving assembly (13) is used to drive the rotating rod (15) to rotate.

2. The high-precision silicon wafer transport support according to claim 1, characterized in that, The silicon wafer base (3) and the support base (4) have an included angle.

3. The high-precision silicon wafer transport support according to claim 1, characterized in that, Both the support beam (2) and the silicon wafer base (3) are equipped with buffer strips (6).

4. The high-precision silicon wafer transport support according to claim 1, characterized in that, The bracket base (4) is provided with a slot (7) and a fixing hole (8).

5. A high-precision silicon wafer transport support according to claim 1, characterized in that, The silicon wafer support (1) has a soft plastic cover (9) on the side away from the silicon wafer base (3).

6. A high-precision silicon wafer transport support according to claim 1, characterized in that, The drive assembly (13) includes a first gear (18) and a second gear (19). The first gear (18) is connected to the end of the rotating rod (15) away from the second connecting rod (17). The second gear (19) is rotatably mounted on the silicon wafer base (3) and meshes with the first gear (18). A rotating handle (21) is connected to one side of the second gear (19).

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