Ultrahigh vacuum sample holder interconnection device

Abstract

The utility model relates to the technical field of vacuum interconnection experiment devices, and particularly discloses an ultrahigh vacuum sample support interconnection device which comprises a son support, a flag-shaped mother support and a clamping groove type mother support. The flag-shaped mother support comprises a first mother support body, a first U-shaped heightening table is arranged on the first mother support body, a first U-shaped groove is formed in the top of the first U-shaped heightening table and used for allowing the son support to be inserted, and the inserting direction of the son support is perpendicular to the central axis direction of the flag-shaped mother support. The clamping groove type female support comprises a second female support body, a half space of the upper portion of the second female support body is a second U-shaped heightening table, and the other half space is reserved. A second U-shaped groove is formed in the top of the second U-shaped heightening table and used for allowing the child support to be inserted therein, and the opening direction of the second U-shaped groove faces the reserved space in the upper portion of the second mother support body. The sub-supports are attached to the bottom face of the first U-shaped groove or the bottom face of the second U-shaped groove. According to the utility model, ultrahigh vacuum interconnection transmission among molecular beam epitaxy, an angle resolution photoelectron spectroscopy system and an ultralow temperature scanning tunneling microscope is realized.

Description

An ultra-high vacuum sample holder interconnection device Technical Field

[0001] This utility model belongs to the technical field of vacuum interconnection experimental devices, specifically relating to an ultra-high vacuum sample holder interconnection device. Background Technology

[0002] Ultra-high vacuum (UHV) environment (P<10) -7 Ultra-high vacuum (mbar) is an essential operating condition for many modern epitaxial growth and surface analysis techniques. Techniques such as molecular beam epitaxy (MBE), scanning tunneling microscopy (STM), and angle-resolved photoelectron spectroscopy (ARPES) all require operation in an ultra-high vacuum environment. To enable measurements of experimental samples in two spatially separated experimental systems, ultra-high vacuum portable cases are often used as intermediate carriers. This ensures the transfer of experimental samples between systems under ultra-high vacuum conditions, minimizing sample mass degradation due to surface adsorption and allowing multiple measurements to be completed within the sample's lifetime.

[0003] However, due to differences in sample tray transfer schemes within different systems, ultra-high vacuum carrying cases can only transfer samples between experimental systems with the same transfer scheme. For systems with incompatible transfer schemes, the ultra-high vacuum carrying case cannot be used directly. For example, the flag-shaped sample tray widely used in the ARPES laboratory and synchrotron radiation beamlines can transfer samples between the MBE and ARPES systems, but it cannot be used on the slot-type sample trays of STM systems (such as UNISOKU's USM series). From an experimental perspective, STM and ARPES experiments are highly complementary, thus creating a strong demand for combining the two systems. Therefore, it is necessary to overcome the problems caused by the different sample tray transfer schemes when docking the ultra-high vacuum carrying case with the two systems, under the constraints of sample tray size imposed by the two experimental systems.

[0004] In the existing technical solutions, the utility model patent with patent number 202010634316.1, entitled "A Vacuum Interconnection System and a Vacuum Sample Transfer Holder," is proposed to address the sample transfer problem between cryogenic scanning tunneling microscopy and four-probe scanning tunneling microscopy. It is not applicable to the sample transfer problem between molecular beam epitaxy (MBE)-angle resolved photoelectron spectroscopy (ARPES) systems and cryogenic scanning tunneling microscopy. Firstly, since the MBE system is an experimental system used for sample growth and preparation, it has additional devices such as heating electrodes compared to the four-probe scanning tunneling microscopy. Furthermore, during the sample growth and preparation process, reflective high-energy electron diffraction (RHEED) is required to monitor the sample growth status. Therefore, there are stricter requirements for the size of the flag holder.

[0005] The utility model patent No. 202010633732.X, entitled "Transfer Vacuum Sample Holder, Small Sample Holder, and Vacuum Interconnection System," presents a flag-shaped holder design where the gripping heads of the female and male holders are aligned in the same direction. During separation, the friction between the female and male holders at the slot causes the female holder to be pulled off the sample holder. Furthermore, the proposed flag-shaped holder design employs a double-layer structure to accommodate the slot and uses a limiting part to control the depth of the female holder entering the slot. This complicates the sample holder manufacturing process and increases manufacturing costs. Simultaneously, the limiting part on the female holder restricts the depth of the female holder, increasing structural complexity and limiting future improvements and functional additions to the female and male holders. Moreover, the slot-type female holder for scanning tunneling microscopes has a double-layer design, which is difficult to manufacture and very costly. The components are connected by screws, resulting in poor stability. Summary of the Invention

[0006] The technical problem to be solved by this utility model is to provide an ultra-high vacuum sample holder interconnection device for sample transfer between molecular beam epitaxy (MBE), angle-resolved photoelectron spectroscopy (ARPES) system and ultra-low temperature scanning tunneling microscope, thereby realizing the interconnection and transfer of samples within the ultra-high vacuum interconnection system.

[0007] To solve the above-mentioned technical problems, this utility model provides an ultra-high vacuum sample holder interconnection device, including: a sub-holder, a flag-shaped female holder, and a slot-type female holder;

[0008] The sub-support includes a sub-support body and a sub-support gripper handle. The sub-support body is plate-shaped. The tail of the sub-support gripper handle is fixedly connected to the sub-support body, and the head is a rectangle with rounded corners.

[0009] The flag-shaped female carrier includes a first female carrier body and a first female carrier gripper handle. The tail of the first female carrier gripper handle is fixedly connected to the first female carrier body, and the head is a rectangle with an opening. A first U-shaped raising platform is provided on the first female carrier body, and the first U-shaped raising platform is fixedly connected to the first female carrier body. The top of the first U-shaped raising platform is provided with a first U-shaped groove for inserting a female carrier. The direction in which the female carrier is inserted into the first U-shaped groove is perpendicular to the central axis of the flag-shaped female carrier.

[0010] The slot-type female tray includes a second female tray body, on which a second U-shaped raising platform is provided. The second U-shaped raising platform occupies half of the upper space of the second female tray body, while the other half of the upper space of the second female tray body is left empty. The top of the second U-shaped raising platform is provided with a second U-shaped groove for inserting a female tray, and the opening of the second U-shaped groove faces the other half of the upper space of the second female tray body.

[0011] The main body of the sub-support is in contact with the bottom surface of either the first or second U-shaped groove.

[0012] As an improvement to the ultra-high vacuum sample holder interconnection device of this utility model:

[0013] Three electrodes are provided on the side wall of the second female support body. The electrodes are evenly spaced from each other and are fixedly connected to the second female support body.

[0014] As a further improvement to the ultra-high vacuum sample holder interconnection device of this utility model:

[0015] The side of the sub-support body connected to the sub-support gripper is the tail, and the two sides of the tail extend outward to form guards; the other side of the sub-support body away from the sub-support gripper is the head, and the bottom and two sides of the head are chamfered; a sample stage is provided on the top surface of the sub-support body, and the sample stage is fixedly connected to the sub-support body.

[0016] As a further improvement to the ultra-high vacuum sample holder interconnection device of this utility model:

[0017] The top of the first U-shaped raising platform is provided with a rear pressure plate and a front pressure plate on both sides. The side of the rear pressure plate and the front pressure plate facing each other is located within the area of ​​the first U-shaped groove. After the sub-support is inserted into the first U-shaped groove, the rear pressure plate and the front pressure plate are each pressed and fixed to the sub-support body by the first screw fastener.

[0018] As a further improvement to the ultra-high vacuum sample holder interconnection device of this utility model:

[0019] A second pressure plate is provided on each side of the top of the second U-shaped riser. The side of the second pressure plate facing each other is located within the area of ​​the second U-shaped groove. After the sub-support is inserted into the second U-shaped groove, the second pressure plate is pressed and fixed to the sub-support body by the second screw fastener.

[0020] As a further improvement to the ultra-high vacuum sample holder interconnection device of this utility model:

[0021] The sample stage measures 5.5mm x 5.5mm.

[0022] The head size of the first female gripper handle is 4mm*4mm;

[0023] The dimensions of both the first and second U-shaped grooves are 8.2mm*6.2mm, and the height is 1mm;

[0024] The height of the second U-shaped riser is 4mm.

[0025] As a further improvement to the ultra-high vacuum sample holder interconnection device of this utility model:

[0026] The head size of the sub-grip gripper is 4*2mm;

[0027] The dimensions of the main body of the sub-support are 8mm*5.7mm.

[0028] The beneficial effects of this utility model are mainly reflected in:

[0029] 1. The placement groove in the flag-shaped female support of this utility model is perpendicular to the direction of the flag-shaped female support gripping head, so that the transfer direction of the sub-support and the flag-shaped female support is decoupled. When it is necessary to remove the sub-support from the flag-shaped female support, the friction between the sub-support and the flag-shaped female support can be avoided from pulling the female support off the sample placement platform.

[0030] 2. In the flag-shaped female support, this utility model uses both screw fasteners and pressure plates to adjust the pressure between the female and male supports, avoiding operational problems caused by excessive looseness or tightness. At the same time, by fixing a pressure plate with two screw fasteners, the freedom of rotation of the pressure plate is restricted, and the pressure of the front and rear parts of the pressure plate can be adjusted separately, so that the male support is easy to insert and not easy to fall out in the inverted state.

[0031] 3. The integrated design of the slotted female support structure of this utility model is easy to process. A step with a large space is provided between the placement groove and the main body of the slotted female support, leaving space for the operation of the sample gripping head. This allows the female support to be easily removed from the direction along the groove opening by adjusting the spatial relationship between the sample gripping head and the slotted female support in the ultra-high vacuum chamber.

[0032] 4. The front of the sub-support of this utility model is designed with a slope, which leaves some space when the sub-support is initially assembled with the placement groove, thus avoiding the problem that the sub-support is easily stuck in the groove due to increased metal friction in the ultra-high vacuum environment.

[0033] 5. The male and female trays of this invention are in surface contact, which reduces the temperature distribution gradient on the male tray and makes the temperature at the sample more uniform and stable during the heat treatment process.

[0034] 6. The limiting device between the sub-support and the female support slot of this utility model is designed on the sub-support. This device allows the experimental purpose to be achieved simply by modifying the smaller sub-support when it is necessary to connect with a new experimental system. Attached Figure Description

[0035] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings.

[0036] Figure 1 is a schematic diagram of the sub-support structure of this utility model;

[0037] In Figure 1: (a) is a schematic diagram of the overall structure, and (b) is a side view;

[0038] Figure 2 is a schematic diagram of the structure of the flag-shaped mother support of this utility model;

[0039] Figure 3 is a schematic diagram of the slot-type female bracket of this utility model;

[0040] Figure 4 is a schematic diagram of the combination of the female support and the male support of this utility model;

[0041] In Figure 4: (a) is a schematic diagram of the combination of flag-type female bracket and female bracket, and (b) is a schematic diagram of the combination of slot-type female bracket and female bracket. Detailed Implementation

[0042] The present invention will be further described below with reference to specific embodiments, but the scope of protection of the present invention is not limited thereto:

[0043] Example 1: An ultra-high vacuum sample holder interconnection device, as shown in Figures 1-4, includes a sub-holder and a female holder. The female holder is further divided into a flag-type female holder and a slot-type female holder. The sub-holder is used to hold the sample. Both the flag-type and slot-type female holders have placement slots on their tops for inserting and fixing the sub-holder to a designated position. The flag-type female holder is used for various experimental systems, while the slot-type female holder is used for cryogenic scanning tunneling microscopes. During use, with the aid of a commercially available ultra-high vacuum carrying case, interconnection and transfer between multiple experimental systems, such as cryogenic scanning tunneling microscopes and angle-resolved photoelectron spectroscopy experimental systems, in different spaces are achieved.

[0044] The flag-shaped support includes a first support body 10, a first support gripper 11, and a first U-shaped lifting platform 12, as shown in Figure 2. The first support gripper 11 is located on the central axis of the first support body 10 and is T-shaped. The tail of the T-shape is fixedly connected to the first support body 10, and the head of the T-shape is a square with rounded corners, measuring 4mm*4mm. A 2mm diameter hole is opened in the middle of the head of the support gripper 11, which can be used for gripping by various gripping heads.

[0045] The first U-shaped lifting platform 12 is a cuboid with a first U-shaped groove 13 on the top. It is mounted on and fixedly connected to the first female support body 10, and is used to insert and fix the female support. The central axis of the first female support body 10 and the first female support gripping handle 11 is in the front-to-back direction, and the opening direction of the first U-shaped groove 13 is in the left-to-right direction, that is, perpendicular to the central axis of the first female support body 10. The flag-shaped female support is placed on the flag-shaped female support sample holder in the direction of the central axis of the flag-shaped female support. When the female support is pulled out from the first U-shaped groove 13 and separated from the flag-shaped female support, the movement direction of the female support is perpendicular to the placement direction of the flag-shaped female support on the flag-shaped female support sample holder, so as to avoid the flag-shaped female support being pulled out of the flag-shaped female support sample holder due to friction when the female support is separated. During the experiment, the sample-bearing sub-support is located in the first U-shaped groove 13. The sample is raised above the first female support body 10 by the first U-shaped elevation platform 12, thus avoiding interference and collision between the gripping head and the first female support body 10.

[0046] At the top of the first U-shaped riser platform 12, a rear pressure plate 14 and a front pressure plate 15 are located on the front and rear sides of the first U-shaped groove 13. The rear pressure plate 14 and the front pressure plate 15 are metal spring plates, which can provide a certain pressure when pressed. Both the rear pressure plate 14 and the front pressure plate 15 are fixed to the top surface of the first U-shaped riser platform 12 by two first screw fasteners 17, which restricts the freedom of rotation of the pressure plate, and the downward pressure of the front and rear parts of the pressure plate can be adjusted in segments, so that the sub-support is easy to insert and not easy to fall out when inverted. The sides of the rear pressure plate 14 and the front pressure plate 15 facing each other (i.e., the sides facing the first U-shaped groove 13) are located within the area of ​​the first U-shaped groove 13, so that the rear pressure plate 14, the front pressure plate 15, and the first U-shaped groove 13 together form a placement groove. When the sub-support is inserted into the first U-shaped groove 13, a portion of the area of ​​the rear pressure plate 14 and the front pressure plate 15 overlaps with the portions on both sides of the sub-support body 10. The rear pressure plate 14 and the front pressure plate 15 are each pressed and fixed to the sub-support by the first screw fastener 17, as shown in Figure 4(a). By adjusting the first screw fastener 17, the bending degree of the rear pressure plate 14 and the front pressure plate 15 can be adjusted, thereby changing the pressure between the sub-support and the flag-shaped female support when they are combined. This avoids the sub-support falling out of the placement groove under gravity due to excessive looseness, and also avoids the sub-support being unable to be inserted into or removed from the placement groove due to excessive tightness.

[0047] The slotted sample holder is designed based on the shape and size of a standard slotted sample holder, including a second sample holder body 20 and a second U-shaped lifting platform 21, as shown in Figure 3. The second sample holder body 20 is cylindrical, with three ear-shaped electrodes 26 on its cylindrical wall (some slotted sample holders apply voltage through these ear-shaped components for experimental use, hence the name electrodes; however, this design does not have the function of applying voltage, but the name is still used and retained). These electrodes are evenly distributed at 120° along the circular cross-section of the second sample holder body 20. The electrode 26 body is rectangular and fixedly connected to the second sample holder body 20. One side of the electrode 26 is chamfered (a triangular prism is removed) to facilitate the insertion of the slotted sample holder into the parking slot. By rotating the slotted sample holder, the electrode 26 is locked into the slot on the parking slot.

[0048] The second U-shaped elevation stage 21 is a semi-cylindrical shape with a second U-shaped groove 22 on the top. It is located on the second female support body 20 and is an integral part of the second female support body 20 (e.g., obtained by cutting off a portion of the second female support body 20). It occupies only half of the upper space of the second female support body 20, leaving the other half of the upper space empty (i.e., the second U-shaped elevation stage 21 and the second female support body 20 form a step). The opening of the second U-shaped groove 22 faces the step. The empty half of the upper space of the second female support body 20 is used for the operation of the gripping head, avoiding interference and collision between the gripping head and the slotted female support. Due to the limitations of the scanning tunneling microscope cavity tube size and the space that can be accommodated at the scanning tunneling microscope measurement point, the height of the second U-shaped elevation stage 21 is controlled to be 4 mm.

[0049] At the top of the second U-shaped riser platform 21, a second pressure plate 25 is provided on both sides of the second U-shaped groove 22. The second pressure plate 25 is a metal spring plate, which can provide a certain pressure after being pressed. Each second pressure plate 25 is fixedly connected to the top of the second U-shaped riser platform 21 by a second screw fastener 24, pressing the second pressure plate 25 to the top of the second U-shaped riser platform 21. The side of the two second pressure plates 25 facing each other (i.e., the side facing the second U-shaped groove 22) is located within the area of ​​the second U-shaped groove 22. The second pressure plates 25 on both sides and the second U-shaped groove 22 together form a placement groove. When the sub-support is inserted into the placement groove, part of the area of ​​the two second pressure plates 25 overlaps with part of the sides of the sub-support body 10. The second pressure plates 25 are pressed and fixed to the sub-support by the second screw fastener 24, as shown in Figure 4(b). The bending degree of the second pressure plate 25 can be adjusted by adjusting the second screw fastener 24. The first U-shaped groove 13 and the second U-shaped groove 22 have the same dimensions, which are 8.2mm (length) * 6.2mm (width) and 1mm in height.

[0050] The sub-support includes a sub-support body 30 and a sub-support gripper 31, as shown in Figure 1. The sub-support gripper 31 is T-shaped, with its tail fixedly connected to the sub-support body 30 and its head being a rectangle with rounded corners, measuring 4*2mm. It can be gripped using various commercial gripping heads to transfer the sub-support within the experimental system. The purpose of the rounded rectangular design of the sub-support gripper 31 is to reduce the overall size of the sub-support, preventing collisions between the combined sub-support and the slotted female support sample holder. Furthermore, the limited size of the sub-support gripper 31 ensures that the sample placed on the sample stage 33 after the sub-support and slotted female support are combined is positioned near the center of the second female support body 20, facilitating measurement of the scanning tunneling microscope tip aligned with the center of the slotted female support.

[0051] The side of the sub-support body 30 that inserts into the female support is the head, and the side connected to the sub-support gripper handle 31 is the tail. The two sides of the tail extend outwards as retaining angles 32. When the sub-support is combined with a slot-type female support (or flag-type female support), the sub-support needs to be inserted into the placement slot of the slot-type female support (or flag-type female support). When the sub-support is inserted to a certain depth, the retaining angles 32 will interfere with the platform on both sides of the placement slot, limiting the sub-support from further insertion. At this point, the gripper head of the sample holder will feel significant resistance, indicating that the sub-support has been correctly installed in the placement slot, prompting the user to separate the gripper head from the sub-support gripper handle 31. This design avoids additional design for the placement slots of the two types of female supports, reducing manufacturing difficulty, and allows for adaptation to different sample sizes by extending the length of the placement slot and sub-support. The dimensions of the sub-support body 30 are 8mm * 5.7mm.

[0052] The bottom and two sides of the head of the sub-support body 30 are all chamfered into bevels 34, so that the width and thickness of the head of the sub-support 30 are smaller than the width and thickness of the rear of the sub-support body 30. When the sub-support enters the placement groove on the slot-type female support (or flag-type female support), it is first guided and transitioned by the bevels 34 to avoid the sub-support getting stuck between the sub-support and the placement groove.

[0053] A sample stage 33 is provided on the top surface of the substrate 30. The sample stage 33 has a size of 5.5mm*5.5mm, and various 5mm*5mm substrates can be attached here with silver paste for subsequent experiments. The size of the sample stage 33 is slightly larger than the sample size, so that when analyzing the sample surface using electron beam diffraction, the boundary between the sample stage 33 and the sample can be seen on the diffraction screen, making it easier to find the diffraction signal of the sample.

[0054] The dimensions of the sub-support body 30 are tolerantly matched with the dimensions of the first U-shaped groove 13 (or the second U-shaped groove 22), so that after the sub-support body 30 is fully inserted into the placement groove, the bottom surface of the sub-support body 30 is in contact with the bottom surface of the first U-shaped groove 13 (or the second U-shaped groove 22), which reduces the temperature distribution gradient on the sub-support and makes the temperature at the sample more uniform and stable during the heat treatment process.

[0055] How to use the ultra-high vacuum sample holder interconnection device of this utility model:

[0056] 1. Pre-adjustment: Before the flag-shaped female support and the slot-type female support enter the ultra-high vacuum chamber, the pre-tightness of the rear pressure plate 14, the front pressure plate 15, and the second pressure plate 25 needs to be adjusted under atmospheric conditions.

[0057] Insert the sub-support into the first U-shaped groove 13 of the flag-shaped female support, and adjust the tightness of the rear pressure plate 14 and the front pressure plate 15 respectively using the first screw fastener 17; insert the sub-support into the second U-shaped groove 22 of the slot-type female support, and adjust the tightness of the second pressure plate 25 using the second screw fastener 24. This ensures that the sub-support is pressed tightly and can be inserted and removed, but will not slide out or fall off due to gravity when the flag-shaped female support and the slot-type female support are inverted.

[0058] 2. Procedure A: Place a slotted female support with a daughter support in the parking slot of the ultra-low temperature scanning tunneling microscope. In the ultra-high vacuum environment system, remove the daughter support from the slotted female support and transfer it to the ultra-high vacuum carrying case. Then, in the ultra-high vacuum carrying case, transfer the daughter support to a flag-shaped female support. Finally, transfer the flag-shaped female support carrying the daughter support out of the ultra-high vacuum carrying case. Specifically:

[0059] 2.1 Place a flag-shaped female tray without a female tray on the flag-shaped female tray sample rack of the ultra-high vacuum carrying case.

[0060] 2.2 Adjust the angle and position of the slotted female support in the parking slot of the cryogenic scanning tunneling microscope so that the opening of the second U-shaped groove 22 is directly opposite the sample holder gripper head. The sample holder gripper head is connected to the sub-support as a whole through the interaction between it and the sub-support gripper handle 31, and then the sub-support is removed from the second U-shaped groove 22.

[0061] 2.3 The sample holder returns to the ultra-high vacuum carrying case under the action of the sample holder gripping head, and then the ultra-high vacuum carrying case is separated from the ultra-low temperature scanning tunneling microscope.

[0062] 2.4 Adjust the flag-shaped female sample holder in the ultra-high vacuum carrying case so that the opening direction of the first U-shaped groove 13 of the flag-shaped female sample holder is directly facing the direction of the sample holder gripping head. Insert the sub-suspension into the first U-shaped groove 13 of the flag-shaped female sample holder through the sample holder gripping head. After insertion, separate the sub-suspension gripping handle 31 from the sample holder gripping head and let the sub-suspension stay in the first U-shaped groove 13.

[0063] 2.5 Connect the ultra-high vacuum carrying case to another experimental system that uses a flag-shaped mother tray (e.g., an angle-resolved photoelectron spectroscopy experimental system). Adjust the flag-shaped mother tray sample holder in the ultra-high vacuum carrying case so that the first mother tray gripper 11 on the flag-shaped mother tray sample holder is facing the sample tray gripper head. Use the sample tray gripper head to remove the flag-shaped mother tray from the flag-shaped mother tray sample holder in the ultra-high vacuum carrying case, and then use the sample tray gripper head to send the flag-shaped mother tray into the flag-shaped mother tray slot of another experimental system that uses a flag-shaped mother tray (e.g., an angle-resolved photoelectron spectroscopy experimental system).

[0064] 3. Procedure B: The flag-shaped female bracket slot of the experimental system is equipped with a flag-shaped female bracket carrying a female bracket. In the ultra-high vacuum environment system, the flag-shaped female bracket carrying the female bracket is transferred from the experimental system to the ultra-high vacuum carrying case. Then, in the ultra-high vacuum carrying case, the female bracket is removed from the flag-shaped female bracket and transferred to the slot-type female bracket in another experimental system.

[0065] 3.1 Place a flag-shaped female tray without a female tray on the flag-shaped female tray sample rack of the ultra-high vacuum carrying case.

[0066] 3.2 Adjust the angle of the flag-shaped female support in the original experimental system's flag-shaped female support slot so that the first female support gripper handle 11 faces the sample tray gripper head. The sample tray gripper head, through interaction with the first female support gripper handle 11, connects to the flag-shaped female support as a whole. Then, remove the flag-shaped female support from the original experimental system's flag-shaped female support slot. Under the action of the sample tray gripper head, the flag-shaped female support returns to the ultra-high vacuum carrying case. Then, separate the ultra-high vacuum carrying case from the original experimental system.

[0067] 3.2 Adjust the flag-shaped female sample holder in the ultra-high vacuum carrying case so that the slot opening of the flag-shaped female sample holder is aligned with the direction of the sample holder gripping head, and insert the flag-shaped female sample holder into the slot of the flag-shaped female sample holder through the sample holder gripping head.

[0068] 3.3 Connect the ultra-high vacuum carrying case to another experimental system, adjust the flag-shaped female support sample rack so that the opening direction of the first U-shaped groove 13 of the flag-shaped female support on the flag-shaped female support sample rack is directly opposite the direction of the sample tray gripping head, and use the sample tray gripping head to remove the sub-tray mounted on the first U-shaped groove 13 from the flag-shaped female support of the ultra-high vacuum carrying case.

[0069] 3.4 Adjust the angle of the slotted female bracket in another experimental system so that the opening direction of the second U-shaped groove 22 of the slotted female bracket is directly facing the direction of the sample tray gripping head. Insert the sub-tractor into the second U-shaped groove 22 of the slotted female bracket through the sample tray gripping head. After insertion, separate the sub-tractor gripping handle 31 from the sample tray gripping head and let the sub-tractor stay in the second U-shaped groove 22.

[0070] This invention utilizes slots on the slot-type and flag-type female supports of a cryogenic scanning tunneling microscope (CSTBM) to allow for the insertion and fixation of a secondary support. By employing commercially available ultra-high vacuum carrying cases, the same secondary support carrying the sample can be transferred between different experimental systems, ensuring that the sample is not damaged by the atmospheric environment. This achieves in-situ sample transfer between experimental systems with different spatial locations and experimental methods. By transferring the sample to the CSTBM, high-quality atomic-resolution morphology images can be acquired. By transferring the sample to other experimental systems, information such as the sample's band structure and chemical valence state can be acquired. This allows the CSTBM to be combined with multiple other experimental techniques to study sample properties.

[0071] Compared to the existing technology described in Suzhou Institute of Nano-Tech and Nano-Bionics patent number 202010634316.1, this invention reduces redundant magnetic and screw structures. It achieves sample transfer using a simple slot structure, avoiding sample tray disintegration due to loose screws / magnets. In Suzhou Institute of Nano-Tech and Nano-Bionics' solution, the left and right supports constituting the slot are fixed by magnets, and the position and angle of the slot are arbitrary. Incorrect positioning can prevent the sub-slot from being inserted into the slot. Furthermore, this structure is prone to sample tray disintegration due to movement of the supports. Once the sample tray disintegrates, the parts fall into the vacuum chamber, forcing the experiment to stop.

[0072] Compared with the design of Suzhou Institute of Nano-Tech and Nano-Bionics (Patent No. 202010633732.X), firstly, this invention increases the contact area between the sub-support and the female support, reducing the temperature gradient on the sub-support and making the temperature at the sample more uniform and stable during the heat treatment process. In the design of Patent No. 202010633732.X, the sub-support and female support only have slight contact on the groove surfaces on both sides. Under this condition, there will inevitably be a temperature field on the sub-support with a lower temperature in the middle and a higher temperature on both sides, which has a significant adverse effect on sample processing and growth. Secondly, in this invention, the direction of the sub-support insertion into the flag-shaped female support is perpendicular to the direction of the first female support gripping handle of the flag-shaped female support, so that the insertion and removal directions of the sub-support and the flag-shaped female support are perpendicular to each other, avoiding the friction between the sub-support and the female support from pulling the female support off the sample placement stage. In the design of patent number 202010633732.X, the insertion and removal directions of the sub-support and the female support are the same. If the pressure applied under the tablet is too high, the female support will be removed from the sample stage when the sub-support is removed. If the pressure applied under the tablet is too low, the sub-support will easily fall off the female support. Thirdly, in this invention, the limiting device (angle 32) between the sub-support and the female support slot is designed on the sub-support. This allows for easy modification of the smaller sub-support when interconnection with a new experimental system is required, enabling the cryogenic scanning tunneling microscope to be combined with other experimental techniques to study sample properties. In the design of patent number 202010633732.X, the limiting device is designed on the female support. If there is a new interconnection requirement, the female support needs to be redesigned, limiting its use to the scanning tunneling microscope experimental system of the Suzhou Institute of Nano-Tech and Nano-Bionics, which is a significant limitation.

[0073] Finally, it should be noted that the above examples are merely a few specific embodiments of this utility model. Obviously, this utility model is not limited to the above embodiments and many variations are possible. All variations that can be directly derived or conceived by those skilled in the art from the disclosure of this utility model should be considered within the protection scope of this utility model.

Claims

1. A high vacuum sample holder interconnection device, characterized in that: The system includes a sub-support, a flag-shaped female support, and a slot-type female support. The sub-support includes a sub-support body (30) and a sub-support gripper (31). The sub-support body (30) is plate-shaped. The tail of the sub-support gripper (31) is fixedly connected to the sub-support body (30), and the head is a rectangle with rounded corners. The flag-shaped female support includes a first female support body (10) and a first female support gripper (11). The tail of the first female support gripper (11) is fixedly connected to the first female support body (10), and the head is a rectangle with an opening. A first U-shaped raising platform (12) is provided on the first female support body (10), and the first U-shaped raising platform (12) is fixedly connected to the first female support body (10). The top of the first U-shaped raising platform is provided with a first U-shaped groove (13) for insertion. The direction in which the sub-support is inserted into the first U-shaped groove (13) is perpendicular to the central axis of the flag-shaped female support; the slot-type female support includes a second female support body (20), on which a second U-shaped lifting platform (21) is provided, the second U-shaped lifting platform (21) occupies half of the upper space of the second female support body (20), and the other half of the upper space of the second female support body (20) is left empty; the top of the second U-shaped lifting platform (21) is provided with a second U-shaped groove (22) for inserting the sub-support, and the opening direction of the second U-shaped groove (22) faces the other half of the upper space of the second female support body (20); the sub-support body (30) is in contact with the bottom surface of the first U-shaped groove (13) or the second U-shaped groove (22).

2. The ultra-high vacuum sample holder interconnection device according to claim 1, characterized in that: The second female support body (20) has three electrodes (26) on its side wall. The electrodes (26) are evenly spaced from each other and are fixedly connected to the second female support body (20).

3. The ultra-high vacuum sample holder interconnection device according to claim 2, characterized in that: The side of the sub-support body (30) connected to the sub-support gripper (31) is the tail, and the two sides of the tail extend outward to form guards (32); the other side of the sub-support body (30) away from the sub-support gripper (31) is the head, and the bottom surface and two sides of the head are chamfered into bevels (34); a sample stage (33) is provided on the top surface of the sub-support body (30), and the sample stage (33) is fixedly connected to the sub-support body (30).

4. The ultra-high vacuum sample holder interconnection device according to claim 3, characterized in that: The top two sides of the first U-shaped riser (12) are provided with a rear pressure plate (14) and a front pressure plate (15). The side of the rear pressure plate (14) and the front pressure plate (15) facing each other is located within the area of ​​the first U-shaped groove (13). After the sub-support is inserted into the first U-shaped groove (13), the rear pressure plate (14) and the front pressure plate (15) are pressed and fixed to the sub-support body (30) by the first screw fastener (17).

5. The ultra-high vacuum sample holder interconnection device according to claim 4, characterized in that: A second pressure plate (25) is provided on each side of the top of the second U-shaped riser (21). The side of the second pressure plate (25) facing each other is located within the area of ​​the second U-shaped groove (22). After the sub-support is inserted into the second U-shaped groove (22), the second pressure plate (25) is pressed and fixed to the sub-support body (30) by the second screw fastener (24).

6. The ultra-high vacuum sample holder interconnection device according to claim 5, characterized in that: The sample stage (33) has a size of 5.5mm*5.5mm; the head size of the first female support gripper (11) is 4mm*4mm; the size of the first U-shaped groove (13) and the second U-shaped groove (22) are both 8.2mm*6.2mm and the height is 1mm; the height of the second U-shaped riser (21) is 4mm.

7. The ultra-high vacuum sample holder interconnection device according to claim 6, characterized in that: The head size of the sub-support gripper (31) is 4*2mm; the size of the sub-support body (30) is 8mm*5.7mm.

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