ALD aluminum boat and battery piece production equipment

By installing an exhaust flow equalization plate at the exhaust port of the ALD aluminum boat and adjusting the airflow direction, the problem of airflow marks on the battery cells at the tail of the ALD aluminum boat was solved, improving the quality and processing efficiency of the battery cells.

CN224186264UActive Publication Date: 2026-05-01HUAIAN JIETAI NEW ENERGY TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
HUAIAN JIETAI NEW ENERGY TECHNOLOGY CO LTD
Filing Date
2025-05-28
Publication Date
2026-05-01

AI Technical Summary

Technical Problem

Airflow marks are commonly found on the solar cells at the stern of the ALD aluminum boat, affecting the cell quality pass rate and processing efficiency.

Method used

An exhaust flow equalization plate is installed at the exhaust port of the ALD aluminum boat to adjust the airflow direction, improve the airflow uniformity of the slot unit, and reduce the risk of airflow marks.

Benefits of technology

This improved the quality pass rate and processing efficiency of solar cells, and reduced the occurrence of airflow marks.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to an ALD aluminum boat and battery piece production equipment, and belongs to the technical field of solar battery pieces. The ALD aluminum boat comprises a boat body, an air flow groove is formed in the boat body, a plurality of upper side guide rods are arranged in the air flow groove at intervals in the length direction of the boat body, a groove unit is formed between every two adjacent upper side guide rods, the groove units are used for containing battery pieces, and the upper side guide rods are arranged in the air flow groove at intervals in the length direction of the boat body. An air inlet and an air outlet are formed in the two ends of the boat body in the length direction of the boat body respectively and communicate with the airflow groove. And each exhaust port is provided with an exhaust flow equalizing plate. The exhaust port of the ALD aluminum boat is provided with the exhaust flow equalizing plate, so that the undesirable phenomenon that airflow marks appear on the battery pieces inserted into the tail part of the aluminum boat is improved, and the quality qualification rate of the battery pieces is improved. The utility model further provides battery piece production equipment which comprises the ALD aluminum boat.
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Description

Technical Field

[0001] This application relates to the field of solar cell technology, and more specifically, to an ALD aluminum boat and solar cell production equipment. Background Technology

[0002] In the manufacturing process of solar cells, with the widespread application of ALD (Atomic Layer Deposition) technology, the ALD aluminum boat, as a key component for supporting and fixing the solar cells, has a crucial impact on the production quality of the cells. Common ALD aluminum boats are used to insert solar cells. Airflow flows from the head to the tail of the boat, thus treating the solar cells with airflow. For example, in processes such as coating and etching, the airflow carries reactive materials that interact with the surface of the solar cells to complete the corresponding process steps.

[0003] However, long-term production practice and quality inspection have revealed that airflow marks are commonly found on the solar cells at the stern of the aluminum boat. This not only reduces the quality pass rate of the solar cells but may also lead to customer complaints. Leaving the solar cell slots prone to airflow marks empty in order to improve the quality pass rate would further reduce the processing efficiency of the solar cells. Utility Model Content

[0004] Therefore, this application proposes an ALD aluminum boat and a battery cell production equipment, which improves the defect of airflow marks on the battery cells inserted at the tail of the aluminum boat and improves the quality pass rate of the battery cells.

[0005] The first aspect of this application's ALD aluminum boat includes a boat body with an airflow groove inside. The boat body includes multiple upper guide rods, which are spaced apart along the length of the boat body inside the airflow groove. Adjacent upper guide rods form a groove unit, which is used to accommodate battery cells. The boat body has an air inlet and an exhaust outlet at two ends along its length, and both the air inlet and the exhaust outlet are connected to the airflow groove. The exhaust outlet is provided with an exhaust flow equalization plate.

[0006] Optionally, one of the multiple upper guide rods located on the side of the exhaust port is a tail guide rod, and the tail guide rod is fitted to the exhaust flow equalization plate.

[0007] Optionally, the exhaust flow equalization plate is a grid plate or a perforated plate.

[0008] Optionally, an air intake equalization plate is provided at the air intake.

[0009] Optionally, one of the multiple upper guide rods located on the side of the air inlet is a head guide rod, and the head guide rod is fitted to the air intake flow equalization plate.

[0010] Optionally, the ALD aluminum boat further includes a plurality of lower guide rod assemblies, which are spaced apart along the length of the boat body. Each lower guide rod assembly is disposed between two adjacent upper guide rods. Each lower guide rod assembly includes at least two lower guide rods, which are spaced apart along the length of the boat body. At least two lower guide rods of the same lower guide rod assembly jointly support the battery cells contained in the same slot unit.

[0011] Optionally, the lower guide rod is provided with a second toothed groove structure, the second toothed groove structure including a plurality of second slots spaced apart along the length direction of the lower guide rod, the second slot (1521) being used to clamp the battery cell.

[0012] Optionally, the upper guide rod is provided with a first toothed groove structure on both sides along the length direction of the boat body. The first toothed groove structure includes a plurality of first slots spaced apart along the length direction of the upper guide rod. The first slots are used to clamp the battery cells.

[0013] Optionally, the hull includes two side plates arranged opposite each other along its width direction, the upper guide rod extends along the width direction of the hull in the length direction, and the two ends of the upper guide rod are respectively fixed to the corresponding side plates.

[0014] The cell processing apparatus of the second aspect of this application includes the ALD aluminum boat described in the first aspect of this application.

[0015] Compared with existing technologies, this solution has the following advantages:

[0016] The exhaust port of the ALD aluminum boat in this application embodiment is provided with an exhaust flow equalization plate, which can adjust the airflow direction of the slot unit near the exhaust port, improve the airflow uniformity of the slot unit, reduce the risk of airflow marks on the cells of the slot unit at the tail of the boat, and thus improve the quality pass rate of the cells.

[0017] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1A first-view structural schematic diagram of the ALD aluminum boat provided in an embodiment of this application;

[0020] Figure 2 for Figure 1 A magnified view of a section at point A in the middle;

[0021] Figure 3 This is a structural schematic diagram of the ALD aluminum boat provided in an embodiment of this application from a second perspective;

[0022] Figure 4 A third-view structural schematic diagram of the ALD aluminum boat provided in the embodiments of this application;

[0023] Figure 5 A schematic diagram of the structure of the first type of exhaust flow equalization plate of the ALD aluminum boat provided in the embodiments of this application;

[0024] Figure 6 A schematic diagram of the structure of the second type of exhaust flow equalization plate of the ALD aluminum boat provided in the embodiments of this application;

[0025] Figure 7 This is a schematic diagram of the third type of exhaust flow equalization plate provided in the embodiments of this application for the ALD aluminum boat.

[0026] Icons: 100-ALD aluminum boat; 110-hull; 111-side plate; 112-bottom plate; 113-top plate; 114-airflow slot; 115-slot unit; 116-air inlet; 117-exhaust port; 120-upper guide rod; 121-tail guide rod; 122-head guide rod; 123-middle guide rod; 124-first toothed groove structure; 1241-first slot opening; 130-exhaust flow equalization plate; 131-exhaust hole; 132-grid hole; 133-square grid hole; 140-air inlet flow equalization plate; 150-lower guide rod assembly; 151-lower guide rod; 152-second toothed groove structure; 1521-second slot opening; 200-battery cell. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0029] like Figure 1 and Figure 2 As shown, in some embodiments of this application, the ALD aluminum boat 100 includes a boat body 110. The boat body 110 has an airflow channel 114 inside. The boat body 110 also includes multiple upper guide rods 120, which are spaced apart along the length of the boat body 110 within the airflow channel 114. Adjacent upper guide rods 120 form a slot unit 115, which accommodates the battery cell 200. The boat body 110 has an air inlet 116 and an exhaust outlet 117 at its two ends along its length, both of which communicate with the airflow channel 114. Each exhaust outlet 117 is equipped with an exhaust flow equalization plate 130.

[0030] The length direction of the hull 110 is direction X, the width direction is direction Y, and the height direction is direction Z. The airflow channel 114 extends along direction X, and the air inlet 116 and the exhaust port 117 are located at the two ends of the hull 110 in direction X, respectively.

[0031] The thickness direction of the exhaust flow equalization plate 130 extends along the X direction. The exhaust flow equalization plate 130 is disposed at the exhaust port 117. A tail exhaust pump is provided at the exhaust port 117 of the boat body 110. Under the action of the tail exhaust pump, the airflow enters the airflow groove 114 from the air inlet 116 and performs airflow treatment on the battery cells 200 in the multiple groove units 115 of the airflow groove 114. The exhaust gas is evenly discharged from the exhaust port 117 to the outside of the boat body 110 through the exhaust flow equalization plate 130.

[0032] The exhaust port 117 of the ALD aluminum boat 100 in this application embodiment is provided with an exhaust flow equalization plate 130, which can adjust the airflow direction of the slot unit 115 near the exhaust port 117, improve the airflow uniformity of the slot unit 115, reduce the risk of airflow marks on the battery cells 200 of the slot unit 115 at the tail of the boat 110, and thus improve the quality pass rate of the battery cells 200.

[0033] The exhaust flow equalization plate 130 can be flush with the exhaust port 117 in the X direction, that is, the edge of the exhaust flow equalization plate 130 is attached to the edge of the exhaust port 117, so as to maximize the use of the space inside the boat hull 110 to form airflow slots 114, thereby enabling more slot units 115 to be separated and more battery cells 200 to be processed; the exhaust flow equalization plate 130 can also be disposed inside the boat hull 110, with a distance between it and the exhaust port 117 in the X direction.

[0034] like Figure 1 As shown, in some embodiments of this application, the number of upper guide rods 120 is eight, so as to divide the interior of the boat body 110 into seven slot units 115.

[0035] By setting an exhaust flow equalization plate 130 at the exhaust port 117, the airflow treatment quality of the last slot unit 115 near the tail of the boat 110 for the battery cell 200 can be improved, reducing the risk of airflow marks. This enables each slot unit 115 of the ALD aluminum boat 100 to be put into normal production and use, improving the processing efficiency of the battery cell 200.

[0036] In other embodiments, the number of slot units 115 inside the hull 110 may also be four, five, six, etc.

[0037] like Figure 1 As shown, one of the multiple upper guide rods 120 located on the side of the exhaust port 117 is the tail guide rod 121, one of the multiple upper guide rods 120 located on the side of the air inlet 116 is the head guide rod 122, and the remaining upper guide rods 120 are the middle guide rods 123.

[0038] For example, eight upper guide rods 120 divide the interior of the boat body 110 into seven slot units 115. The head guide rod 122 is located on one side of the air inlet 116, the tail guide rod 121 is located on one side of the exhaust port 117, and the remaining six intermediate guide rods 123 are spaced apart along the X direction between the head guide rod 122 and the tail guide rod 121.

[0039] like Figure 1 and Figure 3 As shown, in some embodiments of this application, the tail guide rod 121 is fitted to the exhaust flow equalization plate 130.

[0040] In other words, a groove unit 115 is formed at the tail of the boat body 110 between the tail guide rod 121 and an adjacent intermediate guide rod 123, and the groove unit 115 is fitted to the exhaust flow equalization plate 130.

[0041] This configuration effectively adjusts the airflow direction of the slot unit 115 at the stern of the boat 110, maximizing the uniformity of airflow inside the slot unit 115 and thus reducing the risk of airflow marks on the battery cells 200 inside the slot unit 115.

[0042] In other embodiments, the exhaust flow equalization plate 130 may also be disposed on the side of the tail guide rod 121 away from the middle guide rod 123, and the tail guide rod 121 and the exhaust flow equalization plate 130 are spaced apart in the X direction.

[0043] The exhaust flow equalization plate 130 is a grid plate or a perforated plate to uniformly guide the airflow out of the exhaust port 117.

[0044] For example, such as Figure 5 As shown, the exhaust flow equalization plate 130 is provided with a plurality of exhaust holes 131, which are distributed approximately evenly throughout the exhaust flow equalization plate 130; for example, as Figure 6 As shown, the exhaust flow equalization plate 130 includes a plurality of vertically extending grid holes 132; for example, as Figure 7 As shown, the exhaust flow distribution plate 130 includes a grid of intersecting lines and forms a plurality of square holes 133.

[0045] like Figure 1 As shown, in some embodiments of this application, an air intake flow equalization plate 140 is provided at the air intake 116.

[0046] The thickness direction of the intake air distribution plate 140 extends along the X direction. The structure of the intake air distribution plate 140 is the same as that of the exhaust air distribution plate 130, and will not be described further here.

[0047] This configuration allows for adjustment of the airflow direction of the slot unit 115 near the air inlet 116, improving the airflow uniformity within the slot unit 115 and enhancing the airflow processing quality of the battery cells 200 within the slot unit 115.

[0048] like Figure 1 and Figure 3 As shown, in some embodiments of this application, the head guide rod 122 is fitted to the air intake flow equalization plate 140.

[0049] In other words, the head guide rod 122 and the adjacent intermediate guide rod 123 form a groove unit 115 for the head of the boat body 110, and the groove unit 115 is fitted to the air intake flow equalization plate 140.

[0050] This configuration effectively adjusts the airflow direction of the slot unit 115 at the stern of the boat 110, maximizing the uniformity of airflow inside the slot unit 115 and thus reducing the risk of airflow marks on the battery cells 200 inside the slot unit 115.

[0051] In other embodiments, the intake flow equalization plate 140 may also be disposed on the side of the head guide rod 122 away from the middle guide rod 123, and the head guide rod 122 and the intake flow equalization plate 140 are spaced apart in the X direction.

[0052] like Figure 4 As shown, the boat body 110 includes two side plates 111 arranged opposite each other along its width direction (i.e., direction Y). The length direction of the upper guide rod 120 extends along the width direction (i.e., direction Y) of the boat body 110, and the two ends of the upper guide rod 120 are respectively fixed to the corresponding side plates 111.

[0053] This configuration allows for the formation of multiple slot units 115, while also ensuring smooth airflow in the X direction, facilitating gas treatment of the battery cells 200.

[0054] like Figure 3 and Figure 4 As shown, the hull 110 also includes a bottom plate 112 and a top plate 113 arranged opposite each other along its height direction (i.e., direction Z). The bottom plate 112, the top plate 113 and the two side plates 111 together form an airflow groove 114. The edge of the exhaust flow equalization plate 130 is fixedly connected to the bottom plate 112, the top plate 113 and the two side plates 111.

[0055] The exhaust flow equalization plate 130 has a square plate structure. The four edges of the exhaust flow equalization plate 130 correspond one-to-one with the bottom plate 112, the top plate 113 and the two side plates 111. Each edge is fixed to the corresponding inner wall of the plate by means of threaded parts or snap-fit ​​or plug-in. There is a sealing strip between each edge and the corresponding inner wall of the plate.

[0056] This configuration allows for a simple and reliable fixation of the exhaust flow equalization plate 130 inside the boat hull 110.

[0057] The ALD aluminum boat 100 also includes a plurality of lower guide rod assemblies 150, which are spaced apart along the length direction (i.e., direction X) of the boat body 110. Each lower guide rod assembly 150 is disposed between two adjacent upper guide rods 120. Each lower guide rod assembly 150 includes at least two lower guide rods 151, which are spaced apart along the length direction (i.e., direction X) of the boat body 110. At least two lower guide rods 151 of the same lower guide rod assembly 150 jointly support the battery cells 200 contained in the same slot unit 115.

[0058] For example, each lower guide rod assembly 150 includes two lower guide rods 151, which are disposed along direction X between two adjacent upper guide rods 120; in other embodiments, the lower guide rod assembly 150 may also include three or four lower guide rods 151.

[0059] The two ends of the lower guide rod 151 can be fixed to the two side plates 111, and the lower guide rod 151 can also be fixed to the base plate 112.

[0060] The length direction of the lower guide rod 151 is direction Y, that is, the upper guide rod 120 and the lower guide rod 151 are arranged in parallel. A slot unit 115 is formed between two adjacent upper guide rods 120. A lower guide rod assembly 150 is arranged in direction X between two adjacent upper guide rods 120. The two adjacent upper guide rods 120 and at least two lower guide rods 151 in the slot unit 115 jointly clamp the multiple battery cells 200 contained in the slot unit 115.

[0061] In some embodiments of this application, the lower guide rod 151 is provided with a second toothed structure 152. The second toothed structure 152 includes a plurality of second slots 1521 spaced apart along the length direction (i.e. direction Y) of the lower guide rod 151. The second slots 1521 are used to clamp the battery cell 200.

[0062] The second toothed structure 152 extends along the Y direction and forms a plurality of second slots 1521. Each second slot 1521 is used to clamp the edge of the battery cell 200 along the Z direction, i.e., to support the battery cell 200 from the bottom. The second slots 1521 of the two lower guide rods 151 correspond one-to-one in the Y direction, and the two corresponding second slots 1521 of the two lower guide rods 151 together support a battery cell 200 from the bottom. The plurality of battery cells 200 are stacked along the Y direction, and each battery cell 200 is supported in the slot unit 115 by a pair of second slots 1521.

[0063] In some embodiments of this application, the upper guide rod 120 is provided with first toothed groove structures 124 on both sides along the length direction (i.e., direction X) of the boat body 110. The first toothed groove structure 124 includes a plurality of first slots 1241 spaced apart along the length direction (i.e., direction Y) of the upper guide rod 120. The first slots 1241 are used to clamp the battery cell 200.

[0064] The first toothed structure 124 extends along the Y direction and forms a plurality of first slots 1241. The first slots 1241 on the sides of two adjacent upper guide rods 120 that are close to each other along the X direction correspond one-to-one. The two corresponding first slots 1241 together clamp the two sides of the same battery cell 200 along the X direction. The plurality of battery cells 200 are stacked along the Y direction, and each battery cell 200 is clamped and fixed along the X direction by a pair of first slots 1241.

[0065] Multiple solar cells 200 in the same cell unit 115 are arranged at intervals along the Y direction. There is a flow gap between two adjacent solar cells 200. Airflow passes through the surface of the solar cells 200 to achieve airflow treatment on the aligned surfaces.

[0066] The battery cell processing apparatus of this application embodiment includes an ALD aluminum boat 100.

[0067] The battery cell processing equipment also includes a tail pump, a gas supply device, etc. The gas supply device is connected to the air inlet 116 and is used to supply gas to the interior of the boat hull 110. The tail pump is located at the exhaust port 117 and is used to draw air and guide the airflow out of the boat hull 110.

[0068] Due to the characteristics of the ALD aluminum boat 100 in this application embodiment, the battery cell processing equipment in this application embodiment can also improve the defective phenomenon of airflow marks on the battery cells 200 inserted at the tail of the ALD aluminum boat 100, thereby improving the quality pass rate of the battery cells 200.

[0069] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0070] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An ALD aluminum boat (100), characterized in that, The system includes a hull (110), the interior of which is provided with an airflow groove (114). The interior of the hull (110) includes multiple upper guide rods (120), which are spaced apart along the length of the hull (110) inside the airflow groove (114). A groove unit (115) is formed between two adjacent upper guide rods (120), and the groove unit (115) is used to accommodate battery cells (200). The hull (110) has an air inlet (116) and an exhaust outlet (117) at its two ends along its length, and both the air inlet (116) and the exhaust outlet (117) are connected to the airflow groove (114). Each of the exhaust ports (117) is equipped with an exhaust flow equalization plate (130).

2. The ALD aluminum boat (100) according to claim 1, characterized in that, One of the multiple upper guide rods (120) located on the side of the exhaust port (117) is the tail guide rod (121), which is fitted to the exhaust flow equalization plate (130).

3. The ALD aluminum boat (100) according to claim 1, characterized in that, The exhaust flow equalization plate (130) is a grid plate or a perforated plate.

4. The ALD aluminum boat (100) according to claim 1, characterized in that, An air intake equalization plate (140) is provided at the air intake (116).

5. The ALD aluminum boat (100) according to claim 4, characterized in that, Of the plurality of upper guide rods (120), one located on the side of the air inlet (116) is a head guide rod (122), which is fitted to the air inlet flow equalization plate (140).

6. The ALD aluminum boat (100) according to claim 1, characterized in that, The ALD aluminum boat (100) also includes a plurality of lower guide rod assemblies (150), which are spaced apart along the length of the boat body (110). Each lower guide rod assembly (150) is disposed between two adjacent upper guide rods (120). Each lower guide rod assembly (150) includes at least two lower guide rods (151), which are spaced apart along the length of the boat body (110). At least two lower guide rods (151) of the same lower guide rod assembly (150) jointly support the battery cells (200) contained in the same slot unit (115).

7. The ALD aluminum boat (100) according to claim 6, characterized in that, The lower guide rod (151) is provided with a second toothed structure (152), the second toothed structure (152) includes a plurality of second slots (1521) spaced apart along the length direction of the lower guide rod (151), the second slots (1521) are used to clamp the battery cell (200).

8. The ALD aluminum boat (100) according to claim 1, characterized in that, The upper guide rod (120) has a first toothed groove structure (124) on both sides along the length direction of the boat body (110). The first toothed groove structure (124) includes a plurality of first slots (1241) spaced apart along the length direction of the upper guide rod (120). The first slots (1241) are used to clamp the battery cells (200).

9. The ALD aluminum boat (100) according to claim 1, characterized in that, The boat body (110) includes two side plates (111) arranged opposite to each other along its width direction. The upper guide rod (120) extends along the width direction of the boat body (110) in the length direction, and the two ends of the upper guide rod (120) are respectively fixed to the corresponding side plates (111).

10. A battery cell manufacturing equipment, characterized in that, Includes the ALD aluminum boat (100) as described in any one of claims 1 to 9.