Auxiliary device for interferometer detection

Abstract

The utility model relates to an auxiliary device for interferometer detection, which comprises a shell at least comprising a first opening and a second opening positioned at two ends of the shell and an accommodating cavity communicated with the first opening and the second opening, and the center of the first opening and the center of the second opening are on the same line; the first opening is covered with the silk screen plate, and the silk screen plate is fixedly connected with the shell through a fixing assembly; the shading layer is arranged on the inner wall of the shell; the to-be-detected piece comprises a light-splitting-film-plated glass substrate or a high-reflection-film-plated glass substrate, the light-splitting-film-plated glass substrate or the high-reflection-film-plated glass substrate is arranged in the containing cavity and is close to the second opening, the structure is simple, operation is easy and convenient, cost is low, self-coherence fringes are effectively reduced, the contrast ratio of interference fringes is improved, and the detection accuracy is improved. And the silk screen plates with different meshes can be replaced so as to adapt to film layer scenes with different reflectivity.

Description

An auxiliary device for interferometer detection Technical Field

[0001] This utility model relates to the field of optical detection technology, and in particular to an auxiliary device for interferometer detection. Background Technology

[0002] Interferometers offer advantages such as high precision, high sensitivity, and high response speed, making them widely used in the processing and testing of high-precision optical components. To improve the quality of coated glass products, interferometers are commonly used for inspection. Coated glass can be a beam-splitting film-coated glass substrate, meaning multiple dielectric films, such as alternating stacks of TiO2 / SiO2, are deposited on the surface of optical glass. It can also be a high-reflectivity film-coated glass substrate. However, in actual measurements, due to the limited numerical aperture of interferometers such as the Michelson interferometer and the Fizeau interferometer, it is difficult to separate different reflection orders. Ultimately, the beam-splitting film-coated glass substrate will produce multiple reflections during interferometric testing, resulting in self-coherent fringes. For high-reflectivity coated surfaces, this can cause stray light interference, leading to decreased contrast and indistinct interference fringes, severely affecting the accuracy of the test results. Summary of the Invention

[0003] In view of the problems existing in the prior art, this utility model provides an auxiliary device for interferometer detection.

[0004] The technical solution of this utility model is as follows:

[0005] An auxiliary device for interferometer detection includes:

[0006] The housing includes at least a first opening and a second opening located at both ends of the housing, and a receiving cavity communicating with the first opening and the second opening, wherein the center of the first opening and the center of the second opening are on the same line;

[0007] A wire mesh plate, which covers the first opening and is fixedly connected to the housing by a fixing component;

[0008] A light-shielding layer is provided on the inner wall of the housing;

[0009] The test piece includes a glass substrate coated with a beam-splitting film or a glass substrate coated with a high-reflectivity film. The glass substrate coated with a beam-splitting film or a glass substrate coated with a high-reflectivity film is placed in the receiving cavity and is adjacent to the second opening.

[0010] As a preferred technical solution, the shape of the first opening is the same as or different from the shape of the second opening; the size of the first opening is the same as or different from the size of the second opening.

[0011] As a preferred technical solution, both the first opening shape and the second opening shape are rectangular or circular; the size of the first opening is less than or equal to the size of the second opening.

[0012] As a preferred technical solution, the light-shielding layer includes a black anodized aluminum layer and a matte velvet cloth.

[0013] As a preferred technical solution, the fixing component includes a snap-fit ​​assembly and / or a magnetic attraction assembly.

[0014] As a preferred technical solution, the snap-fit ​​assembly includes a snap fastener and a slot. The slot is located at one end of the housing and is located in at least a portion of the area around the first opening. The snap fastener is located in at least a portion of the area around the wire mesh plate and is correspondingly located to the slot.

[0015] As a preferred technical solution, the magnetic suction assembly includes a magnetic suction main component and a magnetic suction auxiliary component. One of the magnetic suction main component and the magnetic suction auxiliary component is located at one end of the housing and in at least a portion of the area around the first opening. The other component is located in at least a portion of the area around the screen plate, and the magnetic suction main component and the magnetic suction auxiliary component are arranged correspondingly.

[0016] As a preferred technical solution, the test piece is a glass substrate coated with a beam-dispersing film, and the mesh count of the screen is 100-200 mesh; the test piece is a glass substrate coated with a high-reflection film, and the mesh count of the screen is 400 mesh.

[0017] As a preferred technical solution, the wire mesh plate is made of metal wire mesh or polymer wire mesh; the shell is made of aluminum alloy.

[0018] As a preferred technical solution, the metal wire mesh is stainless steel wire mesh or copper wire mesh, and the polymer wire mesh is nylon wire mesh; the shell is rectangular or frustum-shaped.

[0019] The beneficial effects achieved by the technical solution adopted in this utility model are as follows:

[0020] This application proposes an auxiliary device for interferometer testing, which mainly includes a housing, a wire mesh plate, and a light-shielding layer. The upper end of the housing has a first opening, and the lower end of the housing has a second opening. A receiving cavity is located between the first and second openings and is connected to them. The side wall of the housing is provided with a light-shielding layer. The wire mesh plate covers the first opening. The part to be tested is inserted into the receiving cavity through the second opening. This device is used to assist the interferometer in quality testing of glass substrates with spectrophotometer coatings or high-reflectivity coatings. It has a simple structure, is easy to operate, and has low cost. It effectively reduces self-coherence fringes and improves the contrast of interference fringes. It can also be adapted to different reflectivity film scenarios by replacing the wire mesh plate with different mesh sizes. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below, forming part of this utility model. The illustrative embodiments of this utility model and their descriptions explain this utility model and do not constitute an improper limitation of this utility model. In the accompanying drawings:

[0022] Figure 1 is a schematic diagram of the structure of the auxiliary device for interferometer detection disclosed in this embodiment;

[0023] Figure 2 is a schematic diagram of the structure of the auxiliary device for interferometer detection disclosed in this embodiment;

[0024] Figure 3 is a schematic diagram of the structure of the auxiliary device for interferometer detection disclosed in this embodiment;

[0025] Figure 4 is a schematic diagram of the auxiliary device for interferometer detection disclosed in this embodiment.

[0026] Explanation of reference numerals in the attached figures:

[0027] 10 housing; 20 screen plate; 30 glass substrate coated with beam splitting film or glass substrate coated with high reflectivity film; 40 interferometer laser; 50 snap-fit ​​assembly; 60 magnetic suction assembly; 70 stage; 80 limiting groove or limiting block. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. In the description of this utility model, it should be noted that the term "or" is generally used to include the meaning of "and / or," unless otherwise expressly stated otherwise.

[0029] In the description of this utility model, it should be understood that terms such as "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, terms such as "connected" and "linked" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a mechanical connection or an electrical connection; it can refer to a direct connection or an indirect connection through a medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] Furthermore, those skilled in the art should understand that in the disclosure of this utility model, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as limitations on this utility model.

[0031] Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0032] Example

[0033] Traditional interferometric detection devices, such as the Michelson interferometer and the Fizeau interferometer, often suffer from problems such as self-coherence effect, insufficient fringe contrast, and uneven light intensity in the detection area when detecting glass substrates with beam-splitting films or high-reflectivity films. Based on Figures 1-4, this embodiment provides an auxiliary device for interferometer detection, including:

[0034] The housing 10 includes at least a first opening and a second opening located at both ends of the housing 10, and a receiving cavity communicating with the first opening and the second opening, wherein the center of the first opening and the center of the second opening are on the same line;

[0035] The screen 20 covers the first opening and is fixedly connected to the housing 10 by a fixing component;

[0036] A light-shielding layer is provided on the inner wall of the housing 10;

[0037] The test piece includes a glass substrate coated with a beam-splitting film or a glass substrate coated with a high-reflectivity film 30, which is placed in the receiving cavity and adjacent to the second opening.

[0038] This embodiment proposes an auxiliary device for interferometer testing, which mainly includes a housing 10, a screen 20, and a light-shielding layer. The upper end of the housing 10 has a first opening, and the lower end of the housing 10 has a second opening. A receiving cavity is located between the first and second openings and is connected to them. The side wall of the housing 10 is provided with a light-shielding layer. The screen 20 covers the first opening. The part to be tested is inserted into the receiving cavity through the second opening. This device is used to assist the interferometer in quality testing of glass substrates with spectrophotometer coatings or high-reflectivity coatings 30. It has a simple structure, is easy to operate, effectively reduces self-coherence fringes, has low cost, and improves the contrast of interference fringes. It can also be adapted to different reflectivity film scenarios by replacing the screen 20 with different mesh sizes.

[0039] According to Figures 1-4, the auxiliary device for interferometer detection proposed in this embodiment includes a housing 10. One end of the housing 10 has a first opening, and the other end has a second opening. The centers of the first and second openings are on the same line. A wire mesh plate 20 covers the first opening and is fixed to one end of the housing 10 by a fixing assembly. Preferably, the shape of the first opening is the same as or different from the shape of the second opening, and the size of the first opening is the same as or different from the size of the second opening. For example, the opening shape can be rectangular, circular, or elliptical. Specifically, both the first and second opening shapes are circular, or the first opening shape is circular and the second opening shape is rectangular, or the first opening shape is elliptical and the second opening shape is rectangular. The opening size can be equal to or smaller than the second opening size. In a preferred embodiment, both the first and second opening shapes are rectangular or circular, and the first opening size is smaller than the second opening size, facilitating high-precision detection of the workpiece. The shape and size of the first opening and the second opening need to be such that the center of the first opening and the center of the second opening are on a straight line. The specific shape and size of the two openings can be set by those skilled in the art according to actual needs, and are not specifically limited here. For ease of description, in this embodiment, setting the first opening at one end of the housing 10 is referred to as setting the first opening at the first end of the housing 10, and setting the second opening at the other end of the housing 10 is referred to as setting the second opening at the second end of the housing 10.

[0040] Furthermore, a light-shielding layer is provided on the inner wall of the housing 10, which can also be understood as a receiving cavity where the first opening and the second opening are connected. The cavity wall is provided with a light-shielding layer. Preferably, the light-shielding layer includes a black anodized aluminum layer and a matte velvet cloth. In actual operation, the black anodized aluminum layer is first coated on the inner wall of the housing 10, and then a layer of matte velvet cloth is covered on this basis. The light-shielding layer is used to reduce the interference of external light on the interferometer during the detection process, and can also work with the interferometer's light intensity knob to enhance the contrast of the interference fringes.

[0041] Furthermore, the screen panel 20 covers the first opening and is fixedly connected to the housing 10 by a fixing component. Preferably, the fixing component includes a snap-fit ​​component 50 and / or a magnetic attraction component 60. Specifically, according to FIG. 2, the snap-fit ​​component 50 includes a buckle and a slot. The slot is located at one end of the housing 10 and is disposed in at least a portion of the area around the first opening. The buckle is located in at least a portion of the area around the screen panel 20, and the buckle and the slot are adapted to and correspondingly disposed. According to FIG. 3, the magnetic attraction component 60 includes... The magnetic main component and the magnetic auxiliary component are provided. One of the magnetic main component and the magnetic auxiliary component is located at one end of the housing 10 and at least a portion of the area around the first opening. The other component is located at least a portion of the area around the screen plate 20. The magnetic main component and the magnetic auxiliary component are matched and correspondingly arranged. Both the snap-fit ​​component 50 and the magnetic component 60 can realize the fixed connection between the screen plate 20 and the housing 10, facilitate the fixed installation of the screen plate 20 on the housing 10, and facilitate the removal of the screen plate 20 from the housing 10. In a preferred embodiment, a limiting groove or limiting block 80 is provided at the first end of the housing 10 and near the first opening, and a handle is provided at one end of the wire mesh plate 20. According to Figures 2-3, the fixing components are located on both sides of the first opening and are parallel to each other. Since the housing 10 is provided with a limiting groove or limiting block 80, the wire mesh plate 20 with the handle side is activated to move towards the limiting groove or limiting block 80 until one end of the wire mesh plate 20 is engaged with the limiting groove or limiting block 80, and the wire mesh plate 20 is fixedly connected to the housing 10 through the fixing components. The limiting groove or limiting block 80 is used to cooperate with the engaging component 50 and / or the magnetic suction component 60 to fix the position of the wire mesh plate 20, ensuring the positional stability of the wire mesh plate 20 and helping to improve the detection accuracy.

[0042] In a preferred embodiment, according to FIG. 3, the fixing component is a snap-fit ​​component 50 or a magnetic component 60. A slot is provided at the first end of the housing 10 on both sides of the first opening. Correspondingly, buckles are provided on both parallel sides of the wire mesh plate 20. For example, the slot is elongated and has a groove in the middle, and is called a slot. The edge of the wire mesh plate 20 has protrusions that match the groove, also called buckles, to facilitate a secure snap-fit ​​between the wire mesh plate 20 and the housing 10. Alternatively, a magnetic main component is provided at the first end of the housing 10 on both sides of the first opening, and correspondingly, magnetic auxiliary components are provided on both parallel sides of the wire mesh plate 20. The components facilitate a secure connection between the wire mesh plate 20 and the housing 10. In another preferred embodiment, the snap-fit ​​component 50 and the magnetic component 60 are used together. For example, a slot is provided on one side of the first opening at the first end of the housing 10, and a magnetic main component is provided on the other side. Correspondingly, a buckle is provided on one side of the parallel sides of the wire mesh plate 20, and a magnetic auxiliary component is provided on the other side. When the wire mesh plate 20 covers the first end of the housing 10, the slot and buckle are correspondingly provided, and the magnetic main component and magnetic auxiliary component are correspondingly provided, which facilitates a secure connection and snap-fit ​​between the wire mesh plate 20 and the housing 10, and improves the stability of the device.

[0043] Furthermore, as an auxiliary device, it does not need to be fixed to the interferometer. It only needs to cover the object to be tested within the accommodating cavity of the housing 10 through the second opening, as shown in Figure 1. In actual operation, the object to be tested can be first placed flat on the interferometer stage 70, and then the auxiliary device can be placed over the object before starting the testing process. Preferably, the object to be tested is a glass substrate coated with a beam-dispersing film, and the mesh count of the screen 20 is 100-200 mesh. For a glass substrate coated with a high-reflectivity film, the mesh count of the screen 20 is 400 mesh, resulting in the best testing effect.

[0044] The interferometer laser 40 is located directly above the auxiliary device. The light emitted from the interferometer laser 40 passes sequentially through the screen plate 20 and the first opening before entering the accommodating cavity. When the light shines onto the glass substrate coated with a beam-splitting film or a high-reflectivity film 30, the light is reflected and refracted at different interfaces of the film due to the presence of the beam-splitting film or high-reflectivity film. Interference occurs between these reflected lights. If the film thickness, refractive index, and other parameters meet certain conditions, constructive or destructive interference will occur, resulting in alternating bright and dark fringes in a specific direction. The presence of the screen plate 20 allows light to form multiple coherent light sources as it passes through the grid. The light emitted from these coherent sources interferes with each other on the glass substrate, forming more pronounced interference fringes. By observing the shape, spacing, and other characteristics of the interference fringes, it is possible to determine whether the uniformity, thickness, and other parameters of the film meet the requirements. When light passes through the grid of the screen 20, diffraction occurs, forming a diffraction pattern on the glass substrate. When there are inhomogeneities or defects in the film layer on the glass substrate, it affects the propagation and distribution of the diffracted light, thus changing the diffraction pattern. By observing the changes in the diffraction pattern, defects and inhomogeneities in the film layer can be detected.

[0045] Furthermore, the screen printing plate 20 is typically mesh-like, with each mesh having the same shape and size to ensure uniform pore size. The screen printing plate 20 itself has a certain periodic structure, which, when light shines on it, produces a grating-like effect, further enhancing the interference and diffraction of light, making the detection more sensitive and accurate. Preferably, the size of the screen printing plate 20 is larger than the size of the first opening to avoid interference from external light.

[0046] The wire mesh 20 is made of metal or polymer mesh; the housing 10 is made of aluminum alloy. The combination of the metal or polymer mesh and the aluminum alloy housing 10 provides optimal protection against external light interference, enabling high-precision inspection of glass substrates 30 coated with a spectrophotometer or a high-reflectivity film. In a preferred embodiment, the metal mesh is made of stainless steel or copper, and the polymer mesh is made of nylon; the housing 10 is rectangular or frustum-shaped, resulting in optimal inspection performance.

[0047] The above provides a detailed description of an auxiliary device for interferometer detection according to an embodiment of this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. An auxiliary device for interferometer detection, characterized in that, include: The housing includes at least a first opening and a second opening located at both ends of the housing, and a receiving cavity communicating with the first opening and the second opening, wherein the center of the first opening and the center of the second opening are on a line; A screen printing plate, which covers the first opening and is fixedly connected to the housing by a fixing component; a light-shielding layer, which is disposed on the inner wall of the housing; and a test piece, including a glass substrate coated with a beam-splitting film or a glass substrate coated with a high-reflectivity film, which is placed in the receiving cavity and adjacent to the second opening.

2. The auxiliary device according to claim 1, characterized in that, The shape of the first opening may be the same as or different from the shape of the second opening; the size of the first opening may be the same as or different from the size of the second opening.

3. The auxiliary device according to claim 2, characterized in that, Both the first opening shape and the second opening shape are rectangular or circular; the size of the first opening is less than or equal to the size of the second opening.

4. The auxiliary device according to claim 3, characterized in that, The light-shielding layer includes a black anodized aluminum layer and a matte velvet cloth.

5. The auxiliary device according to claim 4, characterized in that, The fixing components include snap-fit ​​components and / or magnetic components.

6. The auxiliary device according to claim 5, characterized in that, The snap-fit ​​assembly includes a snap fastener and a slot. The slot is located at one end of the housing and is disposed in at least a portion of the area around the first opening. The snap fastener is located in at least a portion of the area around the wire mesh plate and is disposed corresponding to the slot.

7. The auxiliary device according to claim 5, characterized in that, The magnetic attraction assembly includes a magnetic attraction main component and a magnetic attraction auxiliary component. One of the magnetic attraction main component and the magnetic attraction auxiliary component is located at one end of the housing and is located in at least a portion of the area around the first opening. The other component is located in at least a portion of the area around the wire mesh plate. The magnetic attraction main component and the magnetic attraction auxiliary component are arranged correspondingly.

8. The auxiliary device according to claim 1, characterized in that, The test piece is a glass substrate coated with a beam-dispersing film, and the mesh count of the screen is 100-200 mesh; the test piece is a glass substrate coated with a high-reflection film, and the mesh count of the screen is 400 mesh.

9. The auxiliary device according to claim 8, characterized in that, The wire mesh is made of metal or polymer; the housing is made of aluminum alloy.

10. The auxiliary device according to claim 9, characterized in that, The metal wire mesh is stainless steel wire mesh or copper wire mesh, and the polymer wire mesh is nylon wire mesh; the shell is rectangular or frustum-shaped.

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