Anti-sticking plunger for MEMS testing device and MEMS testing device

Abstract

The utility model relates to the technical field of MEMS device packaging and testing, and particularly discloses an anti-sticking plunger for an MEMS testing device and the MEMS testing device, and the anti-sticking plunger is detachably mounted in a mounting hole of the MEMS testing device; the anti-sticking plunger comprises an ejector pin, a spring and a mounting seat; a mounting cavity is formed in the mounting seat; the spring and at least part of the ejector pin are positioned in the mounting cavity; one end of the spring abuts against or is connected with the first end of the ejector pin, and the other end of the spring abuts against or is connected with the inner wall of the installation cavity. When the MEMS device is tested, the second end of the ejector pin abuts against the MEMS device, and the spring is compressed to a preset length, so that the ejector pin is completely located in the installation cavity. And when the MEMS device is tested, the spring recovers to the original length from the compressed state, and the second end of the ejector pin is popped out of the mounting cavity so as to remove the adhered MEMS device. The anti-sticking plunger can physically push away the stuck MEMS device after the test is completed.

Description

Anti-stick plunger for MEMS testing device and MEMS testing device Technical Field

[0001] This specification relates to the field of MEMS device packaging and testing technology, and in particular to an anti-stick plunger for a MEMS testing device and a MEMS testing device. Background Technology

[0002] In the field of MEMS (Micro-Electro-Mechanical System) device packaging and testing technology, especially in the testing of acoustic MEMS devices (such as MEMS microphones), the plunger mechanism of the test box is responsible for applying pressure to the unit under test (DUT) to make it adhere tightly to the surface of the test chamber. However, in the actual testing process, the DUT is prone to sticking to the plunger surface due to surface electrostatic adsorption, residual flux, or slight deformation, leading to the following serious problems: (1) Quality risk: If the stuck unit is not removed in time, in the next test cycle, the new unit may overlap with the residual unit, resulting in a "double unit" defect; (2) Equipment failure: The stuck unit may hinder the plunger reset, trigger the equipment overload protection mechanism, cause unplanned downtime, and affect production efficiency.

[0003] To address the above problems, existing technologies improve the situation by adjusting sensor sensitivity to trigger alarms and manually repairing them, regularly wiping the surface of the plunger mechanism, and inspecting and replacing faulty plunger mechanisms to reduce adhesion. However, the above solutions have the following drawbacks: (1) They require additional human resources to handle alarms or wipe surfaces. (2) They result in additional unplanned downtime, affecting productivity. (3) They only reduce the occurrence of problems but cannot completely solve the problem of material adhesion.

[0004] There is currently no effective solution to the above problems. Summary of the Invention

[0005] This specification provides an anti-sticking plunger for a MEMS testing device and a MEMS testing device to solve the problem of MEMS devices sticking to the plunger during testing in the prior art.

[0006] This specification provides an anti-sticking plunger for a MEMS testing device, comprising: the anti-sticking plunger being detachably installed in a mounting hole of the MEMS testing device; the anti-sticking plunger including a pin, a spring, and a mounting base;

[0007] The mounting base has a mounting cavity, and the spring and at least part of the ejector pin are located in the mounting cavity. The spring and the ejector pin are coaxially arranged. One end of the spring abuts against or is connected to the first end of the ejector pin, and the other end of the spring abuts against or is connected to the inner wall of the mounting cavity.

[0008] When the MEMS testing device tests the MEMS device, the second end of the ejector pin abuts against the MEMS device, and the spring is compressed to a preset length so that the ejector pin is completely located in the mounting cavity; when the MEMS testing device completes the test on the MEMS device, the spring returns to its original length from the compressed state, so that the second end of the ejector pin pops out of the mounting cavity to remove the MEMS device that is stuck to the anti-stick plunger.

[0009] In one embodiment, the first end of the ejector pin is provided with a radial protrusion, or a radial protrusion is provided between the first end and the second end of the ejector pin, wherein the radial dimension of the radial protrusion is greater than the radial dimension of the second end of the ejector pin; or the radial dimension of the first end of the ejector pin is greater than the radial dimension of the second end of the ejector pin.

[0010] A limiting element is provided inside the mounting cavity, which is used to limit the axial movement of the ejector pin within the mounting cavity.

[0011] In one embodiment, the first end of the ejector pin is provided with a radial protrusion, or a radial protrusion is provided between the first end and the second end of the ejector pin, wherein the radial dimension of the radial protrusion is greater than the radial dimension of the second end of the ejector pin; or the radial dimension of the first end of the ejector pin is greater than the radial dimension of the second end of the ejector pin.

[0012] The mounting cavity includes a first cavity and a second cavity that are interconnected; the spring and the first end of the ejector pin are located in the first cavity, or the spring, the first end of the ejector pin, and the radial protrusion are located in the first cavity; the second end of the ejector pin is located in the second cavity; at least a portion of the radial dimension of the second cavity is smaller than the radial dimension of the first end or the radial protrusion, so as to limit the axial movement of the ejector pin in the mounting cavity.

[0013] In one embodiment, the first end of the ejector pin is provided with a radial protrusion, or a radial protrusion is provided between the first end and the second end of the ejector pin, wherein the radial dimension of the radial protrusion is greater than the radial dimension of the second end of the ejector pin; or the radial dimension of the first end of the ejector pin is greater than the radial dimension of the second end of the ejector pin.

[0014] The mounting base includes a detachably connected base and a fixing base; the base has a base cavity; the fixing base has a fixing cavity; the radial dimension of the base cavity is larger than the radial dimension of a portion of the fixing base; the fixing cavity includes a first sub-cavity and a second sub-cavity that communicate with each other, the radial dimension of the first sub-cavity being larger than the radial dimension of the second sub-cavity; the first end of the ejector pin, the radial protrusion, and a portion of the spring are located in the first sub-cavity, or the first end of the ejector pin and a portion of the spring are located in the first sub-cavity; the second end of the ejector pin is located in the second sub-cavity.

[0015] When the base and the fixed seat are connected, part of the fixed seat is located in the base cavity, such that part of the spring is located in the base cavity, one end of the spring is connected to the first end of the ejector pin, and the other end of the spring abuts against the inner wall of the base cavity;

[0016] At least a portion of the second sub-cavity has a radial dimension smaller than that of the first end or the radial protrusion, in order to limit the axial movement of the ejector pin within the mounting cavity.

[0017] In one embodiment, the radial dimension of the middle portion of the anti-stick plunger is greater than the radial dimension of the upper portion of the anti-stick plunger and / or the radial dimension of the lower portion of the anti-stick plunger.

[0018] This specification also provides a MEMS testing device, including the anti-sticking plunger described in any of the above embodiments.

[0019] In one embodiment, the MEMS testing device further includes a MEMS testing module, the MEMS testing module having a mounting hole, and the anti-stick plunger being detachably installed in the mounting hole;

[0020] When the MEMS testing device tests the MEMS device, the second end of the ejector pin of the anti-sticking plunger abuts against the MEMS device, and the spring of the anti-sticking plunger is compressed so that the anti-sticking plunger is completely located in the mounting hole; after the MEMS testing device completes the test on the MEMS device, the spring of the anti-sticking plunger returns to its original length from the compressed state, so that the second end of the ejector pin of the anti-sticking plunger pops out of the mounting hole to remove the MEMS device that is stuck to the anti-sticking plunger.

[0021] In one embodiment, the MEMS test module includes a grounding probe, a probe circuit board, an assembly, a pressure block, a base, and a fixing component;

[0022] When the MEMS testing device tests the MEMS device, the anti-stick plunger abuts against the lower surface of the probe circuit board, and the probe circuit board is used to form a loop between the anti-stick plunger and the grounding probe to ground.

[0023] The assembly is located below the probe circuit board and is used to position and assemble the grounding probe and the anti-stick plunger;

[0024] The pressure block is located below the assembly and is used to position the anti-stick plunger and to seal the test chamber during testing.

[0025] The base is located below part of the pressure block; the fastener passes through the base, the pressure block, the assembly and the connection hole on the probe circuit board in sequence for fixed connection.

[0026] In one embodiment, the radial dimension of the upper part of the anti-sticking plunger is smaller than the radial dimension of the middle part of the anti-sticking plunger;

[0027] The MEMS testing module also includes a spring; the upper part of the anti-stick plunger extends into the spring, one end of the spring abuts against the stepped portion between the upper and middle parts of the anti-stick plunger, and the other end of the spring abuts against the lower surface of the probe circuit board. The spring is located in the assembly hole of the assembly. When the MEMS testing device tests the MEMS device, the spring rebounds from the compressed state, causing the lower part of the anti-stick plunger to pop out and contact the MEMS device to be tested.

[0028] In one embodiment, the MEMS testing module further includes a support spring, one end of which abuts against the upper surface of the pressure block, and the other end of which abuts against the lower surface of the assembly; the support spring is in a compressed state to support the assembly.

[0029] In one embodiment, the radial dimension of the middle portion of the anti-sticking plunger is greater than the radial dimension of the lower portion of the anti-sticking plunger;

[0030] The middle and lower portions of the anti-sticking plunger are located in the pressure holes of the pressure block; the pressure holes include a first pressure hole and a second pressure hole that are interconnected, the middle portion of the anti-sticking plunger is located in the first pressure hole, and the lower portion of the anti-sticking plunger is located in the second pressure hole; the radial dimension of the second pressure hole is smaller than the radial dimension of the middle portion of the anti-sticking plunger.

[0031] In one embodiment, the MEMS testing apparatus further includes:

[0032] A limiting block is located between the probe circuit board and the assembly, and is used to position the grounding probe.

[0033] In this embodiment, an anti-sticking plunger for a MEMS testing apparatus is provided. The anti-sticking plunger is detachably installed in the mounting hole of the MEMS testing apparatus. The anti-sticking plunger includes a pin, a spring, and a mounting base. A mounting cavity is provided within the mounting base, and the spring and at least a portion of the pin are located within the mounting cavity, with the spring and pin coaxially arranged. One end of the spring abuts against or connects to a first end of the pin, and the other end of the spring abuts against or connects to the inner wall of the mounting cavity. When the MEMS testing apparatus tests a MEMS device, a second end of the pin abuts against the MEMS device. The spring is compressed to a preset length, so that the pin is completely located within the mounting cavity. When the MEMS testing apparatus completes testing the MEMS device, the spring returns to its original length from the compressed state, causing the second end of the pin to pop out of the mounting cavity to remove the MEMS device adhering to the anti-sticking plunger. The spring ensures stable operation of the pin, maintaining it in the ejected state after testing to remove the MEMS device adhering to the anti-sticking plunger. Furthermore, the spring also serves as a buffer and reset mechanism. Specifically, when the MEMS testing device is opened, the anti-stick plunger separates from the MEMS device. During the spring's return to its original length, a force is applied to the ejector pin, causing it to protrude from the plunger surface and remove the MEMS device adhering to it. After ejection, the ejector pin will not retract as long as the MEMS testing device is open; it only retracts when the plunger contacts the MEMS device surface and the testing device is closed. Through a mechanically linked ejector pin mechanism, the adhered MEMS device is actively pushed aside the moment the testing device is opened, achieving physical removal and eliminating dual-cell defects at their source, significantly reducing the probability of equipment failure and improving productivity. Furthermore, the ejector pin is completely integrated inside the plunger, requiring no external power source or control module. It is linked to the opening and closing action of the MEMS testing device via a spring, resulting in low cost and high integration. In addition, by setting the anti-stick plunger as a separate standardized module, the MEMS testing device can adapt to different MEMS device testing scenarios by installing anti-stick plungers of different sizes or with different elastic forces.

[0034] Specific embodiments of the present invention are disclosed in detail with reference to the following description and accompanying drawings, indicating how the principles of the present invention can be adopted. It should be understood that the embodiments of the present invention are not limited in scope. Features described and / or shown for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0035] It should be emphasized that the term "comprising / including" as used herein refers to the presence of a feature, part, step, or component, but does not exclude the presence or addition of one or more other features, parts, steps, or components. Attached Figure Description

[0036] The accompanying drawings described herein are for illustrative purposes only and are not intended to limit the scope of this invention in any way. Furthermore, the shapes and proportions of the components in the drawings are merely schematic to aid in understanding the invention and do not specifically limit the shapes and proportions of the components. Those skilled in the art, under the guidance of this invention, can select various possible shapes and proportions to implement this invention according to specific circumstances. In the drawings:

[0037] Figure 1 shows a schematic diagram of the structure of an anti-sticking plunger for a MEMS testing apparatus according to an embodiment of this specification;

[0038] Figure 2 shows a cross-sectional view of a mounting base for an anti-sticking plunger used in a MEMS testing apparatus according to one embodiment of this specification;

[0039] Figure 3 shows a schematic diagram of the structure of an anti-sticking plunger for a MEMS testing apparatus according to one embodiment of this specification;

[0040] Figure 4 shows an exploded view of an anti-sticking plunger for a MEMS testing apparatus according to one embodiment of this specification;

[0041] Figure 5 shows an exploded view of an anti-sticking plunger for a MEMS testing apparatus according to one embodiment of this specification;

[0042] Figure 6 shows a schematic diagram of the structure of the ejector pin for an anti-sticking plunger in one embodiment of this specification;

[0043] Figure 7 shows a schematic diagram of the structure of a MEMS testing device according to one embodiment of this specification;

[0044] Figure 8 shows a cross-sectional view of a MEMS testing apparatus according to an embodiment of this specification;

[0045] Figure 9 shows an exploded view of a MEMS test apparatus according to one embodiment of this specification.

[0046] The reference numerals in the above figures are as follows:

[0047] 100. Anti-stick plunger; 101. Ejector pin; 102. Spring; 103. Mounting seat; 14. First end; 112. Second end; 113. Radial protrusion; 130. Mounting cavity; 131. First cavity; 132. Second cavity; 133. Base; 134. Fixing seat; 135. Limiting element; 1330. Base cavity; 1341. First sub-cavity; 1342. Second sub-cavity;

[0048] 10. MEMS testing device; 200. MEMS testing module; 201. Mounting hole; 202. Grounding probe; 203. Probe circuit board; 204. Assembly; 205. Pressure block; 206. Base; 207. Fixing component; 208. Rebound spring; 209. Support spring; 210. Limiting block. Detailed Implementation

[0049] The principles and spirit of this specification will now be described with reference to several exemplary embodiments. It should be understood that these embodiments are given merely to enable those skilled in the art to better understand and implement this specification, and are not intended to limit the scope of this specification in any way. Rather, these embodiments are provided to make this disclosure more thorough and complete, and to fully convey the scope of this disclosure to those skilled in the art.

[0050] The details of this utility model can be more clearly understood by referring to the accompanying drawings and the description of specific embodiments. However, the specific embodiments of this utility model described herein are only for explaining the purpose of this utility model and should not be construed as limiting this utility model in any way. Under the teachings of this utility model, those skilled in the art can conceive of any possible modifications based on this utility model, and these should all be considered to fall within the scope of this utility model. It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there may be an intervening element. The terms "mounted," "connected," and "connected" should be interpreted broadly, for example, it can be a mechanical connection or an electrical connection, or it can be a connection within two elements, which can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0051] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this specification belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of this specification. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0052] This specification provides an anti-stick plunger for a MEMS testing apparatus. The anti-stick plunger is detachably installed in the mounting hole of the MEMS testing apparatus. When the MEMS testing apparatus tests the MEMS device, one end of the anti-stick plunger (i.e., the lower end in the figures) contacts the MEMS device. Referring to Figures 1 to 5, a schematic diagram of the structure of an anti-stick plunger for a MEMS testing apparatus according to one embodiment of this specification is shown. The left view of Figure 1 shows a front view of the anti-stick plunger, and the middle and right views of Figure 1 show cross-sectional views of the anti-stick plunger in different states. Figure 2 shows a cross-sectional view of the mounting base in two embodiments. The left view of Figure 3 shows a cross-sectional view of the anti-stick plunger, and the right view of Figure 3 shows a front view of the anti-stick plunger. Figures 4 and 5 show an exploded perspective view and a cross-sectional view of the anti-stick plunger, respectively. As shown in Figures 1 and 3 to 5, the anti-stick plunger 100 may include a pin 101, a spring 102, and a mounting base 103.

[0053] As shown in Figures 1 and 2, a mounting cavity 130 is provided within the mounting base 103. A spring 102 and at least a portion of the ejector pin 101 are located within the mounting cavity 130. As shown in the middle image of Figure 1, when the spring 102 returns to its original length, the second end 112 of the ejector pin 101 pops out of the mounting cavity 130, causing a portion of the ejector pin 101 to be located within the mounting cavity 130. As shown in the right image of Figure 1, when the spring 102 is compressed to a preset length, the ejector pin 101 is completely located within the mounting cavity 130. The spring 102 and the ejector pin 101 are coaxially arranged. One end of the spring 102 abuts against or connects to the first end 111 (i.e., the upper end) of the ejector pin 101, and the other end of the spring 102 abuts against or connects to the inner wall of the mounting cavity 130. Abutting against means that the two are in physical contact to achieve force transmission. Connecting means that the two are fixed together by bolts, welding, or other methods to form a whole.

[0054] When the MEMS testing device tests the MEMS device, the second end 112 (i.e., the lower end) of the ejector pin 101 abuts against the MEMS device, and the spring 102 is compressed to a preset length, so that the ejector pin 101 is completely located within the mounting cavity 130 (as shown in the right figure of Figure 1). When the MEMS testing device completes the testing of the MEMS device, the spring 102 returns to its original length from the compressed state, causing the second end 112 of the ejector pin 101 to pop out of the mounting cavity 130 (as shown in the middle figure of Figure 1) to remove the MEMS device that is stuck to the anti-stick plunger 100.

[0055] In the above embodiment, the spring 102 ensures the stable operation of the ejector pin 101. After the test is completed, the ejector pin 101 remains in the ejected state to remove MEMS devices adhering to the anti-adhesion plunger 100. Furthermore, the spring 102 also serves as a buffer and reset mechanism. When the MEMS testing device is opened, as the anti-adhesion plunger 100 separates from the MEMS device, the spring 102 applies a force to the ejector pin 101 during its return to its original length, causing the ejector pin 101 to protrude from the plunger 100 surface, thus removing the MEMS devices adhering to the anti-adhesion plunger 100. After ejection, the ejector pin 101 will not retract as long as the MEMS testing device is open. It will only retract when the plunger 100 contacts the MEMS device surface when the MEMS testing device is closed. Through the mechanical linkage of the ejector pin 101 mechanism, the adhered MEMS devices are actively pushed out at the moment the test box is opened, achieving physical removal and eliminating dual-unit defects at their source. The ejector pin 101 mechanism is fully integrated inside the anti-stick plunger 100, requiring no external power source or control module. It can be linked with the opening and closing action of the MEMS testing device via the spring 102, resulting in low cost and high integration. Furthermore, by setting the anti-stick plunger 100 as a separate standardized module, the MEMS testing device can adapt to different MEMS device testing scenarios by installing anti-stick plungers of different sizes or with different elasticities.

[0056] Please refer to Figure 6, which shows a schematic diagram of the ejector pin structure in an embodiment of this specification. As shown in the left image of Figure 6, in some embodiments of this specification, the first end 111 of the ejector pin 101 is provided with a radial protrusion 113. As shown in the middle image of Figure 6, in some embodiments of this specification, a radial protrusion 113 is provided between the first end 111 and the second end 112 of the ejector pin 101. The radial dimension of the radial protrusion 113 is larger than the radial dimension of the second end 112 of the ejector pin 101.

[0057] As shown in Figure 2, a limiting member 135 is provided inside the mounting cavity 130. The limiting member 135 is used to limit the axial movement of the ejector pin 101 within the mounting cavity 130, so that the radial protrusion 113 can only move axially within the mounting cavity 130 above the limiting member 135. By providing the radial protrusion 113 and the limiting member 135, a boss-annular groove mechanical limiting structure is formed, which can prevent the ejector pin 101 from falling out of the mounting cavity 130, and can also ensure that the first end 111 of the ejector pin 101 and one end of the spring 102 always maintain contact when they abut against each other, or prevent the spring 102 from being overstretched and failing due to the gravity of the ejector pin 101 when the first end 111 of the ejector pin 101 is connected to one end of the spring 102.

[0058] As shown in Figure 2, in some embodiments of this specification, the limiting member 135 may be a radially inward extension of the inner wall of the mounting cavity 130. It is understood that in some embodiments of this specification, the limiting member 135 may be a separate limiting ring, with its outer side connected to the inner wall of the mounting cavity 130. The above embodiments are merely exemplary, and this application is not limited thereto.

[0059] In some embodiments of this specification, the radial dimension of the first end 111 of the ejector pin 101 is greater than the radial dimension of the second end 112 of the ejector pin 101. As shown in the right figure of FIG6, the ejector pin 101 may be an inverted trapezoidal structure, and the radial dimension of the first end 111 of the ejector pin 101 is greater than the radial dimension of the second end 112 of the ejector pin 101. As shown in the left figure of FIG6, the first end 111 of the ejector pin 101 is provided with a radial protrusion 113, such that the radial dimension of the first end 111 is greater than the radial dimension of the second end 112 of the ejector pin 101.

[0060] As shown in Figures 1 and 2, a limiting member 135 is provided inside the mounting cavity 130. The limiting member 135 is used to limit the axial movement of the ejector pin 101 within the mounting cavity 130, so that the first end 111 can only move axially within the mounting cavity 130 above the limiting member 135. By providing the limiting part and setting the radial dimension of the first end 111 to be larger than the radial dimension of the second end 112, the ejector pin 101 can be prevented from falling out of the mounting cavity 130. It can also ensure that the first end 111 of the ejector pin 101 and one end of the spring 102 always maintain contact when they abut against each other, or prevent the spring 102 from being overstretched and failing due to the gravity of the ejector pin 101 when the first end 111 of the ejector pin 101 is connected to one end of the spring 102.

[0061] In some embodiments of this specification, the limiting member 135 may be configured such that the ejector pin 101 cannot continue to move downward after the spring 102 returns to its original length. For example, as shown in the middle figure of FIG1, when the spring 102 returns from the compressed state to its original length, the first end 111 of the ejector pin 101 cannot continue to move downward.

[0062] In some embodiments of this specification, as shown in the left image of FIG6, the first end 111 of the ejector pin 101 is provided with a radial protrusion 113. As shown in the middle image of FIG6, in some embodiments of this specification, a radial protrusion 113 is provided between the first end 111 and the second end 112 of the ejector pin 101. The radial dimension of the radial protrusion 113 is larger than the radial dimension of the second end 112 of the ejector pin 101. In some embodiments of this specification, the radial dimension of the first end 111 of the ejector pin 101 is larger than the radial dimension of the second end 112 of the ejector pin 101. As shown in the right image of FIG6, the ejector pin 101 can be an inverted trapezoidal structure, and the radial dimension of the first end 111 of the ejector pin 101 is larger than the radial dimension of the second end 112 of the ejector pin 101. As shown in the left image of FIG6, the first end 111 of the ejector pin 101 is provided with a radial protrusion 113, such that the radial dimension of the first end 111 is larger than the radial dimension of the second end 112 of the ejector pin 101. As shown in FIG2, the mounting cavity 130 may include a first cavity 131 and a second cavity 132 that are in communication with each other. In some embodiments, the spring 102 and the first end 111 of the ejector pin 101 are located in the first cavity 131. In other embodiments, the spring 102, the first end 111 of the ejector pin 101, and the radial protrusion 113 are located in the first cavity 131. The second end 112 of the ejector pin 101 is located in the second cavity 132. At least a portion of the radial dimension of the second cavity 132 is smaller than the radial dimension of the first end 111 or the radial protrusion 113 to limit the axial movement of the ejector pin 101 within the mounting cavity 130, so that the first end 111 of the ejector pin 101 or the radial protrusion 113 cannot continue to move downward and enter the second cavity 132. This configuration prevents the ejector pin 101 from falling out of the mounting cavity 130, ensures that the first end 111 of the ejector pin 101 and the first end of the spring 102 remain in contact when they abut against each other, and prevents the spring 102 from being overstretched and failing due to the gravity of the ejector pin 101 when the first end 111 of the ejector pin 101 is connected to the first end of the spring 102.

[0063] In some embodiments of this specification, as shown in the left image of FIG6, the first end 111 of the ejector pin 101 is provided with a radial protrusion 113. As shown in the middle image of FIG6, in some embodiments of this specification, a radial protrusion 113 is provided between the first end 111 and the second end 112 of the ejector pin 101. The radial dimension of the radial protrusion 113 is larger than the radial dimension of the second end 112 of the ejector pin 101. In some embodiments of this specification, the radial dimension of the first end 111 of the ejector pin 101 is larger than the radial dimension of the second end 112 of the ejector pin 101. As shown in the right image of FIG6, the ejector pin 101 can be an inverted trapezoidal structure, and the radial dimension of the first end 111 of the ejector pin 101 is larger than the radial dimension of the second end 112 of the ejector pin 101. As shown in the left image of FIG6, the first end 111 of the ejector pin 101 is provided with a radial protrusion 113, such that the radial dimension of the first end 111 is larger than the radial dimension of the second end 112 of the ejector pin 101. As shown in Figures 3 to 5, the mounting base 103 may include a detachably connected base 133 and a fixing base 134. A base cavity 1330 is provided within the base 133. The radial dimension of the base cavity 1330 is larger than the radial dimension of a portion of the fixing base 134. As shown in Figures 3 to 5, the radial dimension of the base cavity 1330 is larger than the radial dimension of the upper portion of the fixing base 134. A fixing cavity is provided within the fixing base 134. As shown in Figure 5, the fixing cavity may include a first sub-cavity 1341 and a second sub-cavity 1342 that are interconnected. The radial dimension of the first sub-cavity 1341 is larger than the radial dimension of the second sub-cavity 1342. In some embodiments, the first end 111 of the ejector pin 101, the radial protrusion 113, and a portion of the spring 102 are located within the first sub-cavity 1341. In other embodiments, the first end 111 of the ejector pin 101 and a portion of the spring 102 are located within the first sub-cavity 1341. The second end 112 of the ejector pin 101 is located within the second sub-cavity 1342.

[0064] As shown in Figure 3, when the base 133 and the fixed base 134 are detachably connected, part of the fixed base 134 (the upper part of the fixed base 134) is located in the base cavity 1330, so that part of the spring 102 is located in the base cavity 1330. One end of the spring 102 is connected to the first end 111 of the ejector pin 101, and the other end of the spring 102 abuts against or is connected to the inner wall of the base cavity 1330.

[0065] In this embodiment, the anti-sticking plunger 100 includes several independent components: a base 133, a fixing seat 134, a spring 102, and a ejector pin 101. When assembling the anti-sticking plunger 100, the ejector pin 101 can be inserted downwards into the fixing cavity of the fixing seat 134 from above. Then, the spring 102 is placed on the first end 111 within the fixing cavity. Next, the upper part of the fixing seat 134 is inserted into the base cavity 1330 of the base 133. Finally, the base 133 and the fixing seat 134 are connected. In one embodiment, the base 133 and the fixing seat 134 can be detachably connected by a snap-fit ​​or bolt. By assembling the anti-stick plunger 100 from multiple independent components, the manufacturing process of the anti-stick plunger 100 can be simplified, and one or more components of the anti-stick plunger 100 can be easily replaced. For example, different lengths of the ejector pin 101 or different elastic coefficients of the spring 102 can be replaced to meet the needs of different MEMS testing devices and the testing requirements of different MEMS devices. This achieves high flexibility, low maintenance cost and strong applicability of the anti-stick plunger 100.

[0066] As shown in Figures 3 to 5, at least a portion of the second sub-cavity 1342 has a radial dimension smaller than that of the first end 111 or the radial protrusion 113, in order to limit the axial movement of the ejector pin 101 within the mounting cavity 130, allowing the first end 111 or the radial protrusion 113 of the ejector pin 101 to continue moving downwards and entering the second sub-cavity 1342. This arrangement prevents the ejector pin 101 from falling out of the mounting cavity 130, ensures that the first end 111 of the ejector pin 101 and one end of the spring 102 remain in contact when they abut against each other, and prevents the spring 102 from becoming overstretched and failing due to the weight of the ejector pin 101 when the first end 111 of the ejector pin 101 is connected to one end of the spring 102.

[0067] As shown in Figures 1 to 5, in some embodiments of this specification, the radial dimension of the middle portion of the anti-sticking plunger 100 is greater than the radial dimension of the upper portion and / or the radial dimension of the lower portion of the anti-sticking plunger 100. By setting the middle dimension of the anti-sticking plunger 100 to be greater than the radial dimensions of the upper and / or lower portions, the positioning of the anti-sticking plunger 100 in the mounting holes of the MEMS testing device can be facilitated, thereby improving the installation stability of the anti-sticking plunger 100.

[0068] This specification also provides a MEMS testing apparatus. Figures 7 to 9 show a perspective view, a cross-sectional view, and an exploded view of a MEMS testing apparatus according to an embodiment of this specification. As shown in Figures 7 to 9, the MEMS testing apparatus 10 may include the anti-stick plunger 100 from any of the above embodiments.

[0069] In this embodiment, the MEMS testing device 10 includes the anti-sticking plunger 100 described in the previous embodiment, enabling the removal of MEMS devices adhering to the plunger 100 without modifying the structure of the MEMS testing device 10, resulting in low modification costs. The anti-sticking plunger 100 can use a unified installation interface and can directly replace the ordinary plunger in the original MEMS testing device 10 without any mechanical or electrical modifications, enabling rapid deployment. Moreover, by installing anti-sticking plungers 100 with springs 102 of different elastic forces, the MEMS testing device 10 can be adapted to the testing requirements of different MEMS devices, accurately matching different chip adhesion scenarios (from low-viscosity colloids to high-viscosity resin residue scenarios). In this embodiment, the MEMS testing device 10 actively removes adhered MEMS devices through the anti-sticking plunger 100, avoiding downtime caused by manual intervention and effectively reducing dual-cell defect rates and overload alarms.

[0070] In some embodiments of this specification, as shown in Figures 7 to 9, the MEMS testing apparatus 10 may further include a MEMS testing module 200. As shown in Figure 8, the MEMS testing module 200 is provided with mounting holes 201. Anti-stick plungers 100 are detachably installed in the mounting holes 201. By detachably installing the anti-stick plungers 100 in the mounting holes 201, different anti-stick plungers 100 can be easily replaced according to different testing scenarios. In one embodiment, the MEMS testing module 200 may be provided with multiple mounting holes 201, and correspondingly, multiple anti-stick plungers 100 can be installed to test multiple MEMS devices.

[0071] When the MEMS testing apparatus 10 tests the MEMS device, the second end 112 of the ejector pin 101 of the anti-sticking plunger 100 abuts against the MEMS device, and the spring 102 of the anti-sticking plunger 100 is compressed, so that the anti-sticking plunger 100 is completely located within the mounting hole 201. After the MEMS testing apparatus 10 completes the testing of the MEMS device, the spring 102 of the anti-sticking plunger 100 returns to its original length from the compressed state, so that the second end 112 of the ejector pin 101 of the anti-sticking plunger 100 pops out of the mounting hole 201 to remove the MEMS device that is stuck to the anti-sticking plunger 100.

[0072] As shown in Figures 7 to 9, in some embodiments of this specification, the MEMS test module 200 may include a grounding probe 202, a probe circuit board 203, an assembly 204, a pressure block 205, a base 206, and a fixing member 207.

[0073] When the MEMS test device 10 tests the MEMS device, the anti-stick plunger 100 abuts against the lower surface of the probe circuit board 203. The probe circuit board 203 is used to form a circuit between the anti-stick plunger 100 and the grounding probe 202 to ground.

[0074] Assembly 204 is located below probe circuit board 203 and is used to position and assemble ground probe 202 and anti-stick plunger 100.

[0075] The pressure block 205 is located below the assembly 204 and is used to position the anti-stick plunger 100 and to seal the test chamber during testing.

[0076] The base 206 is located below part of the pressure block 205. The fastener 207 passes through the connection holes on the base 206, pressure block 205, assembly 204 and probe circuit board 203 in sequence for fixed connection.

[0077] As shown in Figures 8 and 9, in some embodiments of this specification, the radial dimension of the upper part of the anti-stick plunger 100 is smaller than the radial dimension of the middle part of the anti-stick plunger 100. The MEMS test module 200 may also include a spring 208. The upper part of the anti-stick plunger 100 extends into the spring 208. One end of the spring 208 abuts against the stepped portion between the upper and middle parts of the anti-stick plunger 100. The other end of the spring 208 abuts against the lower surface of the probe circuit board 203. The spring 208 is located in the assembly hole of the assembly 204. When the MEMS test device 10 tests the MEMS device, the spring 208 rebounds from the compressed state, causing the lower part of the anti-stick plunger 100 to pop out of the mounting hole 201 to contact the MEMS device under test. By setting the spring 208, the test device can install anti-stick plungers 100 of different lengths, and it can also serve as a buffer and reset function.

[0078] As shown in Figures 8 and 9, in some embodiments of this specification, the MEMS testing module 200 may further include a support spring 209. As shown in Figure 8, one end of the support spring 209 abuts against the upper surface of the pressure block 205. The other end of the support spring 209 abuts against the lower surface of the assembly 204. The support spring 209 is used to support the assembly 204, which can improve the stability of the MEMS testing device 10 and also has the effect of buffering and resetting.

[0079] As shown in Figure 8, in some embodiments of this specification, the radial dimension of the middle portion of the anti-stick plunger 100 is greater than the radial dimension of the lower portion of the anti-stick plunger 100. A portion of the middle and a portion of the lower portion of the anti-stick plunger 100 are located within the pressure hole of the pressure block 205. The pressure hole may include a first pressure hole and a second pressure hole that are interconnected. A portion of the middle portion of the anti-stick plunger 100 is located in the first pressure hole, and a portion of the lower portion of the anti-stick plunger 100 is located in the second pressure hole. The radial dimension of the second pressure hole is smaller than the radial dimension of the middle portion of the anti-stick plunger 100 to limit the axial movement of the anti-stick plunger 100 within the pressure hole, preventing the plunger 100 from falling out of the mounting hole 201.

[0080] As shown in Figures 7 to 9, in some embodiments of this specification, the MEMS testing apparatus 10 may further include a limiting block 210. The limiting block 210 is located between the probe circuit board 203 and the assembly 204, and is used to position the ground probe 202. By setting the limiting block 210, the ground probe 202 can be accurately positioned.

[0081] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on describing the differences from other embodiments. For details, please refer to the foregoing descriptions of the relevant processing embodiments; they will not be repeated here.

[0082] It should be understood that the above description is for illustrative purposes and not for limitation. Many embodiments and applications beyond the provided examples will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of this specification should not be determined by reference to the above description, but rather by reference to the foregoing claims and the full scope of their equivalents.

[0083] The above description is merely a preferred embodiment of this specification and is not intended to limit this specification. Various modifications and variations can be made to the embodiments described herein by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this specification should be included within the scope of protection of this specification.

Claims

1. An anti-sticking plunger for a MEMS testing device, characterized in that, The anti-stick plunger is detachably installed in the mounting hole of the MEMS testing device. The anti-stick plunger includes a pin, a spring, and a mounting base. The mounting base has a mounting cavity, and the spring and at least part of the pin are located within the mounting cavity. The spring and the pin are coaxially arranged. One end of the spring abuts against or connects to the first end of the pin, and the other end of the spring abuts against or connects to the inner wall of the mounting cavity. When the MEMS testing device tests the MEMS device, the second end of the pin abuts against the MEMS device, and the spring is compressed to a preset length, so that the pin is completely located within the mounting cavity. When the MEMS testing device completes the test on the MEMS device, the spring returns to its original length from the compressed state, causing the second end of the pin to pop out of the mounting cavity to remove the MEMS device adhering to the anti-stick plunger.

2. The anti-sticking plunger for a MEMS testing device according to claim 1, characterized in that, The first end of the ejector pin is provided with a radial protrusion, or a radial protrusion is provided between the first end and the second end of the ejector pin, the radial dimension of the radial protrusion being greater than the radial dimension of the second end of the ejector pin; or the radial dimension of the first end of the ejector pin being greater than the radial dimension of the second end of the ejector pin; a limiting member is provided in the mounting cavity, the limiting member being used to limit the axial movement of the ejector pin in the mounting cavity.

3. The anti-sticking plunger for a MEMS testing device according to claim 1, characterized in that, The first end of the ejector pin is provided with a radial protrusion, or a radial protrusion is provided between the first end and the second end of the ejector pin, wherein the radial dimension of the radial protrusion is greater than the radial dimension of the second end of the ejector pin; or the radial dimension of the first end of the ejector pin is greater than the radial dimension of the second end of the ejector pin; the mounting cavity includes a first cavity and a second cavity that are interconnected; the spring and the first end of the ejector pin are located in the first cavity, or the spring, the first end of the ejector pin, and the radial protrusion are located in the first cavity; the second end of the ejector pin is located in the second cavity; at least a portion of the radial dimension of the second cavity is smaller than the radial dimension of the first end or the radial protrusion, so as to limit the axial movement of the ejector pin in the mounting cavity.

4. The anti-sticking plunger for a MEMS testing device according to claim 1, characterized in that, The first end of the ejector pin has a radial protrusion, or a radial protrusion is provided between the first end and the second end of the ejector pin, the radial dimension of the radial protrusion being larger than the radial dimension of the second end of the ejector pin; or, the radial dimension of the first end of the ejector pin is larger than the radial dimension of the second end of the ejector pin; the mounting base includes a detachably connected base and a fixing base; the base has a base cavity; the fixing base has a fixing cavity; the radial dimension of the base cavity is larger than the radial dimension of a portion of the fixing base; the fixing cavity includes a first sub-cavity and a second sub-cavity that communicate with each other, the radial dimension of the first sub-cavity being larger than the radial dimension of the second sub-cavity; the first end of the ejector pin, the radial protrusion, and a portion of the spring are located in the first sub-cavity, or the first end of the ejector pin and a portion of the spring are located in the first sub-cavity; the second end of the ejector pin is located in the second sub-cavity; When the base and the fixed seat are connected, part of the fixed seat is located in the base cavity, such that part of the spring is located in the base cavity, one end of the spring is connected to the first end of the ejector pin, and the other end of the spring abuts against the inner wall of the base cavity; At least a portion of the second sub-cavity has a radial dimension smaller than that of the first end or the radial protrusion, in order to limit the axial movement of the ejector pin within the mounting cavity.

5. The anti-sticking plunger for a MEMS testing device according to claim 1, characterized in that, The radial dimension of the middle part of the anti-sticking plunger is greater than the radial dimension of the upper part of the anti-sticking plunger and / or the radial dimension of the lower part of the anti-sticking plunger.

6. A MEMS testing device, characterized in that, Includes the anti-stick plunger for MEMS testing apparatus as described in any one of claims 1 to 5.

7. The MEMS testing apparatus according to claim 6, characterized in that, It also includes a MEMS testing module, which has a mounting hole. The anti-stick plunger is detachably installed in the mounting hole. When the MEMS testing device tests the MEMS device, the second end of the plunger's pin abuts against the MEMS device, and the spring of the anti-stick plunger is compressed, so that the anti-stick plunger is completely located in the mounting hole. After the MEMS testing device completes the test on the MEMS device, the spring of the anti-stick plunger returns to its original length from the compressed state, so that the second end of the plunger's pin pops out of the mounting hole to remove the MEMS device that is stuck to the anti-stick plunger.

8. The MEMS testing apparatus according to claim 7, characterized in that, The MEMS test module includes a grounding probe, a probe circuit board, an assembly, a pressure block, a base, and a fixing component. When the MEMS test device tests the MEMS device, the anti-stick plunger abuts against the lower surface of the probe circuit board, and the probe circuit board is used to form a circuit between the anti-stick plunger and the grounding probe for grounding. The assembly is located below the probe circuit board and is used to position and assemble the grounding probe and the anti-stick plunger. The pressure block is located below the assembly and is used to position the anti-stick plunger and also to seal the test chamber during testing. The base is located below a portion of the pressure block. The fastener is fixedly connected by passing through the base, the pressure block, the assembly and the connection hole on the probe circuit board in sequence.

9. The MEMS testing apparatus according to claim 8, characterized in that, The radial dimension of the upper part of the anti-stick plunger is smaller than the radial dimension of the middle part of the anti-stick plunger; the MEMS test module also includes a spring; the upper part of the anti-stick plunger extends into the spring, one end of the spring abuts against the step portion between the upper and middle parts of the anti-stick plunger, and the other end of the spring abuts against the lower surface of the probe circuit board. The spring is located in the assembly hole of the assembly; when the MEMS test device tests the MEMS device, the spring rebounds from the compressed state, causing the lower part of the anti-stick plunger to pop out and contact the MEMS device to be tested.

10. The MEMS testing apparatus according to claim 9, characterized in that, The MEMS testing module also includes a support spring, one end of which abuts against the upper surface of the pressure block, and the other end of which abuts against the lower surface of the assembly; the support spring is used to support the assembly.

11. The MEMS testing apparatus according to claim 8, characterized in that, The radial dimension of the middle part of the anti-sticking plunger is greater than the radial dimension of the lower part of the anti-sticking plunger; a portion of the middle part and a portion of the lower part of the anti-sticking plunger are located in the pressure hole of the pressure block; the pressure hole includes a first pressure hole and a second pressure hole that are interconnected, a portion of the middle part of the anti-sticking plunger is located in the first pressure hole, and a portion of the lower part of the anti-sticking plunger is located in the second pressure hole; the radial dimension of the second pressure hole is smaller than the radial dimension of the middle part of the anti-sticking plunger.

12. The MEMS testing apparatus according to claim 9, characterized in that, Also includes: A limiting block is located between the probe circuit board and the assembly, and is used to position the grounding probe.

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