Detachable high-frequency high-performance radio frequency probe card device
By designing a detachable high-frequency, high-performance RF probe card device, the problems of probe card slippage and inconvenient disassembly when in contact with the spherical PAD were solved, achieving stable connection and convenient disassembly, and improving detection accuracy and replacement efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUXI PROKA TECH CO LTD
- Filing Date
- 2025-03-26
- Publication Date
- 2026-05-01
AI Technical Summary
Existing horizontal probe cards are prone to slipping when in contact with spherical PADs, affecting the accuracy of test results. Furthermore, RF probe cards are not easy to disassemble, resulting in low detection efficiency.
A detachable high-frequency, high-performance radio frequency probe card device was designed. The probe card can be detached by means of a snap-fit mounting slot, a stable chassis frame, a pin counterweight plate, and a locking mounting hole. It can be fixed and disassembled by fastening screws to ensure a stable connection between the probe card body and the chassis frame and easy disassembly.
It achieves stable connection and convenient disassembly of probe cards, improves detection accuracy and replacement efficiency, and avoids the problem of tangled wires affecting detection accuracy.
Smart Images
Figure CN224190097U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of probe card technology, and in particular to a detachable high-frequency high-performance radio frequency probe card device. Background Technology
[0002] Probe cards serve as the interface between electronic test systems and semiconductor wafers. Typically, a probe card mechanically interfaces with probes and is electrically connected to the test instrument. Its purpose is to provide an electrical path between the test system and the circuitry on the wafer, allowing for wafer-level testing and verification of the circuitry, usually before they are diced and packaged. It typically consists of a printed circuit board (PCB) and some form of contact element, usually metallic but also possible from other materials. Currently, most probe cards are horizontal, with the PCB placed horizontally and the probes vertically; such probe cards can meet most wafer testing needs. However, for spherical PADs, slippage can easily occur between the horizontal probe card and the spherical PAD, affecting the accuracy of the test results. Furthermore, the inconvenience of disassembling RF probe cards affects the efficiency of device replacement, thus impacting testing efficiency. Therefore, we designed a detachable high-frequency, high-performance RF probe card device. Utility Model Content
[0003] The purpose of this invention is to provide a detachable high-frequency, high-performance radio frequency probe card device.
[0004] To solve the above technical problems, this utility model provides the following technical solution: a detachable high-frequency high-performance radio frequency probe card device, including a fixed mounting chassis. A snap-fit mounting groove is formed on the top surface of one side of the fixed mounting chassis. A stable chassis frame is detachably installed inside the snap-fit mounting groove. A snap-fit mounting block is fixedly connected to the bottom surface of one side of the stable chassis frame. A radio frequency probe card body is detachably installed on the top surface of one side of the stable chassis frame. A first locking mounting hole is formed on the top surface of the side of the snap-fit mounting groove. A pin resisting plate is detachably installed inside the snap-fit mounting groove. A limiting side plate is fixedly connected to the top of one side of the pin resisting plate. A second locking mounting hole is formed on the back surface of one side of the limiting side plate. An auxiliary disassembly handle is fixedly connected to the back surface of one side of the limiting side plate. A fastening screw is detachably installed inside the second locking mounting hole.
[0005] Preferably, the positions of the snap-fit mounting block and the snap-fit mounting slot correspond one-to-one, the connection relationship between the snap-fit mounting block and the snap-fit mounting slot is a movable snap-fit, the stable chassis frame is located on the top surface of the fixed mounting chassis, and the connection relationship between the snap-fit mounting block and the fixed mounting chassis is a sliding connection.
[0006] Preferably, the positions of the first locking mounting hole and the second locking mounting hole correspond one-to-one, the cross-sectional diameters of the first locking mounting hole and the second locking mounting hole are the same, the connection relationship between the limiting side plate and the snap-fit mounting groove is a movable snap-fit, the connection relationship between the pin resisting plate and the snap-fit mounting block is a compression limiting contact connection, the fastening connecting screw passes through the interior of the second locking mounting hole and the first locking mounting hole, the connection relationship between the fastening connecting screw and the limiting side plate is a threaded connection, and the connection relationship between the fastening connecting screw and the fixed mounting base is a threaded connection.
[0007] Preferably, a fixing ear is fixedly connected to the top edge of the side of the RF probe card body, and a fixing hole is opened inside the fixing ear. A base connecting block is fixedly connected to the top surface of one side of the stable chassis frame, and a line organizing tube is fixedly connected to the top surface of one side of the base connecting block. A line organizing limiting groove is opened on the inner wall of one side of the line organizing tube.
[0008] Preferably, there are several fixed connecting ears, which are distributed in a circular pattern on the top edge of the side of the RF probe card body. A fastening screw is detachably installed inside the fixed connecting hole. The connection between the fastening screw and the fixed connecting ear is a threaded connection, and the connection between the fastening screw and the stable chassis frame is a threaded connection.
[0009] Preferably, the number of the line sorting tubes is several, and the several line sorting tubes are distributed at equal intervals on the top surfaces of both sides of the stable chassis frame. The number of the line sorting limiting grooves is several, and the several line sorting limiting grooves are distributed in a circle on the inner wall of one side of the line sorting tube.
[0010] Compared with related technologies, the detachable high-frequency high-performance radio frequency probe card device provided by this utility model has the following advantages:
[0011] 1. This utility model provides a detachable high-frequency high-performance radio frequency probe card device. A snap-fit mounting block at the bottom of a stable chassis frame directly snaps into the snap-fit mounting groove. A pin-type anti-force plate is inserted directly into the snap-fit mounting groove, directly abutting one side of the snap-fit mounting block, thus fixing and limiting the overall stability of the chassis frame. The second locking mounting hole and the first locking mounting hole are aligned one-to-one, and a fastening screw is directly installed inside the second locking mounting hole to secure the installation. When it is necessary to disassemble the entire stable chassis frame and radio frequency probe card body, the pin-type anti-force plate and the limiting side plate can be removed directly to take out the main body of the stable chassis frame and radio frequency probe card, facilitating replacement and maintenance.
[0012] 2. This utility model provides a detachable high-frequency high-performance RF probe card device. The RF probe card body and the stable chassis frame are securely connected via fixing holes on fixing connecting ears. Multiple fixing connecting screws are installed inside these holes for secure installation. When disassembling the stable chassis frame, separation can be achieved simply by removing the fixing screws inside the fixing connecting holes. Multiple line management tubes are located on both sides of the top of the stable chassis frame to effectively manage and guide the lines on the RF probe card body. Multiple line management limiting grooves are located inside the line management tubes to further limit and manage the lines, preventing tangled lines from affecting the device's detection accuracy. Attached Figure Description
[0013] Figure 1 This is a three-dimensional structural diagram of the present invention;
[0014] Figure 2 This is a schematic diagram of the overall side top view of the device of this utility model;
[0015] Figure 3 This is a schematic diagram of the connection structure between the stable chassis frame and the main body of the radio frequency probe card of this utility model;
[0016] Figure 4 This is a side view structural diagram of the circuit organizing tube of this utility model.
[0017] The following are labeled in the diagram: 1. Fixed mounting base; 2. Snap-on mounting slot; 3. Stabilizing base frame; 4. Snap-on mounting block; 5. RF probe card body; 6. First locking mounting hole; 7. Insert pin anti-force plate; 8. Limiting side plate; 9. Second locking mounting hole; 10. Auxiliary disassembly handle; 11. Fastening connecting screw; 12. Fixed connecting ear; 13. Fixed connecting hole; 14. Base connecting block; 15. Line organizing tube; 16. Line organizing limiting slot. Detailed Implementation
[0018] Example 1:
[0019] Please see Figure 1-4This utility model provides a technical solution: a detachable high-frequency high-performance radio frequency probe card device, including a fixed mounting base 1. A snap-fit mounting groove 2 is formed on the top surface of one side of the fixed mounting base 1. A detachable stable base frame 3 is installed inside the snap-fit mounting groove 2. A snap-fit mounting block 4 is fixedly connected to the bottom surface of one side of the stable base frame 3. A radio frequency probe card body 5 is detachably installed on the top surface of one side of the stable base frame 3. A first locking mounting hole 6 is formed on the top surface of the side of the snap-fit mounting groove 2. A pin-support plate 7 is detachably installed inside the snap-fit mounting groove 2. A limiting side plate 8 is fixedly connected to the top surface of one side of the pin-support plate 7. A second locking mounting hole 9 is formed on the back surface of one side of the limiting side plate 8. An auxiliary disassembly handle 10 is fixedly connected to the back surface of one side of the limiting side plate 8. A fastening screw is detachably installed inside the second locking mounting hole 9. The positions of the screw 11, the snap-fit mounting block 4, and the snap-fit mounting groove 2 are one-to-one. The connection between the snap-fit mounting block 4 and the snap-fit mounting groove 2 is a movable snap-fit. The stable chassis frame 3 is located on the top surface of the fixed mounting chassis 1. The connection between the snap-fit mounting block 4 and the fixed mounting chassis 1 is a sliding connection. The positions of the first locking mounting hole 6 and the second locking mounting hole 9 are one-to-one. The cross-sectional diameters of the first locking mounting hole 6 and the second locking mounting hole 9 are the same. The connection between the limiting side plate 8 and the snap-fit mounting groove 2 is a movable snap-fit. The connection between the pin resisting plate 7 and the snap-fit mounting block 4 is a compression limiting contact connection. The fastening connecting screw 11 passes through the interior of the second locking mounting hole 9 and the first locking mounting hole 6. The connection between the fastening connecting screw 11 and the limiting side plate 8 is a threaded connection. The connection between the fastening connecting screw 11 and the fixed mounting chassis 1 is a threaded connection.
[0020] In the implementation plan, the buckle mounting block 4 at the bottom of the stable chassis frame 3 is directly snapped into the buckle mounting groove 2. The pin counterweight plate 7 is directly inserted into the buckle mounting groove 2 and directly abuts against one side of the buckle mounting block 4, thus fixing and limiting the overall stability chassis frame 3. The second locking mounting hole 9 and the first locking mounting hole 6 are aligned one by one, and the fastening screw 11 is directly installed in the second locking mounting hole 9 to secure the installation. When it is necessary to disassemble the stable chassis frame 3 and the RF probe card body 5 as a whole, the pin counterweight plate 7 and the limiting side plate 8 can be removed directly to take out the main body of the stable chassis frame 3 and the RF probe card body 5, which is convenient for replacement and maintenance.
[0021] Example 2:
[0022] Please see Figure 1-4This utility model provides a technical solution: a detachable high-frequency high-performance radio frequency probe card device, including a fixed connecting ear 12 fixedly connected to the top edge of the side of the radio frequency probe card body 5, a fixed connecting hole 13 opened inside the fixed connecting ear 12, a base connecting block 14 fixedly connected to the top surface of one side of the stable chassis frame 3, a line organizing tube 15 fixedly connected to the top surface of one side of the base connecting block 14, a line organizing limiting groove 16 opened on the inner wall of one side of the line organizing tube 15, and a plurality of fixed connecting ears 12 arranged in a circle. The top edge of the side of the RF probe card body 5 has a fixed connection hole 13 on which a fastening screw 11 is detachably installed. The connection between the fastening screw 11 and the fixed connection ear 12 is a threaded connection. The connection between the fastening screw 11 and the stable chassis frame 3 is also a threaded connection. There are several line organizing tubes 15, which are evenly distributed on the top surfaces of both sides of the stable chassis frame 3. There are several line organizing limiting grooves 16, which are circumferentially distributed on the inner wall of one side of the line organizing tube 15.
[0023] In the implementation scheme, the RF probe card body 5 and the stable chassis frame 3 are fastened together by fixing connection holes 13 on the fixing connection ear 12. Fastening screws 11 are installed inside the multiple fixing connection holes 13 to achieve fastening. When it is necessary to disassemble the stable chassis frame 3, the fastening screws 11 inside the fixing connection holes 13 can be removed directly to complete the separation. Multiple line management tubes 15 are set on both sides of the top of the stable chassis frame 3 to effectively manage and guide the lines on the RF probe card body 5. Multiple line management limiting grooves 16 are set inside the line management tubes 15 to further limit and manage the lines effectively, avoiding the problem of line entanglement affecting the detection accuracy of the device.
[0024] Working principle:
[0025] The buckle mounting block 4 at the bottom of the stable chassis frame 3 is directly snapped into the buckle mounting groove 2. The pin counterweight plate 7 is directly inserted into the buckle mounting groove 2 and directly abuts against one side of the buckle mounting block 4, thus fixing and limiting the overall stability chassis frame 3. The second locking mounting hole 9 and the first locking mounting hole 6 are aligned one by one, and the fastening screw 11 is directly installed in the second locking mounting hole 9 to secure the installation. When it is necessary to disassemble the stable chassis frame 3 and the RF probe card body 5 as a whole, the pin counterweight plate 7 and the limiting side plate 8 can be removed to take out the main body of the stable chassis frame 3 and the RF probe card body 5, which is convenient for replacement and maintenance.
[0026] The RF probe card body 5 and the stable chassis frame 3 are fastened together by fixing the fixing holes 13 on the fixing connecting ears 12. Fastening screws 11 are installed inside the multiple fixing holes 13 to achieve a secure installation. When it is necessary to disassemble the stable chassis frame 3, the fastening screws 11 inside the fixing holes 13 can be removed directly to complete the separation. Multiple line management tubes 15 are set on both sides of the top of the stable chassis frame 3 to effectively manage and guide the lines on the RF probe card body 5. Multiple line management limiting grooves 16 are set inside the line management tubes 15 to further limit and manage the lines effectively, avoiding the problem of line tangling affecting the detection accuracy of the device.
Claims
1. A detachable high-frequency high-performance radio frequency probe card device, comprising a fixed mounting chassis (1), wherein a snap-fit mounting groove (2) is provided on one side of the top surface of the fixed mounting chassis (1), characterized in that: The buckle mounting slot (2) is detachably mounted with a stable chassis frame (3). A buckle mounting block (4) is fixedly connected to the bottom surface of one side of the stable chassis frame (3). An RF probe card body (5) is detachably mounted on the top surface of one side of the stable chassis frame (3). A first locking mounting hole (6) is opened on the top surface of the side of the buckle mounting slot (2). A pin resisting plate (7) is detachably mounted inside the buckle mounting slot (2). A limiting side plate (8) is fixedly connected to the top surface of one side of the pin resisting plate (7). A second locking mounting hole (9) is opened on the back surface of one side of the limiting side plate (8). An auxiliary disassembly handle (10) is fixedly connected to the back surface of one side of the limiting side plate (8). A fastening screw (11) is detachably mounted inside the second locking mounting hole (9).
2. The detachable high-frequency high-performance RF probe card apparatus according to claim 1, wherein, The positions of the snap-on mounting block (4) and the snap-on mounting groove (2) correspond one-to-one. The connection between the snap-on mounting block (4) and the snap-on mounting groove (2) is a movable snap-on connection. The stable chassis frame (3) is located on the top surface of the fixed mounting chassis (1). The connection between the snap-on mounting block (4) and the fixed mounting chassis (1) is a sliding connection.
3. The detachable high-frequency high-performance RF probe card apparatus according to claim 1, wherein, The positions of the first locking mounting hole (6) and the second locking mounting hole (9) correspond one-to-one. The cross-sectional diameters of the first locking mounting hole (6) and the second locking mounting hole (9) are the same. The connection relationship between the limiting side plate (8) and the buckle mounting groove (2) is a movable snap-fit. The connection relationship between the pin resisting plate (7) and the buckle mounting block (4) is a compression limiting contact connection. The fastening connecting screw (11) passes through the interior of the second locking mounting hole (9) and the first locking mounting hole (6). The connection relationship between the fastening connecting screw (11) and the limiting side plate (8) is a threaded connection. The connection relationship between the fastening connecting screw (11) and the fixed mounting base (1) is a threaded connection.
4. The detachable high-frequency high-performance radio frequency probe card device according to claim 1, characterized in that, The top edge of the side of the RF probe card body (5) is fixedly connected to a fixed connecting ear (12), and a fixed connecting hole (13) is opened inside the fixed connecting ear (12). A base connecting block (14) is fixedly connected to the top surface of one side of the stable chassis frame (3). A line organizing tube (15) is fixedly connected to the top surface of one side of the base connecting block (14). A line organizing limiting groove (16) is opened on the inner wall of one side of the line organizing tube (15).
5. The detachable high-frequency high-performance radio frequency probe card device according to claim 4, characterized in that, The number of fixed connecting ears (12) is several, and the several fixed connecting ears (12) are distributed in a circle on the top edge of the side of the radio frequency probe card body (5). The fixed connecting hole (13) is detachably installed with a fastening connecting screw (11). The connection relationship between the fastening connecting screw (11) and the fixed connecting ear (12) is a threaded connection. The connection relationship between the fastening connecting screw (11) and the stable chassis frame (3) is a threaded connection.
6. A detachable high-frequency high-performance RF probe card apparatus according to claim 4, wherein The number of the line sorting tubes (15) is several, and the several line sorting tubes (15) are distributed at equal intervals on the top surfaces of both sides of the stable chassis frame (3). The number of the line sorting limiting grooves (16) is several, and the several line sorting limiting grooves (16) are distributed in a circle on the inner wall of one side of the line sorting tubes (15).