Cleaning device for chip

Abstract

The utility model relates to a cleaning device for chips, which belongs to the technical field of chip processing and comprises a protective cover, a protective cover arranged at the top of the protective cover and a supply box fixedly mounted at the bottom of the protective cover, a cleaning component is arranged on the side surface of the protective cover, and a fixing component is arranged in the protective cover. The cleaning assembly comprises a supply pipe frame fixedly installed on the top of the side face of the supply box and a connecting cylinder fixedly installed on the top of the supply pipe frame. According to the cleaning device for the chip, the chip is embedded into a clamping notch, then a fixing frame is inserted into the side wall of a fixing plate, after the fixing plate is embedded into the fixing notch, a protection cover covers the top of a protection cover, meanwhile, a limiting seat abuts against the top of a sector plate, and a limiting rod at the bottom of the limiting seat is embedded into a groove hole formed by the sector plate; the driving motor is started to drive the rotating cylinder to rotate, the rotating cylinder rotates to drive the conical gear ring to drive the conical gear to rotate, and therefore the rotating pipeline, the cleaning base and the cleaning nozzle are driven to rotate.

Description

Technical Field

[0001] This utility model relates to the field of chip processing technology, specifically to a chip cleaning device. Background Technology

[0002] Chip cleaning is a crucial step in chip manufacturing, aiming to remove various contaminants from the chip surface to ensure chip performance and reliability. As chip size continues to shrink and integration levels increase, the requirements for cleaning precision and cleanliness become increasingly stringent. For example, in nanoscale chip manufacturing, even contaminants at the single-atom level can severely impact chip performance. Simultaneously, the cleaning process needs to balance contaminant removal with avoiding damage to the chip itself, as some cleaning methods may etch the chip surface or introduce new impurities.

[0003] Chip cleaning equipment comes in various forms, with cleaning tanks and spray cleaning being the most common methods. Cleaning tanks are the most basic equipment in wet cleaning processes, typically made of chemically resistant materials such as quartz or polytetrafluoroethylene (PTFE). Chips are placed in the cleaning tank and thoroughly cleaned through immersion and agitation, ensuring complete contact with the chemical solution. Spray cleaning atomizes the cleaning solution and sprays it onto the chip surface. This method provides more even coverage and utilizes the impact force of the spray to remove some particulate contaminants. It also reduces the amount of chemical solution used.

[0004] Spray cleaning, as a commonly used cleaning device, can evenly cover the chip surface and achieve excellent cleaning results by spraying atomized water from a nozzle. However, since the nozzle is usually designed to spray water from a fixed location, the cleaning effect is relatively low and the flexibility is not high. Therefore, a cleaning device for chips is proposed. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a chip cleaning device with advantages such as high flexibility and high operating efficiency, solving the problems of fixed nozzle positions in chip spray cleaning equipment that reduce spray cleaning efficiency and low flexibility.

[0006] To achieve the aforementioned goals of high flexibility and high operational efficiency, this utility model provides the following technical solution: a chip cleaning device, comprising a protective cover, a protective cap disposed on the top of the protective cover, and a supply box fixedly installed at the bottom of the protective cover, wherein a cleaning component is disposed on the side of the protective cover, and a fixing component is disposed inside the protective cover;

[0007] The cleaning assembly includes a supply pipe rack fixedly installed on the top side of the supply box, a connecting cylinder fixedly installed on the top of the supply pipe rack, a rotating pipe disposed on the side wall of the connecting cylinder, a bevel gear disposed on the outside of the rotating pipe, a cleaning seat fixedly installed inside the side of the rotating pipe, several cleaning nozzles disposed on the side of the cleaning seat, a drive motor fixedly installed at the bottom of the protective cover, and a rotating cylinder fixedly installed on the top of the drive motor.

[0008] Furthermore, the fixing assembly includes a fixing seat fixedly installed on the bottom wall of the rotating cylinder, a fixing plate movably connected inside the fixing seat, and a fixing bracket movably connected to the side of the fixing plate.

[0009] Furthermore, the inside of the supply pipe rack is provided with a supply pipe embedded in the inside of the connecting cylinder, the side of the rotating pipe is embedded in the side wall of the connecting cylinder and is rotatably connected to the connecting cylinder, and the cavity of the rotating pipe is connected to the supply pipe inside the connecting cylinder.

[0010] Furthermore, the protective cover has several through holes on its side, the rotating pipe passes through the through holes laterally and is rotatably connected to the side wall of the protective cover, and the bevel gear is located on the outside of the rotating pipe inside the protective cover.

[0011] Furthermore, a conical gear ring is provided at the top of the rotating cylinder, and the bottom wall of the conical gear and the conical gear ring are connected by tooth meshing. The output shaft of the drive motor vertically penetrates the bottom wall of the protective cover to the inside of the protective cover and is rotatably connected to the bottom wall of the protective cover.

[0012] Furthermore, the top of the fixing base is provided with a cross-shaped fixing slot, and the side of the fixing plate is provided with a fan-shaped plate. The fixing plate is vertically embedded in the interior of the fixing slot and is slidably connected to the inner side wall of the fixing slot.

[0013] Furthermore, the bottom of the protective cover is provided with a limiting seat, and the bottom of the limiting seat is provided with a limiting rod that is embedded in the inside of the fixing slot and slidably connected to the inner side wall of the slot formed by splicing the fan-shaped plate.

[0014] Furthermore, the side of the fixing plate is provided with several insertion holes, the side of the fixing frame is provided with insertion rods that are used in conjunction with the insertion holes, and the inner side wall of the fixing frame is provided with locking slots for fixing.

[0015] Compared with the prior art, the present invention provides a chip cleaning device with the following advantages:

[0016] 1. This chip cleaning device involves embedding the chip into the slot, inserting the fixing bracket into the side wall of the fixing plate, embedding the fixing plate into the slot, and then covering the top of the protective cover with a protective cover. At the same time, the limiting seat abuts against the top of the sector plate, and the limiting rod at the bottom of the limiting seat is embedded in the slot formed by the sector plate. The drive motor is started to drive the rotating cylinder to rotate. The rotation of the rotating cylinder drives the conical tooth ring to drive the conical gear to rotate, thereby driving the rotating pipe, cleaning seat and cleaning nozzle to rotate.

[0017] 2. This chip cleaning device delivers cleaning fluid to the supply tube rack via a supply tank. The cleaning fluid then enters the rotating pipe along the connecting cylinder and into the cleaning seat. The atomized cleaning fluid is sprayed onto the chip surface through the cleaning nozzle to clean the chip. Rotating the rotating cylinder drives the fixed seat to rotate, which in turn drives the fixed plate and fixed frame to rotate synchronously, causing the chip to rotate inside the protective cover. Simultaneously, the rotation of the cleaning nozzle continuously cleans the chip surface, thus solving the problems of fixed nozzle position in chip spray cleaning equipment, which reduces spray cleaning efficiency and lacks flexibility. Attached Figure Description

[0018] Figure 1 This is a perspective view of the disassembled protective cover of this utility model;

[0019] Figure 2 This is a cross-sectional view of the protective cover and rotating cylinder of this utility model;

[0020] Figure 3 This is a perspective view of the supply pipe rack and cleaning seat of this utility model;

[0021] Figure 4 This is a perspective view of the structural fixing plate and the sector plate of this utility model;

[0022] Figure 5 This is a perspective view of the protective cover, rotating cylinder, and fixed base of this utility model;

[0023] Figure 6 This is a bottom-view perspective view of the protective cover of this utility model.

[0024] In the diagram: 1. Protective cover; 2. Protective cap; 3. Supply box; 4. Cleaning assembly; 41. Supply pipe rack; 42. Connecting cylinder; 43. Rotating pipe; 44. Bevel gear; 45. Cleaning seat; 46. Cleaning nozzle; 47. Drive motor; 48. Rotating cylinder; 49. Bevel gear ring; 5. Fixing assembly; 51. Fixing seat; 52. Fixing plate; 53. Fixing bracket; 54. Fixing slot; 55. Fan-shaped plate; 56. Limiting seat; 57. Locking slot. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Please see Figures 1 to 6 In this embodiment, a chip cleaning device includes a protective cover 1, a protective cap 2 disposed on the top of the protective cover 1, a supply box 3 fixedly installed at the bottom of the protective cover 1, a cleaning component 4 disposed on the side of the protective cover 1, and a fixing component 5 disposed inside the protective cover 1.

[0027] In this embodiment, the cleaning assembly 4 includes a supply tube rack 41 fixedly installed on the top side of the supply box 3, a connecting cylinder 42 fixedly installed on the top of the supply tube rack 41, a rotating pipe 43 disposed on the side wall of the connecting cylinder 42, a bevel gear 44 disposed on the outside of the rotating pipe 43, a cleaning seat 45 fixedly installed inside the side of the rotating pipe 43, a plurality of cleaning nozzles 46 disposed on the side of the cleaning seat 45, a drive motor 47 fixedly installed at the bottom of the protective cover 1, and a rotating cylinder 48 fixedly installed on the top of the drive motor 47.

[0028] The supply box 3 is equipped with a pressurizing device to pressurize the cleaning fluid inside the supply box 3 and send it to the tube cavity inside the supply tube rack 41. After entering the cleaning seat 45, it is atomized and sprayed out by the cleaning nozzle 46 to clean the surface of the chip.

[0029] In this embodiment, a supply pipe is provided inside the supply pipe frame 41 and embedded inside the connecting cylinder 42. The supply pipe frame 41 connects the supply box 3 and the connecting cylinder 42. The cleaning liquid inside the supply box 3 is sent to the inside of the connecting cylinder 42 along the supply pipe inside the supply pipe frame 41. The side of the rotating pipe 43 is embedded in the side wall of the connecting cylinder 42 and is rotatably connected to the connecting cylinder 42. The cavity of the rotating pipe 43 is connected to the supply pipe inside the connecting cylinder 42, so that the cleaning liquid can enter the inside of the rotating pipe 43 from the supply box 3 along the supply pipe.

[0030] In this embodiment, the protective cover 1 has several through holes on its side. The rotating pipe 43 passes through the through holes laterally and is rotatably connected to the side wall of the protective cover 1. While the rotating pipe 43 and the side wall of the protective cover 1 are rotatably connected, the connecting cylinder 42 is confined to the side of the protective cover 1, thereby confining the supply pipe rack 41 and the supply box 3 to the outside of the protective cover 1, forming a stable structure. The bevel gear 44 is located on the outside of the interior of the rotating pipe 43. The top of the rotating cylinder 48 is provided with a bevel gear ring 49. The bottom wall of the bevel gear 44 and the bevel gear ring 49 are connected by tooth meshing. The rotation of the bevel gear ring 49 drives the bevel gear 44 to rotate, thereby driving the cleaning seat 45 and the cleaning nozzle 46 to rotate, performing multi-angle spray cleaning on the chip, improving cleaning efficiency. The output shaft of the drive motor 47 vertically passes through the bottom wall of the protective cover 1 to the interior of the protective cover 1 and is rotatably connected to the bottom wall of the protective cover 1. The rotation of the output shaft of the drive motor 47 drives the rotating cylinder 48 to rotate, thereby driving the entire fixing assembly 5 to rotate.

[0031] In this embodiment, the fixing component 5 includes a fixing seat 51 fixedly installed on the bottom wall of the inner wall of the rotating cylinder 48, a fixing plate 52 movably connected inside the fixing seat 51, and a fixing bracket 53 movably connected to the side of the fixing plate 52.

[0032] In this embodiment, the top of the fixing base 51 is provided with a cross-shaped fixing slot 54, and the side of the fixing plate 52 is provided with a fan-shaped plate 55. The fixing plate 52 is vertically embedded into the fixing slot 54 and slidably connected to the inner side wall of the fixing slot 54. While the fixing plate 52 is embedded into the fixing slot 54, the fan-shaped plate 55 is embedded into the inner side of the fixing slot 54, forming a ring-shaped fixing structure in the fixing slot 54. The bottom of the protective cover 2 is provided with a limiting seat 56. The bottom of the limiting seat 56 is provided with a limiting rod that is embedded into the fixing slot 54 and slidably connected to the inner side wall of the slot formed by splicing the fan-shaped plate 55. The limiting rod is embedded in the hole formed by the fan-shaped plate 55, limiting the inner side wall of the fan-shaped plate 55 and ensuring the stability of the fixing plate 52 inside the fixing base 51.

[0033] In this embodiment, the side of the fixing plate 52 is provided with a plurality of insertion holes, and the side of the fixing frame 53 is provided with insertion rods for use with the insertion holes. The insertion holes and the insertion rods fix the fixing frame 53 to the side of the fixing plate 52, which facilitates the disassembly and fixing of the chip. The inner side wall of the fixing frame 53 is provided with a locking slot 57 for fixing. The locking slot 57 fixes the edge position of the chip placed inside the fixing frame 53, ensuring the stability of the cleaning process.

[0034] The working principle of the above embodiments is as follows:

[0035] By embedding the chip into the slot 57, inserting the fixing bracket 53 into the side wall of the fixing plate 52, embedding the fixing plate 52 into the fixing slot 54, and then covering the top of the protective cover 1 with the protective cover 2, the limiting seat 56 abuts against the top of the sector plate 55, and the limiting rod at the bottom of the limiting seat 56 is embedded in the slot formed by the sector plate 55. The drive motor 47 is started to drive the rotating cylinder 48 to rotate. The rotation of the rotating cylinder 48 drives the conical tooth ring 49 to drive the conical gear 44 to rotate, thereby driving the rotating pipe 43, the cleaning seat 45, and the cleaning nozzle 46 to rotate.

[0036] In addition, the cleaning fluid is delivered to the inside of the supply tube rack 41 through the supply box 3. The cleaning fluid enters the inside of the rotating pipe 43 along the connecting cylinder 42 and enters the inside of the cleaning seat 45. The atomized cleaning fluid is sprayed onto the surface of the chip through the cleaning nozzle 46 to clean the chip. The rotating cylinder 48 drives the fixed seat 51 to rotate. The fixed seat 51 drives the fixed plate 52 and the fixed frame 53 to rotate synchronously, so that the chip rotates inside the protective cover 1. At the same time, the rotation of the cleaning nozzle 46 continuously cleans the surface of the chip, thereby solving the problem of the fixed nozzle position of the chip spray cleaning equipment reducing the spray cleaning efficiency and lacking flexibility.

[0037] All electrical components mentioned in the text are electrically connected to the main controller and power supply. The main controller can be a conventional and known device such as a computer, and the existing publicly available power connection technology will not be elaborated in the text.

[0038] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention.

Claims

1. A cleaning apparatus for chips, comprising a protective cover (1), a protective cap (2) disposed on the top of the protective cover (1), and a supply box (3) fixedly installed at the bottom of the protective cover (1), characterized in that: A cleaning component (4) is provided on the side of the protective cover (1), and a fixing component (5) is provided inside the protective cover (1). The cleaning assembly (4) includes a supply tube rack (41) fixedly installed on the top side of the supply box (3), a connecting cylinder (42) fixedly installed on the top of the supply tube rack (41), a rotating pipe (43) set on the side wall of the connecting cylinder (42), a bevel gear (44) set on the outside of the rotating pipe (43), a cleaning seat (45) fixedly installed on the side of the rotating pipe (43), several cleaning nozzles (46) set on the side of the cleaning seat (45), a drive motor (47) fixedly installed on the bottom of the protective cover (1), and a rotating cylinder (48) fixedly installed on the top of the drive motor (47).

2. The chip cleaning apparatus according to claim 1, characterized in that: The fixing component (5) includes a fixing seat (51) fixedly installed on the bottom wall of the rotating cylinder (48), a fixing plate (52) movably connected inside the fixing seat (51), and a fixing bracket (53) movably connected to the side of the fixing plate (52).

3. The cleaning apparatus for a chip according to claim 1, wherein: The supply pipe rack (41) has a supply pipe embedded inside the connecting cylinder (42). The side of the rotating pipe (43) is embedded in the side wall of the connecting cylinder (42) and is rotatably connected to the connecting cylinder (42). The cavity of the rotating pipe (43) is connected to the supply pipe inside the connecting cylinder (42).

4. The cleaning apparatus for a chip according to claim 1, wherein: The protective cover (1) has several through holes on its side. The rotating pipe (43) passes through the through holes laterally and is rotatably connected to the side wall of the protective cover (1). The bevel gear (44) is located on the outside of the rotating pipe (43) inside the protective cover (1).

5. A chip cleaning apparatus according to claim 4, characterized in that: The top of the rotating cylinder (48) is provided with a conical toothed ring (49). The bottom wall of the conical gear (44) and the conical toothed ring (49) are connected by tooth meshing. The output shaft of the drive motor (47) vertically penetrates the bottom wall of the protective cover (1) to the inside of the protective cover (1) and is rotatably connected to the bottom wall of the protective cover (1).

6. The cleaning apparatus for a chip according to claim 2, wherein: The top of the fixing seat (51) is provided with a cross-shaped fixing slot (54), and the side of the fixing plate (52) is provided with a fan-shaped plate (55). The fixing plate (52) is vertically embedded in the interior of the fixing slot (54) and is slidably connected to the inner side wall of the fixing slot (54).

7. A chip cleaning apparatus according to claim 6, characterized in that: The bottom of the protective cover (2) is provided with a limiting seat (56), and the bottom of the limiting seat (56) is provided with a limiting rod that is embedded in the fixed slot (54) and slidably connected to the inner side wall of the slot formed by splicing the fan-shaped plate (55).

8. A chip cleaning apparatus according to claim 2, characterized in that: The side of the fixing plate (52) is provided with several insertion holes, the side of the fixing frame (53) is provided with insertion rods for use with the insertion holes, and the inner side wall of the fixing frame (53) is provided with a locking slot (57) for fixing.

Images