Conductive structure, carrier plate conductive system and magnetron sputtering equipment

Abstract

The embodiment of the utility model provides a conductive structure, a carrier plate conductive system and magnetron sputtering equipment, and relates to the technical field of battery manufacturing equipment.The conductive structure comprises a first supporting piece and a conductive assembly, the conductive assembly is arranged on the first supporting piece, and the conductive assembly is used for making contact with a charged piece and conducting away charges on the charged piece. According to the conductive structure provided by the embodiment of the invention, the electric charges on the carrier plate are conducted away through the conductive assembly, so that the damage to a battery film layer is avoided or reduced, and the product quality is ensured.

Description

Technical Field

[0001] This application relates to the field of battery manufacturing equipment technology, and in particular to a conductive structure, a carrier conductive system, and a magnetron sputtering device. Background Technology

[0002] Currently, solar cell thin films are mainly prepared using chemical vapor deposition (CVD) and physical vapor deposition (PVD). Physical vapor deposition includes magnetron sputtering, evaporation, and ion plating, among which magnetron sputtering is widely used.

[0003] However, in existing magnetron sputtering equipment, low-energy electrons are deposited on the carrier plate during the sputtering process. As the negative charge continues to increase, it can easily cause arcing when it accumulates to a certain extent, which can damage the battery film layer and thus affect product quality. Utility Model Content

[0004] Based on this, this application provides a conductive structure, a carrier conductive system, and a magnetron sputtering device to solve the problem of arcing caused by the accumulation of negative charges on the carrier plate in existing magnetron sputtering devices.

[0005] In a first aspect, this application provides a conductive structure, comprising:

[0006] First support component;

[0007] A conductive component is disposed on a first support member. The conductive component is used to contact the charged component and conduct away the charge on the charged component.

[0008] In one possible implementation, the conductive component includes a first conductive element and an elastic element, the first conductive element being used for sliding contact with the charged element;

[0009] The elastic element is connected to the first conductive element and is used to drive the first conductive element to press against the charged contact element.

[0010] In one possible implementation, the first conductive element has a contact portion and a stop portion, the contact portion being used for sliding contact with the charged element;

[0011] The elastic element is sleeved on the first conductive element, with one end of the elastic element abutting against the stop portion and the other end of the elastic element abutting against the first support element.

[0012] In one possible implementation, the first conductive element further has a connecting portion located on the side of the first conductive element opposite to the contact portion;

[0013] The first support member has a socket that matches the connecting part, and the connecting part is inserted into the socket.

[0014] In one possible implementation, the conductive component further includes at least one fastener, with the connecting portion passing through the jack and connected to the fastener.

[0015] In one possible implementation, the conductive component further includes a second conductive element connected to the connection portion and used to discharge the charge on the first conductive element.

[0016] In one possible implementation, the first support member is provided with a guide sleeve, which is sleeved on the outside of the first conductive member and the elastic member.

[0017] In one possible implementation, at least part of the contact portion is in the form of an arc-shaped protrusion.

[0018] In one possible implementation, a limiting component is also included, which is disposed on the first support and is used to contact the charged component to limit the distance between the conductive component and the charged component.

[0019] In one possible implementation, the limiting component includes a second support and a limiting member, wherein the second support is connected to the first support;

[0020] The limiting member is disposed on the second support member and is used to contact the charged member.

[0021] In one possible implementation, the limiting element is a limiting wheel, which is used to make rolling contact with the charged element.

[0022] Secondly, this application also provides a carrier plate conductive system, including a carrier plate and any of the conductive structures provided in the first aspect, wherein the carrier plate is a charged component.

[0023] In one possible implementation, a transmission assembly is also included, which is connected to the carrier plate in a transmission manner;

[0024] The transmission component is made of metal and is used to conduct away the charge on the carrier plate.

[0025] In one possible implementation, the transmission assembly includes a transmission wheel and a driving element, with the transmission wheel connected to the driving element.

[0026] An opening groove is provided on the side of the carrier plate, which extends along the moving direction of the carrier plate, and the drive wheel abuts against the inner top of the opening groove.

[0027] In one possible implementation, the circumferential surface of the drive wheel and / or the inner top surface of the slot are provided with knurled texture.

[0028] Thirdly, this application also provides a magnetron sputtering device, including a cavity, in which any of the conductive structures provided in the first aspect are disposed;

[0029] Alternatively, the cavity may be equipped with any of the carrier plate conductive systems provided in the second aspect.

[0030] The conductive structure, carrier conductive system, and magnetron sputtering equipment provided in this application include a first support member and a conductive component. By placing the conductive component on the first support member, the conductive component comes into contact with a charged component, such as a carrier plate, and conducts away the charge on the charged component, preventing charge accumulation. Therefore, the conductive structure provided in this application, through the conductive component, conducts away the charge on the carrier plate, avoiding or reducing damage to the battery film layer, thereby ensuring product quality. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a schematic diagram of the conductive structure provided in the embodiments of this application;

[0033] Figure 2 for Figure 1 Top view in the middle;

[0034] Figure 3 A partial top view of the carrier conductive system provided in an embodiment of this application;

[0035] Figure 4 for Figure 3 A sectional view along section AA in the middle;

[0036] Figure 5 for Figure 4 A magnified view of a section at point B in the middle;

[0037] Figure 6 for Figure 3 A sectional view along the CC section.

[0038] Figure label:

[0039] 10: Carrier board;

[0040] 11: Opening groove;

[0041] 20: Transmission components;

[0042] 21: Transmission wheel;

[0043] 22: Driving components;

[0044] 30: Cavity;

[0045] 100: First support component;

[0046] 110: Socket;

[0047] 120: Guide sleeve;

[0048] 200: Conductive component;

[0049] 210: First conductive element;

[0050] 211: Contact Department;

[0051] 212: Stop section;

[0052] 213: Connecting part;

[0053] 220: Elastic element;

[0054] 230: Fasteners;

[0055] 240: Second conductive element;

[0056] 300: Limiting component;

[0057] 310: Second support component;

[0058] 320: Limiting component. Detailed Implementation

[0059] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of methods and apparatus consistent with some aspects of this application as detailed in the appended claims.

[0060] The terms “first,” “second,” “third,” “fourth,” etc. (if present) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a particular order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of the application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms “comprising” and “having,” and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0061] As mentioned in the background section, low-energy electrons are easily deposited on the carrier plate of magnetron sputtering equipment. As the negative charge increases, it can easily cause arcing when it accumulates to a certain level, damaging the battery film layer and affecting product quality. In related technologies, a receiving groove is opened on the coating substrate and an insulating plate is added. However, after long-term use, the deposited film layer becomes thicker, affecting the coating effect. The only solution is to replace the insulating plate, which increases costs and is cumbersome.

[0062] To address the aforementioned problems in the prior art, this application provides a conductive structure, a carrier conductive system, and a magnetron sputtering device. The conductive structure provided in this application includes a first support member and a conductive component. By placing the conductive component on the first support member, the conductive component contacts a charged component, such as a carrier plate, and conducts away the charge on the charged component, preventing charge accumulation. In other words, the conductive component conducts away the charge on the carrier plate, avoiding or reducing damage to the battery film layer, thereby ensuring product quality.

[0063] The technical solutions of this application will be described in detail below with specific embodiments. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments.

[0064] Firstly, please refer to Figures 1-6 As shown, an embodiment of this application provides a conductive structure, including:

[0065] First support component 100.

[0066] A conductive component 200 is disposed on the first support member 100. The conductive component 200 is used to contact the charged component and conduct away the charge on the charged component.

[0067] In this embodiment, the first support member 100 serves as the installation base and is used to support the conductive component 200 at least. The first support member 100 can be a bracket, frame, shell, etc., and can be directly connected to the inner wall of the cavity 30 of the magnetron sputtering equipment and grounded through the cavity 30.

[0068] For example, the first support member 100 is a first bracket, which can be a "Z"-shaped plate structure. One end of it can be connected to the inner wall of the cavity 30 by fasteners such as bolts, and the other end faces the charged component, such as the carrier plate 10, and is used to install the conductive component 200. The first support member 100 can also have a conductive function to conduct away the charge on the conductive component 200.

[0069] In this embodiment, the conductive component 200 is used to conduct away the charge. It is disposed on the first support 100 and can contact the charged component, such as through sliding contact or rolling contact, thereby maintaining electrical connection.

[0070] For example, the conductive component 200 may be a conductive head or the like, and can be mounted on the first support member 100 by fasteners. The conductive component 200 is close to the carrier plate 10 and can be in direct contact with the carrier plate 10 or with conductive parts on the carrier plate 10. The conductive component 200 can be grounded via a wire, thereby conducting charge to the ground. Alternatively, the conductive component 200 can be guided to the cavity 30 via the conductive first support member 100. Since the cavity 30 is grounded, charge is conducted to the ground through the cavity 30.

[0071] Specifically, the conductive structure can be installed on the inner wall of the cavity 30 in the non-cathode position of the magnetron sputtering equipment. When the carrier plate 10 moves horizontally in the cavity 30, once the charge generated during the sputtering process is deposited on the carrier plate 10, the conductive component 200 can guide the charge on the carrier plate 10 to the ground, avoid charge accumulation, and thus avoid the formation of a potential difference that would cause a tip discharge phenomenon.

[0072] It is understood that the conductive structure in this embodiment of the application conducts the charge on the carrier plate 10 away through the conductive component 200, thereby avoiding the product from being affected by the electric arc and causing local color difference, avoiding or reducing damage to the battery film layer, and thus ensuring the quality of the product.

[0073] It should be noted that the number and location of the conductive structure can be determined according to the actual number and structure of the process cavity, and no specific limitation is made in this embodiment.

[0074] Therefore, the conductive structure provided in this application embodiment includes a first support member 100 and a conductive component 200. By placing the conductive component 200 on the first support member 100, the conductive component 200 contacts the charged component and conducts away the charge on the charged component, avoiding charge accumulation. That is, the conductive component 200 conducts away the charge on the carrier plate 10, avoiding or reducing damage to the battery film layer, thereby ensuring the quality of the product.

[0075] In some embodiments, the conductive component 200 includes a first conductive element 210 and an elastic element 220, wherein the first conductive element 210 is used to slide in contact with a charged element.

[0076] The elastic element 220 is connected to the first conductive element 210 and is used to drive the first conductive element 210 to press against the charged element.

[0077] Specifically, such as Figure 1 , Figure 5 As shown, the first conductive element 210 can be a conductive post, conductive rod, conductive head, etc. The first conductive element 210 can be set on the first support 100 through a sliding structure or sliding mechanism, and can move towards or away from the carrier plate 10.

[0078] The elastic element 220 can be a compression spring, a sheet, or other component. One side of the elastic element 220 is connected to the first conductive element 210, and the other side can be connected to the first support element 100 to apply elastic force to the first conductive element 210.

[0079] In this way, when the first conductive element 210 wears, it is automatically compensated by the elastic clamping action of the elastic element 220, thereby achieving effective contact with the carrier plate 10 without affecting the transmission of the carrier plate 10.

[0080] Furthermore, in this embodiment, the first conductive member 210 has a contact portion 211 and a stop portion 212, and the contact portion 211 is used to make sliding contact with the charged member.

[0081] The elastic member 220 is sleeved on the first conductive member 210, and one end of the elastic member 220 abuts against the stop portion 212, while the other end of the elastic member 220 abuts against the first support member 100.

[0082] Specifically, such as Figure 1 As shown, the first conductive element 210 is a first conductive post, and the contact portion 211 on the first conductive element 210 can slide in contact with the carrier plate 10. The stop portion 212 can be a stepped surface or a stop protrusion on the periphery of the first conductive element 210, which can prevent the elastic element 220 from passing through. The elastic element 220 is a compression spring, which is sleeved on the first conductive element 210. One end of the elastic element 220 abuts against the stop portion 212, and the other end abuts against the first support member 100. This arrangement can ensure that the elastic element 220 stably applies elastic force to the first conductive element 210, and the elastic pressing structure is more reasonable.

[0083] Alternatively, the elastic element 220 can also be a spring sheet (not shown in the figure). One or more spring sheets are provided around the first conductive element 210, with one end of the spring sheet abutting against the stop portion 212 and the other end abutting against the first support member 100. This arrangement also ensures that the elastic element 220 stably applies elastic force to the first conductive element 210.

[0084] Furthermore, in this embodiment, the first conductive element 210 also has a connecting portion 213, which is located on the side of the first conductive element 210 opposite to the contact portion 211.

[0085] The first support member 100 is provided with a socket 110 that matches the connecting part 213, and the connecting part 213 is inserted into the socket 110.

[0086] Specifically, continue as Figure 1As shown, the connecting part 213 is a connecting post, guide post, etc., and its outer diameter is smaller than the outer diameter of the first conductive post. The connecting part 213 is connected to the side of the first conductive member 210 away from the contact part 211. The connecting part 213 is inserted into the socket 110 and can move relative to the contact part 211 in the socket 110 to adaptively adjust the distance between the contact part 211 and the carrier plate 10.

[0087] It should be noted that the connecting part 213 can be one or several arranged side by side, and correspondingly, the number of sockets 110 should correspond to the number of connecting parts 213. By having multiple connecting parts 213 inserted into each socket 110, the rotation of the first conductive element 210 can also be prevented.

[0088] Furthermore, in this embodiment, the conductive component 200 also includes at least one fastener 230, and the connecting portion 213 passes through the socket 110 and is connected to the fastener 230.

[0089] Specifically, continue as Figure 1 As shown, the fastener 230 can be a fastening nut, and the connecting part 213 has an external thread that matches the fastening nut. The connecting part 213 passes through the insertion hole 110 and is connected to the fastener 230, which facilitates processing, installation, etc.

[0090] For example, two fastening nuts are installed on the connecting part 213. When the two fastening nuts are tightened on the connecting part 213, they can play a role in preventing loosening under the action of friction. The two fastening nuts can be turned in different directions or in the same direction.

[0091] Of course, fastener 230 can also be replaced by other types of fastening components, such as retaining rings, retaining pins, etc. Corresponding annular grooves, pin holes, etc., are formed on the side of the connecting portion 213 opposite to the contact portion 211, so that the retaining ring can be inserted into the annular groove or the retaining pin can be inserted into the pin hole. This also limits the connection portion 213 and prevents it from disengaging from the insertion hole 110. The stop structure on the connecting portion 213 can be determined according to actual needs; this embodiment does not impose too many restrictions on it.

[0092] Furthermore, in this embodiment, the conductive component 200 also includes a second conductive element 240, which is connected to the connecting portion 213 and is used to conduct the charge on the first conductive element 210.

[0093] Specifically, the second conductive element 240 can be a conductive wire, conductive sheet, etc., which is connected to the connecting part 213 and can be tightened by a fastening nut. The second conductive element 240 can be directly connected to the cavity 30, or it can be led out from the cavity 30 and grounded, which can further conduct away the charge and improve reliability. One end of the second conductive element 240 can be connected to the connecting part 213 between the two fastening nuts and clamped by the two fastening nuts.

[0094] Furthermore, in this embodiment, the first support member 100 is provided with a guide sleeve 120, which is sleeved on the outside of the first conductive member 210 and the elastic member 220.

[0095] Specifically, such as Figure 1 As shown, a guide sleeve 120, such as a self-lubricating guide sleeve, is also provided on the first support member 100 at the position corresponding to the insertion hole 110. The guide sleeve 120 can be connected to the first support member 100 by welding, screwing, snap-fitting, etc. The first conductive element 210 and the elastic element 220 are slidably embedded in the guide sleeve 120. Figure 1 As shown, the first conductive element 210 can slide in the up and down direction within the guide sleeve 120 to provide guidance for the sliding of the first conductive element 210 and ensure its sliding stability.

[0096] The specific shape and size of the guide sleeve 120 can be determined according to the installation requirements of the first conductive element 210 and the elastic element 220. In this embodiment, no excessive restrictions are imposed.

[0097] Furthermore, in this embodiment, at least a portion of the contact portion 211 is in the form of an arc-shaped protrusion.

[0098] In one example, such as Figure 1 As shown, the arc-shaped protrusion can be a half-sphere or a hemispherical shape. In another example, not shown in the figure, the arc-shaped protrusion is a full sphere or a sphere. In yet another example, not shown in the figure, the arc-shaped protrusion can also be partially elliptical or partially ellipsoidal, etc.

[0099] This setting, such as Figure 1 As shown, the contact portion 211 makes slidable contact with the carrier plate 10 through the ball head, which can reduce sliding resistance, reduce wear, and avoid scratching the carrier plate 10. The contact portion 211 can be integrally formed with the stop portion 212, or the contact portion 211 and the stop portion 212 can be spaced apart, depending on the actual processing and installation requirements. This embodiment does not impose too many restrictions.

[0100] In some embodiments, the conductive structure in this application further includes a limiting component 300, which is disposed on the first support 100 and is used to contact the charged component to limit the distance between the conductive component 200 and the charged component.

[0101] Specifically, the limiting component 300 is located on one side of the carrier plate 10, and it can be connected to the first support member 100 by means of screwing, snap-fitting, welding, etc. This arrangement, as... Figure 2 As shown, this can prevent parts other than the contact portion 211 from contacting the carrier plate 10, thus protecting both the conductive component 200 and the carrier plate 10.

[0102] Furthermore, in this embodiment, the limiting component 300 includes a second support member 310 and a limiting member 320, with the second support member 310 connected to the first support member 100.

[0103] The limiting member 320 is disposed on the second support member 310 and is used to contact the charged member.

[0104] Specifically, continue as Figure 2 As shown, the second support member 310 serves as the installation base and is used to support the limiting member 320 at least. The second support member 310 can be a bracket, frame, shell, etc.

[0105] For example, the second support member 310 is a second bracket, which can be a plate-like structure. The second support member 310 has two through holes, and the first support member 100 has two corresponding through holes. Two bolts can be passed through the through holes on the second support member 310 and the first support member 100 respectively to secure them together. Of course, the second support member 310 can also be fixedly connected to the first support member 100 by welding, snap-fitting, or other methods.

[0106] The bottom surface of one end of the second support member 310 and the top surface of the first support member 100 are both planar structures to ensure good conductivity, avoid poor contact, and simplify processing and installation. The first support member 100 can be designed in a "Z" shape to connect with the second support member 310 and meet installation requirements with minimal modification to the existing structure. In addition, the second support member 310 can also have a conductive function to conduct away the charge on the limiting member 320.

[0107] Furthermore, the limiting member 320 can be a roller, slider, etc., and is disposed on the second support member 310. The limiting member 320 contacts the side of the carrier plate 10 to limit the distance between the conductive component 200 and the carrier plate 10, that is, to limit the carrier plate 10 from moving along the side. Figure 3 Move along the X-axis.

[0108] Furthermore, in this embodiment, the limiting member 320 is a limiting wheel, which is used to make rolling contact with the charged member.

[0109] Specifically, such as Figure 2 As shown, the limiting wheel can be mounted on the second support 310 through components such as a rotating shaft and bearings, so that the limiting wheel forms rolling contact with the side of the carrier plate 10, reducing frictional resistance and improving service life.

[0110] Of course, the limiting component 320 can also be replaced by other types of limiting components, such as limiting rollers, limiting ball heads, etc. Any component that can contact the side of the carrier plate 10 with a small friction force is acceptable. In this embodiment, no restrictions are imposed.

[0111] Secondly, embodiments of this application also provide a carrier plate conductive system, including a carrier plate 10 and a conductive structure provided in any of the above embodiments, wherein the carrier plate 10 is a charged component.

[0112] The conductive structure has been described in detail in the above embodiments and will not be repeated here.

[0113] The carrier conductive system provided in this application embodiment, by configuring a conductive structure including a first support member 100 and a conductive component 200, allows the conductive component 200 to contact a charged component, such as the carrier plate, by placing the conductive component 200 on the first support member 100. The conductive component 200 conducts away the charge on the charged component, avoiding charge accumulation. That is, the conductive component 200 conducts away the charge on the carrier plate 10, avoiding or reducing damage to the battery film layer, thereby ensuring product quality.

[0114] Furthermore, in this embodiment, a transmission assembly 20 is also included, which is connected to the carrier plate 10 in a transmission manner.

[0115] The transmission component 20 is a metal part and is used to conduct away the charge on the carrier plate 10.

[0116] With this configuration, since the transmission assembly 20 is mounted on the cavity 30 to support the carrier plate 10 and allow it to move within the cavity 30, the transmission assembly 20 can be a transmission wheel, transmission roller, or other components, which can be arranged on both sides of the carrier plate 10. Furthermore, by using a metal component, such as stainless steel or copper, the transmission assembly 20 can conduct away the charge on the carrier plate 10, further reducing charge accumulation.

[0117] Furthermore, in this embodiment, the transmission assembly 20 includes a transmission wheel 21 and a driving member 22, with the transmission wheel 21 connected to the driving member 22.

[0118] The carrier plate 10 has an opening groove 11 on its side, which extends along the moving direction of the carrier plate 10, and the transmission wheel 21 abuts against the inner top of the opening groove 11.

[0119] Specifically, in combination Figure 3 , Figure 4 , Figure 6 As shown, the transmission wheel 21 is connected to the transmission shaft via a flange, and the transmission shaft is then connected to the drive component 22. The drive component 22 is mounted on the cavity 30, with one end located inside the cavity 30 and the other end extending outside the cavity 30. Both the transmission wheel 21 and the drive component 22 can be replaced with conductive materials, such as stainless steel, to ensure excellent conductivity.

[0120] Furthermore, a C-shaped channel steel is installed on the side of the carrier plate 10. The opening groove 11 on the C-shaped channel steel extends along the moving direction of the carrier plate 10. The transmission wheel 21 abuts against the inner top of the opening groove 11, supporting the carrier plate 10. When the driving member 22 drives the transmission wheel 21 to rotate, the carrier plate 10 can move on the transmission wheel 21.

[0121] In addition, the contact portion 211 on the conductive component 200 can also contact the inner side or inner bottom surface of the opening groove 11, which is not shown in the figure, so as to conduct away the charge on the carrier plate 10.

[0122] It should be noted that regardless of which surface the contact portion 211 on the conductive component 200 contacts within the opening groove 11, the limiting member 320 contacts the side wall of the opening groove 11 to prevent the carrier plate 10 from moving too much relative to the conductive component 200 and to ensure the stability of conductivity.

[0123] Furthermore, in this embodiment, the circumferential surface of the transmission wheel 21 and / or the inner top surface of the opening groove 11 are provided with knurled texture.

[0124] Specifically, the circumferential surface of the transmission wheel 21 and the inner top surface of the opening groove 11 can be provided with knurling to increase contact friction and prevent slippage between the transmission wheel 21 and the carrier plate 10 during transmission.

[0125] Of course, other types of rough structures can also be provided on the circumferential surface of the transmission wheel 21 and the inner top surface of the opening groove 11 to increase the contact friction between the two. This embodiment does not impose too many restrictions.

[0126] Thirdly, embodiments of this application also provide a magnetron sputtering device, including a cavity 30, wherein a conductive structure or a carrier conductive system provided in any of the above embodiments is disposed within the cavity 30.

[0127] The magnetron sputtering equipment provided in this application embodiment, by configuring a conductive structure or a carrier conductive system having such a conductive structure, includes a first support member 100 and a conductive component 200. By placing the conductive component 200 on the first support member 100, the conductive component 200 contacts a charged component, such as a carrier plate, and conducts away the charge on the charged component, avoiding charge accumulation. That is, by conducting away the charge on the carrier plate 10 through the conductive component 200, damage to the battery film layer is avoided or reduced, thereby ensuring the quality of the product.

[0128] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this application are indicated by the claims.

[0129] It should be understood that this application is not limited to the precise structures described above and shown in the appendix, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A conductive structure, characterized in that, include: First support member (100); A conductive component (200) is disposed on the first support member (100). The conductive component (200) is used to contact the charged component and conduct away the charge on the charged component. The conductive component (200) includes a first conductive element (210) and an elastic element (220), wherein the first conductive element (210) is used to slide in contact with the charged element; The elastic element (220) is connected to the first conductive element (210) and is used to drive the first conductive element (210) to press against the charged element.

2. The conductive structure according to claim 1, characterized in that, The first conductive element (210) has a contact portion (211) and a stop portion (212), the contact portion (211) being used for sliding contact with the charged element; The elastic element (220) is sleeved on the first conductive element (210), and one end of the elastic element (220) abuts against the stop portion (212), and the other end of the elastic element (220) abuts against the first support member (100).

3. The conductive structure according to claim 2, characterized in that, The first conductive element (210) also has a connecting portion (213), which is located on the side of the first conductive element (210) opposite to the contact portion (211); The first support member (100) is provided with a socket (110) that matches the connecting part (213), and the connecting part (213) is inserted into the socket (110).

4. The conductive structure according to claim 3, characterized in that, The conductive component (200) also includes at least one fastener (230), the connecting portion (213) passing through the socket (110) and connected to the fastener (230).

5. The conductive structure according to claim 4, characterized in that, The conductive component (200) further includes a second conductive element (240), which is connected to the connecting portion (213) and is used to discharge the charge on the first conductive element (210).

6. The conductive structure according to claim 2, characterized in that, The first support member (100) is provided with a guide sleeve (120), which is sleeved on the outside of the first conductive member (210) and the elastic member (220).

7. The conductive structure according to claim 2, characterized in that, At least a portion of the contact portion (211) is arc-shaped protrusion.

8. The conductive structure according to any one of claims 1 to 7, characterized in that, It also includes a limiting component (300) disposed on the first support (100) and used to contact the charged component to limit the distance between the conductive component (200) and the charged component.

9. The conductive structure according to claim 8, characterized in that, The limiting component (300) includes a second support member (310) and a limiting member (320), wherein the second support member (310) is connected to the first support member (100); The limiting member (320) is disposed on the second support member (310) and is used to contact the charged member.

10. The conductive structure according to claim 9, characterized in that, The limiting member (320) is a limiting wheel, which is used to make rolling contact with the charged member.

11. A carrier plate conductive system, characterized in that, It includes a carrier plate (10) and a conductive structure as described in any one of claims 1 to 10, wherein the carrier plate (10) is the charged element.

12. The carrier plate conductive system according to claim 11, characterized in that, It also includes a transmission assembly (20), which is connected to the carrier plate (10) in a transmission manner; The transmission component (20) is a metal part and is used to conduct away the charge on the carrier plate (10).

13. The carrier plate conductive system according to claim 12, characterized in that, The transmission assembly (20) includes a transmission wheel (21) and a driving member (22), wherein the transmission wheel (21) is connected to the driving member (22); The carrier plate (10) has an opening groove (11) on its side. The opening groove (11) extends along the moving direction of the carrier plate (10), and the transmission wheel (21) abuts against the inner top of the opening groove (11).

14. The carrier plate conductive system according to claim 13, characterized in that, The circumferential surface of the drive wheel (21) and / or the inner top surface of the opening groove (11) are provided with knurled texture.

15. A magnetron sputtering apparatus, characterized in that, Includes a cavity (30), wherein the cavity (30) is provided with a conductive structure as described in any one of claims 1 to 10; Alternatively, the cavity (30) may be provided with a carrier conductive system as described in any one of claims 11 to 14.

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