Energy exchange system and clean workshop

Abstract

The utility model discloses an energy exchange system and clean workshop, the energy exchange system includes cooling water system and fresh air handling unit, the cooling water system includes water inlet unit and backwater unit, cooling water in the water inlet unit is used for absorbing the heat of process machine table. And the water return unit is used for collecting the heated cooling water. The fresh air handling unit comprises a heat exchange unit and an air cavity, the heat exchange unit is located in the air cavity, a water inlet of the heat exchange unit communicates with a water outlet of the water return unit, and a water outlet of the heat exchange unit communicates with a water inlet of the water inlet unit. The heat exchange unit is used for exchanging heat with fresh air in the air cavity. According to the energy exchange system provided by the utility model, after the heated cooling water flows into the heat exchange unit, the cooling water exchanges heat with the fresh air in the air cavity. And meanwhile, the cooling water cooled by the heat exchange unit flows back to the process machine table and is used for continuously absorbing heat of the process machine table, so that the energy utilization rate of the whole system is favorably improved, and the energy loss and the production cost of the system are reduced.

Description

Technical Field

[0001] This utility model relates to the field of cleanroom technology, and in particular to an energy exchange system and a cleanroom. Background Technology

[0002] Semiconductor manufacturing plants and display panel manufacturing plants have specific requirements for ambient temperature, humidity, and cleanliness. Therefore, these plants require cleanrooms and fresh air systems, which primarily supply fresh air at 23–28°C to the cleanrooms. Currently, the fresh air required by these systems comes from outdoors, and during winter, the MAU (Manual Unit) of the fresh air system needs additional heating equipment to heat the incoming outdoor air. However, this also leads to additional energy consumption and increased costs for the cleanroom.

[0003] Therefore, how to reduce energy consumption and production costs in cleanrooms has become a pressing problem for those skilled in the art. Utility Model Content

[0004] This invention provides an energy exchange system and a cleanroom, which can be used to reduce energy consumption and production costs in cleanrooms.

[0005] In a first aspect, this utility model provides an energy exchange system, including a cooling water system and a fresh air unit. The cooling water system includes an inlet unit and a return unit. The cooling water in the inlet unit is used to absorb heat from the process equipment; the return unit is used to collect the heated cooling water. The fresh air unit includes a heat exchange unit and an air cavity. The heat exchange unit is located within the air cavity, and its inlet is connected to the outlet of the return unit, while its outlet is connected to the inlet of the inlet unit. The heat exchange unit is used for heat exchange with the fresh air within the air cavity.

[0006] The energy exchange system provided by this invention allows the heated cooling water to flow into the heat exchange unit through the outlet of the return water unit. The heated outer surface of the heat exchange unit then exchanges heat with the fresh air in the air cavity, raising the temperature of the fresh air while simultaneously cooling the cooling water within the heat exchange unit. Furthermore, because the outlet of the heat exchange unit is connected to the inlet of the cooling water system's inlet unit, the cooled water can flow back to the process machine to continue absorbing heat from the machine, thus cooling the machine and effectively improving the overall system's energy utilization rate, while reducing energy consumption and production costs.

[0007] In one possible implementation of this invention, the heat exchange unit includes a primary heat exchange unit and a secondary heat exchange unit, with the temperature of the secondary heat exchange unit being higher than that of the primary heat exchange unit; and fresh air is blown from the primary heat exchange unit to the secondary heat exchange unit. The inlet of the primary heat exchange unit is connected to the outlet of the return water unit, and the outlet of the primary heat exchange unit is connected to the inlet of the inlet water unit. This allows the fresh air entering the air cavity to be preheated by the primary heat exchange unit before being further heated by the secondary heat exchange unit, thereby meeting the temperature requirements of the cleanroom while reducing the energy consumption of the secondary preheating unit, thus reducing the system's energy consumption and production costs.

[0008] In one possible implementation of this invention, the energy exchange system further includes a water temperature control system, which comprises a high-temperature water outlet and a return water outlet. The high-temperature water outlet is connected to the inlet of the secondary heat exchange unit, and the return water outlet is connected to the outlet of the secondary heat exchange unit. This allows the secondary heat exchange unit to continuously exchange heat with the fresh air in the air cavity, thereby effectively improving the temperature stability of the fresh air blown into the clean room and also contributing to improved heat exchange efficiency.

[0009] In one possible implementation of this invention, the water temperature control system further includes a low-temperature outlet, which is connected to the inlet of the water inlet unit. This allows the low-temperature cooling water in the low-temperature water tank to flow from the water inlet unit to the process equipment, thereby improving the temperature stability of the low-temperature cooling water flowing to the process equipment.

[0010] In one possible implementation of this invention, the outlet of the primary heat exchange unit is connected to the return outlet of the water temperature control system. This allows the cooling water flowing out of the primary heat exchange unit to enter the water temperature control system, where its temperature is regulated before flowing into the inlet unit of the cooling water system through the low-temperature outlet. This effectively reduces the risk of unstable cooling water temperature caused by changes in outdoor ambient temperature.

[0011] In one possible implementation of this invention, the energy exchange system further includes adjacent first and second heat exchange sections. The first heat exchange section is used for surface heat exchange with the second heat exchange section. The inlet of the first heat exchange section is connected to the low-temperature outlet of the water temperature control system, and the outlet of the first heat exchange section is connected to the return outlet of the water temperature control system. The outlet of the first-stage heat exchange unit is connected to the inlet of the second heat exchange section; the outlet of the second heat exchange section is connected to the inlet of the inlet unit. Thus, when the pressure in the pipe near the water temperature control system is abnormal, because the first and second heat exchange sections exchange heat through their surfaces, it will not affect the pipe near the inlet unit, thereby effectively improving the system's stability.

[0012] In one possible implementation of this invention, the liquid temperature at the inlet of the first heat exchanger is lower than the liquid temperature at the inlet of the second heat exchanger, in order to achieve heat exchange between the surfaces of the first and second heat exchangers.

[0013] In one possible implementation of this invention, the energy exchange system further includes adjacent third and fourth heat exchange sections. The third heat exchange section is used for surface heat exchange with the fourth heat exchange section. The inlet of the third heat exchange section is connected to the outlet of the return water unit, and the outlet of the third heat exchange section is connected to the inlet of the second heat exchange section, which in turn is connected to the inlet of the inlet water unit. The outlet of the fourth heat exchange section is connected to the inlet of the first-stage heat exchange unit, and the inlet of the fourth heat exchange section is also connected to the outlet of the first-stage heat exchange unit. Thus, when the pressure in the pipe near the first-stage heat exchange unit is abnormal, because the third and fourth heat exchange sections exchange heat through their surfaces, it will not affect the pipe near the return water unit, thereby effectively improving the system's stability.

[0014] In one possible implementation of this invention, the energy exchange system further includes a first water pump, which is positioned between the outlet of the primary heat exchange unit and the inlet of the inlet unit to improve the stability of the liquid flow.

[0015] Secondly, this utility model provides a cleanroom, which includes a clean room and the energy exchange system described in the first aspect. Heated fresh air from the air chamber is blown into the clean room. This can effectively reduce the energy consumption and production costs of the cleanroom. Attached Figure Description

[0016] Figure 1 A schematic diagram of the energy exchange system provided by this utility model;

[0017] Figure 2 Another structural schematic diagram of the energy exchange system provided by this utility model;

[0018] Figure 3 Another structural schematic diagram of the energy exchange system provided by this utility model.

[0019] Figure reference numerals: 1-Cooling water system; 11-Inlet water unit; 12-Return water unit; 2-Fresh air unit; 21-Heat exchange unit; 211-Primary heat exchange unit; 212-Secondary heat exchange unit; 22-Air cavity; 3-Water temperature control system; 31-High temperature outlet; 32-Return water outlet; 33-Low temperature outlet; 4-First water pump; 5-Second water pump. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings. However, the exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted. The terms expressing position and direction described in the embodiments of this utility model are illustrative based on the accompanying drawings, but changes can be made as needed, and all such changes are included within the protection scope of this utility model. The accompanying drawings of the embodiments of this utility model are only for illustrating relative positional relationships and do not represent actual proportions.

[0021] It should be noted that specific details are set forth in the following description to facilitate understanding of this utility model. However, this utility model can be implemented in many ways other than those described herein, and those skilled in the art can make similar extensions without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0022] Semiconductor manufacturing plants and display panel manufacturing plants have specific requirements for ambient temperature, humidity, and cleanliness. Therefore, these plants require cleanrooms and fresh air systems. The fresh air system is primarily responsible for supplying fresh air at 23°C to 28°C to the cleanroom. Currently, the fresh air required by these systems comes from outdoors, and during winter, the MAU (Manual Unit) of the fresh air system needs additional heating equipment to heat the incoming outdoor air. However, this also leads to additional energy consumption and increased costs for the cleanroom.

[0023] Therefore, how to reduce energy consumption and production costs in cleanrooms has become a pressing problem for those skilled in the art.

[0024] In view of this, the energy exchange system provided by this utility model, during the production process, allows cooling water that has absorbed heat from the process equipment to flow into the MAU unit of the fresh air system. This allows the heated cooling water to exchange heat with the fresh air blown into the MAU unit, thus achieving both heating of the fresh air and cooling of the heated cooling water. Furthermore, the cooled water can flow back to the process equipment to continue absorbing heat from the equipment, thereby effectively improving the energy utilization rate of the entire system and helping to reduce energy consumption and production costs. To make the objectives, technical solutions, and advantages of this utility model clearer, the following will describe this utility model in further detail with reference to the accompanying drawings and specific embodiments.

[0025] It should be noted that, in the appendix Figure 1 Appendix Figure 2 and attached Figure 3In the diagram, solid arrows indicate the flow direction of liquids through the pipes. Dashed arrows indicate the flow direction of fresh air through the pipes.

[0026] refer to Figure 1 , Figure 1 This is a schematic diagram of the energy exchange system provided by this utility model. The energy exchange system includes a cooling water system 1 and a fresh air unit 2. The cooling water system 1 includes an inlet water unit 11 and a return water unit 12. During the production process, the cooling water in the inlet water unit 11 is used to absorb heat from the process equipment, while the return water unit 12 is used to collect the heated cooling water. Specifically, the heated cooling water (i.e., the cooling water after absorbing heat from the process equipment) can flow into the return water unit 12 through an external loop.

[0027] In the specific configuration of the fresh air handling unit 2, the fresh air handling unit 2 includes a heat exchange unit 21 and an air cavity 22, with the heat exchange unit located within the air cavity 22. The heat exchange unit 21 may, for example, include one or more heat exchange coils, and the inlet of the heat exchange coil is connected to the outlet of the return water unit 12 of the cooling water system 1, so that the heated cooling water flows into the heat exchange coil through the outlet of the return water unit 12. Simultaneously, the outlet of the heat exchange coil is connected to the inlet of the inlet water unit 11 of the cooling water system 1.

[0028] It should be noted that the temperature of the heated cooling water is, for example, 19℃~21℃, while the temperature of the fresh air blown into the air cavity 22 from the outside is, for example, -20℃~10℃. Using the energy exchange system provided by this invention, since the heated cooling water flows into the heat exchange unit 21 through the outlet of the return water unit 12, the outer surface of the heat exchange unit 21, after being heated, can exchange heat with the fresh air in the air cavity 22, thereby raising the temperature of the fresh air in the air cavity 22, while simultaneously cooling the cooling water in the heat exchange unit 21. Furthermore, since the outlet of the heat exchange unit is connected to the inlet of the water inlet unit 11 of the cooling water system 1, the cooling water cooled by the heat exchange unit 21 can flow back to the process machine to continue absorbing heat from the process machine, thereby cooling the process machine and effectively improving the energy utilization rate of the entire system, as well as reducing the system's energy consumption and production costs.

[0029] In an optional embodiment, such as Figure 1As shown, the heat exchange unit 21 includes a primary heat exchange unit 211 and a secondary heat exchange unit 212. In the specific arrangement of the primary heat exchange unit 211 and the secondary heat exchange unit 212, the primary heat exchange unit 211 and the secondary heat exchange unit 212 are arranged at intervals in the air cavity 22, and the air inlet of the air cavity 22 is located on the side of the primary heat exchange unit 211 away from the secondary heat exchange unit 212. In this way, when fresh air enters the air cavity 22 through the air inlet of the air cavity 22, it is first blown towards the primary heat exchange unit 211, and then blown towards the secondary heat exchange unit 212 after passing through the primary heat exchange unit 211. Furthermore, since the inlet of the primary heat exchange unit 211 is connected to the outlet of the return water unit 12 of the cooling water system 1, and the outlet of the primary heat exchange unit 211 is connected to the inlet of the inlet water unit 11 of the cooling water system 1, and the surface temperature of the secondary heat exchange unit 212 is higher than that of the primary heat exchange unit 211, the fresh air entering the air cavity 22 can be preheated by the primary heat exchange unit 211 before being further heated by the secondary heat exchange unit 212. However, because the temperature of the primary heat exchange unit 211 is affected by the heat generated by the process equipment, it may not be able to directly meet the requirements of the cleanroom after the fresh air is heated. Compared with the temperature of the primary heat exchange unit 211, the temperature of the secondary heat exchange unit 212 is more stable, and its temperature can be set according to the requirements of the cleanroom. Therefore, it is beneficial to further improve the temperature stability of the fresh air blown into the cleanroom.

[0030] In addition, it is understood that by using the energy exchange system provided by this utility model, the fresh air entering the clean room is first preheated by the primary heat exchange unit 211 and then heated by the secondary heat exchange unit 212. This can effectively reduce the energy consumption of the secondary preheating unit, thereby reducing the energy loss and production cost of the system.

[0031] It should be noted that the temperature and heating method of the secondary heat exchange unit 212 can be adjusted according to actual needs to ensure that the required temperature of the fresh air in the cleanroom meets the requirements. In an optional implementation, refer to... Figure 1 The temperature of the secondary heat exchange unit 212 can be controlled by the water temperature control system 3. Specifically, the water temperature control system 3 includes a high-temperature water tank, a heating system, a high-temperature water outlet 31, and a return water outlet 32. The heating system heats the water in the high-temperature water tank to a predetermined temperature. Simultaneously, the high-temperature water outlet 31 is connected to the water inlet of the secondary heat exchange unit 212, allowing the heated water in the high-temperature water tank to flow into the secondary heat exchange unit 212. Furthermore, the return water outlet 32 ​​of the water temperature control system 3 is connected to the water outlet of the secondary heat exchange unit 212, ensuring continuous circulation of water between the secondary heat exchange unit 212 and the water in the water temperature control system 3. This allows for continuous heat exchange between the secondary heat exchange unit 212 and the fresh air in the air cavity 22, effectively improving the temperature stability of the fresh air blown into the cleanroom and also contributing to increased heat exchange efficiency.

[0032] It is understandable that the liquid temperature at the high-temperature outlet 31 of the water temperature control system 3 is greater than the liquid temperature at the inlet of the primary heat exchange unit 211, so that the surface temperature of the secondary heat exchange unit 212 is higher than that of the primary heat exchange unit 211. This allows the fresh air, which has been preheated by the primary heat exchange unit 211, to continue exchanging heat with the preheated fresh air through its surface when it is blown onto the secondary heat exchange unit 212, so that the temperature of the preheated fresh air continues to rise, thereby meeting the temperature requirements of the cleanroom.

[0033] For example, the liquid temperature at the high-temperature outlet 31 of the water temperature control system 3 is 36℃~38℃, and the liquid temperature at the inlet of the primary heat exchange unit 211 (i.e., the temperature of the cooling water that has absorbed heat from the process equipment) is 19℃~21℃, in order to preheat the fresh air in the air cavity, and the temperature of the preheated fresh air is 17℃~18℃. Therefore, the temperature of the fresh air blown into the clean room is 23℃~28℃.

[0034] It is worth mentioning that the water temperature control system 3 is also equipped with a low-temperature water tank, a cooling system and a low-temperature water outlet 33. The cooling system is used to cool the water in the low-temperature water tank, and the low-temperature water outlet 33 is connected to the water inlet of the water inlet unit 11 of the cooling water system 1 so that the low-temperature cooling water in the low-temperature water tank can flow from the water inlet unit 11 to the process machine, thereby improving the temperature stability of the low-temperature cooling water flowing to the process machine.

[0035] In addition, an independent circulation loop can be formed between the high-temperature outlet 31, the secondary heat exchange unit 212 and the return outlet 32, and the loop where the low-temperature outlet 33 is located has no mutual influence with the above loops.

[0036] It should be noted that the water temperature control system 3 provided by this utility model may also include outlets for other water temperatures to connect to other loads. For example, the load may be an air conditioning unit, etc.

[0037] In an optional implementation, since the temperature of the cooling water used to cool the process equipment is, for example, 15°C, and the temperature of the cooling water after cooling by the primary heat exchange unit 211 is affected by the temperature of the fresh air in the air chamber 22, the temperature of the cooled water after cooling has a certain degree of uncertainty. Therefore, as... Figure 1 As shown, the outlet of the primary heat exchange unit 211 can also be connected to the return water outlet 32 ​​of the water temperature control system 3. This allows the cooling water flowing out of the primary heat exchange unit 211 to enter the water temperature control system 3, and after the water temperature control system 3 adjusts the temperature, it flows into the inlet unit 11 of the cooling water system 1 through the low temperature outlet 33, thereby effectively reducing the risk of unstable cooling water temperature caused by changes in outdoor ambient temperature.

[0038] It should be noted that the water temperature control system 3 may only have one water tank. In addition, the structure of the high-temperature water control circuit and the low-temperature water control circuit connected to the water tank can be set according to actual needs, and this utility model does not make specific limitations.

[0039] In one specific implementation, such as Figure 2 As shown, Figure 2 This diagram illustrates another structural design of the energy exchange system. The system also includes adjacent first and second heat exchange sections, with the first heat exchange section exchanging heat with the surface of the second heat exchange section. Specifically, the inlet of the first heat exchange section is connected to the low-temperature outlet 33 of the water temperature control system 3, and the outlet of the first heat exchange section is connected to the return outlet 32 ​​of the water temperature control system 3, forming a circulation loop (hereinafter referred to as the first circulation loop) between the water temperature control system 3 and the first heat exchange section. Simultaneously, the outlet of the first-stage heat exchange unit 211 is connected to the inlet of the second heat exchange section, and the outlet of the second heat exchange section is connected to the inlet of the water inlet unit 11 of the cooling water system 1, forming a circulation loop (hereinafter referred to as the second circulation loop) between the first-stage heat exchange unit 211 and the cooling water system 1 via the second heat exchange section.

[0040] However, since the cooling water flowing out of the outlet of the first heat exchange unit 211 is heated cooling water, and the temperature of the heated cooling water is affected by the external environment, by making the liquid temperature at the inlet of the first heat exchange unit lower than the liquid temperature at the inlet of the second heat exchange unit (i.e., the temperature of the cooling water flowing into the first heat exchange unit from the water temperature control system 3 is lower than the temperature of the heated cooling water), the heated cooling water can be cooled down during the process of passing through the second heat exchange unit, and then flow into the water inlet unit 11 of the cooling water system 1, so that the temperature of the cooling water flowing into the water inlet unit 11 is always kept within a preset range. For example, the temperature of the low-temperature cooling water flowing out of the low-temperature outlet 33 of the water temperature control system 3 is 12°C, thereby effectively improving the temperature stability of the cooling water flowing into the process equipment.

[0041] It is worth mentioning that the liquid flow pressure in the first circulation loop and the liquid flow pressure in the second circulation loop do not affect each other, which can effectively improve the stability of energy exchange and thus further reduce energy loss. In addition, since each circulation loop has a clear and relatively independent structure, the system provided by this invention is conducive to improving maintenance convenience and reducing maintenance costs. Furthermore, during the system construction process, remote operation and data monitoring can be achieved through an automated control system.

[0042] In an optional implementation, the heat exchange equipment consisting of the first heat exchange section and the second heat exchange section can be arranged in parallel in multiple sets. In this way, when one or more sets of equipment fail, the remaining equipment can continue to work normally, thereby improving the reliability of the system.

[0043] Continue to refer to Figure 1 or Figure 2 In an optional embodiment, the energy exchange system further includes a first water pump 4, which is disposed between the outlet of the primary heat exchange unit 211 and the inlet of the inlet unit 11 to improve the stability of the liquid flow in the loop. Specifically, the first water pump 4 can be disposed between the outlet of the primary heat exchange unit 211 and the inlet of the second heat exchange unit in the second circulation loop to improve the stability of the liquid flow in the second circulation loop.

[0044] In addition, continue to refer to Figure 1 or Figure 2 The energy exchange system also includes a second water pump 5, which is positioned between the high-temperature outlet 31 of the water temperature control system 3 and the inlet of the secondary heat exchange unit 212. This is to improve the stability of the liquid flow in the circuit. Alternatively, the second water pump 5 can also be positioned between the return outlet 32 ​​and the outlet of the second heat exchange unit, depending on actual needs; this invention does not impose any specific limitations.

[0045] It should be noted that the energy exchange system provided by this utility model can be equipped with multiple water pumps. For example, a water pump can be installed between the low temperature outlet 33 of the water temperature control system 3 and the first heat exchange unit to improve the stability of the liquid flow in the circuit.

[0046] It is worth mentioning that the fresh air unit 2 and the cooling water system 1 of the energy exchange system provided by this utility model have good compatibility. Therefore, the system is easy to construct, has a short construction period, and has little impact on normal production.

[0047] In a specific embodiment, such as Figure 3 As shown, Figure 3This diagram illustrates another structural design of the energy exchange system, which also includes adjacent third and fourth heat exchange sections. The third heat exchange section exchanges heat with the surface of the fourth heat exchange section. Specifically, the inlet of the third heat exchange section is connected to the outlet of the return water unit 12 of the cooling water system 1, and the outlet of the third heat exchange section is connected to the inlet of the second heat exchange section. Simultaneously, the outlet of the second heat exchange section is connected to the inlet of the inlet water unit 11, thus forming a circulation loop (hereinafter referred to as the fourth circulation loop) between the third heat exchange section and the cooling water system 1. The outlet of the fourth heat exchange section is connected to the inlet of the primary heat exchange unit 211, and the inlet of the fourth heat exchange section is also connected to the outlet of the primary heat exchange unit 211, forming a circulation loop between the fourth heat exchange section and the primary preheating unit.

[0048] Furthermore, the liquid flow pressure in the third circulation loop does not affect the liquid flow pressure in the fourth circulation loop, which can effectively improve the stability of energy exchange and thus further reduce energy loss.

[0049] Continue to refer to Figure 3 A water pump can also be installed between the fourth heat exchange section and the first heat exchange unit 211. For example, the water pump can be located between the water inlet of the first heat exchange unit 211 and the fourth heat exchange section to improve the stability of the liquid flow in the circuit.

[0050] After understanding the structure of the energy exchange system provided by this utility model, the following will be used as an example. Figure 2 Taking the provided energy exchange system as an example, this paper explains the energy consumption of the energy exchange system when applied to a cleanroom.

[0051] In traditional cleanrooms, during winter, the power consumption of the fresh air handling unit 2 is 40,000 kW, and the power consumption of the cooling water system 1 is approximately 50,000 kW. Using the energy exchange system provided by this invention, the power consumption of the fresh air handling unit 2 can be reduced by 30% to 50%, i.e., a reduction of 12,000 kW to 20,000 kW. Simultaneously, the cooled water can continue to circulate to the process equipment, effectively reducing the energy consumption of the cooling water system 1 as well.

[0052] Furthermore, based on a Coefficient of Performance (COP) of 6.5 for the water temperature control system 3 during winter, it is estimated that the power consumption of the water temperature control system 3 will be reduced by 1846 kW to 3076 kW. Assuming an average operating time of 90 days and an average load factor of 0.8, the annual electricity savings will be approximately 3.2 million kWh to 5.3 million kWh. At an electricity price of 0.65 yuan / kWh, the energy-saving cost could reach 2 million yuan / year to 3.4 million yuan / year, thus effectively reducing the production cost of the cleanroom.

[0053] In summary, the energy exchange system provided by this utility model allows the heated cooling water to flow into the heat exchange unit through the outlet of the return water unit 12. The heated outer surface of the heat exchange unit then exchanges heat with the fresh air in the air cavity 22, raising the temperature of the fresh air while simultaneously cooling the cooling water within the heat exchange unit. Furthermore, since the outlet of the heat exchange unit is connected to the inlet of the cooling water system 1's inlet unit 11, the cooled water from the heat exchange unit can flow back to the process machine to continue absorbing heat from the machine, thereby cooling the machine and effectively improving the overall system's energy utilization rate, as well as reducing energy consumption and production costs.

[0054] In addition, the system has a simple structure, and each loop system is independent of each other and works in concert. This not only achieves the integrity of the system functions, but also helps to reduce the complexity of the system, while improving the reliability and maintainability of the system.

[0055] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. An energy exchange system, characterized in that, This includes a cooling water system and a fresh air handling unit, among which: The cooling water system includes an inlet unit and a return unit. The cooling water in the inlet unit is used to absorb heat from the process equipment. The return unit is used to collect the heated cooling water. The fresh air unit includes a heat exchange unit and an air cavity. The heat exchange unit is located inside the air cavity, and the water inlet of the heat exchange unit is connected to the water outlet of the return water unit, and the water outlet of the heat exchange unit is connected to the water inlet of the inlet water unit. The heat exchange unit is used for heat exchange with the fresh air in the air cavity.

2. The energy exchange system according to claim 1, characterized in that, The heat exchange unit includes a primary heat exchange unit and a secondary heat exchange unit, the temperature of the secondary heat exchange unit is higher than the temperature of the primary heat exchange unit; and the fresh air is blown from the primary heat exchange unit to the secondary heat exchange unit. The inlet of the primary heat exchange unit is connected to the outlet of the return water unit; the outlet of the primary heat exchange unit is connected to the inlet of the inlet water unit.

3. The energy exchange system according to claim 2, characterized in that, The energy exchange system further includes a water temperature control system, which includes a high-temperature outlet and a return outlet. The high-temperature outlet is connected to the inlet of the secondary heat exchange unit, and the return outlet is connected to the outlet of the secondary heat exchange unit.

4. The energy exchange system according to claim 3, characterized in that, The water temperature control system also includes a low-temperature water outlet, which is connected to the water inlet of the water inlet unit.

5. The energy exchange system according to claim 4, characterized in that, The outlet of the primary heat exchange unit is connected to the return outlet of the water temperature control system.

6. The energy exchange system according to claim 4, characterized in that, The energy exchange system further includes an adjacent first heat exchange section and a second heat exchange section, wherein the first heat exchange section is used to exchange surface heat with the second heat exchange section. The inlet of the first heat exchange unit is connected to the low-temperature outlet of the water temperature control system, and the outlet of the first heat exchange unit is connected to the return outlet of the water temperature control system. The outlet of the primary heat exchange unit is connected to the inlet of the second heat exchange section; the outlet of the second heat exchange section is connected to the inlet of the inlet unit.

7. The energy exchange system according to claim 6, characterized in that, The liquid temperature at the inlet of the first heat exchanger is lower than the liquid temperature at the inlet of the second heat exchanger.

8. The energy exchange system according to claim 6, characterized in that, The energy exchange system further includes an adjacent third heat exchange section and a fourth heat exchange section, wherein the third heat exchange section is used for surface heat exchange with the fourth heat exchange section; The inlet of the third heat exchange unit is connected to the outlet of the return water unit, and the outlet of the third heat exchange unit is connected to the inlet of the second heat exchange unit, and the outlet of the second heat exchange unit is connected to the inlet of the inlet unit. The outlet of the fourth heat exchange unit is connected to the inlet of the first-stage heat exchange unit, and the inlet of the fourth heat exchange unit is connected to the outlet of the first-stage heat exchange unit.

9. The energy exchange system according to claim 2, characterized in that, The energy exchange system further includes a first water pump, which is located between the outlet of the primary heat exchange unit and the inlet of the inlet unit.

10. A cleanroom, characterized in that, The cleanroom includes a clean room and an energy exchange system as described in any one of claims 1-9, wherein the heated fresh air in the air cavity is used to blow into the clean room.

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