Adjusting structure for adjusting position of ignition device on furnace tube equipment
By combining front-to-back, left-to-right, height, and angle adjustment components, the problem of easy breakage of quartz ignition devices during position adjustment is solved. This achieves a tight-sealed connection between the ignition device on the furnace tube equipment and the wafer deposition chamber, ensuring the precise introduction of process gases and the effective execution of chemical reactions.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- PNC SEMICON EQUIP CO LTD
- Filing Date
- 2025-04-18
- Publication Date
- 2026-05-05
AI Technical Summary
The interface between the ignition device and the wafer deposition chamber of the existing furnace tube equipment is made of quartz material, which makes it easy to break during the position adjustment process, making it difficult to achieve a tight seal connection.
An adjustment structure combining front-to-back, left-to-right, height, and angle adjustment components is adopted. Through the cooperation of sliders, brackets, and support plates, the position of the ignition device is precisely adjusted to ensure a sealed connection with the tube interface of the wafer deposition chamber.
This design achieves parallel docking between the ignition device and the wafer deposition chamber interface, preventing the quartz material from breaking and ensuring the precise introduction of process gases and the effective execution of chemical reactions.
Smart Images
Figure CN224202220U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wafer processing, and specifically to an adjustment structure for adjusting the position of the ignition device on a furnace tube device. Background Technology
[0002] Furnace tube equipment is widely used in the heat treatment of semiconductor materials. The connection between the furnace tube equipment's ignition device and the wafer deposition chamber is crucial, especially their interface, which must achieve a tight seal to ensure precise flow of process gases and efficient execution of chemical reactions.
[0003] The ignition device is mounted on the support platform of the furnace tube equipment via an adjustment mechanism. The existing adjustment mechanism allows for vertical, horizontal, and directional adjustments of the ignition device. However, because both the ignition device's interface and the wafer deposition chamber's tube interface are made of quartz, a material that is not only heavy but also highly fragile, the characteristics of quartz make it extremely prone to breakage during position adjustments due to even minor positional deviations or improper operation once the sealing surface angle of the ignition device's interface is fixed. Therefore, ensuring parallel alignment between the ignition device and the wafer deposition chamber's tube interface becomes exceptionally difficult. Utility Model Content
[0004] Based on this, and in response to the above problems, this utility model provides an adjustment structure for adjusting the position of the ignition device on a furnace tube device.
[0005] The objective of this utility model can be achieved through the following technical solutions:
[0006] An adjustment structure for adjusting the position of an ignition device on a furnace tube device includes a mounting groove on the upper surface of a support platform, a slider slidably connected in the mounting groove via a front-to-back adjustment component, a bracket slidably connected to the slider via a left-to-right adjustment component, and a support plate mounted on the bracket via a height adjustment component. The igniter of the ignition device is mounted on the support plate via an angle adjustment component, which includes a bolt and a nut. The support plate has multiple arc-shaped holes located below the igniter, distributed on a circle centered on the center of the support plate. The bottom surface of the igniter has a through hole corresponding to the position of the arc-shaped holes. The end of the bolt passes through the through hole and the arc-shaped holes and is connected to the nut.
[0007] By adopting the above technical solution, the position of the ignition device can be precisely adjusted through the cooperation of the front and rear adjustment components, the left and right adjustment components, the height adjustment components, and the angle adjustment components, so that the interface of the ignition device and the tube interface of the wafer deposition cavity can be sealed and connected.
[0008] In a specific embodiment of this utility model: a pair of fixing plates are spaced apart on the support platform, and the mounting groove is formed between the two fixing plates.
[0009] In a specific embodiment of this utility model: the front and rear adjustment assembly includes two first guide posts and a first adjustment screw. The two ends of the two first guide posts pass through the slider and are connected to the corresponding fixed plates. One of the fixed plates is provided with a first through hole. The slider is provided with a first threaded hole at the position corresponding to the first through hole. The front end of the first adjustment screw passes through the first through hole and is connected to the first threaded hole.
[0010] In a specific embodiment of this utility model: the left and right adjustment assembly includes two second guide posts and a second adjustment screw. The bracket includes a horizontal plate located above the slider and vertical plates extending downward from both sides of the horizontal plate. The two ends of the two second guide posts pass through the slider and are connected to the corresponding vertical plates. One of the vertical plates is provided with a second through hole. The slider is provided with a second threaded hole at the position corresponding to the second through hole. The end of the second adjustment screw passes through the second through hole, is tightened in the second threaded hole, and abuts against the corresponding first guide post. The second guide post and the first guide post are not at the same height, and the end of the first adjustment screw abuts against the corresponding second guide post.
[0011] In a specific embodiment of this utility model: the height adjustment assembly includes a screw, a bushing, a guide rod, a guide sleeve, and a hand-tightening nut. Mounting holes are respectively opened at both ends of the horizontal plate of the bracket. The bushing and the guide sleeve are respectively installed in the corresponding mounting holes. The screw is located inside the bushing, with its upper end extending upwards to connect with the support plate. The hand-tightening nut is threaded onto the screw and located between the bushing and the support plate. The guide rod is located inside the guide sleeve, with its upper end extending upwards to connect with the support plate.
[0012] In a specific embodiment of this utility model: the lower part of the bushing is provided with a bolt hole, a fixing bolt is installed in the bolt hole, and the end of the fixing bolt abuts against the screw.
[0013] In a specific embodiment of this utility model: the ignition device includes an ignition chamber and an igniter fitted on the ignition chamber. One end of the ignition chamber has an air inlet pipe connected to a gas source, and the other end has an ignition chamber interface. The ignition chamber interface is connected to the pipe interface of the wafer deposition chamber through a clamping assembly.
[0014] In a specific embodiment of this utility model: the clamping assembly includes a first clamping plate and a second clamping plate. Both the first clamping plate and the second clamping plate are provided with U-shaped grooves with upward openings. The first clamping plate is fixed to the outside of the wafer deposition cavity. The pipe interface of the wafer deposition cavity is clamped in the U-shaped groove of the first clamping plate, and the ignition cavity interface is clamped in the U-shaped groove of the second clamping plate. The first clamping plate and the second clamping plate are fixed together by locking bolts.
[0015] In a specific embodiment of this utility model: a sealing ring is provided between the tube interface of the wafer deposition cavity and the ignition cavity interface.
[0016] In summary, by loosening the first and second adjusting screws, the movement of the slider can be directly controlled, thereby facilitating the adjustment of the ignition device's position in the front-back and left-right directions. Rotating the hand-tightening nut causes the screw to move up and down, driving the support plate to move up and down, thus achieving vertical displacement of the ignition device. Loosening the nut in the angle adjustment assembly allows the igniter to swing left and right, thereby adjusting the angle of the ignition chamber interface, ensuring that the sealing surface of the ignition chamber interface is parallel to the sealing surface of the wafer deposition chamber's tube interface, effectively preventing damage to the ignition chamber interface due to misalignment. Attached Figure Description
[0017] The present invention will be further described below with reference to the accompanying drawings.
[0018] Figure 1 This is a schematic diagram of an adjustment structure for adjusting the position of the ignition device on a furnace tube device according to the present invention;
[0019] Figure 2 This shows the igniter mounting support plate;
[0020] Figure 3 This shows that the sealing surface of the ignition chamber interface is parallel to and aligned with the sealing surface of the pipe interface;
[0021] Figure 4 This is a schematic diagram showing the adjustment structure. Detailed Implementation
[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.
[0023] Please see as follows Figure 1 and Figure 2 As shown, this utility model is an adjustment structure for adjusting the position of an ignition device on a furnace tube device. It includes a mounting groove 21 on a support platform 15, a slider 23 slidably connected to the mounting groove 21 via a front-rear adjustment assembly 22, a bracket 25 slidably connected to the slider 23 via a left-right adjustment assembly 24, and a support plate 27 mounted on the bracket 25 via a height adjustment assembly 26. The igniter 12 of the ignition device 10 is mounted on the support plate 27 via an angle adjustment assembly 28.
[0024] In this embodiment, a pair of fixing plates 16 are fixed on the support platform 15, and a mounting groove 21 is formed between the two fixing plates 16. The bracket 25 includes a horizontal plate 251 located above the slider 23 and vertical plates 252 extending downward from both sides of the horizontal plate 251.
[0025] Among them, such as Figure 1 , Figure 2 and Figure 3 As shown, the ignition device 10 includes an ignition chamber 11 and an igniter 12 fitted onto the ignition chamber 11. One end of the ignition chamber 11 has an air inlet pipe 13 connected to a gas source, and the other end has an ignition chamber interface 14 connected to the pipe interface 8 of the wafer deposition chamber 9. Here, both the ignition chamber 11 and the pipe interface 8 of the wafer deposition chamber are made of quartz material.
[0026] like Figure 2 and Figure 4 As shown, in this embodiment, the front-to-back adjustment assembly 22 includes two first guide posts 221 and a first adjusting screw 222. The two ends of the two first guide posts 221 pass through the slider 23 and are connected to the corresponding fixing plates 16. One of the fixing plates 16 has a first through hole 161. The slider 23 has a first threaded hole 162 at the position corresponding to the first through hole 161. The front end of the first adjusting screw 222 passes through the first through hole 161 and connects to the first threaded hole 162.
[0027] In this embodiment, the left and right adjustment assembly 24 includes two second guide posts 241 and a second adjustment screw 242. The two ends of the two second guide posts 241 pass through the slider and are connected to the corresponding vertical plates 252 of the bracket 25. One of the vertical plates 252 has a second through hole 253. A second threaded hole 254 is provided on the slider 23 at the position corresponding to the second through hole 253. The end of the second adjustment screw 242 passes through the second through hole 253, is tightened into the second threaded hole 254, and abuts against the corresponding first guide post 221. The second guide posts 241 and the first guide post 221 are not at the same height. The end of the first adjustment screw 222 abuts against the corresponding second guide post 241, cooperating with the end of the second adjustment screw 242 abutting against the corresponding first guide post 221, thus fixing the slider 23 in place.
[0028] Thus, when it is necessary to adjust the position of the slider in the forward / backward and left / right directions, loosen the first adjusting screw 222 and the second adjusting screw 242, ensuring that the end of the second adjusting screw 242 no longer abuts against the corresponding first guide post 221 and the end of the first adjusting screw 222 no longer abuts against the corresponding second guide post 241. Move the slider left / right by pulling the bolt head of the first adjusting screw 222; move the slider forward / backward by pulling the bolt head of the second adjusting screw 242. Finally, tighten the first adjusting screw 222 and the second adjusting screw 242.
[0029] In this embodiment, the height adjustment assembly 26 includes a screw 261, a bushing 262, a guide rod 263, a guide sleeve 264, a hand-tightening nut 265, and a fixing bolt 266. Mounting holes are respectively opened at both ends of the horizontal plate 251 of the bracket 25. The bushing 262 and the guide sleeve 264 are respectively installed in the corresponding mounting holes. The screw 261 is located inside the bushing 262, with its upper end extending upward and fixedly connected to the support plate 27. The hand-tightening nut 265 is threaded onto the screw 261 and is located between the bushing 262 and the support plate 27. A bolt hole 267 is provided at the lower part of the bushing 262. The fixing bolt 266 is installed in the bolt hole 267, with its end abutting against the screw 261. The guide rod 263 is located inside the guide sleeve 264, with its upper end extending upward and fixedly connected to the support plate 27. When it is necessary to adjust the height of the ignition device, first loosen the fixing bolt 266 to release the lock on the screw 261. Subsequently, rotating the circular hand-tightening nut 265 causes the screw 261 to rise or fall as its upper end is fixedly connected to the support plate 27. This adjusts the height of the support plate 27. Once the height is adjusted to the appropriate position, retighten the fixing bolt 266 to secure the screw 261 and ensure height stability.
[0030] In this embodiment, the angle adjustment assembly 28 includes four bolts and four nuts. Four arc-shaped holes 272 are provided on the support plate 27 below the igniter 12. The four holes 272 are distributed on a circle centered on the center of the support plate 27. Through holes are formed on the bottom surface of the igniter 12 at positions corresponding to the holes 272. The ends of the four bolts pass through the corresponding through holes and holes 272 and are connected to the nuts, thereby fixing the igniter 12 to the support plate 27.
[0031] like Figure 1 As shown, the tube interface 8 of the wafer deposition cavity and the ignition cavity interface 14 are clamped and fixed by a clamping assembly 30.
[0032] like Figure 1 and Figure 3 As shown, in this embodiment, the clamping assembly 30 includes a first clamping plate 34 and a second clamping plate 35. Both clamping plates have upward-facing U-shaped grooves 32. The first clamping plate 34 is fixed to the outside of the wafer deposition cavity 9. The tube interface 8 of the wafer deposition cavity is engaged in the U-shaped groove 32 of the first clamping plate 34, and the ignition cavity interface 14 is engaged in the U-shaped groove 32 of the second clamping plate 35. The first clamping plate 34 and the second clamping plate 35 are fixed together by locking bolts 33.
[0033] In this embodiment, a sealing ring 36 is provided between the tube interface 8 of the wafer deposition cavity 9 and the ignition cavity interface 14.
[0034] The above is an adjustment structure for adjusting the position of the ignition device on the furnace tube equipment according to the present invention. During installation, the igniter 12 is first placed on the support plate 27, and the four bolts are inserted into the corresponding through holes and waist holes.
[0035] When adjusting the position of the ignition device in the front-back or left-right directions, loosen the first adjusting screw 222 and the second adjusting screw 242, ensuring that the end of the second adjusting screw 242 no longer abuts against the corresponding first guide post 221, and the end of the first adjusting screw 222 no longer abuts against the corresponding second guide post 241. Pull the bolt head of the first adjusting screw 222 to move the slider left-right, thus moving the ignition device left-right. Pull the bolt head of the second adjusting screw 242 to move the slider back-forward, thus moving the ignition device forward-backward, thereby achieving displacement of the ignition device in the front-back or left-right directions. When adjusting the vertical position of the ignition device, first loosen the fixing bolt 266 to release the lock on the screw 261. Then, rotate the hand-tightening nut 265 clockwise or counterclockwise to raise or lower the screw 261, raising or lowering the support plate 27, thereby raising or lowering the ignition device. After the height of the ignition device is adjusted to the appropriate position, retighten the fixing bolt 266 to lock the screw 261. Subsequently, by swinging the igniter 12 left and right, the angle of the igniter 12 is adjusted, causing the ignition chamber 11 to move, so that the sealing surface of the ignition chamber interface of the ignition chamber 11 is parallel and aligned with the sealing surface of the tube interface of the wafer deposition chamber. Then, the four nuts are connected to the corresponding bolts to fix the igniter 12 onto the support plate 27. Finally, the second clamping plate 35 is snapped onto the ignition chamber interface, and the first clamping plate 34 and the second clamping plate 35 are fixed together with bolts.
[0036] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.
Claims
1. An adjustment structure for adjusting the position of an ignition device on a furnace tube device, comprising a mounting groove on the upper surface of a support platform, a slider slidably connected in the mounting groove via a front-rear adjustment assembly, a bracket slidably connected to the slider via a left-right adjustment assembly, and a support plate mounted on the bracket via a height adjustment assembly, characterized in that, The igniter of the ignition device is mounted on the support plate via an angle adjustment assembly, which includes a bolt and a nut. The support plate has multiple arc-shaped holes located below the igniter, distributed on a circle centered on the center of the support plate. The bottom surface of the igniter has a through hole corresponding to the position of the arc hole. The end of the bolt passes through the through hole and the arc hole and is connected to the nut.
2. The adjustment structure for adjusting the position of the ignition device on a furnace tube equipment according to claim 1, characterized in that, A pair of fixing plates are spaced apart on the support platform, and the mounting groove is formed between the two fixing plates.
3. The adjustment structure for adjusting the position of the ignition device on a furnace tube equipment according to claim 1, characterized in that, The front and rear adjustment assembly includes two first guide posts and a first adjustment screw. The two ends of the two first guide posts pass through the slider and are connected to the corresponding fixed plates. One of the fixed plates is provided with a first through hole. The slider is provided with a first threaded hole at the position corresponding to the first through hole. The front end of the first adjustment screw passes through the first through hole and is connected to the first threaded hole.
4. The adjustment structure for adjusting the position of the ignition device on a furnace tube equipment according to claim 3, characterized in that, The left and right adjustment assembly includes two second guide posts and a second adjustment screw. The bracket includes a horizontal plate located above the slider and vertical plates extending downward from both sides of the horizontal plate. The two ends of the two second guide posts pass through the slider and are connected to the corresponding vertical plates. One of the vertical plates is provided with a second through hole. The slider is provided with a second threaded hole at the position corresponding to the second through hole. The end of the second adjustment screw passes through the second through hole, is tightened in the second threaded hole, and abuts against the corresponding first guide post. The second guide post and the first guide post are not at the same height, and the end of the first adjustment screw abuts against the corresponding second guide post.
5. The adjusting structure for adjusting the position of the ignition device on a furnace tube equipment according to claim 4, characterized in that, The height adjustment assembly includes a screw, a bushing, a guide rod, a guide sleeve, and a hand-tightening nut. Mounting holes are respectively opened at both ends of the horizontal plate of the bracket. The bushing and the guide sleeve are respectively installed in the corresponding mounting holes. The screw is located inside the bushing, with its upper end extending upwards to connect with the support plate. The hand-tightening nut is threaded onto the screw and located between the bushing and the support plate. The guide rod is located inside the guide sleeve, with its upper end extending upwards to connect with the support plate.
6. The adjusting structure for adjusting the position of the ignition device on a furnace tube equipment according to claim 5, characterized in that, The lower part of the bushing is provided with a bolt hole, and a fixing bolt is installed in the bolt hole, with the end of the fixing bolt abutting against the screw.
7. The adjusting structure for adjusting the position of the ignition device on a furnace tube equipment according to claim 1, characterized in that, The ignition device includes an ignition chamber and an igniter fitted on the ignition chamber. One end of the ignition chamber has an air inlet pipe connected to a gas source, and the other end has an ignition chamber interface. The ignition chamber interface is connected to the pipe interface of the wafer deposition chamber through a clamping assembly.
8. The adjusting structure for adjusting the position of the ignition device on a furnace tube equipment according to claim 7, characterized in that, The clamping assembly includes a first clamping plate and a second clamping plate. Both the first clamping plate and the second clamping plate are provided with U-shaped grooves with upward openings. The first clamping plate is fixed to the outside of the wafer deposition cavity. The pipe interface of the wafer deposition cavity is clamped in the U-shaped groove of the first clamping plate, and the ignition cavity interface is clamped in the U-shaped groove of the second clamping plate. The first clamping plate and the second clamping plate are fixed together by locking bolts.
9. The adjusting structure for adjusting the position of the ignition device on a furnace tube equipment according to claim 8, characterized in that, A sealing ring is provided between the tube interface of the wafer deposition chamber and the ignition chamber interface.