Ellipsometer

Abstract

The ellipsometer comprises an objective table, a polarization starting arm, a polarization detecting arm, a rotation driving assembly and a displacement driving assembly. The rotation driving assembly is connected with and drives the polarization starting arm and the polarization detecting arm to rotate around different central axial directions parallel to the first direction, and the first direction is perpendicular to the incident plane of the ellipsometer. And the displacement driving assembly is connected with and drives the polarization starting arm and the polarization detecting arm to move in the incident plane. The rotation driving assembly and the displacement driving assembly can drive the polarization starting arm and the polarization detecting arm to be switched between a first position close to the objective table and a second position away from the objective table. When the polarizing arm and the polarization detection arm are located at the first position, the polarizing arm and the polarization detection arm are in a detection state facing the objective table. When the polarizing arm and the polarization detecting arm are located at the second position, the polarizing arm and the polarization detecting arm can rotate to the debugging state. According to the ellipsometer, the displacement driving assembly drives the polarizing arm and the polarization detecting arm to move in the incident plane, when the ellipsometer needs to be debugged, in the process of rotating to the debugging state, the rotation movement of the polarizing arm and the polarization detecting arm is not interfered by the objective table, and the reliability of the ellipsometer is improved.

Description

Technical Field

[0001] This application relates to the field of detection and measurement technology, and in particular to an ellipsometer. Background Technology

[0002] Ellipsometry is used to detect thin film thickness, optical constants, and microstructure properties of materials. It can measure samples including bulk materials, thin films, and multilayer structures grown or deposited on planar substrates.

[0003] An ellipsometer typically includes a polarizing arm, an analyzer arm, and a stage. The polarizing arm and analyzer arm are arranged on opposite sides of the stage. The polarizing arm is used to emit polarized light toward the sample on the stage. The polarized light is reflected by the sample and received by the analyzer arm, which can then analyze the thickness and related dimensions of the thin film on the sample surface in a spectroscopic analysis device.

[0004] Currently, ellipsometers mostly use air-to-air adjustment to adjust the relative positions of the optical components in the polarizing arm and analyzer arm to ensure the collimation and symmetry of the emitted and reflected rays. Before adjustment, the polarizing arm and analyzer arm need to be rotated from the detection position to the adjustment position. During this process, the stage can easily interfere with the rotation of the polarizing arm and analyzer arm. Utility Model Content

[0005] Therefore, it is necessary to provide an ellipsometer that addresses the problem of the stage easily interfering with the rotation of the eccentric arm and the analyzer arm in an ellipsometer.

[0006] An ellipsometer, comprising:

[0007] Stage;

[0008] Offset arm and offset detection arm;

[0009] A rotary drive assembly connects to and drives the ellipticizer arm and the polarizer arm to rotate about different central axes parallel to a first direction, wherein the first direction is perpendicular to the incident plane of the ellipticizer; and

[0010] A displacement drive assembly connects to and drives the polarization arm and the polarization detection arm to move within the incident plane;

[0011] The rotary drive assembly and the displacement drive assembly can drive the bias arm and the bias detection arm to switch between a first position close to the stage and a second position far from the stage;

[0012] When the biasing arm and the bias checking arm are in the first position, the biasing arm and the bias checking arm are in a detection state facing the stage; when the biasing arm and the bias checking arm are in the second position, the biasing arm and the bias checking arm are in an adjustment state.

[0013] In some embodiments, the displacement driving assembly is configured to drive the bias arm and the bias detection arm to move in opposite directions;

[0014] When in the debugging state, the biasing arm and the bias checking arm are positioned directly opposite each other in their own direction of movement.

[0015] In some embodiments, the displacement driving assembly includes two slides that are movably disposed along opposite directions;

[0016] The rotary drive assembly includes two rotary drive components, with one rotary drive component provided on each of the slides. The biasing arm and the bias checking arm are respectively driven by one of the rotary drive components to rotate around their respective central axes.

[0017] In some embodiments, the ellipsometry includes two adapter plates, the deflection arm and the detection arm each include a mounting plate, each of the rotary drive components is independently connected to the corresponding adapter plate and drives the adapter plate to rotate around the corresponding central axis, and each of the mounting plates is movably mounted on the corresponding adapter plate.

[0018] When in the debugging state, the position of each mounting plate in the direction of movement is adjustable as it moves along the adapter plate it belongs to.

[0019] In some embodiments, both the polarization arm and the polarization detection arm include a mounting plate and a plurality of optical components disposed on the mounting plate. Each mounting plate is rotatably disposed about the corresponding central axis under the drive of the rotation drive assembly, and is movable along the incident plane under the drive of the displacement drive assembly.

[0020] The plurality of optical components of the polarizing arm are used to form a polarizing optical path, and the plurality of optical components of the analyzing arm are used to form an analyzing optical path. At least one of the optical components is independently and detachably disposed on the corresponding mounting plate, and its position relative to the mounting plate is adjustable so that the polarizing optical path and the analyzing optical path are symmetrically arranged in the incident plane.

[0021] In some embodiments, when in the debugging state, relative to their respective mounting plates, at least some of the optical components of the polarizing arm and the polarizing detector arm are adjustable along the second direction, at least some of the optical components are adjustable along the third direction, and at least some of the optical components are adjustable along the first direction, so that the polarizing optical path and the polarizing optical path are symmetrical, and the second direction, the third direction and the first direction are perpendicular to each other.

[0022] In some embodiments, the polarizing arm includes a light source collimation assembly, a first reflection assembly, a first prism assembly, and a first objective lens assembly arranged sequentially along the polarizing optical path.

[0023] When in the debugging state, the light source collimation component and the first reflection component are arranged at intervals in the third direction, and the first reflection component, the first prism component, and the first objective lens component are arranged at intervals in the second direction. The light source collimation component is configured to be adjustable in position at least along the second direction and the third direction, the first reflection component is adjustable in position at least along the first direction, the first prism component is adjustable in position at least along the third direction and the first direction, and the first objective lens component is adjustable in position along the second direction, the third direction, and the first direction.

[0024] In some embodiments, the polarizer arm includes a second objective lens assembly, a second prism assembly, a second reflection assembly, and a light source receiving assembly arranged sequentially along the polarizer optical path;

[0025] When in the debugging state, the second reflective component and the light source receiving component are arranged at intervals in the third direction, and are arranged sequentially with the second prism component and the second objective lens component in the second direction; the light source receiving component is configured to be adjustable in position along the second direction, the third direction and the first direction, the second reflective component is adjustable in position at least along the first direction, and the second objective lens component is adjustable in position along the second direction, the third direction and the first direction.

[0026] In some embodiments, a fixing block, a wedge block, a mating block, and an adjusting member are configured corresponding to at least one optical component;

[0027] The fixing block is connected to the mounting plate, and the adjusting member is connected to the wedge block and can drive the wedge block to move along the fixing block in the second direction;

[0028] The mating block engages with the inclined surface of the wedge block. When the wedge block moves, it can drive the mating block to move in the first direction. The optical component is disposed on the mating block.

[0029] In some embodiments, at least a portion of the optical components and / or the stage are configured to have an adjustable pitch angle.

[0030] The aforementioned ellipsometer uses a displacement drive assembly to move the elliptic arm and the analytical arm within the incident plane. When the ellipsometer needs to be adjusted, the rotational motion of the elliptic arm and the analytical arm will not be interfered with by the stage during the adjustment process, thus improving the reliability of the ellipsometer. Attached Figure Description

[0031] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0032] Figure 1 This is a schematic diagram of an ellipsometer in the detection state according to some embodiments.

[0033] Figure 2 for Figure 1 The diagram shown is a schematic of the ellipsometer in the debugging state.

[0034] Figure 3 for Figure 1 The diagram shows a three-dimensional representation of an ellipsometer.

[0035] Figure 4 for Figure 1 The diagram shows another orientation of the ellipsometer.

[0036] Figure 5 for Figure 1 The diagram shows another orientation of the ellipsometer.

[0037] Figure 6 for Figure 5 Enlarged view of point A in the middle.

[0038] Figure 7 for Figure 1 The diagram shows the structure of the ellipsometer with some parts of its structure hidden.

[0039] The reference numerals in the detailed embodiments are as follows:

[0040] 100. Ellipsometry; T1. Detection state; T2. Debugging state; X. First direction; Y. Second direction; Z. Third direction; 10. Stage; 20. Polarizing arm; 21. Light source collimation assembly; 22. First reflection assembly; 23. First prism assembly; 24. First objective lens assembly; 30. Analyzer arm; 31. Second objective lens assembly; 32. Second prism assembly; 33. Second reflection assembly; 34. Light source receiving assembly; 40. Rotation drive assembly; 41. Rotation drive component; 50. Displacement drive assembly; 51. Slide table; 60. Mounting plate; 60a. Strip hole; 61. Adapter plate; 62. Back plate; 62a. Mounting surface; 63. Slide rail; 64. Limiting structure; 65. Base; 66. Fixing block; 67. Wedge block; 68. Mating block; 68a. Mating groove; 69. Adjusting component; 70. Adjusting nut; 71. Clearance hole. Detailed Implementation

[0041] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0042] In the description of this application, it should be understood that, where they appear, the terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0043] Furthermore, where applicable, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0044] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., shall be interpreted broadly. For example, they may refer to a fixed connection, a detachable connection, or an integral part; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; they may refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0045] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0046] It should be noted that, if an element is described as "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is described as "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0047] To avoid interference with the stage when the ellipticity's starting and analyzing arms switch from the self-detection state to the debugging state, this application proposes an ellipticity that moves the starting and analyzing arms to a position far away from the stage when switching the states of the starting and analyzing arms, thus avoiding interference with the stage.

[0048] The ellipsometry of the embodiments of this application will be described in detail below.

[0049] Reference Figures 1 to 5 The ellipsometer 100 proposed in this application includes a stage 10, a bias arm 20, an analytical arm 30, a rotation drive assembly 40, and a displacement drive assembly 50. The rotation drive assembly 40 connects to and drives the bias arm 20 and the analytical arm 30 to rotate about different central axes parallel to a first direction X, which is perpendicular to the incident plane of the ellipsometer 100. The displacement drive assembly 50 connects to and drives the bias arm 20 and the analytical arm 30 to move within the incident plane. The rotation drive assembly 40 and the displacement drive assembly 50 can drive the bias arm 20 and the analytical arm 30 to switch between a first position close to the stage 10 and a second position away from the stage 10. When the bias arm 20 and the analytical arm 30 are in the first position, they are in a detection state T1 facing the stage 10. When the bias arm 20 and the analytical arm 30 are in the second position, they can rotate to an adjustment state T2.

[0050] Typically, the ellipsometer 100 also includes a frame, which comprises a back plate 62 and a base 65. The back plate 62 is erected on the base 65, the polarization arm 20 and the polarization analyzer arm 30 are disposed on the back plate 62, and the stage 10 is disposed on the base 65. The stage 10 is used to place the sample and can be fixedly disposed on the base 65 or movably disposed on the base 65, which is not limited. In normal use, the top surface of the stage 10 is used to support the sample. The back plate 62 has a mounting surface 62a configured parallel to the incident plane, and the polarization arm 20 and the polarization analyzer arm 30 are disposed on the mounting surface 62a. The mounting surface 62a can be directly used as a reference surface for the incident plane.

[0051] The ellipsometer 100 has a detection state T1 and an adjustment state T2. In the detection state T1, the polarizing arm 20 and the analyzing arm 30 are positioned towards the stage 10. The polarizing arm 20 emits polarized light towards the sample on the stage 10, while the analyzing arm 30 receives the polarized light reflected from the sample. The thickness of the sample is obtained by processing and analyzing the reflected light.

[0052] The propagation path of light at the polarizing arm 20 is called the polarizing optical path, and the propagation path of light at the analyzing arm 30 is called the analyzing optical path. The incident plane of the ellipsometer 100 is a set reference plane. In the detection state T1, the polarizing optical path and the analyzing optical path are required to be located on the incident plane and symmetrically arranged. In normal use, a vertical plane can be used as the incident plane, and when installing the polarizing arm 20 and the analyzing arm 30, the polarizing optical path and the analyzing optical path are arranged within this plane for detection.

[0053] In the debugging state T2, the ellipsometer 100 can adjust the polarizing optical path of the polarizing arm 20 and the polarizing optical path of the analyzing arm 30 to ensure that both optical paths are located on the incident plane and are symmetrically arranged. In the detection state T1, if the polarizing optical path and the analyzing optical path are found to be misaligned, the polarizing arm 20 and the analyzing arm 30 can be switched to the debugging state T2 to facilitate adjustment of the polarizing arm 20 and the analyzing arm 30 so that the polarizing optical path and the analyzing optical path are located on the same plane (which is the incident plane).

[0054] The rotary drive assembly 40 can drive the eccentric arm 20 and the polarization arm 30 to rotate in opposite directions around different axes parallel to the first direction X, thereby changing the included angle between the eccentric arm 20 and the polarization arm 30 and adjusting the incident angle of the ellipsometer 100. Typically, the eccentric arm 20 and the polarization arm 30 can rotate synchronously under the drive of the rotary drive assembly 40 to ensure consistency between the incident angle and the reflection angle.

[0055] The displacement drive assembly 50 can drive the polarizing arm 20 and the polarizing arm 30 to move within the incident plane. Specifically, the polarizing arm 20 and the polarizing arm 30 can move in opposite directions in the same direction or in different directions to simultaneously switch between positions close to the stage 10 and positions far from the stage 10.

[0056] After the displacement drive assembly 50 drives the lifting arm 20 and the measuring arm 30 to a position away from the stage 10, the rotation drive assembly 40 drives them to rotate to an adjustable second position. After adjustment, the rotation drive assembly 40 drives the lifting arm 20 and the measuring arm 30 to rotate in opposite directions and face the stage 10. Then, the displacement drive assembly 50 drives the lifting arm 20 and the measuring arm 30 to move to a first position close to the stage 10.

[0057] In this embodiment, the displacement drive assembly 50 drives the ellipsometry 20 and the ellipsometer 30 to move in the incident plane. When the ellipsometer 100 needs to be adjusted, during the process of rotating to the adjustment state T2, the rotational motion of the ellipsometry 20 and the ellipsometer 30 is interfered with by the stage 10, which improves the reliability of the ellipsometer 100.

[0058] In some embodiments, refer to Figure 4 The displacement drive assembly 50 is configured to drive the eccentric arm 20 and the eccentric detection arm 30 to move in opposite directions.

[0059] In other words, the biasing arm 20 and the bias checking arm 30 are either far apart or close together in the same direction. This simplifies the structure of the displacement drive assembly and reduces costs.

[0060] For example, when the eccentric arm 20 and the detection arm 30 move in opposite directions, the displacement drive assembly 50 can be obtained by combining a motor, a gear, and two racks. Specifically, the motor drives the gear to rotate, and the two racks are arranged on opposite sides of the gear and mesh with it. When the gear rotates, the two racks move in opposite directions. This, in turn, drives the eccentric arm 20 and the detection arm 30 to move in opposite directions.

[0061] In one specific embodiment, the displacement driving assembly 50 drives the deflection arm 20 and the detection arm 30 along... Figure 4 The second direction, Y, is shifted in the opposite direction, as shown.

[0062] Specifically, in the embodiments, refer to Figure 2 When in the debugging state T2, the bias arm 20 and the bias detection arm 30 are set facing each other in their own direction of movement.

[0063] Specifically, in the debugging state T2, the transmitting end of the polarization arm 20 and the receiving end of the polarization detector arm 30 are positioned directly opposite each other. Thus, in the debugging state T2, the polarization arm 20 and the polarization detector arm 30 can be adjusted by air-to-air adjustment, which is simple to operate.

[0064] In one embodiment, reference is made to Figure 3The displacement drive assembly 50 includes two slides 51, which are movably arranged in opposite directions. The rotation drive assembly 40 includes two rotation drive members 41, with one rotation drive member 41 disposed on each slide 51. The biasing arm 20 and the bias checking arm 30 are respectively driven by a rotation drive member 41 to rotate around their respective central axes.

[0065] That is, a slide table 51 is used in conjunction with a rotary drive component 41 to drive the eccentric arm 20 or the eccentric detection arm 30 to move and rotate. In this way, the structure of the rotary drive component 40 of the moving drive assembly can be greatly simplified and the manufacturing cost can be reduced.

[0066] Specifically, a slide rail 63 can be provided on the back plate 62, and the slide table 51 is slidably mounted on the slide rail 63. Understandably, the slide table 51 is equipped with a power mechanism (such as a telescopic mechanism, linear module, etc.) to enable its movement along the slide rail 63. The rotary drive component 41 may, but is not limited to, adopt a conventional rotary power structure such as a motor.

[0067] Additionally, refer to Figure 3 Limiting structures 64 can be configured on both ends of the slide rail 63 on the back plate 62 to prevent the slide table 51 from derailing.

[0068] For the structural design of the moving drive component and the rotating drive component 40, those skilled in the art can make various designs based on conventional technical means, and are not limited to the above-mentioned solutions.

[0069] In one specific embodiment, reference is made to Figure 1 , Figure 5 and Figure 6 The ellipsometry 100 includes two adapter plates 61. Both the eccentric arm 20 and the calibration arm 30 include a mounting plate 60. Each rotary drive component 41 is independently connected to its corresponding adapter plate 61 and drives each adapter plate 61 to rotate around its corresponding central axis. Each mounting plate 60 is movably mounted on its corresponding adapter plate 61. In the debugging state T2, the position of each mounting plate 60 along its corresponding adapter plate 61 in the aforementioned direction of movement is adjustable.

[0070] Specifically, the rotary drive component 41 drives the adapter plate 61 to rotate, which in turn drives the mounting plate 60 to rotate, thereby realizing the rotation of the offset arm 20 and the detection arm 30. The mounting plate 60 is movable along the adapter plate 61, see reference. Figure 1 A slotted hole 60a can be provided on the mounting plate 60, and a fastening hole can be provided on the adapter plate 61. Fasteners pass through the slotted hole 60a and are securely connected within the fastening hole. When the position of the mounting plate 60 needs to be adjusted, the fasteners can be loosened or removed. In the debugging state T2, the direction of movement of the mounting plate 60 relative to the adapter plate 61 (i.e., the extension direction of the slotted hole 60a) is parallel to the direction of movement of the biasing arm 20 and the bias checking arm 30.

[0071] Typically, the transmitting end of the polarizing arm 20 and the receiving end of the analyzing arm 30 are equipped with objective lenses. The objective lenses are used to adjust the focal length of the light. In practical applications, during the debugging state T2, the focal length of the objective lens can be adjusted by moving the mounting plate 60, making the ellipsometer 100 compatible with objective lenses of different focal lengths.

[0072] Furthermore, referring to Figure 7 A clearance hole 71 is formed on the back plate 62. The rotary drive assembly 40 passes through the clearance hole 71 and is connected to the adapter plate 61. The rotary drive assembly 40 is connected to the displacement drive assembly 50. The clearance hole 71 allows the rotary drive assembly 40 to move with the displacement drive assembly 50, so as to drive the polarizing arm 20 or the polarizing arm 30 to move along the incident plane through the adapter plate 61. Specifically, the clearance hole 71 may be strip-shaped, and the extension direction of the clearance hole 71 is consistent with the second direction Y, so as to allow the polarizing arm 20 and the polarizing arm 30 to move parallel to the second direction Y and opposite to each other.

[0073] In some embodiments, refer to Figures 1 to 5 Both the polarizing arm 20 and the analyzing arm 30 include a mounting plate 60 and multiple optical components mounted on the mounting plate 60. Each mounting plate 60 is rotatable around its corresponding central axis under the drive of the rotation drive assembly 40, and is movable along the incident plane under the drive of the displacement drive assembly 50. The multiple optical components of the polarizing arm 20 are used to form a polarizing optical path, and the multiple optical components of the analyzing arm 30 are used to form an analyzing optical path. At least one optical component is independently and detachably mounted on its corresponding mounting plate 60, and its position relative to the mounting plate 60 is adjustable so that the polarizing optical path and the analyzing optical path are symmetrically arranged in the incident plane.

[0074] Optical components can reflect, shape, collimate, or polarize light. Specifically, the light component includes optical devices and the structure supporting the optical devices. The types of optical devices may include mirrors, collimating mirrors, polarizing mirrors, objective lenses, etc. The types of optical devices included in the polarizing arm 20 and the analyzing arm 30 can be conventionally configured and are not limited here. In the embodiments of this application, the position of the optical component in a certain direction is adjustable; specifically, it is to change the position of the optical device in that direction.

[0075] At least one optical component is independently detachable relative to its mounting plate 60, and its position relative to the mounting plate 60 is adjustable. This allows for individual removal and replacement of damaged or replaced optical components without affecting the use of other optical components or requiring their removal, significantly reducing replacement and maintenance costs. After replacement, the polarization analysis path and / or polarizing path can be recalibrated by adjusting the positions of these optical components relative to the mounting plate 60, simplifying the debugging process.

[0076] Specifically, the optical components can be detachably mounted on the mounting plate 60 by means of screws or other connections, or detachably mounted on the mounting plate 60 by plugging in, and the specific method is not limited.

[0077] In some embodiments, combined with Figure 1 and Figure 3 Understood, when in the debugging state T2, relative to their respective mounting plates 60, both the polarizing arm 20 and the polarizing arm 30 have at least some optical components that are adjustable along the second direction Y, at least some optical components that are adjustable along the third direction Z, and at least some optical components that are adjustable along the first direction X, so that the polarizing optical path and the polarizing optical path are symmetrical, and the first direction X, the second direction Y, and the third direction Z are perpendicular to each other.

[0078] In actual use, the second direction Y can be the horizontal direction of the horizontal plane, the first direction X can be the vertical direction of the horizontal plane, and the third direction Z can be the vertical direction.

[0079] When it is necessary to adjust the polarizing path and / or the analyzing path, and when it is necessary to adjust the position of the optical path in the horizontal, vertical or longitudinal direction, only the position of some optical components needs to be adjusted. The position adjustments of each optical component are complementary, making the debugging process simpler and faster.

[0080] If the second direction Y and the third direction Z are used as independent reference coordinate systems for the polarizing arm 20, when the polarizing arm 20 rotates, the second direction Y and the third direction Z rotate accordingly. Similarly, if the second direction Y and the third direction Z are used as independent reference coordinate systems for the polarizing arm 30, when the polarizing arm 30 rotates, the second direction Y and the third direction Z rotate accordingly. To simplify the description herein, the embodiments of this application associate the position of the reference coordinate system formed by the second direction Y and the third direction Z with the debugging state T2, so that the movement directions of the optical components of both the polarizing arm 20 and the polarizing arm 30 in the debugging state T2 can share the reference coordinate system formed by the second direction Y and the third direction Z.

[0081] Specifically, in one embodiment, combined with Figures 1 to 5 It is understood that the polarizing arm 20 includes a light source collimating assembly 21, a first reflection assembly 22, a first prism assembly 23, and a first objective lens assembly 24 arranged sequentially along the polarizing optical path.

[0082] The light source collimation component 21 can connect to the optical fiber and collimate the light propagating from the optical fiber towards the first reflection component 22. The light is reflected by the first reflection component 22 and then passes through the first prism component 23 and the first objective lens component 24 in sequence. The light is polarized at the first prism component 23 to form polarized light, which is then adjusted by the first objective lens component 24 to be focused onto the sample on the stage 10.

[0083] At this time, the polarizing arm 20 has a simple structure, and the configuration of the first reflective component 22 can shorten the setting length of the polarizing arm 20 in the light propagation direction of the first objective lens component 24, thereby reducing the floor space occupied by the ellipsometer 100.

[0084] In one specific embodiment, combined with Figure 2 and Figure 3 Understood, when in debugging state T2, the light source collimating component 21 and the first reflection component 22 are arranged at intervals in the third direction Z, and the first reflection component 22, the first prism component 23 and the first objective lens component 24 are arranged at intervals in the second direction Y. The light source collimating component 21 is configured to be adjustable at least along the second direction Y and the third direction Z, the first reflection component 22 is adjustable at least along the first direction X, the first prism component 23 is adjustable at least along the third direction Z and the first direction X, and the first objective lens component 24 is adjustable along the second direction Y, the third direction Z and the first direction X.

[0085] Taking the debugging state T2 as a reference state, in debugging state T2, the direction between the light source collimating component 21 and the first reflecting component 22 is the third direction Z, and the direction in which the first reflecting component 22, the first prism component 23, and the first objective lens component 24 are arranged is the second direction Y. The second direction Y, the first direction X, and the third direction Z are all perpendicular to each other. In practical applications, the first direction X and the second direction Y are horizontal, and the third direction Z is vertical.

[0086] In this embodiment, the light source collimation component 21 is adjustable at least along the second direction Y and the third direction Z, and the first reflection component 22 is adjustable at least along the first direction X. Thus, by changing either the light source collimation component 21 or the first reflection component 22, the relative positions of the two in the first direction X, the second direction Y, and the third direction Z can be achieved, making it easy to ensure that the light source collimation component 21 falls on the focal position of the first reflection component 22.

[0087] Similarly, the first prism assembly 23 is adjustable at least along the third direction Z and the first direction X, and the first objective lens assembly 24 is adjustable along the second direction Y, the third direction Z and the first direction X, and can cooperate with the first reflection assembly 22 to make the optical axes of the three coaxial.

[0088] Furthermore, the second direction Y is consistent with the light propagation direction of the first objective lens assembly 24. The position of the first objective lens assembly 24 along the second direction Y is adjustable, which can adjust the focal length of the first objective lens assembly 24 to adapt to the application of different types of objective lenses.

[0089] Specifically, in one embodiment, combined with Figures 1 to 5 It is understood that the polarizer arm 30 includes a second objective lens assembly 31, a second prism assembly 32, a second reflection assembly 33, and a light source receiving assembly 34 arranged sequentially along the polarizer path.

[0090] The polarized light emitted by the polarizing arm 20 is reflected by the sample and then passes through the second objective lens assembly 31, the second prism assembly 32, and the second reflection assembly 33 before being received by the light source receiving assembly 34. The light source receiving assembly 34 can be connected to a spectrometer to analyze the sample thickness.

[0091] At this time, the analyzer arm 30 has a simple structure, and the configuration of the second reflective component 33 can shorten the length of the analyzer arm 30 in the direction of light propagation of the second objective lens component 31, thereby reducing the floor space of the ellipsometer 100.

[0092] In one specific embodiment, combined with Figure 2 and Figure 3 Understood, in the debugging state T2, the second reflector assembly 33 and the light source receiving assembly 34 are arranged at intervals in the third direction Z, and are arranged sequentially with the second prism assembly 32 and the second objective lens assembly 31 in the second direction Y. The light source receiving assembly 34 is configured to be adjustable in position along the second direction Y, the third direction Z, and the first direction X. The second reflector assembly 33 is adjustable at least along the first direction X, and the second objective lens assembly 31 is adjustable in position along the second direction Y, the third direction Z, and the first direction X.

[0093] Taking the debugging state T2 as a reference state, in the debugging state T2, the direction in which the light source receiving component 34 and the second reflection component 33 are spaced apart is the third direction Z, and the direction in which the second reflection component 33, the second prism component 32 and the second objective lens component 31 are arranged is the second direction Y.

[0094] In this embodiment, the second prism assembly 32 can be fixed (or its position can be variable). Using the position of the second prism assembly 32 as a reference, the position of the second reflecting assembly 33 in the first direction X is adjusted so that the optical axes of the second reflecting assembly 33 and the second prism assembly 32 are coaxial. The positions of the second objective lens assembly 31 in the first direction X and the third direction Z are adjusted so that the optical axes of the second objective lens assembly 31 and the second prism assembly 32 are coaxial. Simultaneously, the position of the light source receiving assembly 34 is adjustable in all three directions, providing considerable flexibility.

[0095] Furthermore, the second direction Y is consistent with the light propagation direction of the second objective lens assembly 31. The position of the second objective lens assembly 31 along the second direction Y is adjustable, which can adjust the focal length of the second objective lens assembly 31 to adapt to the application of different types of objective lenses.

[0096] There are several methods to achieve the movement of each optical component in the corresponding direction. For example, refer to... Figure 6The optical component is equipped with an adjusting nut 70 in the corresponding movable direction. The optical component can be mounted on a corresponding support plate (the support plate is located on the mounting plate 60) via the adjusting nut 70. The position of the optical component relative to the support plate in the corresponding direction can be changed by rotating the adjusting nut 70. For example, a telescopic shaft can be provided on the support plate to adjust the position of the optical component in the corresponding direction. The telescopic shaft drives the optical component to change its position in the corresponding direction.

[0097] Specifically, in some embodiments, refer to Figure 6 The mounting plate 60 is equipped with a fixing block 66, a wedge block 67, a mating block 68, and an adjusting member 69, corresponding to at least one optical component. The fixing block 66 is connected to the mounting plate 60, the adjusting member 69 is connected to the wedge block 67 and can drive the wedge block 67 to move along the fixing block 66 in the second direction Y, the mating block 68 is engaged with the inclined surface of the wedge block 67, and when the wedge block 67 moves, it can drive the mating block 68 to move in the first direction X, and the optical component is disposed on the mating block 68.

[0098] Specifically, the wedge block 67 has an inclined surface with unequal heights in the second direction Y and the first direction X. The adjusting member 69 can be a telescopic rod, adjusting bolt, etc. The inclined surface on the mating block 68 is adapted to the inclined surface of the wedge block 67. Further, as... Figure 6 As shown, a mating groove 68a can be provided on the mating block 68. The bottom surface of the mating groove 68a is designed as an inclined surface. The wedge block 67 is assembled in the mating groove 68a, which can guide the movement of the mating block 68 appropriately, making the movement of the mating block 68 more stable.

[0099] In practical applications, by operating the adjusting member 69, the wedge block 67 moves along the fixed block 66 in the second direction Y. Under the action of the inclined plane, the wedge block 67 pushes the mating block 68 to change its position in the first direction X, thereby changing the position of the optical component set on the mating block 68.

[0100] It is readily apparent that the mating block 68 is disposed on the fixed block 66 and is movable relative to the fixed block 66 in the first direction X. Any optical component that needs to change its position in the first direction X can do so through the cooperation of the fixed block 66, the wedge block 67, the mating block 68, and the adjusting member 69.

[0101] In one embodiment, at least some optical components are configured to have adjustable pitch angles. When the position of the optical components is adjusted in the three directions mentioned above, its pitch angle can be changed to make the optical axes of the optical components coaxial with those of other components. Adjustable pitch angles typically mean that the components can rotate in multiple directions around the first direction X, the second direction Y, and the third direction Z. A conventional implementation involves mounting the optical device's receiving structure to another supporting structure via a ball joint. Pitch adjustment bolts are provided at at least three locations around the ball joint, connecting the receiving structure and the supporting structure. By adjusting the pitch adjustment bolts, the position of a certain part of the optical device relative to other parts is changed, thereby changing the pitch angle (i.e., the angle of the optical axis) of the optical device.

[0102] At this point, the state adjustment of the optical components is very flexible.

[0103] In some embodiments, the stage 10 is configured to have an adjustable pitch angle. Specifically, the platform of the stage 10 is mounted on a load-bearing structure via a ball joint, and the platform and the load-bearing structure are connected by a plurality of pitch adjustment bolts. These pitch adjustment bolts surround the ball joint portion, and by adjusting the pitch adjustment bolts, the position of a certain part of the platform relative to other parts is changed, thereby changing the pitch angle of the platform. For the stage 10, the pitch adjustment bolts are typically arranged vertically.

[0104] Regarding the scheme for achieving pitch adjustment of the stage 10 and optical components, other schemes in the existing technology can also be adopted.

[0105] In an optional embodiment, the stage 10 may be configured to be movable along the base 65 in a first direction X. When the ellipsometry 100 switches from the detection state T1 to the debugging state T2, the stage 10 can be controlled to move along the first direction X to a position away from the ellipsomer arm 20 and the polarization detection arm 30, avoiding the ellipsomer arm 20 and the polarization detection arm 30, and further reducing the risk of mutual interference.

[0106] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0107] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An ellipsometer, characterized in that, include: Stage (10); The eccentricity control arm (20) and the eccentricity detection arm (30); A rotary drive assembly (40) connects to and drives the elliptic arm (20) and the ellipsometer arm (30) to rotate about different central axes parallel to a first direction (X), wherein the first direction (X) is perpendicular to the incident plane of the ellipsometer; and The displacement drive assembly (50) connects to and drives the deflection arm (20) and the detection arm (30) to move in the incident plane; The rotary drive assembly (40) and the displacement drive assembly (50) are capable of driving the bias arm (20) and the bias detection arm (30) to switch between a first position close to the stage (10) and a second position far from the stage (10); When the biasing arm (20) and the bias checking arm (30) are in the first position, the biasing arm (20) and the bias checking arm (30) are in a detection state (T1) facing the stage (10); when the biasing arm (20) and the bias checking arm (30) are in the second position, the biasing arm (20) and the bias checking arm (30) are in an adjustment state (T2).

2. The ellipsometer according to claim 1, characterized in that, The displacement drive assembly (50) is configured to drive the deflection arm (20) and the deflection detection arm (30) to move in opposite directions; When in the debugging state (T2), the deflection arm (20) and the deflection detection arm (30) are positioned opposite each other in their own direction of movement.

3. The ellipsometer according to claim 2, characterized in that, The displacement drive assembly (50) includes two slides (51), which are movably arranged in opposite directions; The rotary drive assembly (40) includes two rotary drive members (41), and each of the slides (51) is provided with one of the rotary drive members (41). The biasing arm (20) and the bias checking arm (30) are driven by one of the rotary drive members (41) to rotate around their respective central axes.

4. The ellipsometer according to claim 3, characterized in that, The ellipsometry includes two adapter plates (61), the deflection arm (20) and the deflection detection arm (30) each include a mounting plate (60), each of the rotary drive components (41) is independently connected to the corresponding adapter plate (61) and drives the adapter plate (61) to rotate around the corresponding central axis, and each of the mounting plates (60) is movably mounted on the corresponding adapter plate (61); When in the debugging state (T2), the position of each mounting plate (60) in the direction of movement is adjustable when it moves along the adapter plate (61) it is located.

5. The ellipsometer according to claim 1, characterized in that, Both the polarization arm (20) and the polarization detector arm (30) include a mounting plate (60) and a plurality of optical components disposed on the mounting plate (60). Each mounting plate (60) is rotatably disposed around the corresponding central axis under the drive of the rotation drive assembly (40), and is movable along the incident plane under the drive of the displacement drive assembly (50). The plurality of optical components of the polarizing arm (20) are used to form a polarizing optical path, and the plurality of optical components of the analyzing arm (30) are used to form an analyzing optical path. At least one of the optical components is independently and detachably disposed on the corresponding mounting plate (60) and its position relative to the mounting plate (60) is adjustable so that the polarizing optical path and the analyzing optical path are symmetrically arranged in the incident plane.

6. The ellipsometer according to claim 5, characterized in that, When in the debugging state (T2), relative to their respective mounting plates (60), at least a portion of the optical components of the polarizing arm (20) and the polarizing arm (30) are adjustable along the second direction (Y), at least a portion of the optical components are adjustable along the third direction (Z), and at least a portion of the optical components are adjustable along the first direction (X), so that the polarizing optical path and the polarizing optical path are symmetrical, and the second direction (Y), the third direction (Z), and the first direction (X) are perpendicular to each other.

7. The ellipsometer according to claim 6, characterized in that, The polarizing arm (20) includes a light source collimation assembly (21), a first reflection assembly (22), a first prism assembly (23), and a first objective lens assembly (24) arranged sequentially along the polarizing optical path; When in the debugging state (T2), the light source collimation component (21) and the first reflection component (22) are arranged at intervals in the third direction (Z), and the first reflection component (22), the first prism component (23) and the first objective lens component (24) are arranged at intervals in the second direction (Y). The light source collimation component (21) is configured to be adjustable at least along the second direction (Y) and the third direction (Z), the first reflection component (22) is adjustable at least along the first direction (X), the first prism component (23) is adjustable at least along the third direction (Z) and the first direction (X), and the first objective lens component (24) is adjustable along the second direction (Y), the third direction (Z) and the first direction (X).

8. The ellipsometer according to claim 6, characterized in that, The polarizer arm (30) includes a second objective lens assembly (31), a second prism assembly (32), a second reflection assembly (33), and a light source receiving assembly (34) arranged sequentially along the polarizer optical path; When in the debugging state (T2), the second reflector (33) and the light source receiving component (34) are arranged at intervals in the third direction (Z), and are arranged sequentially with the second prism component (32) and the second objective lens component (31) in the second direction (Y); the light source receiving component (34) is configured to be adjustable in position along the second direction (Y), the third direction (Z) and the first direction (X), the second reflector (33) is adjustable in position at least along the first direction (X), and the second objective lens component (31) is adjustable in position along the second direction (Y), the third direction (Z) and the first direction (X).

9. The ellipsometer according to claim 6, characterized in that, A fixing block (66), a wedge block (67), a mating block (68), and an adjusting member (69) are provided for at least one optical component; The fixing block (66) is connected to the mounting plate (60), and the adjusting member (69) is connected to the wedge block (67) and can drive the wedge block (67) to move along the fixing block (66) in the second direction (Y). The mating block (68) engages with the inclined surface of the wedge block (67). When the wedge block (67) moves, it can drive the mating block (68) to move in the first direction (X). The optical component is disposed on the mating block (68).

10. The ellipsometer according to claim 5, characterized in that, At least some of the optical components and / or the stage (10) are configured to have an adjustable pitch angle.

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