Optical lens adjusting device

Abstract

The utility model provides an optical lens adjusting device. The optical lens adjusting device comprises a fixed base, a translation base and a rotating base. A linear guide rail is fixedly arranged on the surface of the fixed base in the first direction, and the first direction is located in the horizontal plane. And the translation base is arranged above the fixed base. Sliding blocks matched with the linear guide rails are correspondingly and fixedly arranged on the surface of the translation base. The rotating base is rotatably arranged on the upper surface of the translation base. A lens groove used for bearing an optical lens is formed in the upper surface of the rotating base, and rotating deflector rods are symmetrically arranged on the two sides of the rotating base. And the fixed base, the translation base and the rotary base are respectively provided with through holes which are through up and down and are matched with one another to form a light channel, so that light passing through the optical lens can pass through the optical lens adjusting device to reach a target position. According to the technical scheme, the displacement and the angle of the optical lens in the specific direction can be accurately adjusted, it is ensured that imaging is complete and clear, the direction is correct, the overall structure is compact, and the occupied space is small.

Description

Technical Field

[0001] This application relates to the field of optical element technology, and more specifically, to an optical lens adjustment device. Background Technology

[0002] In semiconductor manufacturing, optical lenses are widely used in photolithography, inspection, and packaging. In photolithography, optical lenses precisely reduce the pattern on the photomask and project it onto the wafer. Even a slight deviation in lens position can lead to pattern distortion (e.g., lens misalignment may result in incomplete patterns or image distortion in certain areas), thus affecting chip performance and reliability, and in severe cases, even rendering the chip unusable. In inspection, optical lenses magnify the microstructure of the wafer surface for technicians to observe and analyze. Inaccurate lens positioning can cause blurred or distorted images, affecting the accuracy of defect detection. Therefore, accurately adjusting the position of optical lenses is crucial for semiconductor manufacturing.

[0003] However, in actual production, optical lenses are often placed in relatively confined spaces, making online adjustment of their positions difficult. Therefore, existing technologies generally employ offline methods to adjust optical lenses. When using offline adjustment, it is usually necessary to remove the optical lens from the equipment, adjust it on a specialized adjustment platform, and then reinstall it after adjustment. This process requires specialized technicians, is time-consuming and labor-intensive, and can significantly impact production schedules, increasing the time and financial costs of semiconductor manufacturing. Therefore, existing technologies lack a device that allows for convenient adjustment of optical lens positions in confined spaces, failing to meet the growing production demands of the semiconductor manufacturing industry. Utility Model Content

[0004] The purpose of this application is to provide an optical lens adjustment device that can accurately adjust the displacement and angle of the optical lens in a specific direction, thereby ensuring complete, clear and correct imaging, effectively improving production efficiency, and with a compact overall structure that occupies little space.

[0005] This application provides an optical lens adjustment device, including a fixed base, a translation base, and a rotating base. A linear guide rail is fixedly mounted on the surface of the fixed base along a first direction, which is located in a horizontal plane. The translation base is positioned above the fixed base. A slider that mates with the linear guide rail is fixedly mounted on the surface of the translation base. The rotating base is rotatably mounted on the upper surface of the translation base. A lens groove for supporting the optical lens is formed on the upper surface of the rotating base, and rotating levers are symmetrically arranged on both sides of the rotating base. The fixed base, translation base, and rotating base each have through holes extending vertically, which cooperate to form a light channel, allowing light passing through the optical lens to reach the target position via the optical lens adjustment device.

[0006] In one feasible embodiment, a first fixed side plate perpendicular to the first direction is fixedly mounted on the fixed base. The optical lens adjustment device also includes a translation adjustment knob that passes through the first fixed side plate along the first direction and is used to push the translation base to move along the first direction.

[0007] In one feasible embodiment, a translation side plate perpendicular to the first direction is fixedly mounted on the translation base. The optical lens adjustment device also includes two angle adjustment knobs that pass through the translation side plate along the first direction and are used to push two rotation levers of the rotating base to move, causing the rotating base to rotate around its own central axis.

[0008] In one feasible embodiment, a second fixed side plate perpendicular to the first direction is fixedly mounted on the fixed base, with the first and second fixed side plates distributed opposite each other on both sides of the translation base. The optical lens adjustment device also includes a spring-loaded device, with its two ends connected to the surfaces of the second fixed side plate and the translation base, respectively, providing the translation base with an elastic force away from the second fixed side plate.

[0009] In one feasible embodiment, the first fixed side plate and the translational side plate are located on the same side of the rotating base along a first direction.

[0010] In one feasible solution, a third fixed side plate parallel to the first direction is fixedly mounted on the fixed base, and a linear guide rail is disposed on the surface of the third fixed side plate along the first direction.

[0011] In one feasible solution, a translation locking device is provided on the first fixed side plate to lock the position of the translation base after the translation base has been adjusted into place.

[0012] In one feasible solution, an angle locking device is provided on the translation side plate to lock the angle of the rotating base after the rotating base has been adjusted into place.

[0013] In one feasible solution, a positioning post is fixedly installed on the translation base along a first direction, and a positioning hole is correspondingly provided on the second fixed side plate. The positioning post and the positioning hole are shaped to match each other and limit the movement of the translation base along the first direction.

[0014] In one feasible embodiment, the rebound device is a spring, which is sleeved on the outside of the positioning post.

[0015] Compared with the prior art, the beneficial effects of this application include at least the following:

[0016] This application provides an optical lens adjustment device, which includes a dedicated translation base, a rotation base, and corresponding translation and angle adjustment devices. This allows for precise adjustment of the optical lens's displacement in a specific direction and its own angle, ensuring complete, clear, and oriented imaging, thus facilitating subsequent semiconductor manufacturing processes. The optical lens adjustment device of this application has a compact overall structure and occupies little space, making it easy to install in confined production environments. This enables online adjustment of the optical lens without repeated disassembly and reassembly, greatly simplifying the workflow for technicians and effectively improving production efficiency. Furthermore, the optical lens adjustment device has few components and a simple structure, resulting in good reliability and low overall maintenance costs.

[0017] Furthermore, in the optical lens adjustment device of this application, by setting the first fixed side plate and the translation side plate on the same side of the rotating base along the first direction, the translation adjustment knob and the angle adjustment knob are located on the same side of the rotating base. Therefore, the operator can complete the adjustment of the position and angle of the optical lens without changing sides, thereby improving the operating efficiency and making it easier to adjust in scenarios with limited space, thus improving the adaptability of the optical lens adjustment device. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a first perspective view of an optical lens adjustment device according to an embodiment of this application;

[0020] Figure 2 This is a second three-dimensional schematic diagram of an optical lens adjustment device.

[0021] In the diagram: 1. Fixed base; 2. Translation base; 3. Rotation base; 101. First fixed side plate; 102. Second fixed side plate; 103. Third fixed side plate; 104. Linear guide rail; 111. Translation adjustment knob; 112. Translation locking device; 113. Shim; 121. Springback device; 122. Positioning hole; 201. Slider; 202. Translation side plate; 203. Positioning post; 211. Angle adjustment knob; 212. Angle locking device; 301. Rotary lever; 302. Lens slot; L1. First direction. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0024] like Figure 1 and Figure 2 As shown, this application provides an optical lens adjustment device, characterized in that it includes a fixed base 1, a translational base 2, and a rotating base 3. Wherein, as... Figure 2 As shown, a linear guide rail 104 is fixedly mounted on the surface of the fixed base 1 along the first direction L1, and an external interface for connecting to an external device is provided at the lower part. The first direction L1 is located in a horizontal plane. A translation base 2 is positioned above the fixed base 1. A slider 201 that mates with the linear guide rail 104 is fixedly mounted on the surface of the translation base 2. A rotating base 3 is rotatably mounted on the upper surface of the translation base 2. A lens groove 302 is formed on the upper surface of the rotating base 3 for placing optical lenses. Rotation levers 301 are symmetrically arranged on both sides of the rotating base 3. The fixed base 1, translation base 2, and rotating base 3 all have through holes extending vertically, which cooperate to form a light channel, allowing light passing through the optical lenses to pass through the optical lens adjustment device to reach the target position. Specifically, the through hole of the translation base 2 matches the through hole shape of the rotating base 3, and the through hole of the fixed base 1 is larger than the through hole of the translation base 2 or the rotating base 3, so that when the translation base 2 moves along the first direction L1, the through hole of the translation base 2 will not be blocked by the fixed base 1, and all the through holes can still form a complete light channel together.

[0025] like Figure 1 and Figure 2 As shown, a first fixed side plate 101 perpendicular to the first direction L1 can be fixedly mounted on the fixed base 1. The optical lens adjustment device also includes a translation adjustment knob 111, which passes through the first fixed side plate 101 along the first direction L1 and is used to push the translation base 2 to move along the first direction L1.

[0026] like Figure 1 and Figure 2 As shown, a translation side plate 202 perpendicular to the first direction L1 can be fixedly mounted on the translation base 2. The optical lens adjustment device also includes two angle adjustment knobs 211, which pass through the translation side plate 202 along the first direction L1 and are used to push the two rotation levers 301 of the rotating base 3 to move, so that the rotating base 3 rotates around its own central axis.

[0027] Preferably, the heads of the translation adjustment knob 111 and the angle adjustment knob 211 can be provided with grips for easy manual operation, and the grips can be provided with concave and convex textures to increase friction and make operation more convenient and effortless. Furthermore, a ball bearing can be provided at the end of the translation adjustment knob 111. When the translation adjustment knob 111 is turned, the ball bearing can roll against the surface of the translation base 2, reducing friction between the translation adjustment knob 111 and the translation base 2, making the adjustment process of the translation base 2 smoother and more efficient. Similarly, a ball bearing can be provided at the end of the angle adjustment knob 211. When the angle adjustment knob 211 is turned, the ball bearing can roll against the surface of the rotating base 3, reducing friction between the angle adjustment knob 211 and the rotating base 3, making the adjustment process of the rotating base 3 smoother and more efficient.

[0028] like Figure 1 and Figure 2 As shown, a second fixed side plate 102 perpendicular to the first direction L1 can be fixedly mounted on the fixed base 1. The first fixed side plate 101 and the second fixed side plate 102 are distributed opposite to each other on both sides of the translation base 2. The optical lens adjustment device also includes a spring-loaded device 121. The two ends of the spring-loaded device 121 are respectively connected to the surface of the second fixed side plate 102 and the translation base 2, providing the translation base 2 with an elastic force away from the second fixed side plate 102.

[0029] Specifically, the spring-loaded device 121 can be a spring, elastic sheet, or other type of elastic element, as long as it can provide elastic force to the translation base 2 normally; no further restrictions are imposed here. In use, turning the head of the translation adjustment knob 111 will move the knob along the first direction L1. When the translation adjustment knob 111 approaches the second fixed side plate 102, the spring-loaded device 121 compresses; when the knob 111 moves away from the second fixed side plate 102, the spring-loaded device 121 pushes the translation base 2 to follow the movement of the knob 111 through elastic force. This ensures that the translation adjustment knob 111 is always in contact with the translation base 2, with no play between them, allowing the operator to arbitrarily adjust the position of the translation base 2 within a preset range using the translation adjustment knob 111.

[0030] The optical lens adjustment device of this application is equipped with a dedicated translation base, a rotation base, and corresponding translation and angle adjustment devices. It can accurately adjust the displacement and angle of the optical lens in a specific direction, thereby ensuring complete, clear, and oriented imaging, facilitating subsequent semiconductor manufacturing processes. The optical lens adjustment device of this application has a compact overall structure and occupies little space, allowing it to be easily installed in confined production environments. This enables online adjustment of the optical lens without repeated disassembly and assembly, greatly simplifying the workflow for technicians and effectively improving production efficiency. Furthermore, the optical lens adjustment device has few components and a simple structure, resulting in good reliability and low overall maintenance costs.

[0031] In one embodiment, such as Figure 1 and Figure 2 As shown, the first fixed side plate 101 and the translation side plate 202 are located on the same side of the rotating base 3 along the first direction L1. Since the translation adjustment knob 111 and the angle adjustment knob 211 pass through the first fixed side plate 101 and the translation side plate 202 respectively, the heads of the translation adjustment knob 111 and the angle adjustment knob 211 will be located on the same side of the rotating base 3. In this way, the operator can complete the operation of the translation adjustment knob 111 and the angle adjustment knob 211 on the same side without switching sides, and it is also convenient for the operator to perform translation and rotation adjustments simultaneously. Therefore, it can effectively reduce the difficulty of operation and improve the adjustment efficiency. Especially when the optical lens adjustment device is installed in a space-constrained location, this setting can greatly improve the adaptability of the optical lens adjustment device.

[0032] In one embodiment, such as Figure 1 and Figure 2As shown, a third fixed side plate 103 parallel to the first direction is fixedly mounted on the fixed base 1, and a linear guide rail 104 is disposed on the surface of the third fixed side plate 103 along the first direction. Since the surface of the fixed base 1 typically requires through holes (not shown in the figure) to allow light to pass through, mounting a linear guide rail on the upper surface of the fixed base 1 may present some limitations and inconveniences. However, this problem can be effectively avoided by using the third fixed side plate 103. After mounting the third fixed side plate 103, the second fixed side plate 102 can be fixedly connected to the third fixed side plate 103. This eliminates the need for the second fixed side plate 102 to be directly connected to the fixed base 1, further reducing the overall size of the optical lens adjustment device and making the overall structure more compact.

[0033] In one embodiment, such as Figure 1 and Figure 2 As shown, a translation locking device 112 is also provided on the first fixed side plate 101 to lock the position of the translation base 2 after it has been adjusted to the correct position. Similarly, an angle locking device 212 is also provided on the translation side plate 202 to lock the angle of the rotating base 3 after it has been adjusted to the correct position. Specifically, the translation locking device 112 can be a locking screw, and threaded holes can be provided on the first fixed side plate 101 and the translation base 2 respectively. In use, the translation base 2 is first adjusted to the correct position using the translation adjustment knob 111, and then the translation locking device 112 can be threaded through the first fixed side plate 101 and connected to the translation base 2, thereby restricting the movement of the translation base 2. Preferably, a shim 113 can also be fixedly provided on the outer surface of the first fixed side plate 101, and the translation adjustment knob 111 and the translation locking device 112 pass through the shim 113 and the first fixed side plate 101 respectively, reducing the potential damage to the fixed base 1. Similarly, the angle locking device 212 can also be set as a locking screw. After the rotating base 3 is adjusted to the position using the angle adjustment knob 211, the angle locking device 212 can be tightened to restrict the rotation of the rotating base 3.

[0034] In one embodiment, such as Figure 2 As shown, a positioning post 203 is fixedly installed on the translation base 2 along the first direction L1, and a corresponding positioning hole 122 is provided on the second fixed side plate 102. The positioning post 203 and the positioning hole 122 are shaped to fit together. In use, the positioning post 203 is inserted into the positioning hole 122 to limit the movement of the translation base 2 along the first direction L1. This limiting method complements the linear guide rail 104 and the slider 201, effectively preventing excessive offset or shaking of the translation base 2 during movement, thereby ensuring the normal operation and service life of the device and improving the overall operational reliability of the device. The positioning post 203 can usually be cylindrical or prismatic; no specific limitation is made here.

[0035] In one embodiment, such as Figure 1 and Figure 2 As shown, when the spring-loaded device 121 is a spring, it can be fitted onto the outside of the positioning post 203. This design helps to prevent the spring-loaded device 121 from tilting due to various factors, thereby ensuring a stable elastic force for the translation base 2 and reducing the possibility of failure.

[0036] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An optical lens adjustment device, characterized in that, include: A fixed base (1) has a linear guide rail (104) fixedly installed on its surface along a first direction, the first direction being located in a horizontal plane; A translation base (2) is disposed above the fixed base (1); a slider (201) that cooperates with the linear guide rail (104) is correspondingly fixedly disposed on the surface of the translation base (2); A rotating base (3) is rotatably disposed on the upper surface of the translation base (2); a lens groove (302) for carrying an optical lens is opened on the upper surface of the rotating base (3); and rotating levers (301) are symmetrically disposed on both sides of the rotating base (3). The fixed base (1), the translation base (2), and the rotating base (3) are each provided with through holes running vertically through the ground, which are used to cooperate with each other to form a light channel, so that the light passing through the optical lens can pass through the optical lens adjustment device to reach the target position.

2. The optical lens adjustment device according to claim 1, characterized in that, A first fixed side plate (101) perpendicular to the first direction is fixedly installed on the fixed base (1); The optical lens adjustment device also includes a translation adjustment knob (111), which passes through the first fixed side plate (101) in a first direction and is used to push the translation base (2) to move in the first direction.

3. The optical lens adjustment device according to claim 2, characterized in that, A translational side plate (202) perpendicular to the first direction is fixedly installed on the translational base (2); The optical lens adjustment device also includes two angle adjustment knobs (211). The two angle adjustment knobs (211) pass through the translation side plate (202) along the first direction and are used to push the two rotation levers (301) of the rotating base (3) to move, so that the rotating base (3) rotates around its own central axis.

4. The optical lens adjustment device according to claim 2, characterized in that, A second fixed side plate (102) perpendicular to the first direction is fixedly installed on the fixed base (1), and the first fixed side plate (101) and the second fixed side plate (102) are distributed opposite to each other on both sides of the translation base (2); The optical lens adjustment device also includes a spring-loaded device (121), the two ends of which are connected to the surfaces of the second fixed side plate (102) and the translation base (2) respectively, providing the translation base (2) with an elastic force away from the second fixed side plate (102).

5. The optical lens adjustment device according to claim 3, characterized in that, The first fixed side plate (101) and the translational side plate (202) are located on the same side of the rotating base (3) along the first direction.

6. The optical lens adjustment device according to claim 1, characterized in that, A third fixed side plate (103) parallel to the first direction is fixedly disposed on the fixed base (1), and the linear guide rail (104) is disposed on the surface of the third fixed side plate (103) along the first direction.

7. The optical lens adjustment device according to claim 2, characterized in that, The first fixed side plate (101) is provided with a translation locking device (112) for locking the position of the translation base (2) after the translation base (2) is adjusted into place.

8. The optical lens adjustment device according to claim 3, characterized in that, An angle locking device (212) is provided on the translation side plate (202) for locking the angle of the rotating base (3) after the rotating base (3) is adjusted to the position.

9. The optical lens adjustment device according to claim 4, characterized in that, A positioning post (203) is fixedly provided on the translation base (2) along the first direction, and a positioning hole (122) is correspondingly provided on the second fixed side plate (102). The positioning post (203) and the positioning hole (122) are shaped to fit together and limit the movement of the translation base (2) along the first direction.

10. The optical lens adjustment device according to claim 9, characterized in that, The rebound device (121) is a spring, which is sleeved on the outside of the positioning post (203).

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