Chip loading device and production system
By introducing detachable moving and driving components into the wafer loading device, the problem of low moving accuracy in existing wafer loading devices is solved, achieving high-precision carrier movement, cost reduction, and improved production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN LIANDE SEMICON TECH CO LTD
- Filing Date
- 2025-04-25
- Publication Date
- 2026-05-05
AI Technical Summary
Existing wafer loading devices rely on motors to drag and move the carrier, which has low precision and the structure of the motor and the carrier is not compatible, resulting in a limited range of movement.
A moving assembly consisting of a first moving part and a second moving part is adopted. The two moving parts are driven by a drive assembly to move precisely within the conveying channel. Combined with detachable connection methods such as magnetic adsorption connection or hook connection, high-precision displacement of the carrier is achieved.
It improves the control precision of the carrier during movement, reduces production costs, and simplifies the quick connection and separation of the carrier through a detachable connection method, thus extending the service life of the device.
Smart Images
Figure CN224205572U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of wafer loading equipment technology, and in particular to a wafer loading equipment and production system. Background Technology
[0002] The die-loading device is a key piece of equipment in the chip back-end packaging production line. The die-loading device needs to move the carrier (packaging substrate and lead frame) from the loading unit to the conveying channel, and then precisely move it to the dispensing and die-bonding positions to perform the corresponding process actions.
[0003] However, existing wafer loading devices rely on motors to drag and move the carrier components, resulting in low precision and incompatibility between the motors and the carrier component structure, thus limiting their application range. Utility Model Content
[0004] Therefore, it is necessary to provide a wafer loading device and production system to address the above problems.
[0005] A wafer loading apparatus, comprising:
[0006] body;
[0007] A conveyor is fitted onto the machine body, and the conveyor is configured to have a conveying channel extending in a first direction;
[0008] A carrier is movably fitted into the conveying channel and is used to carry the items to be processed;
[0009] A moving assembly, including a first moving member and a second moving member, both movably coupled to the machine body and configured to be detachably connected to the carrier within the conveying channel; and
[0010] A drive assembly for driving the first moving component and the second moving component to move relative to the fuselage;
[0011] The conveying channel has a loading position, a transfer position, and a unloading position along a first direction; the first moving member is configured to move from the loading position to the transfer position along the first direction under the drive of the driving assembly; the second moving member is configured to move from the transfer position to the unloading position along the first direction under the drive of the driving assembly.
[0012] In one embodiment, the carrier is provided with a connecting part, and both the first moving part and the second moving part are provided with a mating part, wherein the connecting part and the mating part are detachably connected.
[0013] In one embodiment, the conveying member further includes a loading port, a discharging port, and a connecting port. The loading port and the discharging port are located at opposite ends of the channel body along a first direction and are both connected to the conveying channel. The connecting port is located on one side of the conveying member and extends along the first direction, and the connecting port connects the loading port, the discharging port, and the conveying channel.
[0014] In one embodiment, a shielding member is also included, which is coupled to the conveyor and used to cover the communication port.
[0015] In one embodiment, the driving assembly includes a first driving member and a second driving member, wherein the first driving member is used to drive the first moving member to move along a first direction from the loading position to the transfer position; and the second driving member is used to drive the second moving member to move along the first direction from the transfer position to the unloading position.
[0016] A production system including the loading device in the foregoing embodiments.
[0017] In one embodiment, a feeding unit is further included, which is disposed on the side of the loading device near the feeding position, and the feeding unit is used to transport the carrier into the conveying channel.
[0018] In one embodiment, a feeding unit is further included, which is disposed on the side of the loading device near the feeding position, and the feeding unit is used to transport the carrier in the conveying channel to the next process.
[0019] In one embodiment, a material storage bin is also included for storing parts to be processed. The material storage bin is disposed on one side of the loading device and located between the loading unit and the unloading unit.
[0020] In one embodiment, a transfer component is also included, which is used to move the parts to be processed in the hopper to the carrier, and the transfer component is disposed between the hopper and the loading device.
[0021] The aforementioned loading device and production system include a loading device comprising a body, a conveyor, a carrier, a moving assembly, and a drive assembly. During operation, the carrier, carrying the workpiece to be processed, is first assembled onto the loading position of the conveying channel. Then, the first moving assembly is connected to the carrier, and the drive assembly is controlled to drive the first moving assembly, moving the workpiece to be processed and the carrier along a first direction from the loading position to the transfer position. Subsequently, the first moving assembly is separated from the carrier, and the second moving assembly is connected to the carrier. Finally, the drive assembly is controlled to drive the second moving assembly, moving the workpiece to be processed and the carrier along the first direction from the transfer position to the unloading position, and the second moving assembly is separated from the carrier, facilitating the transfer of the carrier at the unloading position to the next process for further processing. The loading device provided in this embodiment enables two-stage displacement of the first moving assembly and the carrier through the first moving assembly and the first moving assembly, thereby improving the control accuracy of the first moving assembly and the carrier during movement by shortening the moving distance. Furthermore, the mounting device provided in this embodiment has a simple structure, which helps to reduce production costs. Attached Figure Description
[0022] Figure 1 This is a schematic diagram of the mounting apparatus in this application.
[0023] Figure 2 This is a structural schematic diagram of the assembly of the fuselage, moving components and drive components in this application.
[0024] Figure 3 This is a structural diagram of the assembly of the fuselage, conveyor, moving components and drive components in this application.
[0025] Figure Labels
[0026] Plate loading device 100;
[0027] fuselage 10;
[0028] Conveying component 11; Conveying channel 111; Feeding port 112; Discharge port 113; Connecting port 114;
[0029] Support component 12;
[0030] Moving component 13; First moving part 131; Second moving part 132;
[0031] Drive component 14; First drive element 141; Second drive element 142;
[0032] 15. Covering component. Detailed Implementation
[0033] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.
[0034] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.
[0035] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0036] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0037] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0038] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.
[0039] Please see Figures 1 to 3 This application provides a wafer loading apparatus 100 in one or more embodiments. The wafer loading apparatus 100 includes a body 10, a conveyor 11, a carrier 12, a moving assembly 13, and a driving assembly 14. The conveyor 11 is coupled to the body 10, and a conveying channel 111 extending in a first direction is formed on the conveyor 11. The carrier 12 is movably coupled within the conveying channel 111 and is used to carry wafers to be processed. The moving assembly 13 includes a first moving member 131 and a second moving member 132, both of which are movably coupled to the body 10 and configured to be detachably connected to the carrier 12 within the conveying channel 111. The driving assembly 14 is used to drive the first moving member 131 and the second moving member 132 to move relative to the body 10.
[0040] The conveying channel 111 has a loading position, a transfer position, and a unloading position along a first direction. The first moving member 131 is configured to move along the first direction from the loading position to the transfer position under the drive of the drive assembly 14. The second moving member 132 is configured to move along the first direction from the transfer position to the unloading position under the drive of the drive assembly 14.
[0041] Understandably, during the operation of the loading device 100, the carrier 12 carrying the workpiece to be processed is first assembled into the loading position of the conveying channel 111. Then, the first moving member 131 is connected to the carrier 12, and the drive assembly 14 is controlled to drive the first moving member 131 to move the workpiece to be processed and the carrier 12 along a first direction from the loading position to the transfer position. Subsequently, the first moving member 131 is separated from the carrier 12, and the second moving member 132 is connected to the carrier 12. Finally, the drive assembly 14 is controlled to drive the second moving member 132 to move the workpiece to be processed and the carrier 12 along the first direction from the transfer position to the unloading position, and the second moving member 132 is separated from the carrier 12 to facilitate the transfer of the carrier 12 at the unloading position to the next process for further processing.
[0042] The loading device 100 provided in this embodiment of the application can realize two-stage displacement of the first moving member 131 and the carrier member 12 through the first moving member 131 and the first moving member 131, so as to improve the control accuracy of the first moving member 131 and the carrier member 12 during the movement process by shortening the movement distance. Moreover, the loading device 100 provided in this embodiment of the application has a simple structure, which is conducive to reducing production costs.
[0043] It should be noted that in this application, the carrier 12 is a packaging substrate and a lead frame. The packaging substrate and lead frame are important semiconductor packaging materials used to carry chips and connect them to the PCB (Printed Circuit Board) motherboard. They primarily provide physical support, heat dissipation, and protection during the chip packaging process, while also providing electrical connections between the chip and the PCB motherboard. Common semiconductor packaging requires the use of substrates or frames to complete the packaging process. Therefore, the track module that carries and moves these semiconductor packaging materials is a key component of a semiconductor die-loading machine and is one of the chip bonding references for the die-loading machine.
[0044] Furthermore, in this application, the specific manner in which the first movable member 131 and the second movable member 132 are detachably connected to the carrier member 12 is not limited.
[0045] It is understood that detachable connection facilitates the rapid connection and separation of the first moving part 131 or the second moving part 132 with the carrier 12, and in this application, it facilitates the phased pushing of the carrier 12.
[0046] Specifically, the detachable connection methods include: magnetic adsorption connection, mechanical plug-in structure, elastic snap-fit connection, vacuum adsorption connection and hook-type connection, etc.
[0047] Magnetic adsorption connection features a fast response speed, making it suitable for high-frequency operations. Furthermore, the magnetic adsorption connection enables a non-contact connection, thereby reducing wear between the first moving part 131 and the second moving part 132 and the carrier part 12, effectively extending the product's service life.
[0048] Specifically, in this embodiment, permanent magnets (such as neodymium iron boron magnets) or magnetically conductive metal plates are embedded in the support member 12, and electromagnets are provided on the first moving member 131 and the second moving member 132. Thus, when the first moving member 131 needs to move the support member 12, energizing the electromagnet on the first moving member 131 causes it to generate a magnetic force that attracts the embedded permanent magnets or magnetically conductive metal plates on the support member 12, thereby enabling the first moving member 131 to move the support member 12 synchronously. Correspondingly, when the second moving member 132 needs to move the support member 12, energizing the electromagnet on the second moving member 132 causes it to generate a magnetic force that attracts the embedded permanent magnets or magnetically conductive metal plates on the support member 12, thereby enabling the second moving member 132 to move the support member 12 synchronously.
[0049] In the hook-type connection, the hook has the feature of flexible and adjustable angle, which can be compatible with the carrier 12 of different sizes and is flexible in use.
[0050] Specifically, in this embodiment, a hook groove is provided on one side of the support member 12, and rotatable hooks are provided on the first movable member 131 and the second movable member 132, with corresponding electrode-driven hook opening and closing to adjust the hook angle. Thus, during operation, by moving the first or second movable member 132 to the side of the support member 12, the hook is controlled to rotate and engage with the hook groove to connect the first or second movable member 132 to the support member 12. Subsequently, the drive assembly 14 drives the first or second movable member 132 to move the support member 12 to the target position, and finally, the hook is controlled to rotate and disengage from the hook groove to separate the first or second movable member 132 from the support member 12.
[0051] In some embodiments, see Figure 1 The support member 12 is provided with a connecting part, and the first moving member 131 and the second moving member 132 are both provided with a mating part. The connecting part and the mating part are detachably connected.
[0052] In this application, the first movable member 131 and the second movable member 132 are detachably connected to the carrier member 12 in the form of a hook connection. The connecting part corresponds to the hook groove provided on one side of the carrier member 12, and the mating part corresponds to the rotatable hooks provided on the first movable member 131 and the second movable member 132.
[0053] During the operation of the loading device 100, the carrier 12 carrying the workpiece to be processed is first assembled into the loading position of the conveying channel 111. Then, the first moving part is moved to the side of the carrier 12, and the hook is controlled to rotate and engage with the hook groove to connect the first moving part with the carrier 12. Subsequently, the first moving part is driven by the drive assembly 14 to move the carrier 12 and move it from the loading position to the transfer position along the first direction. The hook is then controlled to rotate and disengage from the hook groove to separate the first moving part 131 from the carrier 12. Finally, the second moving part is moved to the side of the carrier 12, and the hook is controlled to rotate and engage with the hook groove to connect the second moving part with the carrier 12. Subsequently, the second moving component 132 is driven by the control drive component 14 to move the carrier 12 and the carrier 12 moves from the transfer position to the unloading position along the first direction. The hook is controlled to rotate and disengage from the hook slot so that the second moving component 132 is separated from the carrier 12, so that the carrier 12 located at the unloading position can be transferred to the next process for further processing.
[0054] In some embodiments, see Figure 1 and Figure 3 The conveying component 11 further includes a loading port 112, a discharging port 113, and a connecting port 114. The loading port 112 and the discharging port 113 are located at opposite ends of the main channel body along a first direction and are both connected to the conveying channel 111. The connecting port 114 is located on one side of the conveying component 11 and extends along the first direction, and the connecting port 114 connects the loading port 112, the discharging port 113, and the conveying channel 111.
[0055] In some embodiments, see Figure 1 The loading device 100 further includes a shielding member 15, which is coupled to the conveying member 11 and is used to cover the connecting port 114.
[0056] Understandably, the shield 15 can prevent external pollutants from falling onto the carrier 12 and the workpiece to be treated, thereby protecting the carrier 12 and the workpiece to be treated and reducing the probability of the carrier 12 and the workpiece to be treated being contaminated or impacted.
[0057] In some embodiments, see Figure 1 The driving assembly 14 includes a first driving member 141 and a second driving member 142. The first driving member 141 drives the first moving member 131 to move along a first direction from the loading position to the intermediate transfer position. The second driving member 142 drives the second moving member 132 to move along the first direction from the intermediate transfer position to the unloading position.
[0058] During the operation of the loading device 100, the carrier 12 carrying the workpiece to be processed is first assembled into the loading position of the conveying channel 111. Then, the first moving part is moved to the side of the carrier 12, and the hook is controlled to rotate and engage with the hook groove to connect the first moving part with the carrier 12. Subsequently, the first driving part 141 is controlled to drive the first moving part to move the carrier 12 and move the carrier 12 from the loading position to the transfer position along the first direction. The hook is controlled to rotate and disengage from the hook groove to separate the first moving part 131 from the carrier 12. Finally, the second moving part is moved to the side of the carrier 12, and the hook is controlled to rotate and engage with the hook groove to connect the second moving part with the carrier 12. Subsequently, by controlling the second driving member 142 to drive the second movement to move the carrier member 12 and move the carrier member 12 from the transfer position to the unloading position along the first direction, and controlling the hook to rotate and disengage from the hook groove to separate the second moving member 132 from the carrier member 12, so as to transfer the carrier member 12 located at the unloading position to the next process for further processing.
[0059] Please see Figure 1 One or more embodiments of this application also provide a production system (not shown), which includes the wafer loading device 100 in the foregoing embodiments.
[0060] In some embodiments, see Figure 1 The production system also includes a feeding unit (not shown), which is located on the side of the loading device 100 near the feeding position, and is used to transport the carrier 12 into the conveying channel 111.
[0061] Understandably, during the operation of the loading device 100, the carrier 12 in the loading unit is first transported to the loading position of the conveying channel 111, and the workpiece to be processed is placed on the carrier 12. Then, the first moving member 131 is connected to the carrier 12, and the first driving member 141 is controlled to drive the first moving member 131 to move the workpiece to be processed and the carrier 12 along a first direction from the loading position to the transfer position. Subsequently, the first moving member 131 is separated from the carrier 12, and the second moving member 132 is connected to the carrier 12. Finally, the second driving member 142 is controlled to drive the second moving member 132 to move the workpiece to be processed and the carrier 12 along the first direction from the transfer position to the unloading position, and the second moving member 132 is separated from the carrier 12 to facilitate the transfer of the carrier 12 at the unloading position to the next process for further processing.
[0062] Furthermore, the production system also includes a feeding unit (not shown), which is located on the side of the loading device 100 near the feeding position, and the feeding unit is used to transport the carrier 12 in the conveying channel 111 to the next process.
[0063] Understandably, during the operation of the loading device 100, the carrier 12 in the loading unit is first transported to the loading position of the conveying channel 111, and the workpiece to be processed is placed on the carrier 12. Then, the first moving member 131 is connected to the carrier 12, and the first driving member 141 is controlled to drive the first moving member 131 to move the workpiece to be processed and the carrier 12 along a first direction from the loading position to the transfer position. Subsequently, the first moving member 131 is separated from the carrier 12, and the second moving member 132 is connected to the carrier 12. Finally, the second driving member 142 is controlled to drive the second moving member 132 to move the workpiece to be processed and the carrier 12 along the first direction from the transfer position to the unloading position, and the second moving member 132 is separated from the carrier 12. Further, the workpiece to be processed and the carrier 12 located at the unloading position are transferred to the next process for further processing via the unloading unit.
[0064] In some embodiments, see Figure 1 The production system also includes a material storage unit (not shown), which is used to store parts to be processed. The material storage unit is located on one side of the loading device 100 and between the loading unit and the unloading unit.
[0065] Understandably, during the operation of the loading device 100, the carrier 12 in the loading unit is first transported to the loading position of the conveying channel 111. Then, the workpiece to be processed in the material magazine is placed on the carrier 12, and the first moving component 131 is connected to the carrier 12. The first driving component 141 is then controlled to drive the first moving component 131, moving the workpiece to be processed and the carrier 12 along a first direction from the loading position to the transfer position. Subsequently, the first moving component 131 is separated from the carrier 12, and the second moving component 132 is connected to the carrier 12. Finally, the second driving component 142 is controlled to drive the second moving component 132, moving the workpiece to be processed and the carrier 12 along the first direction from the transfer position to the unloading position, and the second moving component 132 is separated from the carrier 12. Further, the workpiece to be processed and the carrier 12 located at the unloading position are transferred to the next process for further processing via the unloading unit.
[0066] In some embodiments, see Figure 1 The production system also includes a transfer component (not shown), which is used to move the parts to be processed in the material warehouse to the carrier 12. The transfer component is located between the material warehouse and the loading device 100.
[0067] Understandably, during the operation of the loading device 100, the carrier 12 in the loading unit is first transported to the loading position of the conveying channel 111. Then, the workpiece to be processed in the material magazine is placed on the carrier 12 via the transfer component. The first moving component 131 is connected to the carrier 12, and the drive assembly 14 is controlled to drive the first moving component 131 to move the workpiece to be processed and the carrier 12 along the first direction from the loading position to the transfer position. Subsequently, the first moving component 131 is separated from the carrier 12, and the second moving component 132 is connected to the carrier 12. Finally, the drive assembly 14 is controlled to drive the second moving component 132 to move the workpiece to be processed and the carrier 12 along the first direction from the transfer position to the unloading position, and the second moving component 132 is separated from the carrier 12. Furthermore, the unloading unit transfers the workpiece to be processed and the carrier 12 located at the unloading position to the next process for further processing.
[0068] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0069] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.
Claims
1. A wafer loading apparatus, characterized in that, include: body; A conveyor is fitted onto the machine body, and the conveyor is configured to have a conveying channel extending in a first direction; A carrier is movably fitted into the conveying channel and is used to carry the items to be processed; A moving assembly, including a first moving member and a second moving member, both movably coupled to the machine body and configured to be detachably connected to the carrier within the conveying channel; and A drive assembly for driving the first moving component and the second moving component to move relative to the fuselage; The conveying channel has a loading position, a transfer position, and a unloading position along a first direction; the first moving member is configured to move from the loading position to the transfer position along the first direction under the drive of the driving assembly; the second moving member is configured to move from the transfer position to the unloading position along the first direction under the drive of the driving assembly.
2. The mounting apparatus according to claim 1, characterized in that, The support member is provided with a connecting part, and the first moving member and the second moving member are both provided with a mating part. The connecting part and the mating part are detachably connected.
3. The mounting apparatus according to claim 1, characterized in that, The conveying component also includes a loading port, a discharging port, and a connecting port. The loading port and the discharging port are located at opposite ends of the main body of the channel along the first direction and are both connected to the conveying channel. The connecting port is located on one side of the conveying component and extends along the first direction, and the connecting port connects the loading port, the discharging port, and the conveying channel.
4. The mounting apparatus according to claim 3, characterized in that, It also includes a shielding element, which is fitted onto the conveyor and used to cover the communication port.
5. The mounting apparatus according to claim 1, characterized in that, The driving assembly includes a first driving member and a second driving member. The first driving member is used to drive the first moving member to move along a first direction from the loading position to the intermediate position; the second driving member is used to drive the second moving member to move along the first direction from the intermediate position to the unloading position.
6. A production system, characterized in that, Includes the mounting apparatus as described in any one of claims 1 to 5.
7. The production system according to claim 6, characterized in that, It also includes a feeding unit, which is located on the side of the loading device near the feeding position, and the feeding unit is used to transport the carrier into the conveying channel.
8. The production system according to claim 7, characterized in that, It also includes a feeding unit, which is located on the side of the loading device near the feeding position, and the feeding unit is used to transport the carrier in the conveying channel to the next process.
9. The production system according to claim 8, characterized in that, It also includes a material storage bin for storing parts to be processed. The material storage bin is located on one side of the loading device and between the loading unit and the unloading unit.
10. The production system according to claim 9, characterized in that, It also includes a transfer component, which is used to move the parts to be processed in the material bin to the carrier, and the transfer component is disposed between the material bin and the loading device.