Air exhaust structure and processing equipment
By installing flow equalization components and vents in the extraction pipeline, the problem of large differences in exhaust volume in the pipeline extraction device is solved, achieving uniformity and stability of exhaust in various environmental areas, and ensuring uniformity and stability of gas flow at each inlet.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LAPLACE RENEWABLE ENERGY TECH CO LTD
- Filing Date
- 2025-06-10
- Publication Date
- 2026-05-05
AI Technical Summary
In existing technologies, when using pipes in conjunction with exhaust devices, the exhaust volume varies significantly across different environmental areas. The exhaust volume is large near the air inlet of the exhaust device, while the exhaust volume is small or even nonexistent at the air inlet far from the exhaust device.
The system employs an air extraction structure, which divides the pipe into multiple chambers by installing a flow equalizer in the air extraction pipeline. Each chamber is equipped with a flow equalizer and a vent, and the suction force is distributed evenly to each air inlet to ensure the uniformity and stability of the gas flow at each air inlet.
It effectively reduces the difference in exhaust volume in different environments, improves the uniformity and stability of exhaust, and ensures the uniformity and stability of gas flow at each air inlet.
Smart Images
Figure CN224205594U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the fields of semiconductor and photovoltaic technology, and in particular to an air extraction structure and processing equipment. Background Technology
[0002] With the development of photovoltaic technology, solar cells are widely used in various fields. The manufacturing process of solar cells requires various processing steps on silicon wafers, some of which involve multiple specialty gases and high-temperature treatments. During these processes, the internal or surrounding environment of the equipment may contain acidic, alkaline, toxic, and high-temperature gases. When it is necessary to remove these specialty and high-temperature gases, pipes in conjunction with extraction devices are typically used.
[0003] In current applications of pipelines combined with extraction devices, multiple air inlets are typically installed on a single pipeline to correspond to process equipment located in different environmental areas. When exhausting air from multiple environmental areas, the exhaust volume is large at the air inlets closer to the extraction device, while the exhaust volume is small or even nonexistent at the air inlets farther away from the extraction device. Utility Model Content
[0004] In view of this, the present application provides an exhaust structure and processing equipment to solve the problem in the related art where there are large differences in exhaust volume when exhausting gases from multiple environments through a single pipe using a shared exhaust device.
[0005] In a first aspect, one embodiment of this application provides an air extraction structure and an air extraction pipeline having a cavity extending along a first direction. One end of the air extraction pipeline is provided with an air extraction port communicating with the cavity. The pipe wall of the air extraction pipeline is provided with at least one first air inlet and at least one second air inlet communicating with the cavity. At least one flow equalizer is disposed in the cavity of the air extraction pipeline to divide the cavity into a second chamber and at least one first chamber. Each flow equalizer and the side wall of the cavity enclose a first chamber extending along the first direction. Each first chamber has an opening communicating with the air extraction port on the side facing the air extraction port. The second chamber is communicating with the air extraction port. Each first chamber is communicating with at least one first air inlet, and the second chamber is communicating with at least one second air inlet. When the air extraction port performs air extraction, the suction force can act on the gas at each first air inlet and each second air inlet.
[0006] In some embodiments, the number of second air inlets includes one, and the number of first air inlets is N, where N≥1. When the number of flow equalizers includes one, the cross-sectional area of the first chamber is less than or equal to the cross-sectional area of the cavity of N / N+1. When the number of flow equalizers includes two or more, each first chamber is formed by enclosing and communicating with at least one first air inlet. In the direction from the exhaust port to the second air inlet, the cross-sectional area of the multiple first chambers increases sequentially, and the cross-sectional area of at least the first chamber adjacent to the second air inlet is less than or equal to the cross-sectional area of the cavity of N / N+1.
[0007] In some embodiments, when the number of first air inlets corresponding to a first chamber includes two or more, the flow equalizer is provided with at least one vent hole. The vent hole and the first air inlet are disposed opposite to each other on both sides of the first chamber in a second direction. The vent hole is disposed in a position away from the air extraction port in the first direction. In the orthographic projection of the vent hole onto the side wall of the cavity provided with the first air inlet in the second direction, the vent hole and the first air inlet do not overlap or partially overlap.
[0008] In some embodiments, at least one flow equalizer is provided with a vent hole. Among the plurality of first air inlets correspondingly connected to the first chamber, the vent hole corresponds to a first air inlet away from the exhaust port, and the distance from the corresponding vent hole to the exhaust port is less than the distance from the first air inlet to the exhaust port. In the orthographic projection of the vent hole onto the sidewall of the cavity with the corresponding first air inlet in the second direction, the vent hole and the corresponding first air inlet do not overlap. And / or, at least one flow equalizer is provided with two or more vent holes. Among the plurality of first air inlets correspondingly connected to the first chamber, the plurality of vent holes correspond one-to-one with the plurality of first air inlets away from the exhaust port. The distance from each corresponding vent hole to the exhaust port is less than the distance from the first air inlet to the exhaust port. In the orthographic projection of the vent hole onto the sidewall of the cavity with the corresponding first air inlet in the second direction, each vent hole and the corresponding first air inlet do not overlap.
[0009] In some embodiments, when the number of vents includes two or more, the cross-sectional area of the plurality of vents increases sequentially from the air extraction port to the second air inlet.
[0010] In some embodiments, when the number of first air inlets includes two or more, the plurality of first air inlets are arranged at equal intervals along a first direction.
[0011] In some embodiments, the cross-sectional area of the first air inlet is the same as that of the second air inlet; and / or, along the first direction, the distance from the first air inlet to the adjacent second air inlet is equal to the distance between two adjacent first air inlets.
[0012] In some embodiments, the system further includes: a plurality of flow guides disposed on the outer wall of the air extraction pipeline, each flow guide corresponding to a first air inlet or a second air inlet, the flow guides being configured to guide gas into the corresponding first air inlet or second air inlet.
[0013] In some embodiments, the guide member includes a guide plate disposed on the outer wall of the air extraction pipe, pointing from the air extraction port to the second air inlet. Each guide plate is disposed along a first direction on the side of the corresponding first air inlet or second air inlet away from the air extraction port, and the guide plate is tilted at a preset angle towards the air extraction port.
[0014] Secondly, one embodiment of this application provides a processing apparatus, including: at least one processing furnace having a plurality of exhaust regions spaced apart along a first direction; an extraction device configured to extract gas; and the extraction structure described above, wherein the extraction port of the extraction structure is connected to the extraction device, the extraction structure extends along the first direction and corresponds to each exhaust region, and the extraction structure is configured to allow gas from each exhaust region to be extracted by the extraction device through the extraction structure.
[0015] The present application provides an air extraction structure and processing equipment. Utilizing a flow equalizer installed within a pipe cavity, the suction force exerted by the air extraction device from the extraction port into the pipe cavity is diverted by the flow equalizer. This allows a portion of the suction force to act on one or more first air inlets near the extraction port through a first chamber, while the remaining suction force can directly act on one or more second air inlets without passing through the first air inlets. This avoids situations where the suction force cannot reach one or more second air inlets far from the extraction port, resulting in low or no airflow at the second air inlets. This reduces the difference in airflow between the first and second air inlets, thereby reducing the difference in exhaust volume at various locations and improving the uniformity and stability of exhaust at different locations. Attached Figure Description
[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.
[0017] Figure 1 The diagram shown is a schematic diagram of a processing device provided in an embodiment of this application.
[0018] Figure 2 The diagram shown is a schematic diagram of a processing device provided in another embodiment of this application.
[0019] Figure 3 The diagram shown is a schematic diagram of an air extraction structure provided in an embodiment of this application.
[0020] Figure 4 The image shown is a cross-sectional view of an air extraction structure provided in an embodiment of this application.
[0021] Figure 5 The image shown is a cross-sectional view of an air extraction structure provided in another embodiment of this application.
[0022] Figure 6 The image shown is a cross-sectional view of an air extraction structure provided in another embodiment of this application.
[0023] Figure 7 The image shown is a cross-sectional view of an air extraction structure provided in another embodiment of this application.
[0024] Figure 8 The image shown is a cross-sectional view of an air extraction structure provided in another embodiment of this application.
[0025] Figure 9 The image shown is a top view of an air extraction structure provided in an embodiment of this application.
[0026] Figure 10 The image shown is a top view of an air extraction structure provided in another embodiment of this application.
[0027] Figure 11 The image shown is a front view of an air extraction structure provided in an embodiment of this application.
[0028] Figure label:
[0029] 100. Processing equipment; 10. Exhaust structure; 1. Exhaust pipeline; 1a. Pipeline; 1b. Exhaust port; 11. First air inlet; 12. Second air inlet; 2. Flow equalizer; 2a. First chamber; 2b. Opening; 21. Vent hole; 3. Flow guide; 20. Exhaust device; 30. Processing furnace; 30a. Furnace cavity; 301. Exhaust area; X. First direction; Y. Second direction. Detailed Implementation
[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0031] Figure 1 The diagram shown is a schematic diagram of a processing device provided in an embodiment of this application. Figure 2 The diagram shown is a schematic diagram of a processing device provided in another embodiment of this application. Figure 3The diagram shows a schematic of an extraction structure according to an embodiment of this application. Arrow X points to a first direction, which is also the length direction of the extraction pipe 1 (i.e., the extension direction of the extraction pipe 1). Arrow Y points to a second direction. The first direction X and the second direction Y are perpendicular. It can be understood that, depending on the specific location and arrangement of the extraction structure 10 in the processing equipment 100, the first direction X can be vertical or horizontal, which will not be emphasized separately thereafter. Additionally, the double arrows in the diagram indicate the flow direction of gas from the exhaust region 301 into the inlet.
[0032] This application provides an air extraction structure, such as... Figures 1 to 3 The air extraction structure 10 is applied to the processing equipment 100. The air extraction structure 10 includes an air extraction pipe 1. The air extraction pipe 1 has a cavity 1a extending along the first direction X. One end of the air extraction pipe 1 is provided with an air extraction port 1b communicating with the cavity 1a. The air extraction port 1b is connected to the air extraction device 20. The pipe wall of the air extraction pipe 1 is provided with a plurality of air inlets communicating with the cavity 1a along the first direction X.
[0033] It is understood that the processing equipment 100 may include equipment for performing processes such as coating and curing on silicon wafers to obtain solar cells, such as plasma-enhanced chemical vapor deposition (PECVD) equipment, low-pressure chemical vapor deposition (LPCVD) equipment, and atomic layer deposition (ALD) equipment. Figure 1 During the processing of silicon wafers, multiple processing furnaces 30 located in different environmental areas are involved. The silicon wafers need to be processed between these furnaces to obtain the desired solar cells. Some of these furnaces 30 emit gases during their processing, such as acidic gases, alkaline gases, toxic gases, and high-temperature gases. The area where each furnace 30 emits gas is designated as an exhaust zone 301, and multiple exhaust zones 301 are arranged at intervals along a first direction X. Multiple air inlets on the exhaust pipe 1 correspond one-to-one with each exhaust zone 301. Gas from each exhaust zone 301 can be extracted by the exhaust device 20 through the corresponding air inlet and the exhaust structure 10, thereby achieving the purpose of exhausting gas from the processing furnaces 30 in different environments.
[0034] Or, such as Figure 2When only one process is performed on the silicon wafer, the processing equipment 100 may only include equipment related to performing that one process on the silicon wafer. Taking silicon wafer coating as an example, the coating equipment has a reactor, an exhaust device 20 is set outside the reactor, an exhaust pipe is connected to the exhaust device 20 and extends into the furnace chamber 30a of the reactor, so that multiple air inlets are located in the furnace chamber 30a. The furnace chamber 30a can be divided into multiple exhaust regions 301 along the first direction X, and each air inlet corresponds to an exhaust region 301. The gas in each exhaust region 301 can be extracted by the exhaust device 20 through the corresponding air inlet via the exhaust structure 10, so as to achieve the purpose of exhausting each exhaust region 301 in the furnace chamber 30a.
[0035] Optionally, the air extraction device 20 can be configured as a fan, air pump, or other equipment, without specific limitations.
[0036] When exhausting gas from different exhaust zones 301 using the air inlets on the extraction pipe 1, we found that the airflow rate was higher at one or more air inlets near the extraction device 20, resulting in higher exhaust rates and uniformity in the corresponding exhaust zones 301. Conversely, the airflow rate was lower at one or more air inlets farther from the extraction device 20, leading to lower exhaust rates and uniformity in the corresponding exhaust zones 301. Especially when there were a large number of air inlets, the air inlet furthest from the extraction device 20 sometimes experienced no airflow at all.
[0037] To solve the above problems, such as Figures 1 to 3 The air extraction structure 10 in this embodiment further includes at least one flow equalizer 2, which is disposed within the cavity 1a of the air extraction pipe 1 to divide the cavity 1a into a second chamber and at least one first chamber 2a. The air inlet on the air extraction pipe 1 may include at least one first air inlet 11 and at least one second air inlet 12. The first air inlet 11 is located in the first direction X on the side of the second air inlet 12 near the air extraction port 1b. Each flow equalizer 2 and the sidewall of the cavity 1a enclose a first chamber 2a extending along the first direction X. Each first chamber 2a has an opening 2b communicating with the air extraction port 1b on the side facing the air extraction port 1b. Each first chamber 2a communicates with at least one first air inlet 11, and the second chamber communicates with at least one second air inlet 12. When the air extraction port 1b performs air extraction, suction can act on the gas at each first air inlet 11 and each second air inlet 12.
[0038] It is understandable that the exhaust pipe 1 may consist of only one pipe, with the first air inlet 11 and the second air inlet 12 both located on the same pipe. Alternatively, the exhaust pipe 1 may be composed of multiple pipes connected end to end. Each pipe may have the first air inlet 11 and the second air inlet 12 arranged according to its distance from the exhaust port 1b. The flow equalization element 2 may be installed in one or more of these pipes. It can be adapted to actual needs without specific limitations.
[0039] Optionally, the shape and cross-sectional area of the first air inlet 11 and the second air inlet 12 can be set to be the same. For ease of description and understanding, the multiple air inlets are divided into the first air inlet 11 and the second air inlet 12, and the first air inlet 11 and the second air inlet 12 are arranged at equal intervals along the first direction X. In other examples, when the multiple exhaust regions 301 are arranged at non-equal intervals along the first direction X, the multiple air inlets can also be arranged at non-equal intervals along the first direction X. This can be adaptively adjusted according to the specific situation of the exhaust regions 301, without specific limitations.
[0040] The air extraction structure 10 provided in this embodiment utilizes a flow equalizer 2 disposed within the cavity 1a. The suction force exerted by the air extraction device 20 from the air extraction port 1b on the cavity 1a is diverted by the flow equalizer 2, so that a portion of the suction force acts on one or more first air inlets 11 near the air extraction port 1b through the first chamber 2a, while the other portion of the suction force can act directly on one or more second air inlets 12 without passing through the first air inlets 11. This avoids the situation where the suction force cannot reach one or more second air inlets 12 located far from the air extraction port 1b, resulting in a small or even no air intake flow at the second air inlets 12. This reduces the difference in air intake flow between the first air inlets 11 and the second air inlets 12, reduces the difference in exhaust volume at various locations, and helps to improve the uniformity and stability of exhaust at various locations.
[0041] It is understood that the cross-sectional area of the opening 2b in the first chamber 2a is the same as that of the first chamber 2a. The flow equalizer 2 can be set as a flow equalizer plate structure in the tube 1a. The flow equalizer plate structure includes a connected main plate, two side plates and a bottom plate. The bottom plate is set opposite to the opening 2b. The shape and size of the cross-section of the first chamber 2a depend on the specific shape of the flow equalizer plate structure and can be adaptively adjusted according to actual needs without specific limitations.
[0042] It should be emphasized that, for ease of understanding and description, in this embodiment, the air inlet furthest from the air extraction port 1b in the air extraction pipeline 1 is designated as the second air inlet 12, and the remaining air inlets are designated as the first air inlets 11. In other embodiments, two or more air inlets furthest from the air extraction port 1b in the air extraction pipeline 1 may be designated as the second air inlets 12, and the remaining air inlets as the first air inlets 11. Furthermore, when there are two or more second air inlets 12, in addition to the second air inlet 12 furthest from the air extraction port 1b, the other second air inlets 12 may also be equipped with flow equalizers 2. For details, refer to the method of equipping the first air inlet 11 with flow equalizers 2, which will not be elaborated further.
[0043] Figure 4 The image shown is a cross-sectional view of an air extraction structure provided in an embodiment of this application. Figure 5 The image shown is a cross-sectional view of an air extraction structure provided in another embodiment of this application. Figure 6 The image shown is a cross-sectional view of an air extraction structure provided in another embodiment of this application. Figure 7 The image shown is a cross-sectional view of an air extraction structure provided in another embodiment of this application. Figure 8 The image shown is a cross-sectional view of an air extraction structure provided in another embodiment of this application.
[0044] like Figures 4 to 8 The number of second air inlets 12 includes one, and the number of first air inlets 11 is N, where N≥1. When the number of flow equalizers 2 includes one, the cross-sectional area of the first chamber 2a is less than or equal to the cross-sectional area of the pipe 1a of N / N+1. When the number of flow equalizers 2 includes two or more, each first chamber 2a is connected to at least one first air inlet 11. From the direction of the exhaust port 1b to the second air inlet 12, the cross-sectional area of the multiple first chambers 2a increases sequentially, and the cross-sectional area of at least the first chamber 2a adjacent to the second air inlet 12 is less than or equal to the cross-sectional area of the pipe 1a of N / N+1.
[0045] Understandably, the specific value of the number N of the first air inlets 11 depends on the number of exhaust regions 301 that need to be exhausted. Based on the number of the first air inlets 11, the flow equalizer 2 is used to ensure that part of the suction force entering from the suction port 1b can act directly on the second air inlet 12 without passing through each of the first air inlets 11, so that the second air inlet 12, which is far away from the suction port 1b, can also be allocated sufficient suction force, thereby reducing the difference in airflow between the first air inlet 11 and the second air inlet 12.
[0046] When the number N of the first air inlets 11 is greater than or equal to 3, such as 3, 5, or 6 first air inlets 11, in order to avoid one or more first air inlets 11 far from the suction port 1b having a small or even no air intake, the number and arrangement of the flow equalizers 2, the size of the cross-sectional area of the first chamber 2a formed by the flow equalizers 1a and the pipe 1a, and the distribution of the multiple first air inlets 11 in different first chambers 2a can be matched according to the number of first air inlets 11. This allows the suction force to be further dispersed within the pipe 1a to one or two first air inlets 11, thereby reducing the difference in air intake between the multiple first air inlets 11. This allows the suction force to be dispersed as much as possible to the first air inlets 11 and the second air inlets 12, so that each air inlet can achieve the uniformity and stability of the air intake.
[0047] It should be emphasized that the number of first air inlets 11 on the suction pipe determines the number of flow equalizers 2 or the cross-sectional area of the first chamber 2a formed by them, so that the suction force can be distributed as evenly as possible to each air inlet, thereby achieving uniformity of air intake at each air inlet. Therefore, the number and arrangement of flow equalizers 2 and the cross-sectional area of the first chamber 2a can be adaptively adjusted according to the actual situation, without specific limitations.
[0048] like Figure 5 When there is one second air inlet 12 and one first air inlet 11 on the air extraction pipe, the number of flow equalizer 2 can be set to one. The cross-sectional area of the first chamber 2a is less than or equal to half the cross-sectional area of the pipe 1a, so that the air intake from the first air inlet 11 and the air intake from the second air inlet 12 are more similar, which is beneficial to achieving uniformity and stability of the air intake from each air inlet.
[0049] like Figure 6 and Figure 8 When the number of second air inlets 12 on the air extraction pipe is one and the number of first air inlets 11 is two (or three), the number of flow equalizers 2 is set to one. The cross-sectional area of the first chamber 2a is less than or equal to two-thirds (or three-quarters) of the cross-sectional area of the pipe 1a, so that at least half of the suction force acts on the two (or three) first air inlets 11 through the first chamber 2a. This avoids the situation where the suction force cannot act on the first air inlet 11 furthest from the air extraction port 1b when there are too many first air inlets 11, so as to achieve uniformity and stability of the air intake of each air inlet.
[0050] like Figure 4The number of first air inlets 11 is set to 5, the number of second air inlets 12 is set to 1, and the number of flow equalizers 2 is set to 2. One flow equalizer 2 near the suction port 1b corresponds to three first air inlets 11, and the other flow equalizer 2 corresponds to two first air inlets 11. The cross-sectional area of the first chamber 2a corresponding to the three first air inlets 11 is less than or equal to half of the cross-sectional area of the pipe 1a, and the cross-sectional area of the first chamber 2a corresponding to the two first air inlets 11 is less than or equal to five-sixths of the cross-sectional area of the pipe 1a but greater than the cross-sectional area of the other first chamber 2a, so that the suction force can be relatively evenly distributed to each air inlet, thereby achieving uniformity and stability of the intake volume of each air inlet.
[0051] like Figure 7 The number of first air inlets 11 is three, the number of second air inlets 12 is one, and the number of flow equalizers 2 is set to three, that is, each first air inlet 11 corresponds to one flow equalizer 2. From the suction port 1b to the second air inlet 12, the cross-sectional area of the multiple first chambers 2a formed by the flow equalizers 2 gradually increases, so that each flow equalizer 2 participates in the distribution of suction force, thereby enabling the suction force to be distributed into four parts and act on each air inlet respectively, so that each air inlet achieves uniformity and stability of air intake.
[0052] Figure 9 The image shown is a top view of an air extraction structure provided in an embodiment of this application. Figure 10 The image shown is a top view of an air extraction structure provided in another embodiment of this application.
[0053] like Figure 9 and Figure 10 When the number of first air inlets 11 connected to a first chamber 2a includes two or more, the flow equalizer 2 is provided with at least one vent 21. The vent 21 and the first air inlet 11 are arranged opposite each other on both sides of the first chamber 2a in the second direction Y. The vent 21 is arranged in the first direction X at a position away from the air extraction port 1b. In the orthographic projection of the vent 21 onto the side wall of the tube 1a where the first air inlet 11 is provided in the second direction Y, the vent 21 and the first air inlet 11 do not overlap or partially overlap. By providing a vent hole 21 on the flow equalizer 2 at a position away from the exhaust port 1b, the gas entering from one or more first air inlets 11 at a position away from the exhaust port 1b can enter the cavity 1a through the corresponding vent hole 21 and then be extracted from the exhaust port 1b. This increases the air intake of the first air inlets 11 at positions away from the exhaust port 1b, thereby reducing the difference in air intake among the multiple first air inlets 11 and making the air intake of each first air inlet 11 as uniform as possible.
[0054] In some embodiments, at least one of the flow equalizing elements 2 is provided with a vent 21. Among the plurality of first air inlets 11 correspondingly provided in the first chamber 2a, the vent 21 corresponds to a first air inlet 11 that is far from the exhaust port 1b, and the distance from the corresponding vent 21 to the exhaust port 1b is less than the distance from the first air inlet 11 to the exhaust port 1b. In the orthographic projection of the vent 21 onto the side wall of the cavity 1a with the corresponding first air inlet 11 in the second direction Y, the vent 21 and the corresponding first air inlet 11 do not overlap.
[0055] In some embodiments, at least one flow equalizer 2 is provided with two or more vent holes 21. In the plurality of first air inlets 11 connected to the first chamber 2a, the plurality of vent holes 21 correspond one-to-one with the plurality of first air inlets 11 away from the exhaust port 1b, and the distance from each corresponding vent hole 21 to the exhaust port 1b is less than the distance from the first air inlet 11 to the exhaust port 1b. In the orthographic projection of the vent hole 21 onto the side wall of the cavity 1a provided with the corresponding first air inlet 11 in the second direction Y, each vent hole 21 does not overlap with the corresponding first air inlet 11.
[0056] It is understandable that the number and specific location of the vent holes 21 on the flow equalizer 2 can be adaptively adjusted in combination with the location of the multiple first air inlets 11 on the air extraction pipe and the specific cooperation relationship between the first air inlets 11 and the flow equalizer 2, without being specifically limited.
[0057] Optionally, the vent 21 is positioned in the second direction Y without overlapping with the first air inlet 11, and in the first direction X on the side of the corresponding first air inlet 11 near the exhaust port 1b. This allows most of the gas drawn in from the corresponding first air inlet 11 to flow from the first chamber 2a to the exhaust port 1b, while a small portion of the gas flows through the vent 21 into the tube 1a and then to the exhaust port 1b. This avoids a large amount of gas flowing from the vent 21 into the tube 1a, which would reduce the airflow rate of the air inlet located far from the exhaust port 1b.
[0058] In some optional embodiments, when the number of vent holes 21 includes two or more, the cross-sectional area of the multiple vent holes 21 increases sequentially from the direction of the suction port 1b to the second air inlet 12. By matching the cross-sectional area of the vent holes 21 according to their distance from the suction port 1b, the cross-sectional area of the vent holes 21 corresponding to the air inlet located far from the suction port 1b is larger, so as to compensate for the weakness of the lower air intake flow of the air inlet located far from the suction port 1b, and further improve the uniformity of the air intake of each air inlet.
[0059] Optionally, in the ventilation hole 21 corresponding to the first air inlet 11, the ventilation hole 21 can be divided into multiple independent small holes, or it can be set with only one large hole as shown in the figure. The shape and size of each hole can be adjusted adaptively according to the actual situation without being specifically limited.
[0060] Figure 11 The image shown is a front view of an air extraction structure provided in an embodiment of this application.
[0061] like Figure 1 , Figure 3 and Figure 11 The air extraction structure 10 also includes a plurality of guide members 3, which are disposed on the outer side wall of the air extraction pipe 1. Each guide member 3 corresponds to a first air inlet 11 or a second air inlet 12. The guide member 3 is configured to guide the gas into the corresponding first air inlet 11 or second air inlet 12.
[0062] It is understandable that the specific location of the guide component 3 at the corresponding first air inlet 11 or second air inlet 12 and the specific form of cooperation with the outer wall of the extraction pipe can be adaptively adjusted according to the actual location of the exhaust area 301, without being specifically limited.
[0063] In some alternative embodiments, such as Figure 1 The guide plate 3 includes a guide plate disposed on the outer wall of the air extraction pipe 1, pointing from the air extraction port 1b to the second air inlet 12. Each guide plate is disposed along the first direction X on the side of the corresponding first air inlet 11 or second air inlet 12 away from the air extraction port 1b, and the guide plate is tilted at a preset angle towards the air extraction port 1b.
[0064] It is understandable that the preset angle is obtained based on the actual location of the exhaust area 301. For example, if the exhaust area 301 is located at a certain angle above the corresponding air intake, the guide vane set at the corresponding air intake will also tilt upward at that angle, so that the gas can be accurately and quickly introduced into the air intake.
[0065] This application embodiment also provides a processing device 100, including at least one processing furnace 30, a gas extraction device 20, and a gas extraction structure 10. The processing furnace 30 has a plurality of exhaust regions 301 arranged at intervals along a first direction X. The gas extraction device 20 is configured to extract gas. The gas extraction port 1b of the gas extraction structure 10 is connected to the gas extraction device 20. The gas extraction structure 10 extends along the first direction X and corresponds to each exhaust region 301. The gas extraction structure 10 is configured to allow the gas in each exhaust region 301 to be extracted by the gas extraction device 20 through the gas extraction structure 10.
[0066] It is understood that the processing furnace 30 can be a plasma-enhanced chemical vapor deposition (PECVD) reactor, an LPCVD reactor, an ALD reactor, etc., without specific limitations. The number of processing furnaces 30 can be set to one, in which case at least a portion of the extraction structure 10 extends into the furnace cavity 30a of the processing furnace 30 to uniformly exhaust multiple exhaust regions 301 within the furnace cavity 30a. Alternatively, the number of processing furnaces 30 can be set to multiple, in which case the extraction structure 10 is located in the atmospheric environment, and each processing furnace 30 has an exhaust region 301, with the extraction structure 10 used to uniformly exhaust exhaust from the exhaust regions 301 located in various environments.
[0067] Optionally, the specific structure of the air extraction structure 10 can be referred to the relevant descriptions in the above embodiments, and will not be repeated here.
[0068] In the embodiments of this application, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for the form of detachable fit, a non-detachable connection can be achieved by welding, bonding, etc.
[0069] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details of the above application are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.
[0070] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.
[0071] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.
[0072] The above description of the claimed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be applied within the widest scope consistent with the principles and novel features of this application.
[0073] The above description has been given for illustrative and descriptive purposes. Furthermore, this description is not intended to limit the embodiments of this application to the forms described herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.
Claims
1. An air extraction structure, characterized in that, include: An air extraction pipeline has a cavity extending in a first direction, one end of the air extraction pipeline is provided with an air extraction port communicating with the cavity, and the pipe wall of the air extraction pipeline is provided with at least one first air inlet and at least one second air inlet communicating with the cavity. At least one flow equalizer is disposed in the cavity of the air extraction pipeline to divide the cavity into a second chamber and at least one first chamber. Each flow equalizer and the side wall of the cavity enclose a first chamber extending along the first direction. Each first chamber has an opening communicating with the air extraction port on the side facing the air extraction port. The second chamber is communicating with the air extraction port. Each of the first chambers is connected to at least one first air inlet, and the second chamber is connected to at least one second air inlet. When the air extraction port performs air extraction, the suction force can act on the gas at each of the first air inlets and each of the second air inlets.
2. The air extraction structure according to claim 1, characterized in that, The number of second air inlets includes one, and the number of first air inlets is N, where N≥1. When the number of the flow equalizers includes one, the cross-sectional area of the first chamber is less than or equal to the cross-sectional area of the lumen of N / N+1. When the number of flow equalizers includes two or more, each of the first chambers is connected to at least one first air inlet. In the direction from the air extraction port to the second air inlet, the cross-sectional area of the plurality of first chambers increases sequentially, and the cross-sectional area of at least the first chamber adjacent to the second air inlet is less than or equal to the cross-sectional area of the lumen of N / N+1.
3. The air extraction structure according to claim 1, characterized in that, When the number of first air inlets corresponding to and connected to a first chamber includes two or more, the flow equalizer is provided with at least one vent hole. The vent hole and the first air inlet are disposed opposite to each other on both sides of the first chamber in a second direction. The vent hole is disposed in the first direction at a position away from the air extraction port. In the orthographic projection of the vent hole onto the side wall of the cavity where the first air inlet is disposed in the second direction, the vent hole and the first air inlet do not overlap or partially overlap.
4. The air extraction structure according to claim 3, characterized in that, At least one of the flow equalizing elements is provided with a vent hole. Among the plurality of first air inlets correspondingly connected to the first chamber, the vent hole corresponds to a first air inlet located away from the exhaust port, and the distance from the corresponding vent hole to the exhaust port is less than the distance from the first air inlet to the exhaust port. Furthermore, in the orthographic projection of the vent hole onto the sidewall of the cavity with the corresponding first air inlet in the second direction, the vent hole and the corresponding first air inlet do not overlap; and / or, At least one of the flow equalizing components is provided with two or more of the above-mentioned vent holes. Among the multiple first air inlets corresponding to and connected to the first chamber, the multiple vent holes correspond one-to-one with the multiple first air inlets away from the exhaust port. The distance from each corresponding vent hole to the exhaust port is less than the distance from the first air inlet to the exhaust port. In the orthographic projection of the vent hole onto the side wall of the cavity with the corresponding first air inlet in the second direction, each vent hole does not overlap with the corresponding first air inlet.
5. The air extraction structure according to claim 4, characterized in that, When the number of vent holes is two or more, the cross-sectional area of the plurality of vent holes increases sequentially from the direction of the air extraction port toward the second air inlet port.
6. The air extraction structure according to claim 2, characterized in that, When the number of the first air inlets includes two or more, the plurality of the first air inlets are arranged at equal intervals along the first direction.
7. The air extraction structure according to claim 6, characterized in that, The cross-sectional area of the first air inlet is the same as the cross-sectional area of the second air inlet; and / or, Along the first direction, the distance from the first air inlet to the adjacent second air inlet is equal to the distance between two adjacent first air inlets.
8. The air extraction structure according to any one of claims 1-7, characterized in that, Also includes: Multiple flow guides are disposed on the outer wall of the air extraction pipeline. Each flow guide corresponds to a first air inlet or a second air inlet. The flow guide is configured to guide gas into the corresponding first air inlet or second air inlet.
9. The air extraction structure according to claim 8, characterized in that, The guide member includes a guide plate disposed on the outer wall of the air extraction pipe, pointing from the air extraction port to the second air inlet. Each guide plate is disposed along the first direction on the side of the corresponding first air inlet or second air inlet away from the air extraction port, and the guide plate is tilted at a preset angle towards the air extraction port.
10. A processing device, characterized in that, include: At least one processing furnace has multiple exhaust zones arranged at intervals along a first direction; A gas extraction device is configured to extract gas. The air extraction structure according to any one of claims 1 to 9, wherein the air extraction port of the air extraction structure is connected to the air extraction device, the air extraction structure extends along the first direction and corresponds to each of the exhaust regions, and the air extraction structure is configured to allow gas from each of the exhaust regions to be extracted by the air extraction device through the air extraction structure.