Wafer positioning plate with information code
By embedding a ceramic sheet on the wafer positioning plate and designing a liquid inlet hole, the problem of easy wear of the information code was solved, enabling long-term readability of the information code and convenient replacement of the ceramic sheet, thus improving the stability and safety of the processing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ANHUI JING SAI TECH CO LTD
- Filing Date
- 2025-04-30
- Publication Date
- 2026-05-05
AI Technical Summary
In the prior art, the information codes on the wafer positioning plate are easily worn by external friction and corrosion, resulting in the loss of wafer information and affecting the continuity of the processing flow.
A ceramic piece is embedded in a positioning groove on the positioning plate. An information code is set on the ceramic piece, and a liquid inlet hole is opened at the bottom of the positioning groove. The groove is designed to be rectangular, and the liquid inlet holes are distributed in a rectangular array. The ceramic piece is fixed by adhesive, and a notch is provided at the groove opening for easy replacement.
It effectively extends the lifespan of the information code, ensures the readability of the information, simplifies the replacement process of the ceramic plate, improves the accuracy and security of positioning, and reduces production and maintenance costs.
Smart Images

Figure CN224205616U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of resonator wafer processing accessories, specifically a wafer positioning plate carrying information codes. Background Technology
[0002] The resonator chip typically undergoes multiple processing steps during production, and each step needs to be recorded.
[0003] Currently, the common recording method involves spraying corresponding information codes onto the surface of a positioning plate that holds the wafer, and then scanning these codes to record the wafer's processing data. However, during prolonged use, this method suffers from several drawbacks. The positioning plate is constantly in contact with various solutions and its surface is subjected to friction, causing the information codes to become worn and incomplete within a short period, making it impossible to record wafer information. Furthermore, since this wear and tear can occur at any time, it can easily lead to the loss of wafer information during processing, requiring a shutdown to locate the corresponding positioning plate and re-spray the information codes, thus interrupting the processing. Therefore, a solution is urgently needed. Utility Model Content
[0004] To avoid and overcome the technical problems existing in the prior art, this utility model provides a chip positioning plate carrying an information code. This utility model can effectively extend the service life of the information code.
[0005] To achieve the above objectives, this utility model provides the following technical solution:
[0006] A chip positioning plate carrying an information code includes a positioning groove formed on the positioning plate, a ceramic sheet fixed in the positioning groove, an information code being provided on the upper surface of the ceramic sheet, and the upper surface of the ceramic sheet being lower than the opening of the positioning groove.
[0007] As a further embodiment of this utility model, multiple liquid inlet holes are provided through the bottom of the positioning groove.
[0008] As a further improvement of this utility model, each liquid inlet hole is evenly distributed on the bottom of the positioning groove.
[0009] As a further improvement of this utility model, the positioning groove is rectangular.
[0010] As a further improvement of this utility model, the liquid inlet holes are arranged in a rectangular array.
[0011] As a further improvement of this utility model, the groove of the positioning groove is provided with a notch that can guide a pry bar to be inserted to pry up the ceramic piece.
[0012] As a further improvement of this utility model, the ceramic sheet is fixedly installed in the positioning groove by adhesive.
[0013] As a further improvement of this utility model, the ceramic sheet is a rectangular sheet that is adapted to the positioning groove.
[0014] As a further improvement of this utility model, the four corners of the ceramic sheet are all rounded.
[0015] As a further improvement of this utility model, the information code is set on the upper surface of the ceramic sheet by spraying or printing.
[0016] Compared with the prior art, the beneficial effects of this utility model are:
[0017] 1. The information code is set on the ceramic plate and the ceramic plate is fixed in the positioning groove. The upper surface of the ceramic plate is lower than the opening of the positioning groove. This design effectively avoids the information code being directly exposed to the outside, reduces the risk of damage caused by external friction, corrosion and other factors, and thus significantly extends the service life of the information code and ensures the long-term readability of the information.
[0018] 2. Multiple liquid inlet holes are drilled through the bottom of the positioning tank. This design allows liquid to flow into the positioning tank from the bottom. During the sol-gel process, the liquid can quickly reach various positions within the positioning tank, causing the colloid between the ceramic sheet and the positioning tank to dissolve rapidly, further accelerating the removal of the ceramic sheet from the positioning tank.
[0019] 3. Each liquid inlet hole is evenly distributed at the bottom of the positioning tank, so that the liquid can be more evenly dispersed when flowing into the positioning tank, avoiding the situation of too much or too little liquid in a local area, ensuring that all parts of the positioning tank can be treated consistently, and improving the stability and reliability of the overall treatment effect.
[0020] 4. The positioning groove is designed in a cuboid shape. This simple and regular shape is easy to process and manufacture, reducing production difficulty and cost. At the same time, the cuboid shape can better fit the cuboid-shaped wafer to be positioned, providing stable support and positioning, and improving positioning accuracy.
[0021] 5. The liquid inlet holes are arranged in a rectangular array, which on the one hand continues the liquid dispersion advantage brought by uniform distribution, and on the other hand, the rectangular array distribution of liquid inlet holes is easy to plan and control during the design and manufacturing process, improves the standardization of production, and facilitates mass production.
[0022] 6. A notch is made at the opening of the positioning groove to provide space for the pry bar to be inserted. When it is necessary to replace the ceramic plate, the ceramic plate can be pried up conveniently and quickly with the help of the pry bar, which greatly simplifies the replacement process of the ceramic plate, improves the convenience of maintenance, and reduces maintenance costs.
[0023] 7. The ceramic sheet is fixed in the positioning groove by adhesive. This fixing method is simple to operate, does not require complicated equipment and processes, and reduces the installation difficulty. At the same time, the adhesive can form a tight bond between the ceramic sheet and the positioning groove, ensuring the stability of the ceramic sheet during use.
[0024] 8. The ceramic sheet is designed as a rectangular plate that fits the positioning groove, maximizing its fit and making full use of the groove's space to improve space utilization. At the same time, the tight fit design helps enhance the stability of the ceramic sheet, reducing shaking and displacement during use.
[0025] 9. The four corners of the ceramic tile are rounded, avoiding the risk of scratches to operators from sharp edges and improving safety during use. Furthermore, the rounded corner design reduces damage to the ceramic tile caused by corner impacts, extending its lifespan.
[0026] 10. The information code is applied to the surface of the ceramic sheet by spraying or printing. Spraying and printing processes are mature, relatively simple to operate, and low in cost. Furthermore, these two methods ensure the information code adheres firmly to the ceramic sheet, guaranteeing its legibility for a considerable period. Attached Figure Description
[0027] Figure 1 This is a schematic diagram of the overall structure of this utility model.
[0028] Figure 2 This is a schematic diagram showing the disassembled structure of the ceramic sheet and the positioning groove in this utility model.
[0029] In the diagram: 1. Positioning plate; 11. Positioning groove; 12. Liquid inlet hole; 13. Notch; 2. Ceramic plate; 21. Information code. Detailed Implementation
[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0031] Please see Figure 1 and Figure 2 In this embodiment of the invention, firstly, a positioning plate 1 is made using a suitable material, and a cuboid positioning groove 11 is machined on the positioning plate 1. Multiple liquid inlet holes 12 are evenly drilled at the bottom of the positioning groove 11 in a rectangular array. A notch 13 is made at the opening of the positioning groove 11 to allow the insertion of a pry bar.
[0032] The ceramic sheet 2 is processed into a rectangular shape to fit the positioning groove 11, and the four corners of the ceramic sheet 2 are rounded. The ceramic sheet 2 is then fixedly installed in the positioning groove 11 by adhesive.
[0033] The information code 21 is applied to the upper surface of the ceramic plate 2 by spraying or printing. During use, if the ceramic plate 2 is damaged or the information code 21 needs to be replaced, the positioning plate 1 is immersed in a solvent solution. After a period of time, a pry bar is inserted into the notch 13 to lift the ceramic plate 2 for replacement. When cleaning or heat dissipation is required in the positioning groove 11, liquid can flow into the positioning groove 11 through the liquid inlet 12 to achieve the corresponding function.
[0034] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
Claims
1. A chip positioning plate carrying an information code, characterized in that, It includes a positioning groove (11) opened on the positioning plate (1), a ceramic piece (2) is fixed in the positioning groove (11), an information code (21) is provided on the upper surface of the ceramic piece (2), and the upper surface of the ceramic piece (2) is lower than the opening of the positioning groove (11).
2. A chip positioning plate carrying an information code according to claim 1, characterized in that, Multiple liquid inlet holes (12) are provided through the bottom of the positioning groove (11).
3. A chip positioning plate carrying an information code according to claim 2, characterized in that, Each liquid inlet hole (12) is evenly distributed on the bottom of the positioning groove (11).
4. A chip positioning plate carrying an information code according to claim 3, characterized in that, The positioning groove (11) is rectangular.
5. A chip positioning plate carrying an information code according to claim 4, characterized in that, Each liquid inlet hole (12) is arranged in a rectangular array.
6. A chip positioning plate carrying an information code according to any one of claims 1-5, characterized in that, The positioning groove (11) has a notch (13) at the opening to guide the insertion of a pry bar to pry up the ceramic piece (2).
7. A chip positioning plate carrying an information code according to claim 6, characterized in that, The ceramic sheet (2) is fixedly installed in the positioning groove (11) by adhesive.
8. A chip positioning plate carrying an information code according to claim 7, characterized in that, The ceramic sheet (2) is a rectangular sheet that is compatible with the positioning groove (11).
9. A chip positioning plate carrying an information code according to claim 8, characterized in that, The four corners of the ceramic piece (2) are all rounded.
10. A chip positioning plate carrying an information code according to claim 9, characterized in that, The information code (21) is applied to the upper surface of the ceramic sheet (2) by spraying or printing.