Vacuum coating uniformity regulation and control device

Abstract

The utility model discloses a vacuum coating uniformity regulation and control device, which relates to the technical field of vacuum coating and comprises a regulation and control device body and a transmission component, the bottom of the regulation and control device body is fixedly connected with a bottom plate, and the transmission component is arranged in the regulation and control device body. The transmission assembly comprises a first mechanical telescopic rod slidably connected to the regulation and control device body, a mounting bin is fixedly connected to the side, away from the regulation and control device body, of the first mechanical telescopic rod, a fixing rod is slidably connected to the mounting bin, a second fixing block is fixedly connected to the fixing rod, and a third transmission rod is slidably connected to the second fixing block. A third transmission rod is slidably connected with a sliding block, and the reason is that a first sliding rod slides on the transmission block, the transmission block is driven to press downwards, then a second sliding rod drives a blocking plate to slide downwards, and finally a worker can replace the assembly in the mounting bin through an exposed hole.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a vacuum coating uniformity control device. Background Technology

[0002] Vacuum coating uniformity control device is used to precisely control the deposition of coating materials on the substrate surface during the vacuum coating process through various technical means, so as to ensure uniformity in film thickness, performance and other aspects, in order to meet the needs of high-quality coating in multiple fields such as optics, electronics and mechanics.

[0003] The existing technology has a compact internal space and the components block each other, making it difficult for maintenance personnel to access some critical components for inspection, repair and replacement. For example, some evaporation sources, ion sources and other components are installed deep in the equipment, requiring the disassembly of multiple other components for maintenance. This not only increases the workload and time cost of maintenance, but also causes damage to other components during the disassembly process. Utility Model Content

[0004] The purpose of this invention is to provide a vacuum coating uniformity control device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vacuum coating uniformity control device, comprising a control device body, a base plate fixedly connected to the bottom of the control device body, and a transmission component;

[0006] The transmission assembly is housed within the control device body. The transmission assembly includes a first mechanical telescopic rod slidably connected to the control device body. An installation chamber is fixedly connected to the side of the first mechanical telescopic rod away from the control device body. A fixed rod is slidably connected to the installation chamber. A second fixed block is fixedly connected to the fixed rod. A third transmission rod is slidably connected to the second fixed block. A sliding block is slidably connected to the third transmission rod. An installation frame is fixedly connected to the sliding block. A second transmission rod is slidably connected to the side of the sliding block away from the third transmission rod. A first transmission rod is slidably connected to the second transmission rod. A first fixed block is slidably connected to the bottom of the first transmission rod.

[0007] A rubber telescopic rod is slidably connected to the first mechanical telescopic rod, a fourth transmission rod is fixedly connected to the rubber telescopic rod, a first sliding rod is fixedly connected to the fourth transmission rod, a transmission block is slidably connected to the first sliding rod, a second sliding rod is fixedly connected to the transmission block, and a sealing plate is fixedly connected to the second sliding rod.

[0008] Furthermore, a slot is provided on the side of the control device body near the first mechanical telescopic rod, and the first mechanical telescopic rod is slidably connected in the slot inside the control device body.

[0009] The above technical solution is adopted: by setting the first mechanical telescopic rod to slide in the slot inside the control device body, the sliding of the first mechanical telescopic rod inside the control device body is guided.

[0010] Furthermore, both ends of the third transmission rod are rotatably connected to a first rotating shaft. The two ends of the third transmission rod are rotatably connected to the second fixed block and the mounting frame respectively through the first rotating shaft. Both ends of the second transmission rod are rotatably connected to a third rotating shaft. The two ends of the second transmission rod are rotatably connected to the sliding block and the first transmission rod respectively through the third rotating shaft. Both ends of the first transmission rod are rotatably connected to a second rotating shaft. The second rotating shafts at both ends of the first transmission rod are rotatably connected to the fixed rod and the first fixed block respectively. The side of the first fixed block away from the second rotating shaft is fixedly connected to the base plate.

[0011] The above technical solution, by setting a first rotating shaft, a second rotating shaft, and a third rotating shaft, makes the connection between components smoother.

[0012] Furthermore, a spring is fixedly connected inside the first mechanical telescopic rod.

[0013] The above technical solution is adopted: by setting a spring fixedly connected inside the first mechanical telescopic rod, it is easy for the first mechanical telescopic rod to retract into the body of the control device when in use.

[0014] Furthermore, the control device body has an opening, and the transmission block, the second sliding rod, and the sealing plate are all slidably connected to the opening in the base plate.

[0015] The above technical solution is adopted: by setting an opening on the main body of the control device, it is easy for the sealing plate to slide in it during use.

[0016] Furthermore, a first universal joint is fixedly connected between the installation compartment and the fixed rod, and a second universal joint is fixedly connected between the rubber telescopic rod and the first mechanical telescopic rod.

[0017] The above technical solution facilitates transmission between the installation compartment and the fixed rod during use by setting a first universal joint.

[0018] Furthermore, a round rod is fixedly connected to the bottom of the fourth transmission rod, and a slot is provided on the side of the control device body near the fourth transmission rod, and the round rod at the bottom of the fourth transmission rod is slidably connected in the slot at the bottom of the fourth transmission rod.

[0019] The above technical solution is adopted: by setting a round rod fixedly connected to the bottom of the fourth transmission rod, it is convenient to limit the fourth transmission rod during use. A limit groove is opened in the groove at the bottom of the fourth transmission rod, and the round rod is stuck in the limit groove during use.

[0020] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0021] In this invention, when it is necessary to replace the internal components, the first mechanical telescopic rod is pressed back into the control device body, and the electric telescopic rod drives the sliding block to press down, so that the installation chamber is driven to slide within the control device body. During this process, the fourth transmission rod will be driven to slide on the base plate. This is because the first sliding rod slides on the transmission block, and the transmission block is driven to press down, which in turn causes the second sliding rod to adjust the sealing plate to slide down, ultimately allowing the staff to replace the components in the installation chamber through the exposed opening. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of a vacuum coating uniformity control device.

[0023] Figure 2 This is a schematic diagram of the base plate position of a vacuum coating uniformity control device.

[0024] Figure 3 This is a schematic diagram of the cross-sectional structure of a vacuum coating uniformity control device.

[0025] Figure 4 This is a schematic diagram showing the position of the first mechanical telescopic rod in a vacuum coating uniformity control device.

[0026] Figure 5 This is a schematic diagram of the first mechanical telescopic rod in a vacuum coating uniformity control device, showing its disassembled state.

[0027] Figure 6 This is a schematic diagram showing the fourth transmission rod of a vacuum coating uniformity control device separated from the main body of the control device.

[0028] Numbering on the map:

[0029] 1. Control device body; 11. Base plate;

[0030] 2. Transmission assembly; 21. First mechanical telescopic rod; 22. Transmission block; 23. Mounting chamber; 24. Fixed rod; 25. First transmission rod; 26. Second transmission rod; 27. Third transmission rod; 28. Sliding block; 29. ​​First fixed block; 210. Mounting frame;

[0031] 3. First rotating shaft; 31. Second rotating shaft; 32. Third rotating shaft; 33. Second fixing block;

[0032] 4. First universal joint; 41. Second universal joint;

[0033] 5. Fourth transmission rod; 51. First sliding rod; 52. Second sliding rod; 53. Sealing plate;

[0034] 6. Rubber telescopic pole. Detailed Implementation

[0035] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0036] Example:

[0037] like Figures 1-5 As shown, this utility model provides a technical solution: a vacuum coating uniformity control device, including a control device body 1, a base plate 11 fixedly connected to the bottom of the control device body 1, and a transmission component 2.

[0038] The transmission assembly 2 is placed inside the control device body 1. The transmission assembly 2 includes a first mechanical telescopic rod 21 slidably connected to the control device body 1. An installation chamber 23 is fixedly connected to the side of the first mechanical telescopic rod 21 away from the control device body 1. A fixed rod 24 is slidably connected to the installation chamber 23. A second fixed block 33 is fixedly connected to the fixed rod 24. A third transmission rod 27 is slidably connected to the second fixed block 33. A sliding block 28 is slidably connected to the third transmission rod 27. An installation frame 210 is fixedly connected to the sliding block 28. A second transmission rod 26 is slidably connected to the side of the sliding block 28 away from the third transmission rod 27. A first transmission rod 25 is slidably connected to the second transmission rod 26. A first fixed block 29 is slidably connected to the bottom of the first transmission rod 25.

[0039] A rubber telescopic rod 6 is slidably connected to the first mechanical telescopic rod 21. A fourth transmission rod 5 is fixedly connected to the rubber telescopic rod 6. A first sliding rod 51 is fixedly connected to the fourth transmission rod 5. A transmission block 22 is slidably connected to the first sliding rod 51. A second sliding rod 52 is fixedly connected to the transmission block 22. A sealing plate 53 is fixedly connected to the second sliding rod 52.

[0040] In this invention, when it is necessary to replace the internal components, the first mechanical telescopic rod 21 is pressed back into the control device body 1, and the electric telescopic rod drives the sliding block 28 to press down, so that the installation chamber 23 is driven to slide within the control device body 1. During this process, the fourth transmission rod 5 is driven to slide on the base plate 11. This is because the first sliding rod 51 slides on the transmission block 22, and the transmission block 22 is driven to press down, which in turn causes the second sliding rod 52 to move the sealing plate 53 down, ultimately allowing the staff to replace the components in the installation chamber 23 through the exposed opening.

[0041] A slot is provided on one side of the control device body 1 near the first mechanical telescopic rod 21. The first mechanical telescopic rod 21 is slidably connected in the slot inside the control device body 1. This stable sliding path provides a precise starting point for the subsequent linked components, ensuring the orderly progress of the entire transmission process. It is the basic support for achieving stable operation of the device and precise control of the coating uniformity.

[0042] Both ends of the third transmission rod 27 are rotatably connected to the first rotating shaft 3. The two ends of the third transmission rod 27 are rotatably connected to the second fixed block 33 and the mounting frame 210 respectively via the first rotating shaft 3. Both ends of the second transmission rod 26 are rotatably connected to the third rotating shaft 32. The two ends of the second transmission rod 26 are rotatably connected to the sliding block 28 and the first transmission rod 25 respectively via the third rotating shaft 32. Both ends of the first transmission rod 25 are rotatably connected to the second rotating shaft 31. The second rotating shaft 31 at both ends of the first transmission rod 25 are respectively connected to the fixed rod 24 and the first fixed block 25. The first fixed block 29 is fixedly connected to the base plate 11 on the side away from the second rotating shaft 31. The setting of each rotating shaft optimizes the component connection, just like injecting lubricant into the mechanical joint. Taking the third transmission rod 27 as an example, the first rotating shaft 3 at both ends allows it to rotate flexibly between the second fixed block 33 and the mounting frame 210, and the power transmission is smooth and unobstructed. Similarly, the second and first transmission rods 25 achieve close cooperation with adjacent components with the help of corresponding rotating shafts. The components cooperate tacitly, just like a precision gear set operating efficiently, improving the working efficiency of the device.

[0043] Furthermore, such as Figures 1 to 6 As shown, a spring is fixedly connected inside the first mechanical telescopic rod 21. When the first mechanical telescopic rod 21 needs to retract, the spring, with its elastic tension, quickly pulls the telescopic rod back into the control device body 1. This convenient design simplifies the operation process. In emergency adjustments or frequent operation scenarios, operators can easily complete the actions, saving time and costs for coating control work and improving overall efficiency.

[0044] The control device body 1 has an opening, and the transmission block 22, the second sliding rod 52, and the sealing plate 53 are all slidably connected to the opening on the base plate 11. The second sliding rod 52 and the sealing plate 53 slide freely on the base plate 11. Just like alleviating traffic congestion in cities, this prevents collisions and jams between components, ensures smooth transmission links, and allows the coating uniformity control process to proceed step by step in an orderly manner.

[0045] A first universal joint 4 is fixedly connected between the installation chamber 23 and the fixed rod 24, and a second universal joint 41 is fixedly connected between the rubber telescopic rod 6 and the first mechanical telescopic rod 21. No matter what complex working conditions the installation chamber 23 is in, whether it is an angle change or a position fine adjustment, the power of the fixed rod 24 can be smoothly transmitted to ensure the stable operation of the installation chamber 23, greatly enhance the adaptability of the device to complex scenarios, and ensure the stability of the control work.

[0046] like Figure 6 As shown, a round rod is fixedly connected to the bottom of the fourth transmission rod 5. A slot is provided on the side of the control device body 1 near the fourth transmission rod 5. The round rod at the bottom of the fourth transmission rod 5 is slidably connected in the slot at the bottom of the fourth transmission rod 5. When the device is running at high speed and the components are frequently linked, it effectively prevents the fourth transmission rod 5 from deviating from the predetermined trajectory due to external interference, ensuring that it is always in the correct position.

[0047] Working principle: such as Figures 1 to 5 As shown, when in use, first install the electric telescopic rod on the mounting frame 210. The bottom of the electric telescopic rod is fixed on the base plate 11. When it is necessary to replace the internal components, first press the first mechanical telescopic rod 21 back into the control device body 1, start the electric telescopic rod, so that the sliding block 28 is driven to press down, so that the mounting chamber 23 is driven to slide in the control device body 1, so that the first mechanical telescopic rod 21 slides in the limiting groove in the control device body 1.

[0048] During this process, the fourth transmission rod 5 will be driven to slide on the base plate 11, causing the first sliding rod 51 to slide on the transmission block 22. The transmission block 22 will be driven to press down, causing the second sliding rod 52 to move the first rotating shaft 3 of the fourth transmission rod 5 to slide down. At this time, the staff can replace the components in the installation chamber 23 through the exposed opening of the first rotating shaft 3 of the fourth transmission rod 5.

[0049] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-described technical content to create equivalent embodiments without departing from the scope of the present utility model. The implementation schemes in the above embodiments can also be further combined or replaced. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A vacuum coating uniformity control device, comprising a control device body (1), wherein a base plate (11) is fixedly connected to the bottom of the control device body (1), characterized in that, It also includes a transmission component (2); The transmission assembly (2) is placed inside the control device body (1). The transmission assembly (2) includes a first mechanical telescopic rod (21) slidably connected to the control device body (1). An installation chamber (23) is fixedly connected to the side of the first mechanical telescopic rod (21) away from the control device body (1). A fixed rod (24) is slidably connected to the installation chamber (23). A second fixed block (33) is fixedly connected to the fixed rod (24). A third transmission rod (27) is slidably connected to the second fixed block (33). A sliding block (28) is slidably connected to the third transmission rod (27). An installation frame (210) is fixedly connected to the sliding block (28). A second transmission rod (26) is slidably connected to the side of the sliding block (28) away from the third transmission rod (27). A first transmission rod (25) is slidably connected to the second transmission rod (26). A first fixed block (29) is slidably connected to the bottom of the first transmission rod (25). A rubber telescopic rod (6) is slidably connected to the first mechanical telescopic rod (21). A fourth transmission rod (5) is fixedly connected to the rubber telescopic rod (6). A first sliding rod (51) is fixedly connected to the fourth transmission rod (5). A transmission block (22) is slidably connected to the first sliding rod (51). A second sliding rod (52) is fixedly connected to the transmission block (22). A sealing plate (53) is fixedly connected to the second sliding rod (52).

2. The vacuum coating uniformity control device according to claim 1, characterized in that: A slot is provided on one side of the control device body (1) near the first mechanical telescopic rod (21), and the first mechanical telescopic rod (21) is slidably connected in the slot inside the control device body (1).

3. The vacuum coating uniformity control device according to claim 1, characterized in that: Both ends of the third transmission rod (27) are rotatably connected to the first rotating shaft (3). Both ends of the third transmission rod (27) are rotatably connected to the second fixed block (33) and the mounting frame (210) respectively through the first rotating shaft (3). Both ends of the second transmission rod (26) are rotatably connected to the third rotating shaft (32). Both ends of the second transmission rod (26) are rotatably connected to the sliding block (28) and the first transmission rod (25) respectively through the third rotating shaft (32). Both ends of the first transmission rod (25) are rotatably connected to the second rotating shaft (31). The second rotating shaft (31) at both ends of the first transmission rod (25) is rotatably connected to the fixed rod (24) and the first fixed block (29) respectively. The side of the first fixed block (29) away from the second rotating shaft (31) is fixedly connected to the base plate (11).

4. The vacuum coating uniformity control device according to claim 1, characterized in that: A spring is fixedly connected inside the first mechanical telescopic rod (21).

5. The vacuum coating uniformity control device according to claim 4, characterized in that: The control device body (1) has an opening, and the transmission block (22), the second sliding rod (52) and the sealing plate (53) are all slidably connected in the opening on the base plate (11).

6. The vacuum coating uniformity control device according to claim 1, characterized in that: The installation compartment (23) is fixedly connected to the fixing rod (24) by a first universal joint (4), and the rubber telescopic rod (6) is fixedly connected to the first mechanical telescopic rod (21) by a second universal joint (41).

7. The vacuum coating uniformity control device according to claim 1, characterized in that: The bottom of the fourth transmission rod (5) is fixedly connected to a round rod. A slot is provided on the side of the control device body (1) near the fourth transmission rod (5). The round rod at the bottom of the fourth transmission rod (5) is slidably connected in the slot at the bottom of the fourth transmission rod (5).

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