Modularized slide rail type pressure-adjustable test tool

Abstract

The utility model discloses a modularized slide rail type pressure-adjustable test tool, which comprises a substrate, two cross beams arranged side by side are arranged above the substrate, the cross beams can move along the length direction of the substrate, a slide seat is arranged between the two cross beams, the slide seat can move along the length direction of the cross beams, and the slide seat is arranged on the substrate. The moving direction of the sliding seat is perpendicular to the moving direction of the cross beam; a linear bearing is embedded in the sliding seat, an optical shaft arranged in the vertical direction is installed in the linear bearing, a pressing head is installed at the bottom end of the optical shaft, and a fixing block and a weight are sequentially installed above a main body of the optical shaft from bottom to top. According to the testing tool provided by the utility model, the displacement and the pressure value can be randomly adjusted on a plane, the problems that the pressure cannot be completely applied to an object to be tested and the pressure value cannot be measured are solved, the testing equipment period is greatly shortened, and meanwhile, the problem that the pressure values are inconsistent during repeated testing is also solved.

Description

Technical Field

[0001] This utility model relates to a testing fixture, specifically a modular slide rail type adjustable pressure testing fixture, belonging to the field of semiconductor device testing technology. Background Technology

[0002] With the advancement of technology, various devices are demanding higher and higher power density from semiconductor devices, and the research and development speed of semiconductor power devices has also greatly accelerated. Testing and aging of these power devices is a very important part of research and development and production.

[0003] Existing semiconductor device testing fixtures control the pressure between the test object and the substrate by controlling the torque of the screw. This method is not only time-consuming and labor-intensive, but also the screw pressure is not fully applied to the test object, and the pressure value of the test object cannot be measured. The pressure values ​​may also be inconsistent during repeated tests, affecting the accuracy of the test. In addition, existing testing fixtures are not convenient for adjusting the displacement arbitrarily on a plane, and there is a problem of inflexible movement.

[0004] In conclusion, the existing technology obviously has inconveniences and defects in practical use, so it is necessary to improve it. Utility Model Content

[0005] This invention addresses the shortcomings of the prior art by providing a modular sliding rail type adjustable pressure testing fixture, which allows for arbitrary adjustment of displacement and pressure value on a plane. This solves the problems of pressure not being fully applied to the test object and pressure value not being measurable, greatly shortening the equipment cycle for testing. It also solves the problem of inconsistent pressure values ​​during repeated testing.

[0006] To solve the above technical problems, the present invention adopts the following technical solution:

[0007] A modular slide rail type adjustable pressure test fixture includes a base plate, two crossbeams arranged side by side are mounted on the top of the base plate, the crossbeams can move along the length of the base plate, and a slide is installed between the two crossbeams, the slide can move along the length of the crossbeams, the movement direction of the slide is perpendicular to the movement direction of the crossbeams.

[0008] The slide block is equipped with a linear bearing, and a vertically oriented optical axis is installed inside the linear bearing. A pressure head is installed at the bottom of the optical axis, and a fixing block and a weight are installed sequentially from bottom to top on the main body of the optical axis.

[0009] Furthermore, longitudinal beams are provided on both sides of the substrate, and linear slide rails and sliders are installed between the longitudinal beams and the substrate in a sliding connection.

[0010] Furthermore, the linear guide rail is fixed to both sides of the base plate along its length by bolts, and the slider is fixed to the opposing inner sides of the two longitudinal beams by bolts.

[0011] Furthermore, the top of the longitudinal beam and the end of the transverse beam are fixedly connected by bolts, and rectangular grooves are provided on both sides of the top of the longitudinal beam for the transverse beam end to enter and be fixed.

[0012] Furthermore, the slide block has an I-shaped structure, with sliding grooves on both sides, allowing the slide block to slide along the crossbeam via the sliding grooves.

[0013] Furthermore, the linear bearing is fixed to the contour groove of the slide by bolts.

[0014] Furthermore, the pressure head is screwed onto the optical shaft with external threads via internal threads.

[0015] Furthermore, the fixing block is a ring-shaped structure with an opening. The fixing block is fixed to the optical axis by bolts. The height of the fixing block is adjustable, and the fixing block is located above the linear bearing.

[0016] Furthermore, the weight is a ring-shaped structure, and the weight is sleeved on the main body of the optical axis and supported by the fixing block at the bottom.

[0017] Compared with the prior art, the present invention, by adopting the above technical solution, has the following advantages:

[0018] The pressure head in this invention can move along the length of the crossbeam with the slide block, that is, along the width of the substrate. The pressure head can also move along the linear slide rail with the longitudinal beam, that is, along the length of the substrate. Therefore, the pressure head can move arbitrarily on the plane of the substrate.

[0019] This invention changes the pressure applied to the test object by changing the weight of the weights. The linear bearing ensures that the pressure of the weights is fully applied to the test object, providing a specified constant pressure value when the test object is repeatedly tested.

[0020] This invention is more accurate than the traditional method of calculating pressure by calculating torque, greatly improving pressure accuracy. It eliminates the need for a torque wrench, removes the accuracy error of a torque wrench, eliminates the cost and time required for fixing a torque wrench, saves tool costs, and greatly improves testing efficiency.

[0021] This invention is suitable for aging tests of most planar heat dissipation semiconductor devices and aging work of various materials.

[0022] The present invention will now be described in detail with reference to the accompanying drawings and embodiments. Attached Figure Description

[0023] Figure 1This is a three-dimensional structural view of the present invention;

[0024] Figure 2 This is a three-dimensional view of the structure of this utility model in another direction;

[0025] Figure 3 This is a schematic diagram of the optical axis installation;

[0026] Figure 4 yes Figure 3 A schematic diagram of the structure along another direction.

[0027] In the figure, 1-substrate, 2-linear slide rail, 3-slider, 4-longitudinal beam, 5-crossbeam, 6-slide block, 7-optical axis, 8-linear bearing, 9-pressure head, 10-fixed block, 11-weight, 12-slide groove. Detailed Implementation

[0028] To provide a clearer understanding of the technical features, objectives, and effects of this utility model, the specific embodiments of this utility model are now described with reference to the accompanying drawings.

[0029] like Figures 1-4 As shown in the figure, this utility model provides a modular slide rail type adjustable pressure test fixture, including a base plate 1, two crossbeams 5 arranged side by side are installed on the top of the base plate 1, the crossbeams 5 can move along the length direction of the base plate 1, and a slide block 6 is installed between the two crossbeams 5, the slide block 6 can move along the length direction of the crossbeams 5, and the moving direction of the slide block 6 is perpendicular to the moving direction of the crossbeams 5.

[0030] The substrate 1 has longitudinal beams 4 on both sides. A linear slide rail 2 and a slider 3 are installed between the longitudinal beams 4 and the substrate 1. The linear slide rail 2 is fixed to both sides of the substrate 1 along the length direction by bolts, and the slider 3 is fixed to the inner sides of the two longitudinal beams 4 by bolts.

[0031] The top end of the longitudinal beam 4 is fixedly connected to the end of the transverse beam 5 by bolts, and rectangular grooves are provided on both sides of the top end of the longitudinal beam 4 for the transverse beam 5 to enter and be fixed.

[0032] The slide block 6 has an I-shaped structure, and slide grooves 12 are provided on both sides of the slide block 6. The slide block 6 slides along the crossbeam 5 through the slide grooves 12.

[0033] The slide block 6 is equipped with a linear bearing 8, which is fixed to the contour groove of the slide block 6 by bolts. The linear bearing 8 is equipped with an optical axis 7 arranged in the vertical direction, which can slide up and down along the linear bearing 8.

[0034] A pressure head 9 is installed at the bottom of the optical axis 7. The pressure head 9 is screwed onto the optical axis 7 with external threads through internal threads. A fixing block 10 and a weight 11 are installed sequentially from bottom to top on the main body of the optical axis 7.

[0035] The fixing block 10 is a ring-shaped structure with an opening. The fixing block 10 is fixed to the optical axis 7 by bolts. The height of the fixing block 10 is adjustable, and the fixing block 10 is located above the linear bearing 8.

[0036] The weight 11 has a ring structure and is sleeved on the main body of the optical axis 7 and supported by the fixing block 10 at the bottom.

[0037] The longitudinal beam 4, cross beam 5, slide block 6, optical axis 7, and pressure head 9 in this utility model are made of steel; the substrate 1 can be an aluminum liquid cooling plate to provide temperature control conditions for the object to be tested, and can also be flexibly adjusted according to the actual situation.

[0038] The specific working principle of this utility model is as follows:

[0039] In this invention, the pressure head 9 can move along the length of the crossbeam 5 with the slide block 6, that is, along the width of the substrate 1. The pressure head 9 can also move along the linear slide rail 2 with the longitudinal beam 4, that is, along the length of the substrate 1. Therefore, the pressure head 9 can move arbitrarily on the plane of the substrate 1. At the same time, the vertical position of the pressure head 9 can be adjusted by adjusting the height of the fixing block 10. Finally, the pressure on the object to be tested can be adjusted by adjusting the number of weights 11.

[0040] This invention changes the pressure applied to the test object by altering the weight of the weight 11. The linear bearing 8 ensures that the pressure of the weight 11 is fully applied to the test object, making it more accurate than commercially available methods that use bolt tightening devices to calculate pressure by torque calculation, thus significantly improving pressure accuracy. Because it eliminates the need to tighten bolts to provide pressure, a torque wrench is also unnecessary, eliminating the accuracy error associated with torque wrenches, as well as the cost and time required for setting them. This saves on tooling costs and greatly improves testing efficiency.

[0041] The above description provides examples of the preferred embodiments of this utility model. Any aspects not detailed herein are common knowledge to those skilled in the art. The scope of protection of this utility model is determined by the claims. Any equivalent modifications based on the technical teachings of this utility model are also within the scope of protection of this utility model.

Claims

1. A modular slide rail type adjustable pressure testing fixture, characterized in that: Includes a substrate (1), two crossbeams (5) arranged side by side are installed on the top of the substrate (1), the crossbeams (5) can move along the length direction of the substrate (1), a slide (6) is installed between the two crossbeams (5), the slide (6) can move along the length direction of the crossbeams (5), and the moving direction of the slide (6) is perpendicular to the moving direction of the crossbeams (5). The slide (6) is fitted with a linear bearing (8), and the linear bearing (8) is fitted with a vertically oriented optical axis (7). The bottom of the optical axis (7) is fitted with a pressure head (9). The main body of the optical axis (7) is fitted with a fixing block (10) and a weight (11) from bottom to top.

2. The modular slide rail type adjustable pressure testing fixture as described in claim 1, characterized in that: The substrate (1) is provided with longitudinal beams (4) on both sides, and a linear slide rail (2) and a slider (3) are installed between the longitudinal beams (4) and the substrate (1).

3. The modular slide rail type adjustable pressure testing fixture as described in claim 2, characterized in that: The linear slide rail (2) is fixed to both sides of the base plate (1) along the length direction by bolts, and the slider (3) is fixed to the opposing inner sides of the two longitudinal beams (4) by bolts.

4. The modular slide rail type adjustable pressure testing fixture as described in claim 2, characterized in that: The top of the longitudinal beam (4) is fixedly connected to the end of the crossbeam (5) by bolts. Rectangular grooves for the crossbeam (5) to enter and be fixed are provided on both sides of the top of the longitudinal beam (4).

5. The modular slide rail type adjustable pressure testing fixture as described in claim 1, characterized in that: The slide block (6) has an I-shaped structure and slide grooves (12) are provided on both sides of the slide block (6). The slide block (6) slides along the crossbeam (5) through the slide grooves (12).

6. The modular slide rail type adjustable pressure testing fixture as described in claim 1, characterized in that: The linear bearing (8) is fixed to the contour groove of the slide (6) by bolts.

7. The modular slide rail type adjustable pressure testing fixture as described in claim 1, characterized in that: The pressure head (9) is screwed onto the optical shaft (7) with external threads via internal threads.

8. The modular slide rail type adjustable pressure testing fixture as described in claim 1, characterized in that: The fixing block (10) is a ring structure with an opening. The fixing block (10) is fixed to the optical axis (7) by bolts. The height of the fixing block (10) is adjustable, and the fixing block (10) is located above the linear bearing (8).

9. The modular slide rail type adjustable pressure testing fixture as described in claim 1, characterized in that: The weight (11) is a ring structure. The weight (11) is sleeved on the main body of the optical axis (7) and supported by the fixing block (10) at the bottom.

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