Mounting bracket for X-ray semiconductor detection instrument

Abstract

The utility model discloses a mounting bracket for an X-ray semiconductor detection instrument, the mounting bracket comprises a mounting cross rod, an image collector, a lifting assembly and a rotating assembly, the rotating assembly is arranged on the mounting cross rod, the rotating assembly comprises a rotating arc plate and a rotating slide rail, the rotating arc plate is vertically connected to the mounting cross rod, and the rotating slide rail is arranged on the rotating arc plate; the rotating sliding rail is connected to the side, away from the mounting cross rod, of the rotating arc plate, the lifting assembly is arranged on the rotating assembly and comprises a lifting frame and a lifting sliding rail, the lifting sliding rail is arranged on the lifting frame in the length direction of the lifting frame, a first sliding block is slidably arranged on the lifting sliding rail, and the first sliding block is connected with an image collector; a second sliding block is arranged on the lifting frame and arranged on the rotating sliding rail in a sliding mode. The method has the effect of improving the shooting precision of the detector.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor inspection, and in particular to a mounting bracket for an X-ray semiconductor inspection instrument. Background Technology

[0002] X-ray semiconductor inspection instruments are high-precision devices used to detect internal defects, structures, and compositions of semiconductor materials and devices. Utilizing the penetrating and diffraction properties of X-rays, they perform non-destructive testing of semiconductor materials and are widely used in semiconductor manufacturing, packaging testing, and materials analysis. X-ray inspection instruments emit high-energy X-ray beams that penetrate the object being inspected (such as semiconductor wafers or components), then receive the transmitted X-ray signals and generate images, thereby detecting and analyzing minute defects.

[0003] Currently, to achieve more accurate product imaging and inspection, it is necessary to capture images of the product from various heights and angles to avoid situations where a single-angle view cannot accurately assess the product. However, each time the angle and height of the image acquisition device are adjusted, it needs to be repositioned and reinstalled, which is cumbersome and reduces the efficiency of product inspection. Utility Model Content

[0004] To improve the accuracy of X-ray semiconductor inspection, this application provides a mounting bracket for such instruments.

[0005] The mounting bracket for an X-ray semiconductor inspection instrument provided in this application adopts the following technical solution:

[0006] A mounting bracket for an X-ray semiconductor inspection instrument includes a mounting crossbar, an image acquisition unit, a lifting assembly, and a rotating assembly. The rotating assembly is mounted on the mounting crossbar and includes a rotating arc plate and a rotating slide rail. The rotating arc plate is vertically connected to the mounting crossbar, and the rotating slide rail is connected to the side of the rotating arc plate away from the mounting crossbar. The lifting assembly is mounted on the rotating assembly and includes a lifting frame and a lifting slide rail. The lifting slide rail is disposed along the length of the lifting frame, and a first slider is slidably mounted on the lifting slide rail. The first slider is connected to the image acquisition unit. A first driving member is disposed on the lifting frame for driving the first slider to slide along the length of the lifting slide rail. A second slider is disposed on the lifting frame and slidably mounted on the rotating slide rail. A second driving member is disposed on the lifting frame for driving the second slider to move along the rotating slide rail.

[0007] By adopting the above technical solution, when acquiring images of the product, the image acquisition unit moves vertically along with the first slider under the drive of the first driving component, thus adjusting its height. The lifting frame slides along the rotating rail with the second slider under the drive of the second driving component, thereby adjusting the shooting angle. Through the coordinated operation of the crossbar, image acquisition unit, lifting assembly, and rotating assembly, rapid angle and height adjustment of the image acquisition unit is achieved, improving the accuracy of the detector's imaging.

[0008] Optionally, the second driving component includes a driven gear and a driven rack. The driven rack is connected to the outer arc wall of the rotating arc plate. The driven gear is rotatably mounted on the lifting frame. The lifting frame is provided with a driving source for driving the driven gear to rotate. The driven gear is meshed with the driven rack.

[0009] By adopting the above technical solution, when it is necessary to adjust the angle of the image acquisition device, the driven gear starts to rotate under the driving action of the drive source, and the lifting frame rotates under the driving action of the driven gear, thereby realizing the angle adjustment and driving of the lifting frame and the image acquisition device.

[0010] Optionally, a limiting end block is provided on the outer arc wall at both ends of the rotating arc plate along its length, and one end of the limiting end block extends out of the edge of the rotating arc plate.

[0011] By adopting the above technical solution, the two limiting end blocks restrict the rotation angle of the lifting frame, thus preventing the rotating slider from detaching from the rotating slide rail.

[0012] Optionally, the end of the limiting end block away from the rotating arc plate is provided with an abutting rubber block.

[0013] By adopting the above technical solution, the setting of the abutting rubber block reduces the possibility of damage to the driven gear during its contact with it.

[0014] Optionally, a mounting bracket is provided on the mounting crossbar, and a return-to-center sensor switch is provided on the side of the mounting bracket near the lifting frame. A sensor plate is provided on the side of the lifting frame near the mounting crossbar. A first connecting slot is provided on the return-to-center sensor switch for the sensor plate to pass through. When the lifting frame rotates to a vertical position, the sensor plate is located inside the first connecting slot. The return-to-center sensor switch is electrically connected to the second driving component.

[0015] By adopting the above technical solution, after completing the multi-angle detection of the product, the second driving component drives the lifting frame to rotate back to center. When the sensing plate rotates with the lifting frame into the first connecting slot on the centering sensing switch, the lifting frame stops operating and achieves centering.

[0016] Optionally, two limit switches are provided on the mounting crossbar, and the return switch is located between the two limit switches. The limit switches are electrically connected to the second drive component. A second connecting groove is provided on the side of the limit switch near the lifting frame. When the sensing plate moves into the second connecting groove, the driven gear contacts the abutting rubber block.

[0017] By adopting the above technical solution, when the sensing plate rotates with the lifting frame into the second connecting slot of the limit sensing switch, the driven gear approaches the limit end block. The second driving component receives the signal from the limit sensing switch and stops operating, reducing the possibility of damage to the driven gear caused by rapid impact between the driven gear and the limit end block.

[0018] Optionally, the rotating arc plate is provided with angle scale lines along the length direction of the rotating slide rail.

[0019] By adopting the above technical solution, the setting of angle scale lines makes it easier for users to accurately record the shooting angle of the lifting frame and the image acquisition device, further improving the accuracy of the detection.

[0020] Optionally, the mounting crossbar is provided with a mounting groove along its length, and a plurality of mounting sliders are slidably disposed in the mounting groove. The rotating arc plate is provided with a connector for connecting with the plurality of mounting sliders.

[0021] By adopting the above technical solution, the installation groove and the installation slider enable the adjustment of the connection position between the rotating arc plate and the installation crossbar. In actual operation, the position of the overall device can be adjusted as needed.

[0022] In summary, this application includes at least one of the following beneficial technical effects:

[0023] 1. By coordinating the installation of the crossbar, image acquisition unit, lifting component, and rotating component, the angle and height of the image acquisition unit can be quickly adjusted, which improves the accuracy of the detector's image capture.

[0024] 2. The limit switch reduces the possibility of damage to the driven gear caused by rapid impact between the driven gear and the limit block;

[0025] 3. The angle scale lines make it easier for users to accurately record the shooting angles of the lifting frame and the image acquisition device, further improving the accuracy of the detection. Attached Figure Description

[0026] Figure 1 This is a schematic diagram illustrating the structure of a mounting bracket for an X-ray semiconductor detection instrument, as described in this application.

[0027] Figure 2 This is a partial cross-sectional view used to illustrate the rotating component in the embodiments of this application.

[0028] Figure 3 yes Figure 1 Enlarged view of part A in the middle.

[0029] Figure 4 yes Figure 2 Enlarged view of section B in the middle.

[0030] Explanation of reference numerals in the attached drawings: 1. Image acquisition device; 2. Mounting crossbar; 21. Mounting slot; 3. Lifting assembly; 31. Lifting frame; 32. First slider; 33. Lifting block; 34. Lifting screw; 35. Lifting slide rail; 4. Rotating assembly; 41. Rotating arc plate; 411. Connecting slot; 42. Limiting end block; 43. Abutting rubber block; 44. Rotating slide rail; 45. Second slider; 46. Drive motor; 47. Drive gear; 48. Driven gear; 49. Driven rack; 5. Angle scale line; 6. Connecting bolt; 7. Mounting slider; 8. Mounting frame; 9. Return sensor switch; 91. First connecting slot; 10. Limit sensor switch; 101. Second connecting slot; 11. Sensing plate. Detailed Implementation

[0031] The following is in conjunction with the appendix Figure 1-4 This application will be further described in detail below. Embodiments of this application provide a mounting bracket for an X-ray semiconductor inspection instrument, which improves the imaging accuracy of the instrument.

[0032] Reference Figure 1 A mounting bracket for an X-ray semiconductor inspection instrument includes an image acquisition unit 1, a mounting crossbar 2, a lifting assembly 3, and a rotating assembly 4.

[0033] Reference Figure 1 and Figure 2 The lifting assembly 3 includes a lifting frame 31, a first slider 32, a lifting block 33, a lifting screw 34, and lifting rails 35. Two lifting rails 35 are arranged parallel to each other along the length of the lifting frame 31. One first slider 32 is slidably mounted on each lifting rail 35. The image acquisition device 1 is connected to both first sliders 32 simultaneously. The side of the image acquisition device 1 closest to the lifting frame 31 is connected to the lifting block 33, which is fitted into the lifting frame 31. The lifting screw 34 is mounted on the lifting frame 31 along the length of the lifting rails 35, and the lifting frame 31 is equipped with a drive source for rotating the lifting screw 34.

[0034] Reference Figure 2 and Figure 3The rotating assembly 4 is mounted on the mounting crossbar 2. The rotating assembly 4 includes a rotating arc plate 41, a limiting end block 42, an abutting rubber block 43, a rotating slide rail 44, a second slider 45, a drive motor 46, a drive gear 47, a driven gear 48, and a driven rack 49. The rotating arc plate 41 is mounted on the mounting crossbar 2, and the rotating slide rail 44 is connected to the side of the rotating arc plate 41 away from the mounting crossbar 2. The center of the rotating arc plate 41 coincides with the center of the rotating slide rail 44. The second slider 45 is slidably connected to the rotating slide rail 44. Angle scale lines 5 are provided along the length of the outer arc wall of the rotating arc plate 41, and the driven rack 49 is mounted on the outer arc wall of the rotating arc plate 41. The drive motor 46 is mounted on the lifting frame 31, and the output shaft of the drive motor 46 is connected to the drive gear 47. Two driven gears 48 are rotatably mounted on the lifting frame 31. The two driven gears 48 are respectively located on both sides of the driving gear 47 and are simultaneously meshed with the driving gear 47. The two driven gears 48 are also simultaneously meshed with the driven rack 49. Each end of the outer arc wall of the rotating arc plate 41 is provided with a connecting groove 411, and each connecting groove 411 is connected to a limiting end block 42. The side of the limiting end block 42 away from the rotating arc plate 41 is provided with an abutting rubber block 43.

[0035] Reference Figure 3 The mounting bar 2 has several mounting brackets 8. A return-to-center sensor switch 9 is located on the middle mounting block, with a first connecting groove 91 on the side of the return-to-center sensor switch 9 closest to the lifting frame 31. Each mounting bracket 8 on either side has a limit sensor switch 10, with a second connecting groove 101 on the side of the limit sensor switch 10 closest to the lifting frame 31. Both the return-to-center sensor switch 9 and the limit sensor switch 10 are electrically connected to the drive motor 46. A sensor plate 11 is located on the side of the lifting frame 31 closest to the mounting bar 2. When the lifting frame 31 rotates to a vertical position, the sensor plate 11 is located in the first connecting groove 91. When the lifting frame 31 rotates to a position close to the limit end block 42, the sensor plate 11 is located in the second connecting groove 101 corresponding to the limit sensor switch 10.

[0036] Reference Figure 4 The mounting crossbar 2 has a mounting groove 21 along its length on the side near the lifting frame 31, and a mounting slider 7 is slidably disposed in the mounting groove 21. A connecting bolt 6 is provided on the rotating arc plate 41, and the end of the connecting bolt 6 extends into the mounting slider 7 and is threadedly connected to the corresponding mounting slider 7.

[0037] Reference Figure 1 , Figure 2 and Figure 4The mounting crossbar 2 is connected to the external structure. By adjusting the relative position of the mounting slider 7 on the mounting crossbar 2 and fixing the position of the mounting slider 7 with the connecting bolts 6, the position of the overall device can be adjusted according to actual needs. The drive source starts the lifting screw 34 to rotate. Under the drive of the lifting screw 34 and the guidance of the lifting slide rail 35, the lifting block 33 moves along the length of the lifting frame 31, realizing the height adjustment of the image acquisition device 1.

[0038] Reference Figures 1-3 The drive motor 46 starts, driving the drive gear 47 to rotate. Two driven gears 48 rotate under the drive of the drive gear 47, and the second slider 45 slides on the rotating slide rail 44, achieving angle adjustment of the lifting frame 31. The angle scale line 5 allows for precise adjustment of the lifting frame 31's angle. The lifting assembly 3 and the rotating assembly 4 enable simultaneous adjustment of the image acquisition height and angle of the image acquisition device 1, helping to improve the accuracy of the device's imaging results. The limiting end block 42 restricts the rotational stroke of the lifting frame 31, preventing the second slider 45 from disengaging from the rotating slide rail 44. The abutment rubber block 43 reduces the possibility of damage caused by collision between the driven gear 48 and the limiting end block 42.

[0039] Reference Figure 3 and Figure 4 After the workpiece is photographed and inspected, the lifting frame 31 returns to its original position under the action of the drive motor 46. When the sensing plate 11 moves into the first connecting slot 91 of the return sensing switch 9, the drive motor 46 stops operating, realizing the return of the device to its original position. When the lifting frame 31 rotates to a position close to the limit end block 42, the sensing plate 11 moves into the second connecting slot 101 of the corresponding limit sensing switch 10. At this time, the drive motor 46 receives a signal and begins to decelerate, reducing the possibility of a violent collision between the limit end block 42 and the driven gear 48.

[0040] The implementation principle of a mounting bracket for an X-ray semiconductor detection instrument in this embodiment is as follows: When the drive source is activated, the lifting block 33 moves along the length of the lifting frame 31, thereby adjusting the height of the image acquisition device 1. The drive motor 46 is activated, thereby adjusting the angle of the lifting frame 31. The combined adjustment of the imaging height and angle of the image acquisition device 1 through the lifting assembly 3 and the rotating assembly 4 helps improve the accuracy of the imaging results.

[0041] After the workpiece is photographed and inspected, the lifting frame 31 returns to its original position under the action of the drive motor 46. When the sensing plate 11 moves into the first connecting slot 91 of the return sensing switch 9, the drive motor 46 stops operating. When the lifting frame 31 rotates to a position close to the limit end block 42, the sensing plate 11 moves into the second connecting slot 101 of the corresponding limit sensing switch 10.

[0042] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A mounting bracket for an X-ray semiconductor inspection instrument, characterized in that: The system includes a mounting crossbar (2), an image acquisition unit (1), a lifting assembly (3), and a rotating assembly (4). The rotating assembly (4) is mounted on the mounting crossbar (2) and includes a rotating arc plate (41) and a rotating slide rail (44). The rotating arc plate (41) is vertically connected to the mounting crossbar (2), and the rotating slide rail (44) is connected to the side of the rotating arc plate (41) away from the mounting crossbar (2). The lifting assembly (3) is mounted on the rotating assembly (4) and includes a lifting frame (31) and a lifting slide rail (35). The lifting slide rail (35) is positioned along... The lifting frame (31) is arranged along its length direction. A first slider (32) is slidably arranged on the lifting slide rail (35). The first slider (32) is connected to the image acquisition device (1). A first driving member is provided on the lifting frame (31) for driving the first slider (32) to slide along the length direction of the lifting slide rail (35). A second slider (45) is provided on the lifting frame (31). The second slider (45) is slidably arranged on the rotating slide rail (44). A second driving member is provided on the lifting frame (31) for driving the second slider (45) to move along the rotating slide rail (44).

2. The mounting bracket for an X-ray semiconductor detection instrument according to claim 1, characterized in that: The second driving component includes a driven gear (48) and a driven rack (49). The driven rack (49) is connected to the outer arc wall of the rotating arc plate (41). The driven gear (48) is rotatably mounted on the lifting frame (31). The lifting frame (31) is provided with a driving source for driving the driven gear (48) to rotate. The driven gear (48) meshes with the driven rack (49).

3. A mounting bracket for an X-ray semiconductor detection instrument according to claim 2, characterized in that: A limiting end block (42) is provided on the outer arc wall at both ends of the rotating arc plate (41) along its length, and one end of the limiting end block (42) extends out of the edge of the rotating arc plate (41).

4. A mounting bracket for an X-ray semiconductor detection instrument according to claim 3, characterized in that: The limiting end block (42) is provided with an abutting rubber block (43) at the end away from the rotating arc plate (41).

5. A mounting bracket for an X-ray semiconductor detection instrument according to claim 4, characterized in that: A mounting bracket (8) is provided on the mounting crossbar (2). A return-to-center sensor switch (9) is provided on the side of the mounting bracket (8) near the lifting frame (31). A sensor plate (11) is provided on the side of the lifting frame (31) near the mounting crossbar (2). A first connecting slot (91) is provided on the return-to-center sensor switch (9) for the sensor plate (11) to pass through. When the lifting frame (31) rotates to the vertical position, the sensor plate (11) is located inside the first connecting slot (91). The return-to-center sensor switch (9) is electrically connected to the second driving component.

6. A mounting bracket for an X-ray semiconductor detection instrument according to claim 5, characterized in that: Two limit switches (10) are provided on the mounting crossbar (2). The return switch (9) is located between the two limit switches (10). The limit switches (10) are electrically connected to the second drive component. A second connecting groove (101) is provided on the side of the limit switch (10) near the lifting frame (31). When the sensing plate (11) moves into the second connecting groove (101), the driven gear (48) contacts the abutting rubber block (43).

7. A mounting bracket for an X-ray semiconductor detection instrument according to claim 1, characterized in that: Angle scale lines (5) are provided on the rotating arc plate (41) along the length direction of the rotating slide rail (44).

8. A mounting bracket for an X-ray semiconductor detection instrument according to claim 1, characterized in that: The mounting crossbar (2) is provided with a mounting groove (21) along its length direction. Several mounting sliders (7) are slidably arranged in the mounting groove (21). The rotating arc plate (41) is provided with a connector for connecting with the several mounting sliders (7).

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