Diffractive optical element, laser, and scanner

Abstract

The utility model provides a diffractive optical element, a laser and a scanner. The diffractive optical element comprises a plurality of light beam partitions and is provided with a light incident side and a light emergent side; wherein the laser which enters the diffractive optical element from the light incident side is diffracted by the plurality of light beam partitions to form a plurality of light beams which are emitted from the light emergent side; the light beams form at least one linear light spot. The light incident side can be directly in butt joint with laser emitted by the laser light source, and the laser of the laser light source can be converted into a plurality of light beams forming linear light spots through the light beam partition. Therefore, the number of optical elements of the laser can be reduced to a certain extent, and the assembly complexity of the laser is further improved.

Description

Technical Field

[0001] This application relates to the field of optical equipment, specifically to a diffractive optical element, a laser, and a scanner. Background Technology

[0002] In existing multi-line laser technology, the laser typically includes a laser source, lenses, diffractive optical elements (DOEs), and a Powell prism. The laser beam emitted from the source is collimated by the lenses before entering the DOE for beam splitting. It then passes through cylindrical lenses, Powell prisms, or other aspherical cylindrical lenses to extend the beam into a multi-line laser. This process involves a large number of optical components, requiring high precision in the relative positions of the laser source, DOE, and cylindrical lenses.

[0003] It is evident that the assembly difficulties caused by the inclusion of multiple optical elements in lasers have not yet been effectively resolved. Utility Model Content

[0004] This application provides a diffractive optical element, a laser, and a scanner, which can reduce the number of optical elements in the laser to a certain extent, thereby reducing the complexity of laser assembly.

[0005] In a first aspect, embodiments of this application provide a diffractive optical element for a laser, the diffractive optical element comprising multiple beam partitions and having an incident light side and an exit light side;

[0006] The laser light incident on the diffractive optical element from the incident light side is diffracted by the multiple beam partitions into multiple beams emitted from the exit light side; the multiple beams form at least one linear light spot.

[0007] Secondly, embodiments of this application provide a laser, which includes the diffractive optical elements as described above.

[0008] Thirdly, embodiments of this application provide a scanner, the scanner including the laser as described above.

[0009] The various embodiments provided in this specification involve incorporating diffractive optical elements in a laser. These diffractive optical elements include multiple beam partitions and have an incident side and an exit side. Laser light incident on the incident side is diffracted by the multiple beam partitions to form multiple beams exiting from the exit side, and these multiple beams form at least one linear spot. The incident side can directly interface with the laser light emitted from the laser source. The beam partitions convert the laser light from the laser source into a linear spot and exit from the exit surface, reducing the number of optical elements in the laser and thus simplifying laser assembly. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the scanner provided for one embodiment of this specification.

[0011] Figure 2 This is a schematic diagram of the structure of a diffractive optical element provided for one embodiment of this specification.

[0012] Figure 3 This is a schematic diagram of a linear light spot emitted by a scanner, provided as an embodiment of this specification.

[0013] Figure 4 This is a schematic diagram of the scanner provided for another embodiment of this specification.

[0014] Explanation of reference numerals in the attached figures

[0015] 100, Diffractive optical element; 103, incident light surface; 105, emitting light surface; 110, beam partition; 111, focusing section; 112, diffraction section; 113, diffraction structure; 200, laser; 210, housing; 211, first housing; 212, second housing; 220, laser source; 300, scanner. Detailed Implementation

[0016] The technical solutions in the embodiments of this specification will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0017] In this specification, the accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to show the details of the local features more clearly.

[0018] Unless otherwise stated, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of this specification. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items. The singular forms "a," "the," and "the" as used in this specification and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise.

[0019] In the description of this specification, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this specification, "a plurality of" means two or more, unless otherwise explicitly specified.

[0020] In the description of this specification, the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "height," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description in this specification and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In other words, they should not be construed as limitations on this application.

[0021] In the description of this specification, unless otherwise expressly defined, the terms "installation," "connection," "joining," "fixing," "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this specification according to the specific circumstances.

[0022] In applications such as laser measurement and scanning, to achieve multi-line laser output, lasers in related technologies typically employ an optical path structure composed of multiple independent optical elements, including a laser source, lens assembly, diffractive optics (DOE), and wire-drawing elements such as Powell prisms or cylindrical lenses. Specifically, the laser emitted from the laser source needs to be collimated by a lens before entering the DOE for multi-beam splitting. Subsequently, the split laser beam needs to be expanded into lines by the wire-drawing optics, ultimately forming multiple linear light spots for subsequent positioning or scanning tasks.

[0023] However, the optical path of the laser in related technologies is relatively long, the number of components is large, the overall assembly is complex, and the installation accuracy requirements for the positional relationship between each optical element are high. Especially when the DOE and the wire lens are arranged independently, even slight deviations or assembly errors between the DOE and the wire lens can cause distortion, ghosting, or angular shift of the laser line, seriously affecting the measurement accuracy.

[0024] Therefore, it is necessary to propose an optical device with high structural integration and easy assembly to overcome the problems in related technologies.

[0025] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, this application provides a laser 200 for generating a line laser beam. The laser 200 may include a laser source 220 and a diffractive optical element 100. The laser source 220 generates the laser beam, and the diffractive optical element 100 focuses, splits, and draws the laser beam generated by the laser source 220 into a line-shaped light spot.

[0026] In this embodiment, the laser emitted by the laser source 220 directly illuminates the diffractive optical element 100. The diffractive optical element 100 of this embodiment can achieve focusing, beam splitting, and beam drawing functions for the laser, reducing the use of other optical elements such as lenses and Powell prisms in the laser 200. This simplifies the structure of the laser 200, improves assembly efficiency, and enhances the beam quality. This embodiment significantly simplifies the optical architecture of the laser 200 through the multifunctional integration of the diffractive optical element 100. Furthermore, the laser 200 with the diffractive optical element 100 reduces the number of optical elements, lowers the assembly requirements for the laser 200 to some extent, improves assembly efficiency, and helps reduce costs. Additionally, in this embodiment, the type of laser source 220 is not limited to meet different needs. For example, the laser source 220 can be a diode, which can emit a light spot of a certain wavelength towards the diffractive optical element 100.

[0027] One embodiment of this application provides a diffractive optical element 100 for a laser 200, the diffractive optical element 100 including a plurality of beam partitions 110 and having an incident light side and an exit light side; wherein, a laser beam incident on the diffractive optical element 100 from the incident light side is diffracted by the plurality of beam partitions 110 into a plurality of beams emitted from the exit light side; the plurality of beams form at least one linear light spot.

[0028] In this embodiment, multiple beam partitions 110 can form multiple corresponding incident regions on the incident side of the diffractive optical element 100, each incident region being able to receive laser light emitted from the laser source 220. Multiple exiting regions are correspondingly formed on the exiting side of the diffractive optical element 100, each exiting region being able to individually output the beams diffracted by the beam partitions 110, thereby forming at least one linear light spot on the target projection surface. In this embodiment, the beam partitions 110 can be regions with specific optical functions arranged in a specific manner on or inside the surface of the diffractive optical element 100. Each beam partition 110 can independently achieve focusing, beam splitting, and beam drawing functions for the incident laser, realizing multifunctional integration of a single element.

[0029] Furthermore, by setting multiple beam partitions 110, the diffractive optical element 100 can directly convert the single-point or small-area light spot emitted by the laser source 220 into a linear light spot with controllable width and length. Compared with the related technologies that require separate collimating lenses, DOE beam splitters, Powell prisms, or cylindrical lenses for step-by-step processing, the diffractive optical element 100 of this embodiment integrates the above-mentioned multiple functions, thereby effectively reducing the total number of optical elements and reducing the complexity of the optical path structure. In addition, since only a single diffractive optical element 100 needs to be assembled, the assembly accuracy requirements for the positional relationship of optical components are significantly reduced, and the problems of light spot deformation and quality degradation caused by slight misalignment or installation errors of components during laser assembly are reduced.

[0030] Therefore, this embodiment effectively improves the integration of the overall structure of the laser 200 through the multi-functional integrated design of the beam partition 110, thereby reducing the assembly difficulty of the laser 200 and improving the assembly efficiency.

[0031] In some embodiments, each beam partition 110 corresponds to a linear light spot; or, each linear light spot corresponds to at least one beam partition 110.

[0032] In this embodiment, the beam partition 110 and the linear light spot can be in one-to-one correspondence, that is, one beam partition 110 can emit one linear light spot; or one linear light spot can correspond to multiple beam partitions 110, in which case one linear light spot can be formed by the combination of multiple beams diffracted by multiple beam partitions.

[0033] In some embodiments, the laser 200 may further include a housing 210, which can fix the diffractive optical element 100 and the laser source 220. The laser source 220 is disposed on one side of the incident surface 103 of the diffractive optical element 100, that is, the incident surface 103 faces the laser source 220. The laser light generated by the laser source 220 can enter the incident surface 103 at the exit angle of the laser light emitted from the laser source 220, and then exit from the exit surface 105 at a corresponding angle after adjustment by the beam partition 110. In some embodiments, some light-transmitting elements, such as light-transmitting glass, may also be disposed between the laser source 220 and the diffractive optical element 100.

[0034] In this embodiment, the specific form of the housing 210 is not limited to accommodate different configurations. For example, the housing 210 may include a first housing 211 and a second housing 212. The first housing 211 is used to fix the laser source 220, and the second housing 212 is used to fix the diffractive optical element 100. The first housing 211 and the second housing 212 are then fixedly connected together, thereby fixing the relative position of the laser source 220 and the diffractive optical element 100 and ensuring good relative positional accuracy. In some embodiments, the housing 210 may also include an adjustment component, which is disposed between the first housing 211 and the second housing 212 and is used to adjust the relative position between the first housing 211 and the second housing 212, thereby adjusting the relative position of the laser source 220 and the diffractive optical element 100 and ensuring better laser imaging effect of the laser 200. In this embodiment, the specific form of the adjustment component is not limited. The adjustment component can both adjust the relative positions of the first housing 211 and the second housing 212 and ensure that the relative positions of the first housing 211 and the second housing 212 are stable after adjustment. Of course, in some embodiments, the first housing 211 and the second housing 212 can also be made as an integral structure, and this application does not make specific limitations.

[0035] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, each beam section 110 may include a focusing section 111 and a diffraction section 112; wherein the focusing section 111 is used to focus the laser beam, and the diffraction section 112 is used to diffract the laser to form multiple beams.

[0036] In some embodiments, the diffractive optical element 100 has an incident surface 103 located on the incident light side and an exiting surface 105 located on the exiting light side.

[0037] In some embodiments, the light-concentrating part 111 and the diffraction part 112 are integrated between the light-incident surface 103 and the light-emitting surface 105; or, the light-concentrating part 111 and the diffraction part 112 are integrated on the light-incident surface 103.

[0038] In this embodiment, the light-concentrating part 111 and the diffraction part 112 are not sequential and can be integrated on the light-incident surface 103 at the same time, or at any position between the light-incident surface 103 and the light-emitting surface 105.

[0039] In some embodiments, the light-concentrating part 111 is disposed near the light-emitting side relative to the diffraction part 112; or the diffraction part 112 is disposed near the light-emitting side relative to the light-concentrating part 111.

[0040] In this embodiment, the focusing part 111 and the diffraction part 112 have a front-to-back order. The focusing part 111 can be located in front of the diffraction part 112, that is, the focusing part 111 is closer to the light-incident side and the diffraction part 112 is closer to the light-outceasing side; or the diffraction part 112 can be located in front of the focusing part 111, that is, the diffraction part 112 is closer to the light-incident side and the focusing part 111 is closer to the light-outceasing side.

[0041] For example, when the diffraction section 112 is disposed near the light-emitting side relative to the focusing section 111, the diffraction section 112 is used to split the light beam focused by the focusing section 111 into multiple beams. The focusing section 111 is disposed on the side of the diffraction section 112 near the incident light surface 103, and the focusing section 111 focuses the laser light acting on the incident light surface 103 to achieve a focusing function. The focused light beam is split by the diffraction section 112, and the multiple beams are emitted through the light-emitting surface 105 respectively.

[0042] In one embodiment, the diffractive optical element 100 has a plurality of beam partitions 110 arranged together. Different beam partitions 110 can diffract the laser light from the laser source 220 into multiple beams emitted from the light-emitting surface 105. The beams emitted from the light-emitting surface 105 corresponding to different beam partitions 110 have different angles. The plurality of beam partitions 110 form a first arrangement direction, and the relative positions of the different beam partitions 110 are different, resulting in different positions of the multiple linear light spots converted from the different beam partitions 110. Each beam partition 110 corresponds to one linear light spot; that is, the linear light spots are also arranged along the first arrangement direction.

[0043] The diffractive optical element 100 can achieve focusing, beam splitting, and beam drawing functions through the focusing part 111 and the diffraction part 112. The focusing part 111 performs the focusing function, while the diffraction part 112 performs the beam splitting and beam drawing functions. Addressing the assembly difficulties of existing laser 200s due to their large number of optical components, such as low assembly efficiency, high cost, stringent assembly requirements, and the impact of even a single misaligned component on the overall effect, this embodiment solves these problems by incorporating the diffractive optical element 100 within the laser 200, which converts the light from the laser source 220 into multiple laser beams capable of forming multiple linear light spots. The focusing part 111 and the diffraction part 112 can be integrally formed or fabricated separately and then joined together to form the diffractive optical element 100.

[0044] In one embodiment, a plurality of beam partitions 110 are formed between the light-incident surface 103 and the light-exit surface 105 of the diffractive optical element 100. The light spot generated by the laser source 220 passes through the light-incident surface 103, the plurality of beam partitions 110 and the light-exit surface 105 in sequence, thereby emitting a laser at a certain angle from the light-exit surface 105. The laser can form a linear light spot at a specified position, wherein each beam partition 110 corresponds to a linear light spot.

[0045] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, the focusing portion 111 of each beam partition 110 is integrally formed into a focusing lens, and the structures of the focusing portions 111 are different among the multiple beam partitions 110.

[0046] In this embodiment, the laser source 220 can emit scattered light as a point source, and the scattered light illuminates the incident surface 103 of the diffractive optical element 100. The focusing parts 111 of some adjacent beam sections 110 are closely connected together to form a focusing lens, which can focus the laser light acting on the incident surface 103.

[0047] Furthermore, in this embodiment, the type of focusing lens formed by the combination is not limited to meet different needs. For example, the focusing portions 111 of adjacent beam sections 110 are closely connected together to form a Fresnel lens, or they can be combined to form a meta-lens.

[0048] Please see Figure 4In some embodiments, the diffractive optical element 100 may further include a focusing portion 111 and a diffractive portion 112. The focusing portion 111 may be a single focusing lens, while the diffractive portion 112 may be formed by combining multiple beam partitions 110. The focusing portion 111 and the diffractive portion 112 are then fixedly connected together using optical adhesive or other methods to ensure that the light focused by the focusing portion 111 can be split and drawn through the diffractive portion 112.

[0049] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, each diffraction section 112 includes a plurality of diffraction structures 113, which diffract multiple light beams from the incident light side onto the diffraction optical element 100; wherein the multiple light beams diffracted by the plurality of diffraction structures 113 of the same diffraction section 112 are used to form a linear light spot.

[0050] In this embodiment, each diffraction section 112 includes multiple diffraction structures 113. Light can pass through multiple diffraction structures 113 simultaneously, thereby achieving beam splitting and beam drawing. The beam partition 110 includes a focusing section 111 and diffraction sections 112. Each diffraction section 112 includes multiple diffraction structures 113. After a focusing section 111 focuses the light, it passes through multiple diffraction structures 113. Different diffraction structures 113 diffract and split the laser beam into multiple beams. Please refer to... Figure 3 Since the adjacent diffraction structures 113 are close to each other, the beams emitted by the diffraction structure 113 after diffraction will also be relatively close to each other. Multiple beams after diffraction by a diffraction section 112 are arranged in a linear pattern and can form a linear light spot.

[0051] In one specific embodiment, the diffraction structure 113 can adopt a sawtooth phase step structure. This structure is constructed by periodically forming several sawtooth-shaped protrusions or depressions in a transparent substrate. The sawtooth phase steps introduce different phase delays to the incident laser at different positions, thereby generating a predetermined diffraction angle in the outgoing light and achieving beam splitting. Specifically, the tilted surface of each sawtooth phase step slightly modulates the incident light wavefront, causing different phase shifts after passing through different sawtooth structures. These minute phase changes interfere and superimpose, ultimately forming multiple spatially distributed diffracted beams. Since the sawtooth structures are uniformly arranged along a one-dimensional direction on the substrate surface, the multiple diffracted beams are aligned along this direction, forming a continuous linear spot. In this embodiment, due to the periodic design of the sawtooth phase step structure, the diffraction angle and the number of beams can be flexibly controlled by adjusting the tilt angle and step height of the sawtooth structure according to the refractive index of the selected material and the incident wavelength, ensuring that the length and beam density of the formed linear spot meet specific application requirements.

[0052] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, the plurality of beam partitions 110 form a first alignment direction, and the plurality of diffraction structures 113 form a second alignment direction; wherein the first alignment direction is perpendicular to the second alignment direction.

[0053] In this embodiment, after focusing the laser emitted from the laser source 220, the diffractive optical element 100 can divide it into multiple sub-beams and emit them at different exit angles, so that the sub-beams emitted from the laser 200 form multiple linear spots at designated positions. The beam partitions 110 form a first alignment direction, and different beam partitions 110 can emit the laser at different angles. When the laser from the same beam partition 110 passes through different diffraction structures 113, it can form linear spots at designated positions along a second alignment direction.

[0054] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, the plurality of beam partitions 110 each include the same number of diffraction structures 113.

[0055] In this embodiment, each of the multiple beam partitions 110 includes the same number of diffraction structures 113, ensuring that the laser lines emitted by each beam partition 110 maintain the same beam density, thereby guaranteeing the uniformity of the laser lines. In this embodiment, the number of diffraction structures 113 in each beam partition 110 is not limited; therefore, the number of beams contained in each laser line generated by the laser 200 is also not limited, in order to meet various requirements.

[0056] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, multiple beams formed by the diffraction section 112 in each beam partition 110 form a linear light spot corresponding to the beam partition 110; wherein each beam forms a point light spot, and the point light spots of the multiple beams of the multiple diffraction structures 113 are arranged to form the linear light spot.

[0057] In this embodiment, the first arrangement direction is perpendicular to the second arrangement direction, and the extension direction of the linear light spots is consistent with the second arrangement direction. Different linear light spots generated by different beam partitions 110 are arranged along the first arrangement direction. In addition, the diffraction structure 113 can be arranged periodically along the second arrangement direction within a beam partition 110.

[0058] The formula for the line length of the incident beam that is spread into a linear spot by beam partitioning 110 is:

[0059] sinθ=mλ / d;

[0060] Where θ is the diffraction angle, which is the angle along the length of the linear light spot; m is the diffraction order, which is the number of points in the linear light spot; d is the length of a beam partition 110; and λ is the wavelength of the light.

[0061] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, in the first arrangement direction, the multiple beams diffracted by the same beam partition 110 have the same exit angle with the light-emitting surface 105, while the exit angles between different beam partitions 110 are different. Specifically, the multiple beams of one beam partition 110 have the same exit angle with the light-emitting surface 105, so that the linear light spots generated by the same diffraction section 112 are accurately arranged.

[0062] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, a plurality of beam partitions 110 are used to form a plurality of parallel linear light spots; wherein the spacing between the plurality of parallel linear light spots is equal.

[0063] In this embodiment, the linear light spots generated by the entire diffractive optical element 100 extend along the second arrangement direction, and multiple linear light spots are evenly distributed along the first arrangement direction, thereby realizing the action of forming multi-line laser at a specified position, so that the scanner 300 can acquire the three-dimensional coordinate data of the surface of the object being measured.

[0064] Please see Figure 1 This application also provides a scanner 300, which includes the laser 200 as described above.

[0065] In this embodiment, the scanner 300 can scan an object using a linear light spot generated by the laser 200 to obtain three-dimensional coordinate data of the surface of the object being measured.

[0066] The functions and effects of this embodiment can be explained by referring to the foregoing implementation methods, and will not be repeated here.

[0067] It is understood that in the various embodiments of this specification, the sequence number of each process does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this specification.

[0068] It is understood that the various implementation methods described in this specification can be implemented individually or in combination, and the embodiments in this specification are not limited in this respect.

[0069] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the aforementioned method implementations, and will not be repeated here.

[0070] The above description is merely a specific embodiment of this specification, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this specification should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A diffractive optical element for a laser, characterized in that, The diffractive optical element includes multiple beam partitions and has an incident light side and an exit light side; The laser light incident on the diffractive optical element from the incident light side is diffracted by the multiple beam partitions into multiple beams emitted from the exit light side; the multiple beams form at least one linear light spot.

2. The diffractive optical element according to claim 1, characterized in that, Each beam partition corresponds to a linear spot; or, each linear spot corresponds to at least one beam partition.

3. The diffractive optical element according to claim 1, characterized in that, Each beam section includes a focusing section and a diffraction section; wherein the focusing section is used to focus the laser beam, and the diffraction section is used to diffract the laser beam to form multiple beams.

4. The diffractive optical element according to claim 3, characterized in that, The diffractive optical element has an incident surface located on the incident light side and an exiting surface located on the exiting light side; The light-concentrating part and the diffraction part are integrated between the light-incident surface and the light-exiting surface; or, the light-concentrating part and the diffraction part are integrated on the light-incident surface.

5. The diffractive optical element according to claim 3, characterized in that, The light-concentrating part is positioned relative to the diffraction part, closer to the light-emitting side; or The diffraction section is positioned relative to the focusing section on the light-emitting side.

6. The diffractive optical element according to claim 3, characterized in that, The focusing section of each beam zone forms a focusing lens as a whole, and the structure of the focusing section is different between multiple beam zones.

7. The diffractive optical element according to claim 3, characterized in that, Each diffraction section includes multiple diffraction structures, and the diffraction optical element incident from the incident light side is diffracted by the diffraction section to form multiple light beams; wherein, the multiple light beams formed by the diffraction of multiple diffraction structures of the same diffraction section are used to form a linear light spot.

8. The diffractive optical element according to claim 7, characterized in that, The plurality of beam partitions form a first arrangement direction, and the plurality of diffraction structures form a second arrangement direction; Wherein, the first arrangement direction is perpendicular to the second arrangement direction.

9. The diffractive optical element according to claim 7, characterized in that, Each of the multiple beam partitions includes the same number of diffraction structures.

10. The diffractive optical element according to claim 8, characterized in that, In the first arrangement direction, the multiple beams formed by the diffraction of the same beam partition have the same exit angle with the light-emitting surface, while the exit angles of different beam partitions are different.

11. The diffractive optical element according to claim 1, characterized in that, Multiple beam partitions are used to form multiple parallel linear light spots; wherein the spacing between the multiple parallel linear light spots is equal.

12. A laser, characterized in that, include: The diffractive optical element according to any one of claims 1-11.

13. A scanner, characterized in that, Includes the laser as described in claim 12.

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