Automatic switching and pressure drop preventing automatic cleaning device for filter
By designing an automatic filter switching and anti-pressure drop automatic cleaning device, which uses pneumatic valves and pressure sensors to achieve automatic filter switching and cleaning, the problems of filter clogging and impurity falling off are solved, ensuring the cleanliness and efficient operation of the filter.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHEJIANG DONGKAI SEMICON TECH CO LTD
- Filing Date
- 2025-05-20
- Publication Date
- 2026-05-12
AI Technical Summary
Existing filters are prone to clogging after use and are difficult to clean, causing impurities to fall into the pipes and affecting the normal use of the filters.
Design an automatic filter switching and pressure drop prevention automatic cleaning device. By setting up a first delivery pipeline and a second delivery pipeline, the automatic switching and cleaning of the filter is realized by using a pneumatic valve and a pressure sensor. Nitrogen and pure water are used for cleaning, and impurities are discharged through the waste liquid pipeline to ensure the cleanliness of the filter interior.
It enables automatic cleaning and drying of the filter, preventing impurities from entering the new filter, maintaining the filter in optimal condition, facilitating filter element replacement, and improving the filter's efficiency and cleanliness.
Smart Images
Figure CN224220934U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of filter cleaning, and in particular to an automatic filter switching and pressure drop prevention automatic cleaning device. Background Technology
[0002] After use, semiconductor polishing slurry needs to be filtered. However, filters are prone to clogging after long-term use. Therefore, it is necessary to install two filters and use them alternately.
[0003] However, current filters are not easy to clean after use, and a lot of grinding fluid and impurities still stick to the filter. If they are not cleaned and replaced, the impurities may fall into the pipeline. Utility Model Content
[0004] Purpose of the utility model: The purpose of this utility model is to solve the problems in the prior art and provide an automatic filter switching and anti-pressure drop automatic cleaning device.
[0005] Technical solution: A filter automatic switching and pressure drop prevention automatic cleaning device is proposed.
[0006] Including the first delivery pipeline and the second delivery pipeline;
[0007] One end of the first and second conveying pipelines is connected to the supply source, and the other end of the first and second conveying pipelines is connected to the supply pipeline.
[0008] The first conveying pipeline is equipped with a first filter, and the second conveying pipeline is equipped with a second filter;
[0009] The input ends of the first and second conveying pipelines are respectively connected to the nitrogen pipeline and the pure water pipeline, and the output ends of the first and second conveying pipelines are respectively connected to the waste liquid pipeline.
[0010] A first pressure sensor is connected to one end of the first delivery pipeline and the second delivery pipeline, and a second pressure sensor is connected to the other end of the first delivery pipeline and the second delivery pipeline.
[0011] Preferably, a first pneumatic valve and a second pneumatic valve are sequentially installed on the first delivery pipeline from the direction of the supply source to the direction of the supply pipeline.
[0012] Preferably, a third pneumatic valve and a fourth pneumatic valve are sequentially installed on the second delivery pipeline from the supply source to the supply pipeline.
[0013] Preferably, a fifth pneumatic valve is provided on the first delivery pipeline in parallel with the first pneumatic valve;
[0014] The second delivery pipeline is equipped with a sixth pneumatic valve that is connected in parallel with the third pneumatic valve.
[0015] Preferably, the nitrogen pipeline includes a first nitrogen inlet pipe and a second nitrogen inlet pipe that are connected to external nitrogen.
[0016] The first nitrogen input pipe is connected to the input end of the first filter via a first multi-purpose pipe;
[0017] The second nitrogen inlet pipe is connected to the inlet of the second filter via a second multi-purpose pipe.
[0018] Preferably, the first nitrogen input pipe is provided with a seventh pneumatic valve, and the second nitrogen input pipe is provided with an eighth pneumatic valve.
[0019] Preferably, the pure water pipeline includes a first pure water inlet pipe and a second pure water inlet pipe that are connected to external pure water.
[0020] The first pure water input pipe is connected to the input end of the first filter through a first multi-purpose pipe;
[0021] The second pure water input pipe is connected to the input end of the second filter through the second multi-purpose pipe.
[0022] Preferably, the first pure water input pipe is equipped with a ninth pneumatic valve, and the second pure water input pipe is equipped with a tenth pneumatic valve.
[0023] Preferably, the first multi-purpose pipeline is provided with an eleventh pneumatic valve, and the second multi-purpose pipeline is provided with a twelfth pneumatic valve.
[0024] Preferably, the liquid output end of the first filter is connected to the waste liquid pipeline through the first drain pipe;
[0025] The wastewater discharge end of the first filter is connected to the waste liquid pipeline through the second drain pipe;
[0026] The first drain pipe is equipped with a thirteenth pneumatic valve, and the second drain pipe is equipped with a fourteenth pneumatic valve;
[0027] The liquid output end of the second filter is connected to the waste liquid pipeline through the third drain pipe;
[0028] The wastewater discharge end of the second filter is connected to the waste liquid pipeline through the fourth drain pipe;
[0029] The third drain pipe is equipped with a fifteenth pneumatic valve, and the fourth drain pipe is equipped with a sixteenth pneumatic valve.
[0030] Beneficial effects: When switching from the first conveying pipe to the second conveying pipe or vice versa, both ends of the closed pipe can be sealed, allowing for cleaning and drying of the closed pipe and the filter. This enables impurities and grinding fluid to be discharged separately into the waste liquid pipe. Simultaneously, the internal structure of the filter is cleaned, preventing accumulated waste and grinding fluid from entering the replaced filter element, thus maintaining the filter in optimal condition. After cleaning the filter element, manual replacement is easier and more efficient. Attached Figure Description
[0031] Figure 1 This is a schematic diagram of the structure of this utility model;
[0032] Figure 2 This is a schematic diagram of the structure of the first filter and the second filter of this utility model.
[0033] Figure label:
[0034] 1. First delivery pipeline; 2. Second delivery pipeline; 3. Supply pipeline; 4. First filter; 5. Nitrogen pipeline; 6. Pure water pipeline; 7. Waste liquid pipeline; 8. First pneumatic valve; 9. Second pneumatic valve; 10. Second pressure sensor; 11. Supply source; 12. Third pneumatic valve; 13. Fourth pneumatic valve; 14. Fifth pneumatic valve; 15. Sixth pneumatic valve; 16. First nitrogen input pipeline; 17. Second nitrogen input pipeline; 18. First multi-purpose pipeline; 19. Second multi-purpose pipeline; 20. 21. Second filter; 22. Seventh pneumatic valve; 23. Eighth pneumatic valve; 24. First pure water inlet pipe; 25. Second pure water inlet pipe; 26. Ninth pneumatic valve; 27. Tenth pneumatic valve; 28. Eleventh pneumatic valve; 29. Twelfth pneumatic valve; 30. First drain pipe; 31. Thirteenth pneumatic valve; 32. Second drain pipe; 33. Fourteenth pneumatic valve; 34. Third drain pipe; 35. Fourth drain pipe; 36. Fifteenth pneumatic valve; 37. Sixteenth pneumatic valve; 38. First pressure sensor. Detailed Implementation
[0035] To make the technical solution of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0036] Example 1
[0037] To make the technical solution of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0038] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.
[0039] In response to the problems existing in the current technology, combined with Figure 1-2 An automatic filter switching and pressure drop prevention automatic cleaning device.
[0040] Includes a first conveying pipeline 1 and a second conveying pipeline 2;
[0041] One end of the first conveying pipeline 1 and the second conveying pipeline 2 is connected to the supply source 11, and the other end of the first conveying pipeline 1 and the second conveying pipeline 2 is connected to the supply pipeline 3.
[0042] The first conveying pipeline 1 is provided with a first filter 4, and the second conveying pipeline 2 is provided with a second filter 20;
[0043] The input ends of the first conveying pipeline 1 and the second conveying pipeline 2 are respectively connected to the nitrogen pipeline 5 and the pure water pipeline 6, and the output ends of the first conveying pipeline 1 and the second conveying pipeline 2 are respectively connected to the waste liquid pipeline 7.
[0044] A first pressure sensor 37 is connected to one end of the first delivery pipeline 1 and the second delivery pipeline 2, and a second pressure sensor 10 is connected to the other end of the first delivery pipeline 1 and the second delivery pipeline 2. The first pressure sensor 37 and the second pressure sensor 10 can be electrically connected to a controller (not shown in the figure). When the pressure difference between the first pressure sensor 37 and the second pressure sensor 10 obtained by the controller is greater than a preset threshold, an alarm (not shown in the figure) can remind the staff to replace the filter. This solution is existing technology and will not be described in detail here.
[0045] In some specific embodiments, a first pneumatic valve 8 and a second pneumatic valve 9 are sequentially arranged on the first delivery pipeline 1 from the direction of the supply source 11 to the direction of the supply pipeline 3.
[0046] In some specific embodiments, a third pneumatic valve 12 and a fourth pneumatic valve 13 are sequentially provided on the second delivery pipeline 2 from the direction of the supply source 11 to the direction of the supply pipeline 3.
[0047] Specifically, when the first filter 4 is clogged, the first pneumatic valve 8 and the second pneumatic valve 9 can be closed, the third pneumatic valve 12 and the fourth pneumatic valve 13 can be opened to open the second delivery pipeline 2, and the first delivery pipeline 1 can be closed to clean the first delivery pipeline 1, while the second delivery pipeline 2 is started at the same time.
[0048] Wastewater generated during cleaning can be discharged through waste liquid pipe 7.
[0049] In some specific embodiments, the first delivery pipeline 1 is provided with a fifth pneumatic valve 14 which is connected in parallel with the first pneumatic valve 8;
[0050] The second delivery pipeline 2 is equipped with a sixth pneumatic valve 15, which is connected in parallel with the third pneumatic valve 12.
[0051] Specifically, when switching from the first delivery line 1 to the second delivery line 2, the sixth pneumatic valve 15 is first opened to fill the second delivery line 2 with the liquid to be filtered at a small flow rate. When the grinding liquid is full in the second delivery line 2, the sixth pneumatic valve 15 is closed and the third pneumatic valve 12 and the fourth pneumatic valve 13 are opened. This is to avoid the second delivery line 2 being empty when the third pneumatic valve 12 and the fourth pneumatic valve 13 are opened directly, which would generate too much kinetic energy and damage the second filter 20 and the second delivery line 2.
[0052] When switching from the second delivery line 2 to the first delivery line 1, the principle is the same as the above scheme. The liquid to be filtered is filled into the first delivery line 1 at a small flow rate through the fifth pneumatic valve 14.
[0053] In some specific embodiments, the nitrogen pipeline 5 includes a first nitrogen input pipe 16 and a second nitrogen input pipe 17 that are connected to external nitrogen.
[0054] The first nitrogen input pipe 16 is connected to the input end of the first filter 4 through the first multi-purpose pipe 18;
[0055] The second nitrogen inlet pipe 17 is connected to the inlet of the second filter 20 via the second multi-purpose pipe 19.
[0056] In some specific embodiments, the first nitrogen input pipe 16 is provided with a seventh pneumatic valve 21, and the second nitrogen input pipe 17 is provided with an eighth pneumatic valve 22.
[0057] In some specific embodiments, the pure water pipeline 6 includes a first pure water inlet pipe 23 and a second pure water inlet pipe 24 that are connected to external pure water.
[0058] The first pure water input pipe 23 is connected to the input end of the first filter 4 through the first multi-purpose pipe 18;
[0059] The second pure water input pipe 24 is connected to the input end of the second filter 20 through the second multi-purpose pipe 19.
[0060] In some specific embodiments, the first pure water input pipe 23 is provided with a ninth pneumatic valve 25, and the second pure water input pipe 24 is provided with a tenth pneumatic valve 26.
[0061] In some specific embodiments, the first multi-purpose pipeline 18 is provided with an eleventh pneumatic valve 27, and the second multi-purpose pipeline 19 is provided with a twelfth pneumatic valve 28.
[0062] In some specific embodiments, the liquid output end of the first filter 4 is connected to the waste liquid pipe 7 through the first drain pipe 29;
[0063] The sewage discharge end of the first filter 4 is connected to the waste liquid pipeline 7 through the second drain pipe 31;
[0064] The first drain pipe 29 is equipped with a thirteenth pneumatic valve 30, and the second drain pipe 31 is equipped with a fourteenth pneumatic valve 32;
[0065] The liquid output end of the second filter 20 is connected to the waste liquid pipe 7 through the third drain pipe 33;
[0066] The sewage outlet of the second filter 20 is connected to the waste liquid pipeline 7 through the fourth drain pipe 34;
[0067] The third drain pipe 33 is equipped with a fifteenth pneumatic valve 35, and the fourth drain pipe 34 is equipped with a sixteenth pneumatic valve 36.
[0068] In practice, the first conveying pipeline 1 and the second conveying pipeline 2 are blown in the same way. The first conveying pipeline is used as an example below:
[0069] When it is necessary to purge the first delivery pipeline 1, with the first pneumatic valve 8, the second pneumatic valve 9, and the fifth pneumatic valve 14 closed, the seventh pneumatic valve 21, the eleventh pneumatic valve 27, the thirteenth pneumatic valve, and the fourteenth pneumatic valve 32 are opened to allow gas to enter the first filter 4 and purge the filter element. Although the filter element is clogged, there will still be some small gaps. Through gas purging, the excess waste gas, grinding liquid, and small particles generated are allowed to enter the waste liquid pipeline 7 through the thirteenth pneumatic valve 30 and the fourteenth pneumatic valve 32, respectively.
[0070] Similarly, the first delivery pipeline 1 and the second delivery pipeline 2 are cleaned with pure water in the same way. The following example uses the first delivery pipeline 1:
[0071] When it is necessary to flush the first delivery pipeline 1 with pure water, with the first pneumatic valve 8, the second pneumatic valve 9, and the fifth pneumatic valve 14 closed, the ninth pneumatic valve 25, the eleventh pneumatic valve 27, the thirteenth pneumatic valve, and the fourteenth pneumatic valve 32 are opened to allow pure water to enter the first filter 4 to clean the filter element. Although the filter element is clogged, there will still be some small gaps. Through flushing with pure water, the excess waste gas, grinding liquid, and small particles generated will enter the waste liquid pipeline 7 through the thirteenth pneumatic valve 30 and the fourteenth pneumatic valve 32, respectively.
[0072] In practical implementation, the first filter 4 and the second filter 20 are existing conventional three-hole filters, such as... Figure 2 As shown, the two sides are the input end and the output end, respectively, and the bottom end is the drain end. When gas and pure water are input, the cleaning liquid and the blown gas can be discharged through the second drain pipe 31 and the first drain pipe 29, respectively, to rinse and blow air on the outer and inner sides of the filter element, respectively.
[0073] In addition, the blowing and pure water processes can be performed alternately, with the last process ending with blowing to dry the first filter 4 and the first delivery pipeline 1 as much as possible, so that employees can manually replace the filter element.
[0074] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.
Claims
1. A filter automatic switching and anti-pressure drop automatic cleaning device, characterized in that, It includes a first delivery pipeline (1) and a second delivery pipeline (2); One end of the first conveying pipeline (1) and the second conveying pipeline (2) is connected to the supply source (11), and the other end of the first conveying pipeline (1) and the second conveying pipeline (2) is connected to the supply pipeline (3); The first conveying pipeline (1) is provided with a first filter (4), and the second conveying pipeline (2) is provided with a second filter (20). The input ends of the first conveying pipeline (1) and the second conveying pipeline (2) are respectively connected to the nitrogen pipeline (5) and the pure water pipeline (6), and the output ends of the first conveying pipeline (1) and the second conveying pipeline (2) are respectively connected to the waste liquid pipeline (7); A first pressure sensor (37) is connected to one end of the first delivery pipeline (1) and the second delivery pipeline (2), and a second pressure sensor (10) is connected to the other end of the first delivery pipeline (1) and the second delivery pipeline (2).
2. The automatic filter switching and anti-pressure drop automatic cleaning device according to claim 1, characterized in that, A first pneumatic valve (8) and a second pneumatic valve (9) are sequentially installed on the first delivery pipeline (1) from the direction of the supply source (11) to the direction of the supply pipeline (3).
3. The automatic filter switching and anti-pressure drop automatic cleaning device according to claim 2, characterized in that, A third pneumatic valve (12) and a fourth pneumatic valve (13) are sequentially installed on the second delivery pipeline (2) from the direction of the supply source (11) to the direction of the supply pipeline (3).
4. The automatic filter switching and anti-pressure drop automatic cleaning device according to claim 3, characterized in that, The first delivery pipeline (1) is provided with a fifth pneumatic valve (14) connected in parallel with the first pneumatic valve (8); The second delivery pipeline (2) is provided with a sixth pneumatic valve (15) connected in parallel with the third pneumatic valve (12).
5. The automatic filter switching and anti-pressure drop automatic cleaning device according to claim 1, characterized in that, The nitrogen pipeline (5) includes a first nitrogen input pipe (16) and a second nitrogen input pipe (17) that are connected to the outside nitrogen. The first nitrogen input pipe (16) is connected to the input end of the first filter (4) through the first multi-purpose pipe (18); The second nitrogen inlet pipe (17) is connected to the inlet of the second filter (20) through the second multi-purpose pipe (19).
6. The automatic filter switching and anti-pressure drop automatic cleaning device according to claim 5, characterized in that, The first nitrogen input pipe (16) is provided with a seventh pneumatic valve (21), and the second nitrogen input pipe (17) is provided with an eighth pneumatic valve (22).
7. The automatic filter switching and anti-pressure drop automatic cleaning device according to claim 1, characterized in that, The pure water pipeline (6) includes a first pure water inlet pipe (23) and a second pure water inlet pipe (24) that are connected to external pure water. The first pure water input pipe (23) is connected to the input end of the first filter (4) through the first multi-purpose pipe (18); The second pure water input pipe (24) is connected to the input end of the second filter (20) through the second multi-purpose pipe (19).
8. The automatic filter switching and anti-pressure drop automatic cleaning device according to claim 7, characterized in that, The first pure water input pipe (23) is equipped with a ninth pneumatic valve (25), and the second pure water input pipe (24) is equipped with a tenth pneumatic valve (26).
9. The automatic filter switching and anti-pressure drop automatic cleaning device according to claim 5 or 7, characterized in that, The first multi-purpose pipeline (18) is equipped with an eleventh pneumatic valve (27), and the second multi-purpose pipeline (19) is equipped with a twelfth pneumatic valve (28).
10. The automatic filter switching and anti-pressure drop automatic cleaning device according to claim 1, characterized in that, The liquid output end of the first filter (4) is connected to the waste liquid pipe (7) through the first drain pipe (29); The sewage discharge end of the first filter (4) is connected to the waste liquid pipeline (7) through the second drain pipe (31); The first drain pipe (29) is equipped with a thirteenth pneumatic valve (30), and the second drain pipe (31) is equipped with a fourteenth pneumatic valve (32). The liquid output end of the second filter (20) is connected to the waste liquid pipe (7) through the third drain pipe (33); The sewage outlet of the second filter (20) is connected to the waste liquid pipe (7) through the fourth drain pipe (34); The third drain pipe (33) is equipped with a fifteenth pneumatic valve (35), and the fourth drain pipe (34) is equipped with a sixteenth pneumatic valve (36).