Positioning reference device and coating equipment

Abstract

The utility model discloses a positioning reference device and coating equipment, and the positioning reference device comprises an adjusting assembly and a testing assembly, the adjusting assembly comprises an adjusting surface, and the adjusting surface is used for abutting against a reference plane and supporting the reference plane; the test assembly comprises a plurality of displacement detection pieces, the plurality of displacement detection pieces are respectively used for detecting the heights of different positions of the reference plane, and the adjustment of the adjusting surface is indicated through the heights of the plurality of positions of the reference plane, so that the adjusting surface forms a positioning reference; and a positioning reference formed by the adjusting surface is used for indicating position adjustment of an external component. The positioning reference device and the coating equipment disclosed by the utility model are used for forming the positioning reference to indicate the position adjustment of the external part, and the adjustment steps of the external part are simplified.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a positioning reference device and a coating equipment. Background Technology

[0002] Coating equipment is commonly used to process layered structures such as perovskite liquid films. The substrate to be coated is placed on the coating station of the coating equipment, and the coating head applies a slurry to the substrate at the coating station to form a layered structure such as a perovskite liquid film. Existing coating equipment also includes a cleaning station located beside the coating station to remove excess slurry. To ensure coating efficiency, some coating equipment has multiple coating stations.

[0003] In coating equipment, the alignment of the coating and cleaning stations affects the quality of the resulting layer structure. Therefore, before coating operations, it is necessary to ensure that the surfaces of multiple coating stations and the cleaning station are on the same horizontal plane. In existing coating equipment, calibration devices are typically used to calibrate both the cleaning and coating stations separately to ensure that the surfaces of all stations are at the same height. However, this method of multiple calibrations is cumbersome and time-consuming. Utility Model Content

[0004] The purpose of this invention is to provide a positioning reference device and a coating equipment for forming a positioning reference to indicate the position adjustment of external components, thereby simplifying the adjustment steps for external components.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A positioning reference device, comprising:

[0007] An adjustment assembly includes an adjustment surface for contacting and supporting a reference plane.

[0008] The test assembly includes multiple displacement detection elements, each of which is used to detect the height at different positions on a reference plane. The height at these multiple positions on the reference plane is used to indicate the adjustment of the adjustment surface so that the adjustment surface forms a positioning reference.

[0009] The positioning reference formed by the adjustment surface is used to indicate the position adjustment of external components.

[0010] Preferably, the test assembly includes a calibration unit for calibrating the position of the displacement detector. The calibration unit includes an adjustment plate and a calibration component connected to the adjustment plate and used to adjust the position of the adjustment plate. The displacement detector is mounted on the adjustment plate, and the calibration component adjusts the position of the adjustment plate to calibrate the displacement detector.

[0011] Preferably, the calibration unit further includes a fixing plate, and a plurality of calibration elements pass through the fixing plate and abut against the adjusting plate. The mounting position of the calibration elements on the fixing plate is adjusted to drive the adjusting plate to deflect and calibrate the displacement detection element.

[0012] Preferably, the calibration component includes a stud with external threads, and the stud of the calibration component is threadedly engaged with the fixing plate;

[0013] The end face of the displacement detection element is a plane.

[0014] Preferably, the test assembly includes a base and a movable seat; the displacement detection element is mounted on the movable seat, and the movable seat is movably mounted on the base so that the movable seat can drive the displacement detection element to move relative to the base.

[0015] Preferably, the adjustment assembly includes an adjustment seat and a plurality of adjustment members connected to the adjustment seat. The upper end surface of the adjustment seat forms the adjustment surface, and the plurality of adjustment members respectively abut against the lower end of the adjustment seat and are used to adjust the position of the adjustment seat so that the adjustment surface on the adjustment seat forms a positioning reference.

[0016] Preferably, the adjusting member includes a fixing part and an adjusting part, the adjusting part abutting against the adjusting seat, and the adjusting part being movably connected to the fixing part so that the height of the adjusting member is adjustable.

[0017] Preferably, the fixing part is provided with a first connecting part, and the adjusting seat is provided with a second connecting part corresponding to the first connecting part. The first connecting part and the corresponding second connecting part are connected by an elastic element, and the elastic element pulls the adjusting seat to abut tightly against the adjusting part.

[0018] Preferably, the adjusting seat is provided with a recessed groove formed on the upper end surface of the adjusting seat, the recessed groove being used to avoid external components;

[0019] The adjustment element is provided in at least three parts.

[0020] A coating apparatus, comprising:

[0021] Coating station;

[0022] Cleaning station;

[0023] Any of the above positioning reference devices;

[0024] A coating head is movably installed inside a coating device and is connected to a detection sensor. The detection sensor is used to detect the position of the adjustment surface in the positioning reference device and obtain a standard value. The detection sensor detects the position of the coating station and the cleaning station and obtains a detection value. The detection values ​​corresponding to the coating station and the cleaning station are the same as the standard value.

[0025] Compared with the prior art, the beneficial effects of this utility model include at least the following:

[0026] By using the combination of test components and adjustment components, the adjustment surface can form a positioning reference. The positioning reference can be used to indicate the position adjustment of external components. The external components are adjusted with this positioning reference as the standard, realizing simple and quick adjustment of the external components without the need for calibration with a specific calibration device. Furthermore, the use of this positioning reference for calibration of multiple external components can also improve the high consistency of multiple external components and improve the positional accuracy of multiple external components. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the positioning reference device according to an embodiment of the present invention;

[0028] Figure 2 This is a partial structural schematic diagram of the positioning reference device according to an embodiment of the present utility model;

[0029] Figure 3 This is a partial structural schematic diagram of the positioning reference device according to another perspective of this utility model embodiment;

[0030] Figure 4 This is a schematic diagram of the structure of the adjustment component according to an embodiment of the present invention;

[0031] Figure 5 This is a schematic diagram of the adjustment component from another perspective according to an embodiment of the present utility model;

[0032] Figure 6 This is a partial structural schematic diagram of the coating equipment according to an embodiment of the present invention.

[0033] In the diagram: 100, Positioning reference device; 1, Planar reference; 11, Reference plane; 2, Adjustment component; 21, Adjustment surface; 22, Adjustment seat; 221, Second connecting part; 222, Recessed groove; 23, Adjustment component; 231, Fixing part; 2311, First connecting part; 232, Adjustment part; 24, Elastic component; 3, Test component; 31, Displacement detection component; 32, Calibration unit; 321, Adjustment plate; 322, Calibration component; 323, Fixing plate; 33, Base; 34, Moving seat; 200, Coating station; 300, Cleaning station; 400, Marble platform. Detailed Implementation

[0034] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0035] The terms used to describe position and direction in this utility model are illustrated with the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this utility model.

[0036] like Figure 1 As shown, this utility model provides a positioning reference device 100, which provides a positioning reference. This positioning reference can serve as a reference for external components to indicate the position adjustment of the external components. These external components can be components such as coating stations and cleaning stations in a coating equipment. The positioning reference device 100 includes an adjustment component 2 and a testing component 3. The adjustment surface 21 in the adjustment component 2 can abut against and support a preset reference plane 11. The testing component 3 can test the height of the reference plane 11 at various points after it is supported by the adjustment component 2. When the adjustment surface 21 is a horizontal plane, the height of all points on the reference plane 11 is consistent. When the adjustment surface 21 is not a horizontal plane, for example, when the adjustment surface 21 is tilted, the reference plane 11 will also tilt after it comes into contact with the adjustment surface 21, resulting in inconsistent heights at different points on the reference plane 11. In this case, the adjustment surface 21 can be adjusted according to the differences in height at different points on the reference plane 11 to make the height of all points on the reference plane 11 consistent. At this time, the adjustment surface 21 is adjusted to a horizontal plane, and the adjustment surface 21 can be used as a positioning reference. The reference plane 11 can be the surface of the planar reference 1. The planar reference 1 is a fixture with a high-precision plane, such as a plane gauge, where the reference plane 11 is selected from the surface of a parallel gauge. Alternatively, the planar reference 1 can also be other precision measuring instruments used to measure the surface flatness of parts, which have a highly flat surface, and this highly flat surface can serve as the reference plane 11.

[0037] Reference Figure 2 and Figure 3The test assembly 3 includes a base 33 and multiple displacement detection elements 31 indirectly mounted on the base 33. The multiple displacement detection elements 31 are used to detect the height of different positions on the reference plane 11. The displacement detection elements 31 can be high-precision displacement sensors. The end face of the displacement detection element 31 adjacent to the reference plane 11 can be flat. When using the displacement detection elements 31 to detect the height of the reference plane 11, the position of the displacement detection elements 31 can be calibrated first to eliminate tilting and errors caused by factors such as the processing and installation of the displacement detection elements 31.

[0038] To facilitate the calibration of the displacement detection element 31, the test assembly 3 may be equipped with a calibration unit 32 for correcting the position of the displacement detection element 31. The number of calibration units 32 may be the same as the number of displacement detection elements 31, and each calibration unit 32 corresponds one-to-one with a displacement detection element 31, with each calibration unit 32 used to calibrate its corresponding displacement detection element 31; alternatively, in other embodiments, one calibration unit 32 may be used to calibrate multiple displacement detection elements 31. To ensure that each displacement detection element 31 can be calibrated individually to ensure the accurate position of each displacement detection element 31, in this embodiment, the calibration unit 32 corresponds one-to-one with the displacement detection element 31.

[0039] Reference Figure 3 The calibration unit 32 may include an adjusting plate 321 and a calibration component 322 connected to the adjusting plate 321 and used to adjust the position of the adjusting plate 321. It may also include a fixing plate 323. The fixing plate 323 can be kept fixed, and it remains relatively independent of the adjusting plate 321, with a gap between them. The adjusting plate 321 is used to mount the displacement detection component 31, and the position of the adjusting plate 321 and the displacement detection component 31 can be kept relatively fixed. Therefore, when the adjusting plate 321 moves, it can move the displacement detection component 31. The calibration component 322 can be used to adjust the position of the adjusting plate 321 to adjust the position of the displacement detection component 31 mounted on the adjusting plate 321, thereby calibrating the displacement detection component 31.

[0040] Specifically, multiple calibration elements 322 pass through the fixed plate 323 and abut against the edge of the adjusting plate 321. The calibration elements 322 can be fixed to the fixed plate 323 in multiple positions. When the calibration elements 322 move downward relative to the fixed plate 323, they drive the adjusting plate 321 located below the fixed plate 323 to move, thereby adjusting the position of the adjusting plate 321. During adjustment, the calibration element 322 located on the first side of the adjusting plate 321 can move downward and drive the first side of the adjusting plate 321 downward. When the first side of the adjusting plate 321 moves downward, the adjusting plate 321 rotates, and the second side of the adjusting plate 321 opposite to the first side moves upward. When adjusting the downward movement of the calibration element 322 located on the first side of the adjusting plate 321, the calibration element 322 located on the second side of the adjusting plate 321 can move upward to make room for the second side of the adjusting plate 321 to move upward. When the adjusting plate 321 rotates, the displacement detection element 31 located on the adjusting plate 321 rotates synchronously, compensating for any tilt or error of the displacement detection element 31. The calibration element 322 may include a stud with external threads, which is threaded into the fixing plate 323. Rotating the calibration element 322 adjusts its installation position relative to the fixing plate 323. Two calibration elements 322 may be provided, symmetrically arranged relative to the displacement detection element 31. The middle portion of the adjusting plate 321 is used to mount the displacement detection element 31, and the adjusting plate 321 can rotate around this middle portion.

[0041] To detect whether the displacement detection element 31 has tilting or errors, a precision fixture such as a level can be used for detection. In this embodiment, to reduce the need for a precision fixture, the displacement detection element 31 can be detected using the aforementioned planar reference 1 with a reference plane 11. Specifically, one end of the planar reference 1 can be placed on a plane, such as a marble platform in a coating device, and the other end of the planar reference 1 is located above the displacement detection element 31 and spaced apart from it. When the displacement detection element 31 is accurately positioned, the distance between the horizontal end face of the displacement detection element 31 and the reference plane 11 of the planar reference 1 is consistent at all points. When the displacement detection element 31 is not accurately positioned, the distance between the horizontal end face of the displacement detection element 31 and the reference plane 11 is inconsistent at all points. In this case, the corresponding calibration unit 32 can be adjusted according to the different distances between the displacement detection element 31 and the reference plane 11 to make the distance between the displacement detection element 31 and the reference plane 11 consistent. The distance between the displacement detection element 31 and the reference plane 11 can be visually determined by a person. The person's line of sight should be at the same height as the distance between the displacement detection element 31 and the reference plane 11, and the distance between the displacement detection element 31 and the reference plane 11 should be observed to ensure consistency. When the distance between the displacement detection element 31 and the reference plane 11 is consistent, the height of the reference plane 11 detected by the displacement detection element 31 at this time can be recorded as zero. After multiple displacement detection elements 31 are calibrated in the same way and all are set to zero, the height detection data of multiple displacement detection elements 31 for the same horizontal plane will be consistent.

[0042] In the positioning reference device 100, errors may occur during component processing and assembly, and these errors may vary from place to place, affecting the use of the positioning reference device 100. To facilitate compensation for errors at various points in the positioning reference device 100, the test component 3 may be equipped with a movable base 34. The displacement detection component 31 is fixedly installed on the movable base 34, and the movable base 34 can be movably installed on the base 33. For example, the movable base 34 can be movably installed on the base 33 through a sliding fit. When the movable seat 34 moves relative to the base 33, it can drive the displacement detection element 31 to move relative to the base 33. If the positioning reference device 100 is accurate and without error, the data detected by the displacement detection element 31 relative to the base 33 at different positions will be the same. If there are errors in various parts of the positioning reference device 100, the data detected by the displacement detection element 31 relative to the base 33 at different positions may be different. In this case, the positioning reference device 100 can be adjusted according to the data detected by the displacement detection element 31 to compensate for the errors in various parts of the positioning reference device 100, thereby ensuring that the data detected by the displacement detection element 31 relative to the base 33 at different positions are the same. The method of adjusting and compensating the positioning reference device 100 can adopt existing common compensation adjustment methods, which will not be elaborated here. In addition, the displacement detection element 31 does not need to detect every position of the base 33. The displacement detection element 31 only needs to move within a certain range. When it is ensured that the data detected by the displacement detection element 31 at the same height plane is the same during the movement within this certain range, it can be determined that the adjustment of the positioning reference device 100 is complete. The plane at the same height can be selected as the reference plane 11 or other planes that meet the requirements.

[0043] Reference Figure 4 and Figure 5 The adjustment assembly 2 includes an adjustment base 22 and multiple adjustment members 23 connected to the adjustment base 22. The upper surface of the adjustment base 22 forms an adjustment surface 21 to support the reference plane 11. The adjustment base 22 may be provided with a recessed groove 222 formed in the upper end face of the adjustment base 22. The recessed groove 222 is used to avoid external components, such as a conveyor belt in a coating equipment. By providing a recessed groove 222 on the adjustment base 22, the positioning reference device 100 and the components in the coating equipment can be more compact, without occupying a large space. Multiple recessed grooves 222 can be provided to avoid multiple external components; for example, two recessed grooves 222 can be provided, and the adjustment base 22 forms a "W" shape.

[0044] Adjusting component 23 is connected to adjusting seat 22 and used to adjust adjusting seat 22. When adjusting seat 22 supports reference plane 11, displacement detection component 31 detects the height of reference plane 11. When the height data detected by multiple displacement detection components 31 are inconsistent, adjusting component 23 can be adjusted to adjust the position of adjusting seat 22, thereby making the adjusting surface 21 of adjusting seat 22 a horizontal plane, and the height data detected by multiple displacement detection components 31 consistent. After adjusting seat 22 is installed, the upper surface of adjusting seat 22 is the required positioning reference height. After adjusting seat 22 using adjusting component 23, the upper surface of adjusting seat 22 is at the required height and is a horizontal plane. At this time, the upper surface of adjusting seat 22, i.e., adjusting surface 21, can be used as the positioning reference.

[0045] Adjusting member 23 is connected to the lower end of adjusting base 22, and multiple adjusting members 23 are provided. The height of each adjusting member 23 is adjustable, so that the height of the corresponding position of adjusting base 22 can be adjusted by adjusting multiple adjusting members 23. Preferably, there are three or more adjusting members 23. The line connecting the three adjusting members 23 is not a straight line, so that the connection points of the three adjusting members 23 and adjusting base 22 can define a plane, facilitating accurate adjustment of adjusting base 22.

[0046] Reference Figure 5 The adjusting member 23 may include a fixing part 231 and an adjusting part 232. The fixing part 231 is mounted on the base 33. The adjusting part 232 is used to abut against the adjusting seat 22. The adjusting part 232 is movably connected to the fixing part 231 and can extend and retract relative to the fixing part 231 to change the height of the adjusting member 23, thereby adjusting the adjusting seat 22. Specifically, the adjusting part 232 may be threadedly connected to the fixing part 231. By rotating the adjusting part 232, the depth to which the adjusting part 232 is screwed into the fixing part 231 is changed, thereby changing the overall height of the adjusting member 23.

[0047] To ensure tight contact between the adjusting member 23 and the adjusting seat 22 so that the adjusting seat 22 can be accurately adjusted when the height of the adjusting member 23 changes, the adjusting member 23 and the adjusting seat 22 can be elastically connected. The adjusting member 23 and the adjusting seat 22 are held together by elastic traction. Specifically, the fixing part 231 of the adjusting member 23 is provided with a first connecting part 2311, and the lower end of the adjusting seat 22 is provided with a second connecting part 221 corresponding to the first connecting part 2311. The first connecting part 2311 and the second connecting part 221 can be connected by an elastic member 24, which remains in a stretched state. Therefore, the rebound tendency of the elastic member 24 will pull the adjusting seat 22 and the adjusting member 23 into tight contact. The elastic member 24 can be a spring, and the first connecting part 2311 and the second connecting part 221 are respectively provided with holes that mate with the hooks of the spring, so that the first connecting part 2311 and the second connecting part 221 can be connected to the spring. Each adjusting member 23 may be provided with a first connecting part 2311, and the adjusting seat 22 is provided with the same number of second connecting parts 221 as the first connecting parts 2311. The second connecting parts 221 correspond one-to-one with the first connecting parts 2311, and each second connecting part 221 is connected to the corresponding first connecting part 2311 through an elastic member 24.

[0048] Reference Figure 6 The present invention also provides a coating device, including a coating station 200, a coating head, a cleaning station 300, a marble platform 400, and the aforementioned positioning reference device 100.

[0049] The positioning reference device 100 can be installed on the marble platform 400, for example, the base 33 of the positioning reference device 100 is fixed to the marble platform 400 with screws. After adjustment, the adjustment surface 21 of the positioning reference device 100 forms a positioning reference, and the height of the positioning reference is the predetermined height of the coating station 200 and the cleaning station 300. The coating head can move within the coating equipment, and multiple detection sensors can be installed on the coating head to detect different positions. These detection sensors can be laser sensors.

[0050] When the coating head moves above the adjustment surface 21, the detection sensor detects the position of the adjustment surface 21 and records it as a standard value. Then, the coating head moves above the coating station 200 and detects the position of the coating station 200. If the detected value of the coating station 200 is inconsistent with the standard value, the coating station 200 is adjusted according to the deviation between the detected value and the standard value to make the detected value of the coating station 200 consistent with the standard value. When there are multiple coating stations 200, the coating head moves sequentially above multiple coating stations 200 and detects them, adjusting the detected values ​​of multiple coating stations 200 to be consistent with the standard value. When the coating head moves above the cleaning station 300 and detects it, if the detected value of the cleaning station 300 is inconsistent with the standard value, the cleaning station 300 is adjusted according to the deviation between the detected value and the standard value to make the detected value of the cleaning station 300 consistent with the standard value. When the detection values ​​of the cleaning station 300 and multiple coating stations 200 are all standard values, the cleaning station 300 and coating station 200 are adjusted and their heights are consistent.

[0051] By setting up a positioning reference device 100 with an adjustment surface 21, the adjustment surface 21 serves as a positioning reference to indicate the adjustment of the cleaning station 300 and the coating station 200. The adjustment of the cleaning station 300 and the coating station 200 is more convenient. After adjusting the cleaning station 300 and the coating station 200 respectively, the height consistency of the cleaning station 300 and the coating station 200 can be guaranteed. The operation is simple, efficient and the adjustment effect is good.

[0052] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and alterations to the above embodiments within the scope of the present invention without departing from the principles and spirit of the present invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A positioning reference device, characterized in that, include: The adjustment component (2) includes an adjustment surface (21) for contacting and supporting the reference plane (11); The test component (3) includes multiple displacement detection elements (31), each of which is used to detect the height of a reference plane (11) at different positions. The height of the multiple positions of the reference plane (11) indicates the adjustment of the adjustment surface (21) so that the adjustment surface (21) forms a positioning reference. The positioning reference formed by the adjustment surface (21) is used to indicate the position adjustment of the external components.

2. The positioning reference device according to claim 1, characterized in that, The test assembly (3) includes a calibration unit (32) for calibrating the position of the displacement detection element (31). The calibration unit (32) includes an adjustment plate (321) and a calibration element (322) connected to the adjustment plate (321) and used to adjust the position of the adjustment plate (321). The displacement detection element (31) is mounted on the adjustment plate (321), and the calibration element (322) adjusts the position of the adjustment plate (321) to calibrate the displacement detection element (31).

3. The positioning reference device according to claim 2, characterized in that, The calibration unit (32) further includes a fixing plate (323), and a plurality of calibration elements (322) pass through the fixing plate (323) and abut against the adjusting plate (321). The mounting position of the calibration elements (322) on the fixing plate (323) is adjusted to drive the adjusting plate (321) to deflect and calibrate the displacement detection element (31).

4. The positioning reference device according to claim 3, characterized in that, The calibration component (322) includes a stud with external threads, and the stud of the calibration component (322) is threadedly engaged with the fixing plate (323); The end face of the displacement detection component (31) is a plane.

5. The positioning reference device according to claim 1, characterized in that, The test component (3) includes a base (33) and a movable seat (34); the displacement detection element (31) is mounted on the movable seat (34), and the movable seat (34) is movably mounted on the base (33) so that the movable seat (34) can drive the displacement detection element (31) to move relative to the base (33).

6. The positioning reference device according to claim 1, characterized in that, The adjustment assembly (2) includes an adjustment seat (22) and a plurality of adjustment members (23) connected to the adjustment seat (22). The upper end surface of the adjustment seat (22) forms the adjustment surface (21). The plurality of adjustment members (23) respectively abut against the lower end of the adjustment seat (22) and are used to adjust the position of the adjustment seat (22) so that the adjustment surface (21) on the adjustment seat (22) forms a positioning reference.

7. The positioning reference device according to claim 6, characterized in that, The adjusting member (23) includes a fixing part (231) and an adjusting part (232). The adjusting part (232) abuts against the adjusting seat (22), and the adjusting part (232) is movably connected to the fixing part (231) so that the height of the adjusting member (23) is adjustable.

8. The positioning reference device according to claim 7, characterized in that, The fixing part (231) is provided with a first connecting part (2311), and the adjusting seat (22) is provided with a second connecting part (221) corresponding to the first connecting part (2311). The first connecting part (2311) and the corresponding second connecting part (221) are connected by an elastic member (24). The elastic member (24) pulls the adjusting seat (22) and the adjusting member (23) to abut tightly.

9. The positioning reference device according to claim 6, characterized in that, The adjusting seat (22) is provided with a recessed groove (222) formed in the upper end surface of the adjusting seat (22), and the recessed groove (222) is used to avoid external components; The adjustment element (23) is provided in at least three parts.

10. A coating apparatus, characterized in that, include: Coating station (200); Cleaning station (300); The positioning reference device (100) as described in any one of claims 1 to 9; A coating head is movably installed inside a coating device and is connected to a detection sensor. The detection sensor is used to detect the position of the adjustment surface (21) in the positioning reference device (100) and obtain a standard value. The detection sensor detects the position of the coating station (200) and the cleaning station (300) and obtains a detection value. The detection values ​​corresponding to the coating station (200) and the cleaning station (300) are the same as the standard value.

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