Seed crystal specification automatic detection and sorting device

Abstract

The utility model is applicable to the technical field of seed crystal detection, and provides a seed crystal specification automatic detection and sorting device which comprises a workbench, an industrial computer is arranged on one side of the top surface of the workbench, a visual device is arranged on the top surface of the workbench, and the visual device can be transversely and longitudinally adjusted. A pneumatic claw is arranged on one side of the visual device, a rotating assembly is arranged on one side of the pneumatic claw, and a self-sliding way is arranged at the end, close to the rotating assembly, of the workbench. Preferably, the visual device comprises an industrial camera, the side wall of the industrial camera is connected with a longitudinal sliding rail, and the bottom of the longitudinal sliding rail is connected with a transverse sliding rail; preferably, the rotating assembly comprises a rotating arm, and the output end of the rotating arm is connected with the side wall of the pneumatic claw. According to the scheme, the chassis diameter and the longitudinal length of the seed crystal can be automatically detected, qualified and unqualified seed crystals are automatically sorted according to a detection result, and the detection efficiency and accuracy are improved.

Description

Technical Field

[0001] This utility model belongs to the field of seed crystal detection technology, and in particular relates to an automatic seed crystal specification detection and sorting device. Background Technology

[0002] In the production process of semiconductor silicon rods, seed crystals are key materials in the crystal pulling stage. Their specifications (including the base diameter and longitudinal length) directly affect the growth quality and production efficiency of the silicon rod. Traditional manual inspection methods rely on operators using tools such as calipers to measure the base diameter and longitudinal length of the seed crystals. This method is not only inefficient, but also prone to inaccurate results due to human error. In addition, the process of manually sorting out unqualified seed crystals is cumbersome, increasing production costs and time.

[0003] In recent years, machine vision technology has been gradually applied to the field of semiconductor material inspection. However, existing inspection devices usually only detect a single parameter (such as diameter or length) and lack automatic sorting functions, failing to meet the requirements of efficient and accurate inspection. Therefore, there is a need for a device that can automatically detect seed crystal specifications and automatically sort qualified and unqualified seed crystals. In this regard, this application proposes an automatic seed crystal specification detection and sorting device. Utility Model Content

[0004] The purpose of this invention is to provide an automatic seed crystal specification detection and sorting device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an automatic seed crystal specification detection and sorting device, including a worktable, an industrial computer on one side of the top surface of the worktable, a vision device on the top surface of the worktable, the vision device being adjustable in both horizontal and vertical directions, a pneumatic gripper on one side of the vision device, a rotating component on one side of the pneumatic gripper, and a self-sliding track at one end of the worktable near the rotating component.

[0006] Preferably, the vision device includes an industrial camera, the sidewall of which is connected to a longitudinal slide rail, and the bottom of the longitudinal slide rail is connected to a transverse slide rail.

[0007] Preferably, the rotating assembly includes a rotating arm, the output end of which is connected to the side wall of the pneumatic gripper.

[0008] Preferably, the top surface of the workbench is provided with a qualified product material frame.

[0009] Preferably, the pneumatic gripper is an MHZ series three-jaw gripper.

[0010] Preferably, the self-sliding track is inclined and has a side groove.

[0011] This utility model has at least the following beneficial effects:

[0012] This invention provides an automatic seed crystal specification detection and sorting device, which can automatically detect the base diameter and longitudinal length of the seed crystal, and automatically sort qualified and unqualified seed crystals according to the detection results, thereby improving detection efficiency and accuracy. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This is a partial structural schematic diagram of the present invention;

[0015] Figure 3 This is a diagram of the electrical module of this utility model.

[0016] In the attached diagram, the following are the reference numerals: 1. Industrial computer; 2. Workbench; 3. Industrial camera; 4. Longitudinal slide rail; 5. Lateral slide rail; 6. Pneumatic gripper; 7. Rotary arm; 8. Self-sliding track; 9. Qualified product material box. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present utility model.

[0018] Example

[0019] Please see Figure 1 , Figure 2 and Figure 3 This utility model provides a technical solution: an automatic seed crystal specification detection and sorting device, including a worktable 2, an industrial computer 1 is provided on one side of the top surface of the worktable 2, specifically, the industrial computer 1 includes a QT user interface and an automatic seed crystal specification detection program, a vision device is provided on the top surface of the worktable 2, the vision device can be adjusted in the horizontal and vertical directions, a pneumatic gripper 6 is provided on one side of the vision device, specifically, the pneumatic gripper 6 can automatically measure the clamping displacement, a rotating component is provided on one side of the pneumatic gripper 6, and a self-sliding track 8 is provided at one end of the worktable 2 near the rotating component.

[0020] Furthermore, the vision device includes an industrial camera 3, with a longitudinal slide rail 4 connected to the side wall of the industrial camera 3 and a transverse slide rail 5 connected to the bottom of the longitudinal slide rail 4. Specifically, the longitudinal slide rail 4 and the transverse slide rail 5 drive the industrial camera 3 to move longitudinally and laterally, adjust its position, and ensure that the full view of the side image of the seed crystal can be captured.

[0021] In this embodiment, the industrial computer 1 is used to run the visual inspection algorithm and provide a user control interface, including inspection buttons, inspection result display area, etc.; the workbench 2 is used to support and fix the entire inspection device; the industrial camera 3 is used to capture side images of the seed crystal and calculate the longitudinal length of the seed crystal through the visual algorithm.

[0022] Furthermore, the rotating assembly includes a rotating arm 7, the output end of which is connected to the side wall of the pneumatic gripper 6. Specifically, the side wall of the pneumatic gripper 6 is fixedly connected to the output end of the rotating arm 7.

[0023] In this embodiment, the rotating component is used to control the rotation of the pneumatic gripper 6, sending qualified seed crystals back to the operator's side and discarding unqualified seed crystals into the self-sliding chute 8.

[0024] Furthermore, the top surface of the workbench 2 is provided with a qualified product material frame 9.

[0025] In this embodiment, qualified products are placed in qualified product material box 9.

[0026] Furthermore, the pneumatic gripper 6 adopts the MHZ series three-jaw gripper.

[0027] In this embodiment, the air gripper 6 adopts an MHZ series three-jaw gripper to fix the seed crystal and automatically measure its base diameter. When gripping the seed crystal, the air gripper 6 automatically adjusts to a centrally symmetrical state, and the diameter of the seed crystal base is calculated by recording the displacement of the gripper.

[0028] Furthermore, the slide rail 8 is inclined and has a side groove.

[0029] In this embodiment, the self-sliding chute 8 is used to store defective seed crystals, which automatically slide down to a designated area via the self-sliding chute 8.

[0030] The working principle and usage process of this utility model are as follows:

[0031] ①. Seed crystal placement: The operator places the seed crystal to be tested on the pneumatic gripper 6.

[0032] ②. Detection Start: The operator clicks the detection button on the user interface of Industrial Computer 1 to start the detection process.

[0033] ③. Measurement of the base diameter: The air gripper 6 holds the seed crystal and automatically adjusts it to a centrally symmetrical state. The diameter of the seed crystal base is calculated by recording the displacement of the gripper.

[0034] ④. Longitudinal length measurement: Industrial camera 3 captures a side image of the seed crystal and transmits the image to industrial computer 1. Industrial computer 1 analyzes the image using a visual algorithm and calculates the longitudinal length of the seed crystal.

[0035] ⑤. Judgment of test results: Industrial computer 1 judges whether the diameter and longitudinal length of the seed crystal are qualified according to the preset specifications.

[0036] ⑥. Automatic sorting: If the seed crystal is qualified, the rotating arm 7 rotates the air gripper 6 to the operator's side, and the operator takes off the qualified seed crystal and puts it into the qualified product material box 9. If the seed crystal is unqualified, the rotating arm 7 rotates the air gripper 6 to the side of the slide rail 8, the air gripper 6 is released, and the unqualified seed crystal slides down the slide rail 8 to the storage area.

[0037] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description. Therefore, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this utility model, and no reference numerals in the claims should be construed as limiting the scope of the claims.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An automatic seed crystal specification detection and sorting device, characterized in that, The workbench (2) includes an industrial computer (1) on one side of the top surface of the workbench (2), a vision device on the top surface of the workbench (2), the vision device being adjustable in both horizontal and vertical directions, a pneumatic gripper (6) on one side of the vision device, a rotating assembly on one side of the pneumatic gripper (6), and a self-sliding track (8) on one end of the workbench (2) near the rotating assembly.

2. The automatic seed crystal specification detection and sorting device according to claim 1, characterized in that: The vision device includes an industrial camera (3), the side wall of which is connected to a longitudinal slide rail (4), and the bottom of the longitudinal slide rail (4) is connected to a transverse slide rail (5).

3. The automatic seed crystal specification detection and sorting device according to claim 2, characterized in that: The rotating assembly includes a rotating arm (7), the output end of which is connected to the side wall of the pneumatic gripper (6).

4. The automatic seed crystal specification detection and sorting device according to claim 3, characterized in that: The top surface of the workbench (2) is provided with a qualified product material frame (9).

5. The automatic seed crystal specification detection and sorting device according to claim 4, characterized in that: The pneumatic gripper (6) is an MHZ series three-jaw gripper.

6. The automatic seed crystal specification detection and sorting device according to claim 5, characterized in that: The self-sliding track (8) is inclined and has a side groove.

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