Part machining tool for tail gas treatment device in semiconductor industry

Abstract

The utility model discloses a part processing tool for a tail gas treatment device in the semiconductor industry, which is characterized by comprising a working bottom plate, a driving motor is arranged on the working bottom plate, a screw rod is arranged at the output end of the driving motor, a movable seat is sleeved on the outer side of the screw rod, an auxiliary driving platform is arranged on the movable seat, and the auxiliary driving platform is arranged on the working bottom plate. A rotating platform is arranged on the auxiliary driving platform, a workpiece positioning seat and a workpiece adjusting seat are arranged on the rotating platform, and a rotating clamp is arranged on one side of the workpiece adjusting seat. The workpiece positioning base and the workpiece adjusting base can be matched with workpieces of different sizes and lengths, meanwhile, the whole device moves integrally instead of moving independently, therefore, the workpieces cannot be damaged, and the application range is wide.

Description

Technical Field

[0001] This utility model relates to the field of exhaust gas treatment device processing technology, specifically to a tooling for processing components of exhaust gas treatment devices in the semiconductor industry. Background Technology

[0002] Semiconductor processing, such as welding and cutting, generates exhaust gases, which require specific exhaust gas treatment devices. Pipes, as the most common component in exhaust gas treatment devices, play an important role in the entire equipment. During pipe processing, such as cutting, grinding, or rotating, a positioning device at the bottom is needed to position and fix the device for subsequent processing. General positioning devices only serve a fixing effect and cannot achieve range transfer or adapt to various pipe specifications. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a component processing fixture for a semiconductor industry exhaust gas treatment device. The fixture can be adapted to workpieces of different sizes and lengths by using a workpiece positioning seat and a workpiece adjusting seat. At the same time, the entire device moves as a whole rather than individually, so the workpiece will not be damaged. It has a wide range of applications.

[0004] To solve the above-mentioned technical problems, this utility model provides a component processing fixture for a semiconductor industry exhaust gas treatment device, including a working base plate, a drive motor on the working base plate, a screw on the output end of the drive motor, a movable seat on the outside of the screw, an auxiliary drive platform on the movable seat, a rotating platform on the auxiliary drive platform, a workpiece positioning seat and a workpiece adjusting seat on the rotating platform, and a rotating clamp on one side of the workpiece adjusting seat.

[0005] Furthermore, the working base plate is provided with moving rails on both sides of the screw, and a limiting sheet metal is provided on the outer side of the moving rails. The moving seat is provided on the moving rails on both sides and has grooves on both sides that are adapted to the limiting sheet metal.

[0006] Furthermore, the rotating platform is provided with a limiting track through hole, and the workpiece positioning seat and the workpiece adjusting seat are disposed in the limiting track through hole.

[0007] Furthermore, the workpiece adjustment seat includes a movable housing, a lifting cylinder is provided inside the movable housing, a lifting plate is provided at the output end of the lifting cylinder, a front placement seat and a rear placement seat are connected to the lifting plate through a main shaft, and auxiliary shafts are provided on both sides of the main shaft on the lifting plate, both of which penetrate the movable housing.

[0008] Furthermore, the working base plate has protruding positioning through holes on both sides.

[0009] Furthermore, blocking seats are provided on both sides of the screw.

[0010] The beneficial effects of this utility model are as follows: When this device is in use, the drive motor drives the screw to rotate, which in turn drives the moving seat on the outside of the screw to move back and forth. The auxiliary drive platform drives the rotating platform to rotate, thereby adjusting the lateral position and rotation position of the tool. The workpiece positioning seat is used to initially support the position of the workpiece. The workpiece adjusting seat can be adjusted in height and cooperates with the workpiece positioning seat to achieve workpiece support. The rotating clamp on the side is used to clamp and fix the workpiece. The workpiece positioning seat and the workpiece adjusting seat can be used to adapt to workpieces of different sizes and lengths. At the same time, the entire device moves as a whole rather than individually, so the workpiece will not be damaged. It has a wide range of applications. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0012] Figure 2 This is a schematic diagram of the workpiece adjustment seat structure of this utility model.

[0013] The following are the labels in the diagram: 1. Working base plate; 2. Drive motor; 3. Screw; 4. Moving seat; 5. Auxiliary drive platform; 6. Rotary platform; 7. Workpiece positioning seat; 8. Workpiece adjusting seat; 81. Moving housing; 82. Lifting cylinder; 83. Lifting plate; 84. Main spindle; 85. Front placement seat; 86. Rear placement seat; 87. Auxiliary shaft; 9. Rotary fixture; 10. Moving track; 11. Limiting sheet metal; 12. Limiting track through hole; 13. Positioning through hole; 14. Blocking seat. Detailed Implementation

[0014] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0015] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0016] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0017] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0018] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0019] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0020] Reference Figures 1 to 2 As shown, an embodiment of the component processing fixture for a semiconductor industry exhaust gas treatment device of the present invention includes a working base plate 1, a drive motor 2 is provided on the working base plate 1, a screw 3 is provided at the output end of the drive motor 2, a movable seat 4 is sleeved on the outside of the screw 3, an auxiliary drive platform 5 is provided on the movable seat 4, a rotating platform 6 is provided on the auxiliary drive platform 5, a workpiece positioning seat 7 and a workpiece adjusting seat 8 are provided on the rotating platform 6, and a rotating clamp 9 is provided on one side of the workpiece adjusting seat 8.

[0021] In use, the drive motor 2 drives the screw 3 to rotate, which in turn drives the moving seat 4 on the outside of the screw 3 to move back and forth. The auxiliary drive platform 5 drives the rotating platform 6 to rotate, which allows the horizontal position and rotation position of the tool to be adjusted. The workpiece positioning seat 7 is used to initially support the position of the workpiece. The workpiece adjusting seat 8 can be adjusted in height and cooperates with the workpiece positioning seat 7 to support the workpiece. The rotating clamp 9 on the side is used to clamp and fix the workpiece.

[0022] The working base plate 1 has moving rails 10 on both sides of the screw 3. The moving rails 10 have limiting sheet metal 11 on the outer side. The moving seat 4 is set on the moving rails 10 on both sides and has grooves on both sides that are adapted to the limiting sheet metal 11. When the moving seat 4 moves back and forth, it moves along the moving rails 10 and is limited by the limiting sheet metal 11 on both sides to ensure that it will not leave the rails.

[0023] The rotating platform 6 is provided with a limit track through hole 12, and the workpiece positioning seat 7 and the workpiece adjusting seat 8 are arranged in the limit track through hole 12, so as to facilitate changing the overall position of the workpiece positioning seat 7 and the workpiece adjusting seat 8.

[0024] The workpiece adjustment seat 8 includes a movable housing 81, within which a lifting cylinder 82 is installed. A lifting plate 83 is installed at the output end of the lifting cylinder 82. A front placement seat 85 and a rear placement seat 86 are connected to the lifting plate 83 via a main shaft 84. Auxiliary shafts 87 are installed on both sides of the main shaft 84 on the lifting plate 83. Both the auxiliary shafts 87 and the main shaft 84 penetrate the movable housing 81. The lifting cylinder 82 drives the lifting plate 83 to move up and down, which in turn drives the main shaft 84 to move up and down, thereby changing the height of the front placement seat 85 and the rear placement seat 86 for adaptation. The auxiliary shafts 87 on both sides are used to ensure that the workpiece does not deviate from its original position during up and down movement.

[0025] The working base plate 1 has protruding positioning through holes 13 on both sides to facilitate the installation and disassembly of the working base plate 1; the screw 3 has blocking seats 14 on both sides.

[0026] The above-described embodiments are merely preferred embodiments provided to fully illustrate the present invention, and the scope of protection of the present invention is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present invention are all within the scope of protection of the present invention. The scope of protection of the present invention is defined by the claims.

Claims

1. A tooling fixture for processing components in a semiconductor industry exhaust gas treatment device, characterized in that, The system includes a working base plate (1), on which a drive motor (2) is mounted. A screw (3) is mounted at the output end of the drive motor (2). A movable seat (4) is fitted on the outside of the screw (3). An auxiliary drive platform (5) is mounted on the movable seat (4). A rotating platform (6) is mounted on the auxiliary drive platform (5). A workpiece positioning seat (7) and a workpiece adjusting seat (8) are mounted on the rotating platform (6). A rotating clamp (9) is mounted on one side of the workpiece adjusting seat (8).

2. The tooling for processing components in a semiconductor industry exhaust gas treatment device as described in claim 1, characterized in that, The working base plate (1) has moving rails (10) on both sides of the screw (3), and a limiting sheet metal (11) is provided on the outside of the moving rails (10). The moving seat (4) is set on the moving rails (10) on both sides and has grooves on both sides that are adapted to the limiting sheet metal (11).

3. The tooling for processing components in a semiconductor industry exhaust gas treatment device as described in claim 1, characterized in that, The rotating platform (6) is provided with a limiting track through hole (12), and the workpiece positioning seat (7) and the workpiece adjusting seat (8) are disposed in the limiting track through hole (12).

4. The tooling for processing components in a semiconductor industry exhaust gas treatment device as described in claim 1, characterized in that, The workpiece adjustment seat (8) includes a movable housing (81), a lifting cylinder (82) is provided inside the movable housing (81), a lifting plate (83) is provided at the output end of the lifting cylinder (82), a front placement seat (85) and a rear placement seat (86) are connected to the lifting plate (83) through a main shaft (84), and auxiliary shafts (87) are provided on both sides of the main shaft (84) on the lifting plate (83), and both the auxiliary shafts (87) and the main shaft (84) penetrate the movable housing (81).

5. The tooling for processing components in a semiconductor industry exhaust gas treatment device as described in claim 1, characterized in that, The working base plate (1) has protruding positioning through holes (13) on both sides.

6. The tooling for processing components in a semiconductor industry exhaust gas treatment device as described in claim 1, characterized in that, The screw (3) is provided with blocking seats (14) on both sides.

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