Vacuum adsorption table for laser machine

Abstract

The utility model belongs to the technical field of vacuum adsorption tables, and particularly relates to a vacuum adsorption table for a laser machine, which comprises a base and a through hole thin plate, the through hole thin plate is provided with a plurality of vacuum adsorption holes, the bottom surface of the through hole thin plate is provided with a communicating structure, and the communicating structure can enable the adjacent vacuum adsorption holes to be communicated. The adjacent vacuum adsorption holes are communicated through the communicating structures, so that during vacuum suction, air flow can circulate among the multiple vacuum adsorption holes, and the uniformity of the adsorption force of the adsorption surface is improved advantageously, compared with the prior art, buffer transition is provided between the vacuum adsorption holes and the vacuum pipe through the communicating structures, and the adsorption efficiency is improved. The point-to-line gas flow direction is adjusted into the point-to-line and then-to-face gas flow direction, so that the defect that the adsorption force of a local area of an adsorption surface is weak is overcome, it is guaranteed that the adsorption force of the whole area is uniform when an ultra-thin product is treated, and the product machining precision is improved.

Description

Technical Field

[0001] This utility model belongs to the technical field of vacuum adsorption stages, and particularly relates to a vacuum adsorption stage for laser machines. Background Technology

[0002] Vacuum adsorption stages are used to provide adsorption and fixation force for products processed by laser machines (such as PCB circuit boards). In the prior art, such as Chinese Utility Model Patent ZL202221651387.3, a vacuum adsorption platform is disclosed (as shown in paragraph 0016 of the specification and appendix). Figure 4 The description states: "The adsorption seat is equipped with an adsorption perforated plate, which is bolted to the bottom of the adsorption seat. The adsorption seat contains a vacuum chamber, which is connected to a vacuum tube." The vacuum tube acts directly on several adsorption perforated plates to achieve vacuum adsorption of the product. However, this structure has the following shortcomings: the adsorption force of the adsorption holes near the vacuum tube is greater than that of the adsorption holes far from the vacuum tube, resulting in uneven adsorption force. When processing large-area products such as flexible printed circuit boards (FPCs) or ultra-thin FR4s using laser drilling, the uneven adsorption force can easily cause product warping, deviation from the preset drilling coordinates, etc., thus affecting the drilling accuracy. Utility Model Content

[0003] The purpose of this invention is to provide a vacuum adsorption stage for laser machines, aiming to solve the technical problems in the prior art.

[0004] To achieve the above objectives, the present invention provides a vacuum adsorption stage for a laser machine, comprising a base and a perforated thin plate. The perforated thin plate has a plurality of vacuum adsorption holes, the top ends of which extend to the top surface of the perforated thin plate and form an adsorption surface, and the bottom ends extend to the bottom surface of the perforated thin plate. The bottom surface of the perforated thin plate has a communicating structure, which allows adjacent vacuum adsorption holes to communicate with each other. The base has a vacuum cavity, the perforated thin plate is disposed on the top of the base and covers the vacuum cavity, and a vacuum tube is disposed at the bottom of the vacuum cavity. One end of the vacuum tube faces the communicating structure, and the other end is connected to a vacuum generator.

[0005] Optionally, a plurality of the vacuum adsorption holes are arranged in a rectangular array on the through-hole thin plate, and the communication structure includes a plurality of horizontally arranged first air guide grooves and a plurality of vertically arranged second air guide grooves. The first air guide grooves can connect to the plurality of horizontally arranged vacuum adsorption holes, and the second air guide grooves can connect to the plurality of vertically arranged vacuum adsorption holes.

[0006] Optionally, the width of the first air guide groove is adapted to the aperture of the vacuum adsorption hole, and the depth of the first air guide groove is 0.4 to 0.8 mm.

[0007] Optionally, the width of the second air guide groove is adapted to the aperture of the vacuum adsorption hole, and the depth of the second air guide groove is 0.4 to 0.8 mm.

[0008] Optionally, the pore size of the vacuum adsorption pore is 1.3 to 1.8 mm.

[0009] Optionally, the through-hole plate is further provided with a plurality of auxiliary adsorption holes, which are located between two adjacent vacuum adsorption holes. The top ends of the plurality of auxiliary adsorption holes extend to the adsorption surface and the bottom ends extend to the connecting structure.

[0010] Optionally, the pore size of the auxiliary adsorption pore is 0.8 to 1.2 mm.

[0011] Optionally, the top of the base is recessed with a support step, and the through-hole plate is detachably fixed to the support step.

[0012] Optionally, the edge of the through-hole plate is provided with a plurality of screw through holes, and the support step is provided with screw thread holes corresponding to the screw through holes.

[0013] Optionally, it also includes a sealing gasket, which is stacked between the support step and the through-hole plate and has a through hole for a screw to pass through.

[0014] The above-mentioned one or more technical solutions of the vacuum adsorption stage for laser machines provided in this utility model embodiment have at least one of the following technical effects: the interconnected structure connects adjacent vacuum adsorption holes, so that during vacuum suction, the airflow can flow between several vacuum adsorption holes, which is beneficial to improving the uniformity of the adsorption force on the adsorption surface. Compared with the prior art, this application uses the interconnected structure to provide a buffer transition between the vacuum adsorption hole and the vacuum tube, and adjusts the gas flow direction from point to surface to point to line and then to surface, thereby avoiding the defect of weak adsorption force in local areas of the adsorption surface, ensuring uniform adsorption force across the entire area when dealing with ultra-thin products, which is beneficial to improving the precision of product processing. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of a vacuum adsorption stage for a laser machine provided in an embodiment of the present invention.

[0017] Figure 2 for Figure 1 A magnified view of a portion of point A in the middle.

[0018] Figure 3 A schematic diagram of the bottom surface of the through-hole thin plate provided in an embodiment of this utility model.

[0019] Figure 4 for Figure 3 A magnified view of a section at point B in the middle.

[0020] Figure 5 This is a longitudinal section schematic diagram of the vacuum adsorption stage for a laser machine provided in an embodiment of the present invention.

[0021] The following are the labeling elements in the figure:

[0022] 1—Base; 11—Vacuum Chamber; 12—Vacuum Tube

[0023] 13—Supporting step; 2—Through-hole thin plate; 21—Vacuum adsorption hole

[0024] 22—Adsorption surface; 23—Connecting structure; 231—First gas guide groove

[0025] 232—Second air guide groove; 24—Auxiliary adsorption hole. Detailed Implementation

[0026] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the embodiments of the present invention, and should not be construed as limiting the present invention.

[0027] In the description of the embodiments of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0029] In this embodiment of the invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this embodiment of the invention according to the specific circumstances.

[0030] In one embodiment of this utility model, such as Figures 1-5 As shown, a vacuum adsorption stage for a laser machine is provided, including a base 1 and a through-hole thin plate 2. The through-hole thin plate 2 has a plurality of vacuum adsorption holes 21. The top ends of the plurality of vacuum adsorption holes 21 extend to the top surface of the through-hole thin plate 2 and form an adsorption surface 22, and the bottom ends extend to the bottom surface of the through-hole thin plate 2. The bottom surface of the through-hole thin plate 2 has a connecting structure 23, which allows adjacent vacuum adsorption holes 21 to communicate. The base 1 has a vacuum cavity 11. The through-hole thin plate 2 is located on the top of the base 1 and covers the vacuum cavity 11. The bottom of the vacuum cavity 11 has a vacuum tube 12. One end of the vacuum tube 12 faces the connecting structure 23, and the other end is connected to a vacuum generator (not shown in the figure). By using the connecting structure 23 to connect adjacent vacuum adsorption holes 21, the airflow can flow between several vacuum adsorption holes 21 during vacuum suction, which is beneficial to improving the uniformity of the adsorption force on the adsorption surface 22. Compared with the prior art, this application uses the connecting structure 23 to provide a buffer transition between the vacuum adsorption hole 21 and the vacuum tube 12, adjusting the gas flow direction from point to surface to point to line and then to surface, thereby avoiding the defect of weak adsorption force in local areas of the adsorption surface 22, ensuring uniform adsorption force across the entire area when dealing with ultra-thin products, which is beneficial to improving the precision of product processing.

[0031] In one embodiment of this utility model, such as Figures 3-4 As shown, a plurality of vacuum adsorption holes 21 are arranged in a rectangular array on the through-hole thin plate 2. The connecting structure 23 includes a plurality of horizontally arranged first air guide grooves 231 and a plurality of vertically arranged second air guide grooves 232. The first air guide grooves 231 can connect to the plurality of horizontally arranged vacuum adsorption holes 21, and the second air guide grooves 232 can connect to the plurality of vertically arranged vacuum adsorption holes 21. Specifically, the first air guide grooves 231 and the second air guide grooves 232 are both straight grooves. The first air guide grooves 231 and the second air guide grooves 232 are intersected and interconnected, forming a plurality of recessed rectangular grooves on the bottom surface of the through-hole thin plate 2.

[0032] In one embodiment of this utility model, such as Figures 3-4 As shown, the width of the first air guide groove 231 is adapted to the aperture of the vacuum adsorption hole 21, and the depth of the first air guide groove 231 is 0.4-0.8 mm. Specifically, the depth of the first air guide groove 231 is 0.5 mm.

[0033] In one embodiment of this utility model, such as Figures 3-4 As shown, the width of the second air guide groove 232 is adapted to the aperture of the vacuum adsorption hole 21, and the depth of the second air guide groove 232 is 0.4-0.8 mm. Specifically, the depth of the second air guide groove 232 is 0.5 mm.

[0034] In one embodiment of this utility model, such as Figures 1-2 As shown, the pore size of the vacuum adsorption pore 21 is 1.3–1.8 mm. Specifically, the pore size of the vacuum adsorption pore 21 is 1.5 mm.

[0035] In one embodiment of this utility model, such as Figures 1-2 As shown, the through-hole thin plate 2 also has a plurality of auxiliary adsorption holes 24. The auxiliary adsorption holes 24 are located between two adjacent vacuum adsorption holes 21, and the top ends of the plurality of auxiliary adsorption holes 24 extend to the adsorption surface 22 and the bottom ends extend to the connecting structure 23. Specifically, through the coordinated design of the auxiliary adsorption holes 24, the adsorption surface area 22 of the adsorption surface 22 is increased. During the processing, because the edge area of ​​the product dissipates heat quickly, it is easy to form a temperature difference with the center area, causing the product to curl upward or sink under thermal stress. By acting on the product with a larger adsorption surface area 22, the product is continuously provided with adsorption force to counteract thermal stress, further improving the processing accuracy of this embodiment.

[0036] In one embodiment of this utility model, such as Figures 1-2 As shown, the pore size of the auxiliary adsorption pore 24 is 0.8–1.2 mm. Specifically, the pore size of the auxiliary adsorption pore 24 is 1 mm.

[0037] In one embodiment of this utility model, such as Figure 5 As shown, the top of the base 1 is recessed with a support step 13, and the through-hole plate 2 is detachably fixed to the support step 13. This detachable fixing structure facilitates maintenance and cleaning of the connecting structure 23. The edge of the through-hole plate 2 has several screw holes, and the support step 13 has screw threads corresponding to these screw holes. Specifically, the through-hole plate 2 is fixed to the base 1 with screws, resulting in a simple structure that is easy to assemble and disassemble. A sealing gasket is also included, which is stacked between the support step 13 and the through-hole plate 2 and has a through hole for the screw to pass through. The sealing gasket improves the sealing performance of the vacuum chamber 11, reducing air leakage.

[0038] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vacuum adsorption stage for a laser machine, characterized in that: The device includes a base and a perforated thin plate. The perforated thin plate has a plurality of vacuum adsorption holes. The top ends of the vacuum adsorption holes extend to the top surface of the perforated thin plate and form an adsorption surface, and the bottom ends extend to the bottom surface of the perforated thin plate. The bottom surface of the perforated thin plate has a connecting structure that allows adjacent vacuum adsorption holes to communicate with each other. The base has a vacuum cavity. The perforated thin plate is located on top of the base and covers the vacuum cavity. The bottom of the vacuum cavity has a vacuum tube. One end of the vacuum tube faces the connecting structure, and the other end is connected to a vacuum generator.

2. The vacuum adsorption stage for a laser machine according to claim 1, characterized in that: A plurality of vacuum adsorption holes are arranged in a rectangular array on the through-hole thin plate. The connecting structure includes a plurality of horizontally arranged first air guide grooves and a plurality of vertically arranged second air guide grooves. The first air guide grooves can connect to the plurality of horizontally arranged vacuum adsorption holes, and the second air guide grooves can connect to the plurality of vertically arranged vacuum adsorption holes.

3. The vacuum adsorption stage for a laser machine according to claim 2, characterized in that: The width of the first air guide groove is adapted to the aperture of the vacuum adsorption hole, and the depth of the first air guide groove is 0.4 to 0.8 mm.

4. The vacuum adsorption stage for a laser machine according to claim 2, characterized in that: The width of the second air guide groove is adapted to the aperture of the vacuum adsorption hole, and the depth of the second air guide groove is 0.4 to 0.8 mm.

5. The vacuum adsorption stage for a laser machine according to claim 1, characterized in that: The pore size of the vacuum adsorption pore is 1.3 to 1.8 mm.

6. The vacuum adsorption stage for a laser machine according to claim 1, characterized in that: The through-hole thin plate is also provided with a number of auxiliary adsorption holes, which are located between two adjacent vacuum adsorption holes. The top ends of the auxiliary adsorption holes extend to the adsorption surface and the bottom ends extend to the connecting structure.

7. The vacuum adsorption stage for a laser machine according to claim 6, characterized in that: The pore size of the auxiliary adsorption pore is 0.8–1.2 mm.

8. The vacuum adsorption stage for a laser machine according to claim 1, characterized in that: The top of the base is recessed with a support step, and the through-hole plate is detachably fixed to the support step.

9. The vacuum adsorption stage for a laser machine according to claim 8, characterized in that: The edge of the through-hole plate is provided with a number of screw through holes, and the support step is provided with screw thread holes corresponding to the screw through holes.

10. The vacuum adsorption stage for a laser machine according to claim 9, characterized in that: It also includes a sealing gasket, which is stacked between the support step and the through-hole plate and has a through hole for screws to pass through.

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