Quartz furnace tube rapid annealing furnace

Abstract

The utility model discloses a quartz furnace tube quick annealing furnace, which relates to the technical field of annealing furnaces, and comprises a base, an annealing furnace main body is fixedly connected to the upper part of the base, a sliding rail is fixedly connected to the upper part of the base, one end of the sliding rail is positioned below the annealing furnace main body, a sliding block is slidably connected to the upper part of the sliding rail, and a mounting mechanism is fixedly connected to the upper part of the sliding block. When annealing treatment is carried out on products, the placing frame matched with the products is selected, the inserting blocks are connected with the sleeves in an inserted mode, meanwhile, the wedge-shaped limiting blocks are connected with the sleeves and the inserting blocks in an inserted mode, and the placing frame is installed and fixed, so that different products can be stably placed and fixed; the placing frame can be customized to adapt to specifications of different products, the problem that a traditional support is poor in adaptability is solved through quick insertion connection and replacement of standardized connectors of insertion blocks and sleeves, and accurate positioning of the placing frame in the three-dimensional direction is achieved through guide fit of the sleeves and the insertion blocks and radial locking of wedge-shaped limiting blocks.

Description

Technical Field

[0001] This utility model relates to the field of annealing furnace technology, and in particular to a rapid annealing furnace for quartz furnace tubes. Background Technology

[0002] Quartz furnace tube rapid annealing furnaces are key equipment for rapid heat treatment of samples in fields such as semiconductor manufacturing and materials science. Using high-purity quartz furnace tubes as clean heat treatment chambers, they employ infrared radiation or laser heating methods, coupled with a precise temperature control system and gas environment regulation, to achieve rapid heating and precise temperature control of tens to hundreds of degrees Celsius per second, meeting the process requirements of ion implantation repair, thin film annealing, alloying, and other processes.

[0003] However, in the existing technology, the existing quartz furnace tube rapid annealing furnaces mostly adopt standardized designs when placing materials, which leads to poor size and shape adaptability in terms of material placement. When the size and shape of the placement bracket do not match the product, it will cause unstable sample positioning, uneven heating or atmosphere, and easy damage to the structure, which in turn will result in reduced product yield or poor performance consistency after annealing. Utility Model Content

[0004] The purpose of this invention is to solve the problem that existing rapid annealing furnaces for quartz tubes often use standardized designs when placing materials, resulting in poor size and shape adaptability in material placement. Therefore, this invention proposes a rapid annealing furnace for quartz tubes.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a quartz furnace tube rapid annealing furnace, including a base, an annealing furnace body fixedly connected to the upper part of the base, and a slide rail fixedly connected to the upper part of the base. One end of the slide rail is located below the annealing furnace body, and a slider is slidably connected to the upper part of the slide rail. An installation mechanism is fixedly connected to the upper part of the slider, and a placement frame is fixedly connected to the upper part of the installation mechanism. The installation mechanism includes an installation frame fixedly connected to the side of the sleeve, and a wedge-shaped limiting block is slidably connected inside the installation frame. The wedge-shaped limiting block is inserted into the sleeve and the insertion block, and a placement frame is fixedly connected to the upper part of the insertion block.

[0006] Preferably, a placement frame is fixedly connected to the upper part of the slider, and multiple placement frames are evenly distributed on the surface of the slider.

[0007] Preferably, a limiting rod is fixedly connected to the side of the wedge-shaped limiting block, and the limiting rod is slidably inserted into the mounting bracket.

[0008] Preferably, a first spring is provided on the surface of the limiting rod, one end of the first spring is fixedly connected to the wedge-shaped limiting block, and the other end of the first spring is fixedly connected to the mounting bracket.

[0009] Preferably, a telescopic rod is fixedly connected inside the sleeve, a placement plate is fixedly connected to the upper part of the telescopic rod, and a second spring is provided on the surface of the telescopic rod. One end of the second spring is fixedly connected to the sleeve, and the other end of the second spring is fixedly connected to the placement plate.

[0010] Preferably, the bottom of the insert block is in contact with the surface of the placement plate.

[0011] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0012] 1. In this utility model, when annealing the product, a placement rack suitable for the product is selected. The rack is installed and fixed by inserting the insert block into the sleeve and simultaneously by inserting the wedge-shaped limiting block into the sleeve and the insert block. This allows for the stable placement and fixing of different products. The placement rack can be customized to fit different product specifications. The standardized interface of the insert block allows for quick insertion and replacement of the sleeve, solving the problem of poor adaptability of traditional brackets. The guiding cooperation between the sleeve and the insert block and the radial locking of the wedge-shaped limiting block enable precise positioning of the placement rack in three dimensions.

[0013] 2. In this utility model, when the insert block is inserted into the sleeve, the limiting rod slides and compresses the first spring. After it reaches the position, the first spring pushes the wedge-shaped limiting block to automatically engage with the insert block, forming a one-way locking force to ensure a stable connection at high temperatures. When disassembling, it is only necessary to pull the limiting rod outward to unlock the wedge-shaped limiting block. The elastic restoring force of the telescopic rod and the second spring can automatically push the insert block out, avoiding the jamming risk of traditional mechanical disassembly. This not only ensures the positioning accuracy during installation but also simplifies the maintenance process, making it particularly suitable for high-frequency replacement scenarios. Attached Figure Description

[0014] Figure 1 A three-dimensional structural schematic diagram of a rapid annealing furnace for quartz furnace tubes is provided for this utility model.

[0015] Figure 2 This utility model provides a front view structural diagram of a quartz furnace tube rapid annealing furnace;

[0016] Figure 3 This utility model provides a three-dimensional structural diagram of the installation mechanism in a quartz furnace tube rapid annealing furnace;

[0017] Figure 4 This utility model provides a cross-sectional side view of the installation mechanism in a quartz furnace tube rapid annealing furnace.

[0018] Legend: 1. Base; 2. Annealing furnace body; 3. Slide rail; 4. Slider; 5. Mounting mechanism; 51. Sleeve; 52. Insert block; 53. Mounting frame; 54. Limiting rod; 55. Spring No. 1; 56. Wedge-shaped limiting block; 57. Telescopic rod; 58. Spring No. 2; 59. Placement plate; 6. Placement frame. Detailed Implementation

[0019] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0020] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0021] Example 1: As Figures 1-4 As shown, this utility model provides a rapid annealing furnace for quartz furnace tubes, including a base 1. An annealing furnace body 2 is fixedly connected to the upper part of the base 1, and a slide rail 3 is fixedly connected to the upper part of the base 1. One end of the slide rail 3 is located below the annealing furnace body 2, and a slider 4 is slidably connected to the upper part of the slide rail 3. An installation mechanism 5 is fixedly connected to the upper part of the slider 4, and a placement rack 6 is fixedly connected to the upper part of the installation mechanism 5. The installation mechanism 5 includes a sleeve 51 with an installation rack 53 fixedly connected to its side. A wedge-shaped limiting block 56 is slidably connected inside the installation rack 53. The wedge-shaped limiting block 56 is inserted into the sleeve 51 and the insertion block 52. The placement rack 6 is fixedly connected to the upper part of the insertion block 52.

[0022] The specific settings and functions of this embodiment are described in detail below. When annealing the product, a placement rack 6 that is compatible with the product is selected. The rack is inserted into the sleeve 51 through the insert block 52, and simultaneously inserted into the sleeve 51 and the insert block 52 through the wedge-shaped limiting block 56. The placement rack 6 is installed and fixed, so that different products can be stably placed and fixed. The placement rack 6 can be customized to fit the specifications of different products. The standardized interface of the insert block 52 and the sleeve 51 can be quickly inserted and replaced, solving the problem of poor compatibility of traditional brackets. The guiding cooperation between the sleeve 51 and the insert block 52 and the radial locking of the wedge-shaped limiting block 56 realize the precise positioning of the placement rack 6 in three dimensions.

[0023] Example 2: Figures 1-4As shown, a placement frame 6 is fixedly connected to the upper part of the slider 4. Multiple placement frames 6 are evenly distributed on the surface of the slider 4. A limit rod 54 is fixedly connected to the side of the wedge-shaped limiting block 56. The limit rod 54 is slidably inserted into the mounting frame 53. A first spring 55 is provided on the surface of the limit rod 54. One end of the first spring 55 is fixedly connected to the wedge-shaped limiting block 56, and the other end of the first spring 55 is fixedly connected to the mounting frame 53. A telescopic rod 57 is fixedly connected inside the sleeve 51. A placement plate 59 is fixedly connected to the upper part of the telescopic rod 57. A second spring 58 is provided on the surface of the telescopic rod 57. One end of the second spring 58 is fixedly connected to the sleeve 51, and the other end of the second spring 58 is fixedly connected to the placement plate 59. The bottom of the insert block 52 is in contact with the surface of the placement plate 59.

[0024] The overall effect of this embodiment is that during the insertion of the insert 52 and the sleeve 51, the limiting rod 54 slides along the mounting bracket 53, and the first spring 55 is compressed. When the insert 52 is inserted into place, the first spring 55 restores its deformation and pushes the wedge-shaped limiting block 56 to insert into the insert 52, which facilitates the insertion and fixing of the insert 52. At the same time, the placement plate 59 pushes the telescopic rod 57 and the second spring 58 to compress. When it is necessary to disassemble and replace the placement bracket 6, the limiting rod 54 is pulled outward to pull the wedge-shaped limiting block 56 out from the side of the insert 52. Then the telescopic rod 57 and the second spring 58 restore their deformation and push the placement plate 59 and the insert 52 to move upward, pushing the insert 52 upward, which facilitates the disassembly and replacement of the placement bracket 6.

[0025] When the insert 52 is inserted into the sleeve 51, the limiting rod 54 slides and compresses the first spring 55. After it is in place, the first spring 55 pushes the wedge-shaped limiting block 56 to automatically engage the insert 52, forming a one-way locking force to ensure a stable connection at high temperatures. When disassembling, simply pull the limiting rod 54 to unlock the wedge-shaped limiting block 56. The elastic restoring force of the telescopic rod 57 and the second spring 58 can automatically push the insert 52 out, avoiding the jamming risk of traditional mechanical disassembly. This not only ensures the positioning accuracy during installation but also simplifies the maintenance process, making it especially suitable for high-frequency replacement scenarios.

[0026] The usage method and working principle of this device are as follows: When annealing the product, select a placement rack 6 that is compatible with the product, insert the insert block 52 into the sleeve 51, and simultaneously insert the wedge-shaped limiting block 56 into the sleeve 51 and the insert block 52 to install and fix the placement rack 6, thereby enabling stable placement and fixing of different products.

[0027] During the insertion of the insert 52 and the sleeve 51, the limiting rod 54 slides along the mounting bracket 53, and the first spring 55 is compressed. When the insert 52 is inserted into place, the first spring 55 returns to its original shape and pushes the wedge-shaped limiting block 56 to insert into the insert 52, which facilitates the insertion and fixing of the insert 52. At the same time, the placement plate 59 pushes the telescopic rod 57 and the second spring 58 to compress. When the placement bracket 6 needs to be disassembled and replaced, the limiting rod 54 is pulled outward to pull the wedge-shaped limiting block 56 out from the side of the insert 52. Then the telescopic rod 57 and the second spring 58 return to their original shape and push the placement plate 59 and the insert 52 upward, pushing the insert 52 upward.

[0028] The above are merely preferred embodiments of this utility model and are not intended to limit the utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of this utility model without departing from the technical solution of this utility model shall still fall within the protection scope of this utility model.

Claims

1. A rapid annealing furnace for quartz furnace tubes, comprising a base (1), an annealing furnace body (2) fixedly connected to the upper part of the base (1), and a slide rail (3) fixedly connected to the upper part of the base (1), one end of the slide rail (3) being located below the annealing furnace body (2), and a slider (4) slidably connected to the upper part of the slide rail (3), an installation mechanism (5) fixedly connected to the upper part of the slider (4), and a placement rack (6) fixedly connected to the upper part of the installation mechanism (5), characterized in that: The installation mechanism (5) includes a sleeve (51) with a mounting bracket (53) fixedly connected to the side. A wedge-shaped limiting block (56) is slidably connected inside the mounting bracket (53). The wedge-shaped limiting block (56) is inserted into the sleeve (51) and the insert (52). A placement bracket (6) is fixedly connected to the upper part of the insert (52).

2. The rapid annealing furnace for quartz furnace tubes according to claim 1, characterized in that: A mounting bracket (6) is fixedly connected to the upper part of the slider (4), and multiple mounting brackets (6) are evenly distributed on the surface of the slider (4).

3. The rapid annealing furnace for quartz furnace tubes according to claim 1, characterized in that: The wedge-shaped limiting block (56) is fixedly connected to the limiting rod (54) on the side, and the limiting rod (54) is slidably inserted into the mounting bracket (53).

4. A rapid annealing furnace for quartz furnace tubes according to claim 3, characterized in that: A first spring (55) is provided on the surface of the limiting rod (54). One end of the first spring (55) is fixedly connected to the wedge-shaped limiting block (56), and the other end of the first spring (55) is fixedly connected to the mounting bracket (53).

5. A rapid annealing furnace for quartz furnace tubes according to claim 1, characterized in that: The sleeve (51) is fixedly connected to a telescopic rod (57), and a placement plate (59) is fixedly connected to the upper part of the telescopic rod (57). A second spring (58) is provided on the surface of the telescopic rod (57). One end of the second spring (58) is fixedly connected to the sleeve (51), and the other end of the second spring (58) is fixedly connected to the placement plate (59).

6. A rapid annealing furnace for quartz furnace tubes according to claim 1, characterized in that: The bottom of the insert (52) is attached to the surface of the placement plate (59).

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