Multi-channel electroplating bath automatic liquid supplementing device with waste heat recovery function

Abstract

A multichannel electroplating bath automatic liquid supplementing device with waste heat recovery relates to the technical field of electroplating equipment, and comprises an electroplating bath, a liquid supplementing bath and a control module, a liquid level sensor and an electroplating liquid component detection module are arranged in the electroplating bath, a liquid supplementing pipeline is connected between the electroplating bath and the liquid supplementing bath, and the control module is connected with the electroplating bath. A metering pump and an electromagnetic valve are arranged on the liquid supplementing pipeline, the electroplating bath is connected with a liquid discharging pipeline, and a part of the liquid supplementing pipeline is connected with a part of the liquid discharging pipeline through a heat exchanger. According to the utility model, the concentration balance of the bath solution can be monitored, the solution can be accurately supplemented to ensure the concentration balance, the double-stage operation of'rough supplementing and fine supplementing 'is realized by virtue of the multi-channel liquid supplementing design, new supplementing liquid is preheated by utilizing waste heat of waste liquid, and the heating energy consumption is reduced.

Description

Technical Field

[0001] This utility model relates to the field of electroplating equipment technology, and in particular to an automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery. Background Technology

[0002] During the electroplating process, metal ions (such as copper and nickel) in the electroplating solution continuously participate in the deposition reaction, leading to a decrease in the concentration of the main salt. At the same time, additives (such as accelerators and leveling agents) are oxidized and decomposed or adsorbed onto the workpiece surface and become ineffective. In addition, the solvents (such as sulfuric acid in acidic solutions) and water in the electroplating solution are reduced due to decomposition of the electrolytic reaction or volatilization at high temperatures. Therefore, it is necessary to replenish the solution to maintain the composition balance of the electroplating tank, ensure process stability and coating quality.

[0003] Traditional electroplating tank replenishment relies on manual monitoring and addition, which has the following problems:

[0004] 1. Manual replenishment is inefficient and prone to level fluctuations, affecting electroplating quality and the electroplating environment;

[0005] 2. Insufficient, untimely, or excessive replenishment of the electroplating solution leads to an imbalance in the composition of the electroplating solution, increasing raw material waste;

[0006] 3. Lack of real-time monitoring makes it impossible to respond quickly to abnormal situations. Utility Model Content

[0007] The purpose of this invention is to address the shortcomings of the prior art by providing a multi-channel automatic replenishment device for electroplating tanks with waste heat recovery. This device can monitor the concentration balance of the tank solution and accurately replenish the solution to ensure concentration balance. The multi-channel replenishment design enables a two-stage operation of "coarse replenishment + fine replenishment". It utilizes the waste heat of the waste liquid to preheat the new replenishment solution, thereby reducing heating energy consumption.

[0008] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0009] An automatic replenishment device for a multi-channel electroplating tank with waste heat recovery includes an electroplating tank, a replenishment tank, and a control module. The electroplating tank is equipped with a level sensor and an electroplating solution composition detection module. A replenishment pipeline connects the electroplating tank and the replenishment tank, and the replenishment pipeline is equipped with a metering pump and a solenoid valve. The electroplating tank is connected to a drain pipeline, with a portion of the replenishment pipeline connected to a portion of the drain pipeline via a heat exchanger. The level sensor monitors the real-time changes in the electroplating tank level, and the electroplating solution composition detection module, immersed in the electroplating solution and integrating a pH sensor and a concentration meter, monitors changes in the electroplating solution composition. The control module is an intelligent control unit based on a microcontroller (such as a PLC or embedded system). It can set the target liquid level range and the threshold of the electroplating solution composition, receive sensor data and generate replenishment instructions: when the liquid level is lower than the threshold, the control module starts the metering pump and opens the solenoid valve, and the solution in the replenishment tank enters the electroplating tank through the replenishment pipeline, replenishing the electroplating solution stock or additives according to the set flow rate; when the liquid level is higher than the threshold, the liquid is drained through the drain pipeline.

[0010] Among them, the heat exchanger realizes the waste heat utilization function: the drain pipe and the replenishment pipe are connected through the heat exchanger, allowing the two fluids (hot water and cold water) to enter the heat exchanger through the interface respectively, and flow in opposite directions or cross directions in the alternating flow channel, using the waste heat of the waste liquid to preheat the new replenishment liquid.

[0011] Preferably, the liquid level sensor is a lidar sensor, which enables high-precision non-contact liquid level monitoring, avoids direct contact between the sensor and corrosive liquid, and extends its service life.

[0012] Preferably, the portion of the replenishment pipeline within the electroplating tank is divided into a main replenishment pipeline and a fine-tuning replenishment pipeline. The multi-channel replenishment design, with the main replenishment pipeline (for rapid filling) and the fine-tuning replenishment pipeline (for precise control) combined with the flow meter feedback on the replenishment pipeline, enables a two-stage operation of "coarse replenishment + fine replenishment".

[0013] Preferably, the drain pipe extends into the electroplating tank from the top, and can achieve low-energy draining by using the siphon principle or the difference in tank height, reducing the frequency of pump use. Furthermore, both the replenishment and draining pass through the top of the electroplating tank, making it convenient for the drain pipe and the replenishment pipe to be connected to the heat exchanger together.

[0014] Preferably, the heat exchanger is a plate heat exchanger. The two fluids, hot water and cold water, enter the heat exchanger through interfaces and flow in opposite or cross directions in the alternating channels between the plates, utilizing the waste heat of the waste liquid to preheat the new replenishment liquid.

[0015] Preferably, a centrifuge is installed on the drain pipe, which can recover the effective components by centrifugation during draining, thereby reducing the waste of raw materials.

[0016] Preferably, the centrifuge is a tubular centrifuge, which achieves separation through centrifugal force generated by high rotation speed.

[0017] Preferably, the electroplating tank is equipped with resistance measuring electrodes to measure the resistance (or conductivity) of the electroplating solution, which can indirectly reflect the ion concentration and purity in the solution. Resistance monitoring can also determine the degree of additive consumption and replenish it in time to ensure the quality of the plating layer.

[0018] Preferably, the control module is connected to a computer interaction module, which is a touch screen or a remote monitoring terminal, and supports parameter setting and status display.

[0019] The beneficial effects of this utility model are as follows: 1. High-precision control: Through the coordinated control module of liquid level monitoring, electroplating solution composition detection and liquid replenishment pipeline operation, the liquid level and composition can be accurately adjusted, improving the electroplating quality. Automated operation reduces manual intervention, reduces the risk of operational errors and improves production efficiency.

[0020] 2. Multi-channel replenishment design: It is equipped with a main replenishment tube (for rapid filling) and a fine-tuning replenishment tube (for precise control). Combined with the flow meter feedback on the replenishment tube, it realizes a two-stage operation of "coarse replenishment + fine replenishment".

[0021] 3. Non-contact liquid level monitoring: High-precision non-contact liquid level monitoring is achieved using lidar, avoiding direct contact between the sensor and corrosive liquids and extending its service life.

[0022] 4. Energy saving and environmental protection: The drain pipeline and the replenishment pipeline are connected through a plate heat exchanger to preheat the new replenishment liquid with the waste heat of the waste liquid, thereby reducing heating energy consumption; the draining is achieved with low energy consumption by using the siphon principle or the difference between high and low tank levels, thereby reducing the frequency of pump use; the effective components are recovered by centrifugal separation technology during the draining process, thereby reducing the waste of raw materials. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of this utility model.

[0024] Explanation of key component symbols in the diagram: 1. Electroplating tank; 2. Replenishment tank; 3. Control module; 4. Liquid level sensor; 5. Electroplating solution composition detection module; 6. Replenishment pipeline; 6.1. Main replenishment pipeline; 6.2. Fine-tuning replenishment pipeline; 7. Metering pump; 8. Solenoid valve; 9. Drainage pipeline; 10. Heat exchanger; 11. Centrifuge; 12. Resistance measuring electrode; 13. Computer interaction module. Detailed Implementation

[0025] The present invention will be further described below with reference to specific embodiments and accompanying drawings.

[0026] Example 1: As Figure 1As shown, an automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery includes an electroplating tank 1, a liquid replenishment tank 2, and a control module 3. The electroplating tank 1 is equipped with a liquid level sensor 4 and an electroplating solution composition detection module 5.

[0027] The electroplating tank 1 and the replenishment tank 2 are connected by a replenishment pipeline 6, and a metering pump 7 and a solenoid valve 8 are installed on the replenishment pipeline 6.

[0028] In addition, the electroplating tank 1 is connected to a drain pipe 9, and a portion of the replenishment pipe 6 is connected to a portion of the drain pipe 9 through a heat exchanger 10. The drain pipe 9 extends into the electroplating tank 1 from the top.

[0029] Example 2: Combination Figure 1 As shown, based on Embodiment 1, the portion of the replenishment pipeline 6 within the electroplating tank 1 is divided into a main replenishment pipeline 6.1 and a fine-tuning replenishment pipeline 6.2.

[0030] Example 3: Combination Figure 1 As shown, based on Embodiment 1 or Embodiment 2, a centrifuge 11 is installed on the drainage pipeline 9.

[0031] Example 4: Combination Figure 1 As shown, based on Embodiment 1, Embodiment 2 or Embodiment 3, the electroplating tank 1 is provided with a resistance measuring electrode 12, and the control module 3 is connected to a computer interaction module 13.

[0032] In the above embodiments, the liquid level sensor 4 is a lidar sensor, the heat exchanger 10 is a plate heat exchanger, and the centrifuge 11 is a tubular centrifuge.

[0033] The above description is only a specific embodiment of the present utility model, but the structural features of the present utility model are not limited thereto. The present utility model can be used in similar products. Any changes or modifications made by those skilled in the art within the scope of the present utility model are covered by the patent scope of the present utility model.

Claims

1. An automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery, characterized in that: It includes an electroplating tank (1), a replenishment tank (2), and a control module (3). The electroplating tank (1) is equipped with a liquid level sensor (4) and an electroplating solution composition detection module (5). A replenishment pipeline (6) is connected between the electroplating tank (1) and the replenishment tank (2), and a metering pump (7) and a solenoid valve (8) are installed on the replenishment pipeline (6). The electroplating tank (1) is connected to a drain pipe (9), and a portion of the replenishment pipe (6) is connected to a portion of the drain pipe (9) via a heat exchanger (10).

2. The automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery according to claim 1, characterized in that: The liquid level sensor (4) is a lidar sensor.

3. The automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery according to claim 1, characterized in that: The replenishment pipeline (6) within the electroplating tank (1) is divided into a main replenishment pipeline (6.1) and a fine-tuning replenishment pipeline (6.2).

4. The automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery according to claim 1, characterized in that: The drain pipe (9) extends from the top into the electroplating tank (1).

5. The automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery according to claim 4, characterized in that: The heat exchanger (10) is a plate heat exchanger.

6. The automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery according to claim 1, characterized in that: A centrifuge (11) is installed on the drainage pipeline (9).

7. The automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery according to claim 6, characterized in that: The centrifuge (11) is a tubular centrifuge.

8. The automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery according to claim 1, characterized in that: The electroplating tank (1) is equipped with a resistance measuring electrode (12).

9. An automatic liquid replenishment device for a multi-channel electroplating tank with waste heat recovery according to any one of claims 1-8, characterized in that: The control module (3) is connected to a computer interaction module (13).

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