Multi-sensor lead vacuum sealing structure

Abstract

The utility model relates to a multi-sensor lead vacuum sealing structure, which only needs to arrange a vacuum cap on an empty device, the vacuum cap is provided with a plurality of lead holes for a plurality of leads to penetrate out, and the plurality of lead holes are uniformly pressed by a pressing plate at the same time for sealing and locking. According to the sealing structure, vacuum sealing structures do not need to be arranged in multiple areas of the vacuum equipment, the lead holes and the vacuum sealing structures are integrated on one vacuum cap, the occupied area is minimized, the sealing structure can be suitable for lead vacuum sealing of the vacuum equipment of different sizes, and the structural strength of the vacuum equipment cannot be affected.

Description

Technical Field

[0001] This utility model relates to the field of vacuum sealing, and in particular to a vacuum sealing structure for multi-sensor leads. Background Technology

[0002] In vacuum equipment, various sensors are installed to measure various parameters during operation. For example, in a plasma vacuum etching machine, temperature sensors are installed in multiple areas to monitor the temperature in each area during operation. The sensor leads need to be drilled in the vacuum equipment and led out through these holes to connect to external display or analytical devices. The vacuum seal at the point where the leads are led out is crucial, affecting the overall vacuum sealing of the equipment. Currently, a lead hole is typically drilled near each sensor location, and a vacuum sealing structure is installed on the lead hole to seal the lead exit point. However, this design with multiple holes and vacuum sealing structures has two problems. First, each vacuum sealing structure occupies a portion of the vacuum device, which is impractical for small-volume vacuum equipment. Second, drilling holes and installing vacuum sealing structures at multiple locations on the vacuum device affects the overall structural strength, significantly reducing its lifespan. Utility Model Content

[0003] To overcome the above problems, this utility model provides a vacuum sealing structure for multi-sensor leads. The technical solution adopted by this utility model to solve its technical problems is as follows:

[0004] A multi-sensor lead vacuum sealing structure includes a vacuum cap communicating with the interior of a vacuum device. The top surface of the vacuum cap is provided with several first sealing grooves and several locking screw holes. Each first sealing groove is provided with a first lead hole penetrating into the vacuum cap. Each first sealing groove is provided with a first sealing ring. The inner ring of the first sealing ring coincides with the first lead hole, and the first sealing ring protrudes from the top surface of the vacuum cap. A first pressure plate is attached to the top surface of the vacuum cap. The first pressure plate is provided with several second lead holes and several first alignment holes. The sensor lead passes through the first lead hole, the inner ring of the first sealing ring, and the second lead hole from the interior of the vacuum device to the exterior. The locking screw passes through the first alignment hole and is screwed into the locking screw hole to lock the first pressure plate. The bottom surface of the first pressure plate presses against the first sealing ring to vacuum seal the lead.

[0005] Furthermore, the top surface of the first pressure plate is provided with several second sealing grooves, each corresponding to a second lead hole. A second sealing ring is provided in each second sealing groove, the inner ring of which coincides with the second lead hole, and the sealing ring protrudes from the top surface of the first pressure plate. A second pressure plate is placed on the top surface of the first pressure plate, and several third lead holes and several second alignment holes are provided on the second pressure plate. The sensor lead passes through the first lead hole, the inner ring of the first sealing ring, the second lead hole, the inner ring of the second sealing ring, and the third lead hole from the inside of the vacuum device to the outside. The locking screw passes through the second alignment hole and the first alignment hole and is screwed into the locking screw hole to lock the second pressure plate and the first pressure plate. The bottom surface of the second pressure plate presses against the second sealing ring to vacuum seal the lead.

[0006] Furthermore, the first lead hole, the second lead hole, and the third lead hole correspond one-to-one and are all located on the same vertical line.

[0007] Furthermore, each of the corresponding first lead hole, second lead hole, and third lead hole is marked with a corresponding position mark.

[0008] Furthermore, the first lead hole is located at the center of the bottom surface of the first sealing groove, and the bottom surface of the first sealing groove is funnel-shaped and connected to the first lead hole; the second lead hole is located at the center of the bottom surface of the second sealing groove, and the bottom surface of the second sealing groove is funnel-shaped and connected to the second lead hole.

[0009] Furthermore, the inner diameter of the first sealing ring / second sealing ring is less than or equal to the diameter of the first lead hole / second lead hole, and the inner diameter of the first sealing ring / second sealing ring is 0.6mm-1.8mm.

[0010] The beneficial effects of this utility model are as follows:

[0011] The vacuum sealing structure includes a vacuum cap communicating with the interior of a vacuum device. The top surface of the vacuum cap has several first sealing grooves and several locking screw holes. Each first sealing groove has a first lead hole penetrating the vacuum cap. Each first sealing groove also has a first sealing ring, the inner ring of which coincides with the first lead hole and protrudes from the top surface of the vacuum cap. A first pressure plate is attached to the top surface of the vacuum cap, and the first pressure plate has several second lead holes and several first alignment holes. The sensor lead passes through the first lead hole, the inner ring of the first sealing ring, and the second lead hole from inside the vacuum device to the outside. The locking screw... After the nail passes through the first alignment hole, it is screwed into the locking screw hole to lock the first pressure plate. The bottom surface of the first pressure plate presses against the first sealing ring to vacuum seal the lead wire. This sealing structure only requires a vacuum cap to be set on this empty device. The vacuum cap has several lead wire holes for multiple lead wires to pass through, and multiple lead wire holes are pressed together by a single pressure plate for sealing and locking. This sealing structure does not require setting vacuum sealing structures in multiple areas of the vacuum device. The lead wire holes and vacuum sealing structures are integrated into a single vacuum cap, minimizing the area occupied. It can be used for lead wire vacuum sealing of vacuum devices of different sizes without affecting the structural strength of the vacuum device. Attached Figure Description

[0012] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, wherein:

[0013] Figure 1 This is an exploded view of the first embodiment of the vacuum sealing structure of this utility model;

[0014] Figure 2 This is a perspective view of the second embodiment of the vacuum sealing structure of this utility model;

[0015] Figure 3 This is an exploded view of the second embodiment of the vacuum sealing structure of this utility model;

[0016] Figure 4 This is a cross-sectional view of the second embodiment of the vacuum sealing structure of this utility model;

[0017] Figure 5 This is an exploded cross-sectional view of the second embodiment of the vacuum sealing structure of this utility model.

[0018] Figure number marking:

[0019] 100. Vacuum cap; 101. First sealing groove; 102. Locking screw hole; 103. First lead hole; 104. First sealing ring; 105. First pressure plate; 106. Second lead hole; 107. First alignment hole; 108. Locking screw; 109. Second sealing groove; 110. Second sealing ring; 111. Second pressure plate; 112. Third lead hole; 113. Second alignment hole; 114. Position mark. Detailed Implementation

[0020] To better understand the purpose, structure, and function of this utility model, the following detailed description of a specific embodiment of the utility model "a multi-sensor lead vacuum sealing structure" is provided in conjunction with the accompanying drawings.

[0021] See Figure 1 In the first embodiment, the multi-sensor lead vacuum sealing structure includes a vacuum cap 100 communicating with the interior of a vacuum device. The top surface of the vacuum cap 100 is provided with a plurality of first sealing grooves 101 and a plurality of locking screw holes 102. Preferably, the first sealing grooves 101 are evenly distributed on the top surface of the vacuum cap 100, and the locking screw holes 102 are distributed symmetrically and at equal angles around the top surface of the vacuum cap 100. Each of the first sealing grooves 101 is provided with a first lead hole 103 that penetrates into the vacuum cap 100 to communicate with the interior of the vacuum device. At the same time, each of the first sealing grooves 101 is provided with a first sealing ring 104. The inner ring of the first sealing ring 104 coincides with the first lead hole 103, and the first sealing ring 104 protrudes from the top surface of the vacuum cap 100. A first pressure plate 105 is covered on the top surface of the vacuum cap 100. The first pressure plate 105 is provided with a plurality of second lead holes 106 and a plurality of first alignment holes 107. In use, the sensor lead passes through the first lead hole 103, the inner ring of the first sealing ring 104, and the second lead hole 106 from inside the vacuum equipment to the outside. The first pressure plate 105 covers the top surface of the vacuum cap 100. The locking screw 108 passes through the first alignment hole 107 and is screwed into the locking screw hole 102 to complete the alignment of the first pressure plate 105 and the vacuum cap 100. At this time, the second lead hole 106, the inner ring of the first sealing ring 104, and the first lead hole 103 overlap. Then, the locking screw 108 is tightened to lock the first pressure plate 105. During the locking process, the bottom surface of the first pressure plate 105 presses down on all the first sealing rings 104 at the same time, causing the first sealing rings 104 to deform. The inner rings of the first sealing rings 104 squeeze the lead inward together to vacuum seal the lead.

[0022] This utility model's lead wire vacuum sealing structure integrates all lead wire holes onto a vacuum cap 100. Simultaneously, using a first pressure plate 105 and several first sealing rings 104 on the vacuum cap 100 achieves vacuum sealing for all leads. This integrated lead wire vacuum sealing structure occupies a small surface area in the vacuum equipment, making it suitable for sealing multi-sensor leads in vacuum equipment of various sizes. Furthermore, this structure eliminates the need for multiple openings for sealing on the vacuum equipment, thus not affecting the structural strength of the vacuum equipment and effectively improving its service life.

[0023] See further Figures 2-5 In the second embodiment, a plurality of second sealing grooves 109 are provided on the top surface of the first pressure plate 105, and the second sealing grooves 109 correspond one-to-one with the second lead holes 106. A second sealing ring 110 is provided in each of the second sealing grooves 109, and the inner ring of the second sealing ring 110 coincides with the second lead hole 106. The sealing ring protrudes from the top surface of the first pressure plate 105. A second pressure plate 111 is covered on the top surface of the first pressure plate 105, and a plurality of third lead holes 112 and a plurality of second alignment holes 113 are provided on the second pressure plate 111. In use, the sensor lead passes through the first lead hole 103, the inner ring of the first sealing ring 104, the second lead hole 106, the inner ring of the second sealing ring 110, and the third lead hole 112 from inside the vacuum equipment to the outside. The locking screw 108 passes through the second alignment hole 113 and the first alignment hole 107 and is screwed into the locking screw hole 102 to complete the alignment of the second pressure plate 111, the first pressure plate 105, and the top surface of the vacuum cap 100. Then, the locking screw 108 is tightened to lock the second pressure plate 111 and the first pressure plate 105 at the same time. The bottom surface of the second pressure plate 111 presses down on the second sealing ring 110 at the same time, causing the second sealing ring 110 to deform and vacuum seal the lead. The bottom surface of the first pressure plate 105 presses down on all the first sealing rings 104, causing the first sealing rings 104 to deform and vacuum seal the lead. This embodiment features a double-layer sealing design, which provides double vacuum sealing protection for the lead wires, thereby improving the vacuum sealing performance of this vacuum sealing structure.

[0024] See further Figure 3 and Figure 5 In this embodiment, the first lead hole 103, the second lead hole 106, and the third lead hole 112 are one-to-one and all located on the same vertical line, which facilitates the passage of the lead wire. Furthermore, each of the corresponding first lead hole 103, second lead hole 106, and third lead hole 112 is provided with a corresponding position mark 114. The corresponding first lead hole 103, second lead hole 106, and third lead hole 112 are marked with the same serial number, which facilitates recording which sensor lead wire is passed through each lead hole, thus facilitating subsequent monitoring and maintenance operations.

[0025] See further Figure 4 and Figure 5 In this embodiment, the first lead hole 103 is located at the center of the bottom surface of the first sealing groove 101. The bottom surface of the first sealing groove 101 is funnel-shaped and connected to the first lead hole 103. When the first pressure plate 105 presses against the first sealing ring 104, the inner inclined surface of the funnel shape will apply an inward squeezing force to the periphery of the first sealing ring 104, causing the inner ring of the first sealing ring 104 to squeeze the lead wire more fully inward, further ensuring the vacuum seal of the lead wire. The second lead hole 106 is located at the center of the bottom surface of the second sealing groove 109. The bottom surface of the second sealing groove 109 is funnel-shaped and connected to the second lead hole 106. When the second pressure plate 111 presses against the second sealing ring 110, the inner inclined surface of the funnel shape will apply an inward squeezing force to the periphery of the second sealing ring 110, causing the inner ring of the second sealing ring 110 to squeeze the lead wire more fully inward, further ensuring the vacuum seal of the lead wire.

[0026] More specifically, in this embodiment, the inner diameter of the first sealing ring 104 / second sealing ring 110 is less than or equal to the diameter of the first lead hole 103 / second lead hole 106. This ensures that the lead wire can easily pass through the lead hole while also ensuring that the sealing ring 104 can be fully compressed to vacuum seal the lead wire under pressure. The preferred range of the inner diameter of the first sealing ring 104 / second sealing ring 110 is 0.6mm-1.8mm, the preferred range of the outer diameter of the first sealing ring 104 / second sealing ring 110 is 4.6mm-5.8mm, and the preferred range of the diameter of the first lead hole 103 / second lead hole / third lead hole 112 is 0.8mm-2.0mm. The minimum distance between the centers of the lead holes can be 5mm. This allows multiple lead holes to be provided even on the top surface of the vacuum cap 100, which is only a few square centimeters in size, greatly reducing the volume of the multi-sensor lead vacuum sealing structure and the area occupied by the vacuum equipment.

[0027] In summary, this multi-sensor lead vacuum-sealed structure has the following advantages:

[0028] 1. Multiple lead holes are integrated on a vacuum cap, and multiple sealing rings are pressed together by a pressure plate. In this way, multiple sensor leads can be vacuum sealed with one vacuum sealing structure. It is not necessary to set multiple openings on the vacuum equipment to lead out the leads, which improves the structural strength of the vacuum equipment. Moreover, this vacuum sealing structure can be applied to small-volume vacuum equipment.

[0029] 2. By using a single pressure plate to press multiple sealing rings together, the area occupied by the sealing structure can be greatly reduced. The spacing between the lead holes can be designed to be very small (as small as 5mm). This allows the multi-sensor lead vacuum sealing structure to be an integrated design (one seals multiple leads at the same time) but its volume can be approximately the same as that of a previous single sealing structure.

[0030] 3. The vacuum cap 100 in this structure can use a standard KF40 flange. It can be transformed into the vacuum sealing structure of this utility model simply by machining the top surface of the KF40 flange and adding a pressure plate. The design and manufacturing are convenient.

[0031] It is understood that this utility model has been described through some embodiments, and those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of this utility model. Furthermore, under the teachings of this utility model, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of this utility model.

[0032] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this utility model. In the description of this application, "multiple" is understood as "at least two." "And / or" describes the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can represent: A alone, A and B simultaneously, and B alone. A connected to B can represent: A and B directly connected and A and B connected through C. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

Claims

1. A vacuum-sealed structure for multi-sensor leads, characterized in that, The device includes a vacuum cap (100) that communicates with the interior of a vacuum device. The top surface of the vacuum cap (100) is provided with a plurality of first sealing grooves (101) and a plurality of locking screw holes (102). Each of the first sealing grooves (101) has a first lead hole (103) penetrating into the vacuum cap (100). Each of the first sealing grooves (101) has a first sealing ring (104). The inner ring of the first sealing ring (104) coincides with the first lead hole (103), and the first sealing ring (104) protrudes from the top surface of the vacuum cap (100). A first pressure plate (105) is attached to the top surface. The first pressure plate (105) is provided with a plurality of second lead holes (106) and a plurality of first alignment holes (107). The sensor lead passes through the first lead hole (103), the inner ring of the first sealing ring (104) and the second lead hole (106) from the inside of the vacuum device and is led to the outside. The locking screw (108) passes through the first alignment hole (107) and is screwed into the locking screw hole (102) to lock the first pressure plate (105). The bottom surface of the first pressure plate (105) presses against the first sealing ring (104) to vacuum seal the lead.

2. The multi-sensor lead vacuum sealing structure according to claim 1, characterized in that, The top surface of the first pressure plate (105) is provided with a plurality of second sealing grooves (109), each of which corresponds to a second lead hole (106). A second sealing ring (110) is provided in each of the second sealing grooves (109), and the inner ring of the second sealing ring (110) coincides with the second lead hole (106). The sealing ring protrudes from the top surface of the first pressure plate (105). A second pressure plate (111) is covered on the top surface of the first pressure plate (105). The second pressure plate (111) is provided with a plurality of third lead holes (112) and a plurality of second lead holes (113). Alignment hole (113); The sensor lead passes through the first lead hole (103), the inner ring of the first sealing ring (104), the second lead hole (106), the inner ring of the second sealing ring (110), and the third lead hole (112) from the inside of the vacuum device and is led to the outside. The locking screw (108) passes through the second alignment hole (113) and the first alignment hole (107) and is screwed into the locking screw hole (102) to lock the second pressure plate (111) and the first pressure plate (105). The bottom surface of the second pressure plate (111) presses against the second sealing ring (110) to vacuum seal the lead.

3. The multi-sensor lead vacuum sealing structure according to claim 2, characterized in that, The first lead hole (103), the second lead hole (106) and the third lead hole (112) correspond one-to-one and are all located on the same vertical line.

4. The multi-sensor lead vacuum sealing structure according to claim 3, characterized in that, The first lead hole (103), the second lead hole (106), and the third lead hole (112) that correspond to each other are all provided with a corresponding mark (114).

5. The multi-sensor lead vacuum sealing structure according to claim 2, characterized in that, The first lead hole (103) is located at the center of the bottom surface of the first sealing groove (101), and the bottom surface of the first sealing groove (101) is funnel-shaped and connected to the first lead hole (103); the second lead hole (106) is located at the center of the bottom surface of the second sealing groove (109), and the bottom surface of the second sealing groove (109) is funnel-shaped and connected to the second lead hole (106).

6. The multi-sensor lead vacuum sealing structure according to claim 5, characterized in that, The inner diameter of the first sealing ring (104) / second sealing ring (110) is less than or equal to the diameter of the first lead hole (103) / second lead hole (106), and the inner diameter of the first sealing ring (104) / second sealing ring (110) is 0.6mm-1.8mm.

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