Integrated glow discharge sample cell

Abstract

The utility model relates to the technical field of mass spectrometry, and particularly discloses an integrated glow discharge sample cell which comprises a cathode, an anode and an argon inlet pipe arranged on the upper end face of the anode, the anode and the cathode are insulated and fixed through two ceramic chips, the anode comprises a discharge cell and gaskets arranged on the two sides of the discharge cell, and the gaskets are arranged on the upper end face of the discharge cell. The anode comprises a glow discharge sample, a spring pressing tool and a cavity, the glow discharge sample is arranged in the cavity through the spring pressing tool, and the argon gas inlet pipe comprises a gas pipe, a connector and a gas inlet adapter. The anode is cleaned without damaging the vacuum environment, and the vacuum degree of the cavity is maintained; a discharge gap is stabilized by a double-ceramic-chip insulation structure, and uniform sputtering of different types of thin-layer materials is supported by matching with adjustable argon flow velocity and pulse parameters.

Description

Technical Field

[0001] This utility model relates to the field of mass spectrometry analysis technology, and in particular to an integrated glow discharge sample cell. Background Technology

[0002] In the field of thin film material analysis, glow discharge technology, with its unique advantages, can accurately reveal the relationship between elemental composition and depth, and is therefore widely used in the depth analysis of film structures. However, existing glow discharge technology still has many shortcomings in practical applications that urgently need to be addressed. First, the design of the traditional glow discharge sample cell has obvious flaws. The anode and cathode are designed as two separate parts, with the anode fixed in the vacuum chamber and the cathode removable. This design brings many inconveniences in actual operation. When the anode needs to be cleaned, the vacuum environment must be broken, which is not only cumbersome but also prone to introducing external impurities. Once impurities are mixed in, they will directly affect the accuracy and stability of subsequent analyses, thereby reducing the reliability of the analytical results and making it difficult to accurately characterize thin film materials. Second, traditional glow discharge technology has a bottleneck in terms of ablation depth resolution. It is difficult to achieve nanometer-level ablation depth resolution, which is a serious shortcoming for thin film materials with thicknesses ranging from nanometers to hundreds of micrometers.

[0003] With the continuous advancement of technology, thin film materials are being used more and more widely, and their thickness is becoming increasingly thinner, leading to higher requirements for analytical precision. Current detection techniques cannot meet the growing demand for high-precision thin film material analysis, especially at the nanoscale, where the composition and structure of thin film materials are often more critical, yet traditional techniques struggle to provide accurate depth resolution. This significantly limits the development of thin film material research and applications. Therefore, it is urgent to improve and optimize existing glow discharge techniques to enhance their performance and reliability in thin film material analysis and better meet the needs of modern thin film material research. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of existing technologies and provide an integrated glow discharge sample cell. Through the integrated design of the anode and cathode, both can enter and exit the vacuum chamber simultaneously, allowing for convenient cleaning of the anode without disrupting the vacuum. At the same time, the discharge structure and control parameters are optimized to achieve nanoscale ablation depth resolution, meeting the high-precision component detection requirements of thin-layer materials.

[0005] To achieve the above objectives, the technical solution adopted by this utility model to solve its technical problems is as follows:

[0006] An integrated glow discharge sample cell includes a cathode, an anode, and an argon gas inlet pipe disposed on the upper end face of the anode. The anode and cathode are insulated and fixed by two ceramic plates. The anode includes a discharge cell and gaskets disposed on both sides of the discharge cell. The cathode includes a glow discharge sample, a spring clamp, and a cavity. The glow discharge sample is placed in the cavity by the spring clamp. The argon gas inlet pipe includes a gas pipe, a connector, and an inlet adapter.

[0007] In a preferred embodiment of this utility model, the central through hole of the discharge battery is 15-25mm and the height is 5-10mm. The central through hole of the pad on the side of the discharge battery closer to the cathode has a diameter of 8-12mm and a thickness of 0.3-0.7mm. The pad on the other side serves as the ion outlet of the ion source, and its central through hole has a diameter of 0.2-0.6mm and a thickness of 0.3-0.7mm.

[0008] In a preferred embodiment of this utility model, the thickness of the ceramic sheet is 0.3-0.7 mm, the diameter of the central through hole of the ceramic sheet in close contact with the cathode is 8-12 mm, and the diameter of the central through hole of the ceramic sheet in close contact with the anode is 14-18 mm.

[0009] The discharge cell and the gaskets on both sides of it together constitute the anode of the glow discharge. The anode is pressed tightly against a copper block cooled by liquid nitrogen through a pressure block, grounding the anode while keeping the entire discharge system at a low temperature. The purpose is to cool gaseous impurities such as C, N, and O, reducing their chances of collision and ionization in the plasma, thereby minimizing interference. The anode and cathode are insulated by ceramic sheets.

[0010] In a preferred embodiment of this invention, the cathode and anode are assembled as a single unit, allowing them to be completely removed from the vacuum chamber for cathode replacement and anode cleaning.

[0011] In a preferred embodiment of this utility model, a through hole is opened at the middle position of the upper end face of the discharge battery, and gas enters the cavity through the through hole. The cathode passive sealing sample changing rod is connected to the cathode.

[0012] In a preferred embodiment of this utility model, the battery and gasket are made of high-purity tantalum, and the cavity, air tube, connector and air inlet adapter are made of PEEK (polyether ether ketone).

[0013] Argon gas is introduced into the discharge battery. The flow rate of the argon gas is controlled by a gas flow control valve, and the gas flow rate is 0-5 sccm.

[0014] Compared with the prior art, this technical solution has the following advantages:

[0015] This invention features an integrated design of the anode and cathode, allowing the anode and cathode to enter and exit the vacuum chamber simultaneously. Cleaning the anode does not require disrupting the vacuum environment, thus maintaining the vacuum level of the chamber. The dual ceramic sheet insulation structure stabilizes the discharge gap, and with adjustable argon flow rate and pulse parameters, it supports uniform sputtering of different types of thin-layer materials. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] Figure 1 A schematic diagram of the integrated glow discharge sample cell;

[0018] Figure 2 This is a schematic diagram of the glow discharge sample cell structure in an integrated glow discharge sample cell.

[0019] In the diagram: 11-Anode, 12-Cathode, 13-Argon gas inlet pipe, 14-Stainless steel pressure block, 15-Ceramic sheet 1, 16-Ceramic sheet 2, 111-Tantalum sheet 1, 112-Tantalum cell, 113-Tantalum sheet 2, 121-Glow discharge sample, 122-Spring clamp, 123-Cavity, 131-Gas pipe, 132-Connector, 133-Gas inlet adapter, 1121-Through hole, 1122-Positioning hole 1, 1223-Positioning hole 2. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be further described below in conjunction with the accompanying drawings and embodiments. These embodiments may take different forms and should not be construed as limited to the description herein. Throughout the document, the same reference numerals always represent the same elements, and similar reference numerals represent similar elements.

[0021] It should be noted that the terms "inner" refer to the side in contact with the contents, and "outer" refer to the side away from the contents, and should not be construed as a limitation on this utility model.

[0022] like Figure 1 As shown, an integrated glow discharge sample cell includes a cathode 12, an anode 11, and an argon gas inlet pipe 13 disposed on the upper end face of the anode 11. Figure 2As shown, the anode 11 and cathode 12 are insulated and fixed together by ceramic sheets 115 and 216. The anode 11 includes a tantalum cell 112 and tantalum sheets 1111 and 2113 on both sides of the tantalum cell. The cathode 12 includes a glow discharge sample 121, a spring clamp 122, and a cavity 123. The glow discharge sample 121 is placed in the cavity 123 by the spring clamp 122. The argon gas inlet pipe 13 includes a pipe 131, a connector 132, and an inlet adapter 133. The cavity 123, pipe 131, connector 132, and inlet adapter 133 are all made of PEEK. The tantalum cell 112 is made of high-purity tantalum with a central through-hole diameter of 20 mm and a height of 8 mm. On the left side of the tantalum cell 112, near the cathode 12 sample, a tantalum sheet 1111 with a central through-hole of 10 mm and a thickness of 0.5 mm is attached. On the right side of the tantalum cell 112, a tantalum sheet 2113 with a central through-hole of 0.4 mm and a thickness of 0.5 mm serves as the ion outlet of the ion source. The tantalum cell 112, tantalum sheets 1111 and 2113 together constitute the anode 11 of the glow discharge. The ceramic sheets 115 and 216 used for insulating fixation are 0.5 mm thick: the ceramic sheet 115, which is in close contact with the surface of the glow discharge sample 121, has a through-hole with a diameter of 10 mm; the ceramic sheet 216, which is in close contact with the anode tantalum cell 12, has a through-hole with a diameter of 16 mm, and is aligned with the tantalum sheet 2113 on the right side of the tantalum cell 112, which serves as the ion outlet of the ion source, forming a sputtering area with a diameter of 10 mm. The cathode 12 and anode 11 are assembled as a single unit and can be completely removed from the vacuum chamber for cathode replacement and anode cleaning. The various parts of the left anode 11 are pressed together by a stainless steel clamping block 14 to ensure uniform heat conduction. A 1 / 16" through hole 1121 is opened in the middle of the upper end face of the tantalum cell 112. There are also positioning holes 11122 and 21223 on both sides of the upper end face. Argon gas is introduced into the PEEK cavity through the through hole 1121. The cathode passive sealing sample changing rod is connected to the cathode and is connected and positioned to the gas inlet adapter 133 through the positioning holes 1122 and 1223.

[0023] The integrated design of the anode and cathode allows them to enter and exit the vacuum chamber simultaneously. When the anode needs cleaning, the anode and cathode can be removed from the vacuum chamber as a whole without disrupting the vacuum environment. After cleaning, they can be reinstalled to ensure normal operation of the equipment. The dual ceramic sheet insulation structure stabilizes the discharge gap, and with adjustable argon flow rate and pulse parameters, it supports uniform sputtering of different types of thin-layer materials.

[0024] The integrated glow discharge sample cell of this invention has advantages such as efficient cooling, convenient maintenance and high depth resolution in thin film analysis of thin film materials, providing reliable technical support for the accurate analysis of thin film materials.

[0025] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. An integrated glow discharge sample cell, characterized in that, It includes a cathode, an anode, and an argon gas inlet pipe disposed on the upper end face of the anode. The anode and cathode are insulated and fixed by two ceramic plates. The anode includes a discharge battery and gaskets disposed on both sides of the discharge battery. The cathode includes a glow discharge sample, a spring clamp, and a cavity. The glow discharge sample is placed in the cavity by the spring clamp. The argon gas inlet pipe includes a gas pipe, a connector, and an inlet adapter.

2. The integrated glow discharge sample cell as described in claim 1, characterized in that, The central through hole of the discharge battery is 15-25mm and the height is 5-10mm. The central through hole of the pad on the side of the discharge battery closer to the cathode has a diameter of 8-12mm and a thickness of 0.3-0.7mm. The pad on the other side serves as the ion outlet of the ion source, and its central through hole has a diameter of 0.2-0.6mm and a thickness of 0.3-0.7mm.

3. The integrated glow discharge sample cell as described in claim 1, characterized in that, The ceramic sheet has a thickness of 0.3-0.7 mm, the diameter of the central through hole of the ceramic sheet in close contact with the cathode is 8-12 mm, and the diameter of the central through hole of the ceramic sheet in close contact with the anode is 14-18 mm.

4. The integrated glow discharge sample cell as described in claim 1, characterized in that, The cathode and anode are assembled as a single unit.

5. The integrated glow discharge sample cell as described in claim 1, characterized in that, A through hole is opened in the middle of the upper end face of the battery.

6. The integrated glow discharge sample cell as described in claim 1, characterized in that, The battery and gasket are made of high-purity tantalum.

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