Test frame structure for detecting component performance

Abstract

The utility model provides a test frame structure for detecting component performance, which comprises a first mounting frame for mounting a tested device, the first mounting frame comprises a horizontally arranged first support plate and a plurality of U-shaped frames and straight plate frames with different sizes, and a mounting platform of the tested component is built through the plurality of U-shaped frames and straight plate frames; the U-shaped frame comprises an upper plate and a lower plate which are parallel and opposite to each other, mounting hole groups are formed in the surfaces of the lower plate and the straight plate frame, each mounting hole group comprises an n-stage through hole formed in the center and a plurality of (n + i)-stage through holes uniformly distributed around the n-stage through hole, and i is a positive integer. According to the utility model, the detection assembly with multiple components running cooperatively can be installed, so that the working performance can be detected.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer processing equipment detection technical field, concretely relates to a test frame structure of detection subassembly performance. BACKGROUND

[0002] Wafer processing equipment is the core equipment in the field of semiconductor manufacturing, and it completes complex processes such as wafer transmission, positioning, etching and deposition through the coordinated action of multiple precision components inside. Since the wafer itself has the characteristics of thin and brittle (the thickness is usually hundreds of microns), when the action accuracy of the internal actuator of the equipment exceeds the allowed range, it is easy to cause uneven stress on the wafer, local stress concentration and other problems, and then cause the wafer to break or micro-crack defects, significantly reducing the product yield.

[0003] In the prior art, the maintenance of equipment precision usually adopts the "selective component detection" strategy, that is, based on experience or historical fault data, only part of the high-risk components (such as the end effector of the mechanical hand, the vacuum chuck positioning module, etc.) are calibrated independently before the equipment starts. However, this method has significant limitations, and: the stability of the wafer processing process depends on the timing cooperation and spatial coupling of multiple components, and local errors of a single component may cause system-level precision deviation through dynamic superposition effect, and the existing independent detection mode cannot evaluate the interaction between multiple error sources.

[0004] In addition, although periodic detection of all components can improve coverage, it will significantly increase equipment downtime and maintenance costs. Therefore, a device is needed to test the working performance of components running in cooperation with multiple components. UTILITY MODEL CONTENT

[0005] Therefore, the utility model wants to solve the problem to provide a test frame structure for detecting the performance of components, which can install detection components running in cooperation with multiple components to detect their working performance.

[0006] To solve the above technical problems, the utility model adopts the technical scheme of:

[0007] A test frame structure for detecting the performance of components, comprising a first mounting rack for mounting a device under test, the first mounting rack comprising a first support plate arranged horizontally and a plurality of U-shaped racks and straight plate racks of different sizes, and the mounting platform of the component under test is built by the plurality of U-shaped racks and straight plate racks.

[0008] The U-shaped rack comprises upper and lower plates arranged in parallel, and the lower plate and the surface of the straight plate rack are provided with a mounting hole group, the mounting hole group comprises an n-level through hole arranged at the center and a plurality of n+i-level through holes uniformly distributed around the n-level mounting hole, wherein i and n are positive integers.

[0009] Further, the bottom surface of the first support plate is fixedly provided with a plurality of support rods, the support rods comprise inner rods in cylindrical structure and outer rods in circular cylindrical structure, and the outer rods are threadedly sleeved outside the inner rods.

[0010] Further, the upper end of the outer rod is provided with internal threads.

[0011] Further, the upper plate surface of the U-shaped frame is provided with trapezoidal holes to match the connecting pieces of multiple sizes.

[0012] Further, the lower plate and the straight plate frame surface of the U-shaped frame are provided with a plurality of mounting hole groups.

[0013] Further, the test frame comprises a second mounting frame, the second mounting frame comprises a second support plate for supporting the first mounting frame and the device under test, the left and right ends of the second support plate are vertically and oppositely provided with a first mounting plate and a second mounting plate, and a plurality of mounting holes for fixing the test device are uniformly arranged on the first mounting plate and the second mounting plate.

[0014] Further, the first mounting plate or the second mounting plate is fixedly provided with a clamping plate, the middle section of the clamping plate is horizontally provided with a long hole matched with the mounting hole, and the upper end and the lower end of the clamping plate are spaced apart from the first mounting plate or the second mounting plate.

[0015] The utility model has the advantages and positive effects that:

[0016] By setting the U-shaped frame and the straight plate frame, the upper plate surface of the U-shaped frame is provided with trapezoidal holes to match the connecting pieces of multiple sizes, the lower plate and the straight plate frame surface of the U-shaped frame are provided with mounting hole groups, the installation of the U-shaped frame can widen the height space of the installation platform, and the sub plate frame is used for widening the width space of the installation platform. Through the trapezoidal holes and the mounting hole groups, the U-shaped frame and the straight plate frame can be randomly combined and installed to install the measured assembly composed of a plurality of sub components which can be independently operated and have force transmission between each other, and the performance of various measured assemblies can be detected. BRIEF DESCRIPTION OF DRAWINGS

[0017] The drawings are used to provide a further understanding of the utility model and constitute a part of the specification, are used together with the embodiments of the utility model to explain the utility model, and do not constitute the limitation on the utility model. In the drawings:

[0018] Fig. 1 It is the overall structure diagram of the test frame structure of the utility model for detecting the performance of an assembly.

[0019] Fig. 2 It is the front view of the test frame structure of the utility model for detecting the performance of an assembly.

[0020] Fig. 3 It is the sectional view of A-A.

[0021] Fig. 4 is a sectional view of B-B;

[0022] In the figure: 1, second support plate; 2, first mounting plate; 201, first frame; 3, clamping plate; 301, long hole; 4, second mounting plate; 401, second frame; 5, first support plate; 501, support rod; 511, outer rod; 512, inner rod; 6, U-shaped frame; 601, trapezoidal hole; 602, mounting hole group; 621, n-level through hole; 622, n+i-level through hole; 7, straight plate frame. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0024] It should be noted that when a component is referred to as being "fixed" to another component, it can be directly on the other component or there can be intervening components. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or there can be intervening components. When a component is referred to as being "disposed" on another component, it can be directly disposed on the other component or there can be intervening components. The terms "vertical", "horizontal", "left", "right", and similar terms as used herein are for purposes of description only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in this description, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0026] The utility model provides a kind of test frame structure for detecting component performance, as shown in Figs. 1 to 4 Figure, including the first mounting frame for installing measured device, first mounting frame includes horizontally arranged first support plate 5, the bottom surface of first support plate 5 is fixedly installed several support rods 501, for fixing first support plate 5 at preset height. One embodiment of the application is: first support plate 5 is rectangular structure, four support rods 501 are arranged at the position of four corners of first support plate 5 respectively.

[0027] The support rod 501 comprises an inner rod 512 in a cylindrical structure and an outer rod 511 in a circular ring cylindrical structure. The upper end of the inner rod 512 is fixedly connected to the bottom surface of the first support plate 5, and the inner rod 512 is externally threaded and sleeved with the outer rod 511. By rotating the outer rod 511 along the central axis, the length of the inner rod 512 screwed into the outer rod 511 is adjusted to adjust the height of the first support rod 501. An embodiment of the present application is that the outer rod 511 is only provided with internal threads at the upper end, which does not affect the height adjustment and saves production cost.

[0028] The second mounting rack comprises a plurality of U-shaped racks 6 and straight plate racks 7 of different sizes. The mounting platform for the measured assembly is built by the plurality of U-shaped racks 6 and straight plate racks 7, so that the measured assembly can normally operate. The U-shaped rack 6 can widen the height space of the mounting platform, which can be widened upward or downward. The sub-plate rack is used to widen the width space of the mounting platform, without limiting the width direction.

[0029] The measured assembly comprises a plurality of sub-components. When testing the running performance of the measured assembly, each sub-component needs to be fixedly installed and the normal transmission of force between the sub-components needs to be ensured. The mounting platform for the measured assembly is built by the plurality of U-shaped racks 6 and straight plate racks 7.

[0030] The U-shaped rack 6 comprises parallel and opposite upper and lower plates. The upper plate is provided with a trapezoidal hole 601 on the surface to match the connecting members of different sizes. The upper plate is fixedly connected to other U-shaped racks 6, straight plate racks 7 or the first support plate 5 to fix the position of the lower plate of the U-shaped rack 6, so as to flexibly provide connecting holes (through holes on the lower plate) of different heights.

[0031] The lower plate and the straight plate rack 7 are provided with a mounting hole group 602 on the surface. The mounting hole group 602 comprises an n-level through hole 601 in the center and a plurality of n+i-level through holes 602 uniformly distributed around the n-level mounting hole. Wherein, i and n are positive integers. The through holes of different levels correspond to connecting members or connecting holes on the sub-components of different diameters. An embodiment of the present application is that the higher the level of the through hole, the smaller the hole.

[0032] The lower plate is used to connect with other U-shaped racks 6, straight plate racks 7 or sub-components. When the lower plate is connected with the U-shaped rack 6, connecting holes of different heights can be provided. When the lower plate is connected with the straight plate rack 7, connecting holes of the same height can be provided. When the lower plate is connected with the sub-component, the sub-component is fixedly installed. An embodiment of the present application is that a plurality of mounting hole groups 602 are provided on the lower plate of the U-shaped rack 6 and the straight plate rack 7, so as to provide a large number of mounting holes of the same height.

[0033] The test frame comprises a first mounting frame and a second mounting frame for supporting a device under test, the second mounting frame comprises a second support plate 1, first and second mounting plates 2 and 4 are vertically arranged on the left and right ends of the second support plate 1, a plurality of mounting holes are uniformly arranged on the first and second mounting plates 2 and 4, and a test device is fixed through the mounting holes, the test device is connected with the device under test through wires or gas lines, and the device under test is controlled to act.

[0034] The test device comprises a power supply, a transformer, a circuit breaker, a hole plate, an integrated circuit board, a gas pump, a pneumatic valve, an electric valve, a sensor, an oscilloscope and the like, the sensor is fixedly installed on the first mounting frame and is used for monitoring the action state of the device under test, and the action state is determined through the oscilloscope, so that whether the device under test operates normally is determined. The control circuit is arranged on the hole plate, the control circuit, the integrated circuit board, the gas pump, the pneumatic valve and the electric valve jointly constitute a control module, the control module is electrically connected or connected through gas lines with the device under test, so as to control the device under test to act. The power supply, the transformer and the circuit breaker jointly constitute a power supply module, and are used for supplying power to the control module and the device under test. An embodiment of the present application is that the integrated circuit board is a single-chip microcomputer circuit board, and a control program is manually introduced during detection.

[0035] An embodiment of the present application is that the circuit breaker is usually directly purchased on the network, and the model can be: CHINT NXB-63, and the circuit breaker is fixedly connected through the back clamping block. The first mounting plate 2 or the second mounting plate 4 is fixedly installed with a clamping plate 3, a long hole 301 matched with the mounting hole is horizontally arranged in the middle section of the clamping plate 3, and the upper end and the lower end of the clamping plate 3 are arranged in a spaced manner with the first mounting plate 2 or the second mounting plate 4, so as to clamp and install the circuit breaker. The test device is conveniently arranged and disassembled.

[0036] The second mounting frame comprises a first frame 201 for fixing the first support plate 5 and a second frame 401 for fixing the second support plate 1, the outer side of the first support plate 5 is provided with the first frame 201, the upper and lower edges of the first mounting plate 2 are provided with gaps between the first frame 201, the outer side of the second support plate 1 is provided with the second frame 401, and the mounting structure is the same as that of the first frame 201, and the lower ends of the first frame 201 and the second frame 401 are fixedly connected with the left and right ends of the second support plate 1.

[0037] The above embodiment of the present application is described in detail, but the content described can only be the preferred embodiment of the present application, and cannot be considered as limiting the scope of the present application. Any equivalent changes and improvements within the scope of the present application should still belong to the scope of the present application.

Claims

1. A test fixture structure for detecting component performance, characterized in that, It includes a first mounting bracket for mounting the device under test, the first mounting bracket including a horizontally arranged first support plate (5) and several U-shaped brackets (6) and straight brackets (7) of different sizes, and the mounting platform of the device under test is built by multiple U-shaped brackets (6) and straight brackets (7); The U-shaped frame (6) includes a parallel upper plate and a lower plate. The lower plate and the straight plate frame (7) have mounting hole groups (602) on their surfaces. The mounting hole group (602) includes an n-level through hole (621) placed in the center and a number of n+i-level through holes (622) evenly distributed around the n-level mounting hole, where i and n are both positive integers.

2. The test fixture structure for detecting component performance according to claim 1, characterized in that, A plurality of support rods (501) are fixedly installed on the bottom surface of the first support plate (5). The support rods (501) include an inner rod (512) with a cylindrical structure and an outer rod (511) with a circular cylindrical structure. The outer rod (511) is threaded onto the outside of the inner rod (512).

3. The test fixture structure for detecting component performance according to claim 2, characterized in that, The upper end of the outer rod (511) is threaded internally.

4. The test fixture structure for detecting component performance according to claim 1, characterized in that, The upper plate surface of the U-shaped frame (6) has trapezoidal holes (601) to accommodate connectors of various sizes.

5. The test fixture structure for detecting component performance according to claim 4, characterized in that, The lower plate of the U-shaped frame (6) and the surface of the straight plate frame (7) are provided with a number of mounting holes (602).

6. The test fixture structure for detecting component performance according to claim 1, characterized in that, The test frame includes a second mounting frame, which includes a second support plate (1) for supporting the first mounting frame and the device under test. The left and right ends of the second support plate (1) are vertically opposite to each other, and a first mounting plate (2) and a second mounting plate (4) are provided. The first mounting plate (2) and the second mounting plate (4) are evenly provided with a plurality of mounting holes for fixing the test device.

7. The test fixture structure for detecting component performance according to claim 6, characterized in that, A mounting plate (3) is fixedly mounted on the first mounting plate (2) or the second mounting plate (4). The middle section of the mounting plate (3) has a horizontally opened elongated hole (301) that matches the mounting hole. The upper and lower ends of the mounting plate (3) are spaced apart from the first mounting plate (2) or the second mounting plate (4).

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