Pressing plate mechanism and workbench

Abstract

The pressing plate mechanism comprises a driving mechanism and a pressing plate connected to the driving mechanism, the pressing plate mechanism further comprises an in-place detection mechanism and an in-place detection system, the in-place detection mechanism is installed in a notch formed in the pressing plate, and the in-place detection system is installed in the notch formed in the pressing plate. The in-place detection mechanism and the driving mechanism are connected to the in-place detection system, and the in-place detection system receives signals of the in-place detection mechanism and controls the driving mechanism to act. Whether the pressing plate mechanism is pressed down in place or not can be stably and accurately detected by detecting the position of the pressing plate through the in-place detection mechanism, meanwhile, the in-place detection mechanism is installed on the pressing plate, the size is small, and installation is convenient.

Description

Technical Field

[0001] This invention relates to the field of laser processing equipment, and in particular to the pressure plate mechanism of laser processing equipment and the worktable using the pressure plate mechanism. Background Technology

[0002] Currently, photolithography equipment typically uses vacuum adsorption to fix substrates, such as printed circuit boards (PCBs) and IC substrates, onto the worktable. When processing the substrate, it needs to be flattened and adsorbed onto the worktable. However, the edges of the substrate are prone to warping, leading to insufficient adsorption force on the worktable, affecting the flatness of the substrate, and reducing photolithography accuracy. To solve the problem of substrate edge warping, a pressure plate mechanism is often used to press the substrate edges flat and prevent air leakage. This pressure plate mechanism uses a cylinder or motor as a drive source to move a pressure bar to press the substrate. While controlling the drive source controls the positioning of the pressure plate, it cannot accurately detect whether the pressure bar has been fully depressed and pressed onto the substrate. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a pressure plate mechanism that can stably and accurately detect whether the pressure plate mechanism has been pressed down to the correct position.

[0004] To address the aforementioned problems, the present invention provides a pressure plate mechanism, which includes a driving mechanism and a pressure plate connected to the driving mechanism. The pressure plate mechanism further includes a positioning detection mechanism and a positioning detection system. The positioning detection mechanism is installed in a recess in the pressure plate. The positioning detection mechanism and the driving mechanism are connected to the positioning detection system. The positioning detection system receives signals from the positioning detection mechanism and controls the driving mechanism to operate.

[0005] In one embodiment, the positioning detection mechanism includes a housing, a pressing spring protruding from the housing, a conductive component located within the housing, and an input / output terminal. The input / output terminal is electrically connected to the positioning detection system. The pressing spring is elastically mounted on the housing, and the contact of the pressing spring is connected to the conductive component by an external force.

[0006] In one embodiment, the pressing spring of the positioning detection mechanism protrudes from the pressure plate. When the pressure plate presses the substrate until the pressing spring retracts into the bottom surface of the pressure plate, the contact of the pressing spring communicates with the contact of the conductive component.

[0007] In one embodiment, the bottom surface of the housing of the pressing spring of the positioning detection mechanism is flush with the bottom surface of the pressure plate close to the substrate, and the pressing spring protrudes from the bottom surface of the housing. When the pressure plate is pressed into place, the contact of the pressing spring is connected with the contact of the conductive component.

[0008] In one embodiment, the surface of the pressure plate is provided with a groove that communicates with the notch, for accommodating the cable of the positioning detection mechanism.

[0009] In one embodiment, the drive mechanism is connected to one or both sides of the pressure plate.

[0010] In one embodiment, the pressure plate mechanism further includes a sliding mechanism, and the driving mechanism drives the pressure plate to move relative to the worktable to the edge of the substrate along the sliding mechanism.

[0011] A workbench, wherein the aforementioned pressure plate mechanism is installed on at least one side of the workbench, the pressure plate mechanism being disposed on opposite sides of the workbench, or the pressure plate mechanism being disposed on all four sides of the workbench.

[0012] Compared with the prior art, the pressure plate mechanism is equipped with a positioning detection mechanism. By detecting the position of the pressure plate by the positioning detection mechanism, it is possible to stably and accurately detect whether the pressure plate mechanism has been pressed down to the correct position. At the same time, the positioning detection mechanism is installed on the pressure plate, which is small in size and easy to install. Attached Figure Description

[0013] Figure 1 This is a perspective view of an embodiment of a pressure plate mechanism installed on a workbench.

[0014] Figure 2 This is a three-dimensional schematic diagram of an embodiment of the pressure plate mechanism.

[0015] Figure 3 This is a side view schematic diagram of an embodiment of the pressure plate mechanism.

[0016] Figure 4 This is an enlarged schematic diagram of the testing agency.

[0017] Figure 5 This is a block diagram of the pressure plate mechanism. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be described below with reference to specific embodiments shown in the accompanying drawings.

[0019] like Figures 1-5The diagram illustrates one embodiment of a pressure plate mechanism. The pressure plate mechanism is mounted on a worktable 1, which supports a substrate placed on the worktable. The pressure plate mechanism 2 is located on at least one side of the worktable 1 and includes a drive mechanism 20, a pressure plate 21, and a positioning detection system. The pressure plate 21 is connected to the drive mechanism 20, and the drive mechanism 20 is connected to the positioning detection system. The positioning detection system controls the drive mechanism 20 to drive the pressure plate 21 to press the substrate. The pressure plate 21 has a notch 210, which is positioned above the substrate when the pressure plate 21 presses against it.

[0020] Depending on the needs, the drive mechanism 20 is connected to one or both sides of the pressure plate 21.

[0021] If necessary, the pressure plate mechanism 2 also includes a sliding mechanism, and the driving mechanism drives the pressure plate to move along the sliding mechanism relative to the worktable to the edge of the substrate and press the substrate.

[0022] The pressure plate mechanism 2 further includes a positioning detection mechanism 22, which is installed in the recess 210 of the pressure plate 21. The positioning detection mechanism 22 can be a micro switch, including a housing 220, a pressing spring 221 protruding from the housing, a conductive component (not shown) located in the housing 220, and an input / output terminal 222. The input / output terminal 222 is electrically connected to the positioning detection system. The pressing spring 221 is elastically disposed in the housing 220. When it protrudes from the housing 220, the contact of the pressing spring 221 separates from the conductive component, disconnecting the circuit. When the pressing spring 221 is compressed into the housing 220, the contact of the pressing spring 221 connects with the contact of the conductive component, connecting the circuit. The positioning detection system obtains the connection signal of the positioning detection mechanism 22 through the input / output terminal 222. The positioning detection mechanism 22 is configured such that the bottom surface of the housing of the pressing spring 221 is flush with the bottom surface of the pressure plate 21 close to the substrate, and the pressing spring 221 protrudes from the bottom surface of the housing. When the pressure plate is pressed into place, the contact of the pressing spring is connected to the contact of the conductive component, thus connecting the circuit.

[0023] During the pressing process of the pressure plate mechanism 2, the pressing spring 221 contacts the substrate and continuously retracts to the inner side of the pressure plate 21. The contact point of the pressing spring 221 communicates with the contact point of the conductive component. The pressing detection system receives the connection signal from the positioning detection mechanism and controls the driving mechanism to stop pressing. When the positioning detection mechanism sends the connection signal, the pressure plate and the substrate can fit tightly together, ensuring the pressing effect.

[0024] When the drive mechanism 20 is connected to both sides of the pressure plate 21, preferably, the positioning detection mechanism is installed in the middle position of the pressure plate to facilitate accurate detection of whether the pressure plate has been pressed down to the correct position.

[0025] When the drive mechanism 20 is connected to one side of the pressure plate 21, preferably, the positioning detection mechanism is installed on the side of the pressure plate away from the drive mechanism, so as to accurately detect whether the pressure plate has been pressed down into place.

[0026] According to the structure of the positioning detection mechanism 22, the bottom surface of the housing of the positioning detection mechanism 22 can also be located inside the pressure plate. The pressing spring 221 of the positioning detection mechanism 22 protrudes from the pressure plate. When the pressure plate 21 presses the substrate, the pressing spring 221 retracts into the bottom surface of the pressure plate, and the contact of the pressing spring is connected to the contact of the conductive component.

[0027] The surface of the pressure plate is provided with a groove that communicates with the recess 210 to accommodate the cable of the positioning detection mechanism and fix the cable, making the overall mechanism more compact.

[0028] When the pressure plate mechanism is applied to the worktable, the pressure plate mechanism is located on at least one side of the worktable, and can be set on opposite sides of the worktable, or the pressure plate mechanism can be set on all four sides of the worktable.

Claims

1. A pressure plate mechanism, comprising a driving mechanism and a pressure plate connected to the driving mechanism, characterized in that: The pressure plate mechanism further includes a positioning detection mechanism and a positioning detection system. The positioning detection mechanism is installed in the recess of the pressure plate. The positioning detection mechanism and the drive mechanism are connected to the positioning detection system. The positioning detection system receives the signal from the positioning detection mechanism and controls the drive mechanism to operate.

2. The pressure plate mechanism according to claim 1, characterized in that: The positioning detection mechanism includes a housing, a pressing spring protruding from the housing, a conductive component located inside the housing, and an input / output terminal. The input / output terminal is electrically connected to the positioning detection system. The pressing spring is elastically mounted on the housing, and the contact of the pressing spring is connected to the conductive component by external force.

3. The pressure plate mechanism according to claim 2, characterized in that: The pressing spring of the positioning detection mechanism protrudes from the pressure plate. When the pressure plate presses the base plate until the pressing spring retracts into the bottom surface of the pressure plate, the contact of the pressing spring communicates with the contact of the conductive component.

4. The pressure plate mechanism according to claim 2, characterized in that: The positioning detection mechanism is configured such that the bottom surface of the pressing spring housing is flush with the bottom surface of the pressure plate close to the substrate, and the pressing spring protrudes from the bottom surface of the housing. When the pressure plate is pressed into position, the contact point of the pressing spring is connected to the contact point of the conductive component.

5. The pressure plate mechanism according to claim 1, characterized in that: The surface of the pressure plate is connected to the recess and has a groove for accommodating the cable of the positioning detection mechanism.

6. The pressure plate mechanism according to claim 1, characterized in that: The drive mechanism is connected to one or both sides of the pressure plate.

7. The pressure plate mechanism according to claim 1, characterized in that: The pressure plate mechanism also includes a sliding mechanism, and the driving mechanism drives the pressure plate to move relative to the worktable to the edge of the substrate along the sliding mechanism.

8. A workbench, characterized in that: A pressure plate mechanism is installed on at least one side of the workbench, and the pressure plate mechanism is any one of the pressure plate mechanisms described in claims 1-7.

9. The worktable according to claim 8, characterized in that: The pressure plate mechanism is located on opposite sides of the worktable.

10. The worktable according to claim 8, characterized in that: The pressure plate mechanism is located on the four sides of the worktable.

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